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G-1

Sensor Systems

G

G

GLinear Gages

Laser Scan Micrometers

Linear Gage LGK

Laser Scan Micrometer LSM-500S

INDEXLinear GagesLinear Gage / Display Unit Selection Guide G-2Linear Gage LGK G-6Linear Gage LGF G-7Linear Gage LGB G-9Linear Gage LGD G-10Linear Gage LGS G-11Laser Hologage G-12Linear Gage LGF G-13Laser Hologage G-14Long Stroke Linear Gage G-15EC Counter G-16EG Counter G-17EB Counter G-18EH Counter G-19Difference/Sum Unit G-20D/A Conversion Unit G-20EV Counter G-21D-EV Display Unit G-22SENSORPAK G-23Litematic and Litematic Head G-24Laser Scan MicrometersLaser Scan Micrometer Selection Guide G-26LSM-902/6900 G-27LSM-500S, LSM-501S, LSM-503S G-28LSM-506S, LSM-512S, LSM-516S G-30LSM-9506 G-32LSM-5200 Display Unit G-33LSMPAK G-33LSM-6200 Display Unit G-34Optional Accessories for LSM G-35

G-2

G

Linear Gage / Display Unit Selection Guide

Laser Hologage Laser Hologage•0.01µmresolution•Sinewaveoutput•ø15mmplainstem

•1µmresolution•Squarewaveoutput•ø9.5mmstem

•0.1/1µmresolution•Squarewaveoutput•ø9.5/ø8mmstem

•1µmresolution•Squarewaveoutput•ø9.5/ø8mmstem

•0.1/0.5/1µmresolution

•Squarewaveoutput•ø8mmstem

•0.1µmresolution•Squarewaveoutput•ø15mmplainstem

High accuracy, low measuring force and sine wave output models available

With pneumatic cylinder

ø8mm stemø9.5mm stemWith stem clamp nut

Range:5mm/.2” Range:5mm/.2”

Range:10mm/.4”

Range:10mm/.4”

Range:10mm/.4” Range:10mm/.4”

LGB series LGB series

LGB series

LGK series

A low measuring force model is available

CompatibledisplayunitCompatibledisplayunit

Compatibledisplayunit




Compatibledisplayunit Compatibledisplayunit

A low measuring force model is available

LG series LGM seriesRange:100mm/4” Range:100mm/4”

•0.1/1µmresolution•Squarewaveoutput•ø20mmstem

•0.1/1µmresolution•Squarewaveoutput•ø20mmstem•Motor-drive

operation

Motor-drive unit

ø8mm stem ø8mm stemø9.5mm stem ø9.5mm stemWith stem clamp nut With stem clamp nut

EG-101PEG-101P

EG-101P

EG-101P

EG-101P

EG-101P

EH-102S EG-101P

EB-11PEB-11P

EB-11P

EB-11P

EB-11P

EB-11P

EH-101P EH-102P

EH-101PEH-101P

EH-101P

EH-101P

EH-101P

EH-101P

EH-102PEH-102P

EH-102P

EH-102P

EH-102P

EH-102P

EV-16PEV-16P

EV-16P

EV-16P

EV-16P

EV-16P

PageG-14 PageG-12

PageG-9 PageG-9PageG-12

PageG-6 PageG-6 PageG-6

PageG-9 PageG-9 PageG-9

PageG-9

PageG-15 PageG-15

G-3

G

•0.1µmresolution•Squarewaveoutput•ø8mm/ø15mmstem

ø8mm stemø15mm stem

Range:10mm/.4” Range:25mm/1”LGF series





•0.5/1µmresolution•Squarewaveoutput•ø8mm/ø15mmstem

•0.5/1µmresolution•Squarewaveoutput•ø8mm/ø15mmstem•Withoriginpoint

mark


ø15mm stem

ø15mm stem

0.5µm / .00002”

0.5µm / .00002”

0.5µm / .00002”

1µm / .00004”

1µm / .00004”

1µm / .00004”

1µm / .00004”

1µm / .00004”

LGF series

LGF series

Range:10mm/.4” Range:25mm/1” Range:50mm/2”

Range:10mm/.4” Range:25mm/1” Range:50mm/2”

•5µmresolution•Squarewaveoutput•ø15mmstem

LGF series Range:25mm/1” Range:50mm/2”


0.5µm / .00002” 1µm / .00004”

0.5µm / .00002”

0.5µm / .00002”

EG-101P

EG-101P

EG-101Z

EG-101P

EB-11P

EB-11P

EB-11Z

EB-11P

EH-101P

EH-101P

EH-102Z

EH-101P

EH-102P

EH-102P

EV-16Z

EH-102P

EV-16P

EV-16P

EV-16P

PageG-7

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PageG-8

PageG-13

PageG-13

PageG-7 PageG-7

PageG-7PageG-7

PageG-8

G-4

G

•0.01mmresolution•Digimaticoutput•Absolutelinearencoder•ø8mm/ø15mmstem

ø8mm stem

ø15mm stem

ø15mm stem

Range:10mm/.4” Range:25mm/1” Range:50mm/2”LGD series

•0.01mmresolution•Digimaticoutput•Absolutelinearencoder•ø8mmstem

Range:12.7mm/.5”LGS series



EC-101D

EC-101D

EG-101D

EG-101D

EB-11D

EB-11D

EH-102D

EH-102D

EV-16D

EV-16D

PageG-10

PageG-11

PageG-10

PageG-10

System Connections

*EB-11P and EV-16P are not applicable.

3/5-stage limit, 7ch limit, Serial BCD, Simple analog



3/5-stage Limit, BCD

Applicable gages & Output function

3/5-stage limit, BCD

3/5-stage limit, Digimatic

3/5-stage limit, BCD

Programmable Controller

3/5-stage limit, RS-232C, Simple BCD, Simple analog




3/5-stage limit, Segment, Parallel BCD, RS-232C

3/5-stage limit, Segment, Parallel BCD, RS-232C

3/5-stage limit, Segment, Parallel BCD, RS-232CPersonal computer

Digimatic Mini-processor DP-1VR

EG-101P

EB-11P

EH-101P

EH-102P

EV-16P

EG-101Z

EB-11Z

EH-102Z

EV-16Z

EG-101D

EB-11D

EH-102D

EV-16D

EH-102S

0.5 / 1 / 5µm gage headLGKLGFLGB

LGLGM

0.1µm gage headLGKLGFLGBLaser Hologage*

LGLGM

Gage head with Origin Point MarkLGF

Absolute type gage headLGS LGD

0.01µm gage headLaser Hologage

EC-101D

G-5

G

Singlefunctiontype

Singlefunctiontype

Multi-functiontype

Multi-functiontypeformulti-gagesystem

Multi-functiontype

EC-101D

Forsquarewaveoutputgageheads



Forsquarewaveoutputgageheads(1-axis/2-axis)

Forsquarewaveoutputgageheadswithoriginpointmark




Forsinewaveoutputgageheads

ForDigimaticoutputgageheads





ECcounter

EGcounter

EBcounter

EVcounter

EHcounter

EG-101P

EB-11P

EV-16P

EH-101P

EH-102P

EG-101Z

EB-11Z

EV-16Z

EH-102Z

EH-102S

EG-101D

EB-11D

EV-16D

EH-102D

PageG-16

PageG-17

PageG-18

PageG-19

PageG-21

G-6

Attachment thread for thrust stemM9.5X0.5

10.6

or l

onge

r (str

oke)

ø8 -0.009 0

14

6.5

73.1

ø12

125.

5

82.7

30 20.4

Connecting cable (2m)

(HIROSE) RM12BPE-6PH

G

Linear Gage LGKSERIES 542 — Slim type

TechnicalDataAccuracy: Refer to the list of specifications

(excludes quantizing error)Resolution: 1µm, 0.5µm or 0.1µmScale type: Photoelectric linear encoderMax. response speed: 1500mm/s, 400mm/s (542-158)Contact point: ø3mm carbideStem: ø8mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square

wave (RS-422A equivalent)Signal pitch: 0.4µm (542-158), 2µm (542-157), 4µm

(542-156)Dust/Water protection level: IP66

OptionalAccessories238772: Rubber boot (10mm)902434: Extension cable (5m)902433: Extension cable (10m)902432: Extension cable (20m)02ADE230: Air drive unit02ADB680: Thrust stem set02ADB681: Thrust stem02ADB682: Clamp nut02ADB683: Wrench

StandardAccessory538610: Wrench for contact point

SPECIFICATIONSRange OrderNo. Resolution Accuracy* Measuring force** Stem dia. Remarks10mm (.4”) 542-156 0.001mm (1.5+L/50)µm 0.8N / 0.75N / 0.7N 8mm Gold banded10mm (.4”) 542-157 0.0005mm (1.5+L/50)µm 0.8N / 0.75N / 0.7N 8mm Blue banded10mm (.4”) 542-158 0.0001mm (0.8+L/50)µm 0.8N / 0.75N / 0.7N 8mm Green banded

*L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP

542-158 542-157 542-156

FEATURES•Compactdesignwitha12mmoutside

diameter.•Excellentprotectionagainstdustand

splashing water (IP66) in harsh shop-floor environments.

•Maximumpermissibleaccelerationvaluesfor shock and impact, 100G(11ms)

(IEC68-2-27)•Outputdifferentialsquarewavesignalsfor

a wide range of applications.•Employslinearstrokeballbearingsonthe

spindle movement for durability.•ThrustStemwithaclampnutisoptional.•Interchangeablecontactpointsfordial

indicators can be used.

DIMENSIONS Unit: mm

Refer to the Linear Gage leaflet (E4174) for more details.

Connector

G-7

542-171,-161 542-172,-162

542-612,-613

542-173,-163

18.5

M18×1

Thrust stem

Clamp nut

02ADN371

02ADB692

(screw top height)

M14×0.5

142

34

13.8

（31

6）

0.6

ø15 -0.015 0

61.720.6

56.1

8.6

41

ø18

9 5

ø18 -0.0180

（24.2）

21

4.5

124.

9

174

629

.6

20

Connectingcable2m

51.5

or l

onge

r(st

roke

)

Attachment thread for thrust stem

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

18.5

6.5

Connecting cable2m

(screw top height)

M14×0.5

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

M18×1

Thrust stem

Clamp nut

02ADN371

02ADB692

21

（24.2）

ø18-0.018 0

59

ø18

41

20.6

30.7

61.7

ø15-0.0150

13.8

（20

8.3）

34

8.6

93.6

114.

722

200.6

4.5

84.1 Attachment thread

for thrust stem

26 o

r lon

ger

(stro

ke)

M9.5×0.5

M9.5×0.5

02ADB682

02ADB681

(screw top height)

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

12

（13.8）

ø9.5-0.015 0

4

14.5

9.5

6

17.3

ø8

12.3

34

6.9（

129.

5）

15.4 61.5

46.9

ø18

41

14.80.6

75.7

14

545

.9

Thrust stem


10.6

or l

onge

r (s

troke

)

Connecting cable2m

Clamp nut

-0.009 0

542-171,542-161

542-172,542-162,542-612 542-173,542-163,542-613

G

Linear Gage LGFSERIES 542 — Economical Design

SPECIFICATIONSRange OrderNo. Resolution Accuracy* Measuring force** Stem dia.10mm (.4”) 542-171 0.0005mm (1.5+L/50)µm 1.2N / 1.1N / 1.0N 8mm10mm (.4”) 542-161 0.001mm (1.5+L/50)µm 1.2N / 1.1N / 1.0N 8mm25mm (1”) 542-172 0.0005mm (1.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm25mm (1”) 542-162 0.001mm (1.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm25mm (1”) 542-612 0.005mm (7.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm50mm (2”) 542-173 0.0005mm (1.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm50mm (2”) 542-163 0.001mm (1.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm50mm (2”) 542-613 0.005mm (7.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm


OptionalAccessories238772: Rubber boot (10mm)962504: Rubber boot (25mm)962505: Rubber boot (50mm)902434: Extension cable (5m*)902433: Extension cable (10m*)902432: Extension cable (20m*)02ADB680: Thrust stem set (for 10mm range models)02ADN370: Thrust stem set (for 25/50mm range models)02ADB683: Thrust stem wrench (for 10mm range models)02ADB693: Thrust stem wrench (for 25/50mm range models)

StandardAccessories538610: Wrench for contact point (for 10mm range models)210187: Wrench for contact point (for 25/50mm range models)


(excludes quantizing error)Resolution: 5µm, 1µm or 0.5µmScale type: Photoelectric linear encoderMax. response speed: 1500mm/sContact point: ø3mm carbideStem: ø8mm or ø15mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square

wave (RS-422A equivalent)Signal pitch: 20µm (542-612, 542-613), 4µm (542-161, 542-162, 542-163),

2µm (542-171, 542-172, 542-173) Dust/Water protection level: IP66

DIMENSIONSUnit: mm


G-8

542-174,-164

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

(screw top height)

M14×0.5Attachment thread for thrust stemM18×1

Thrust stem

Clamp nut

02ADN371

02ADB692

18.5

95

ø18-0.018 0

（24.2）

21

34

ø16.7

142

34

13.8

（31

6）

0.6

ø15-0.015 0

61.720.6

56.1

8.6

4.5

124.

9

174

629

.6

20

51.5

or l

onge

r(st

roke

)

Connectingcable2m


M14×0.5

(screw top height)

Connectingcable2m

02ADB692

02ADN371

Clamp nut

Thrust stem

M18×1

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

18.5

95

ø18-0.018 0

（24.2）

21

34

ø16.7

93.6

8.6

34

（20

8.3）

13.8

ø15-0.015 0

61.7

30.7

20.6

4.5

84.1

200.6

114.

76.

522

26 o

r lon

ger

(stro

ke)

6

(screw top height)

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

M9.5×0.5

M9.5×0.5

Clamp nut02ADB682

Thrust stem02ADB681

17.3

ø8-0.009 0

12.3

34

（12

9.5）

61.5

46.9

15.4

ø16.7

34

12

（13.8）

ø9.5-0.015 0

414

.59.

5

14.80.6

75.7

14

6.95

45.9

Connectingcable2m


10.6

or l

onge

r (s

troke

)

542-174,542-164

542-175,542-165 542-176,542-166

542-176,-166

542-175,-165

G

Linear Gage LGFSERIES 542 — Economical Design with Origin Point Mark

OptionalAccessories238772: Rubber boot (10mm)962504: Rubber boot (25mm)962505: Rubber boot (50mm)02ADB680: Thrust stem set (for 10mm range models)02ADN370: Thrust stem set (for 25/50mm range models)02ADB683: Thrust stem wrench (for 10mm range models)02ADB693: Thrust stem wrench (for 25/50mm range models)



(excludes quantizing error)Resolution: 1µm or 0.5µm Scale type: Photoelectric linear encoderMax. response speed: 1500mm/sContact point: ø3mm carbideStem: ø8mm or ø15mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square

wave (RS-422A equivalent)Signal pitch: 4µm (542-164, 542-165, 542-166) or

2µm (542-174, 542-175, 542-176)Dust/Water protection level: IP66

SPECIFICATIONSRange OrderNo. Resolution Accuracy* Measuring force** Stem dia. Remarks10mm (.4”) 542-174 0.0005mm (1.5+L/50)µm 1.2N / 1.1N / 1.0N 8mm w/ origin point mark10mm (.4”) 542-164 0.001mm (1.5+L/50)µm 1.2N / 1.1N / 1.0N 8mm w/ origin point mark25mm (1”) 542-175 0.0005mm (1.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm w/ origin point mark25mm (1”) 542-165 0.001mm (1.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm w/ origin point mark50mm (2”) 542-176 0.0005mm (1.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm w/ origin point mark50mm (2”) 542-166 0.001mm (1.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm w/ origin point mark


DIMENSIONSUnit: mm


G-9

(HIROSE)RM12BPG-6PH

Connectingcable (2m)


30

82.7

20.4

20.430

47

Dsub15-pin

100

Sine wave output model(542-401, 542-421)

(HIROSE)RM12BPG-6PH



30

82.7

20.4

20.430

47

Dsub15-pin

100

Sine wave output model(542-401, 542-421)

Connector

ø918

ø9

ø14ø9.575

6.315

.925

.1

4.9 (th

read)

No.200365Clamp nut

L

L=11.5 to 13.0

542-244

0- 0.009

ø9

542-204

18

ø9

ø8

924

.675 0

- 0.009

7.3 542-222, 542-222H, 542-224

113

15.4

34.9

ø8

7.3

0- 0.009

542-262, 542-262H, 542-264

ø9.5

ø4.2

ø7.9

Knurl

ø12

ø14

20.2

15.9

34.9

4.9 (th

read)

No.200365

L

L=11.5 to 13.0

113

0- 0.009

Clamp nut

542-270

60.1

50.3

1134.5

15.9L

29.3

ø9.5

Applicable air hose(ID ø2.5)

(No.200365)L=11.5 to 13.0

Strok

e 10.5

mm

or lo

nger

Clamp nut

Knurl

0- 0.009

542-401 542-230

60.1

(39.3)

10221

.215

.423

.9

10.5

ø8

Strok

e 10.5

mm

or lo

nger

9.6

5

Air inlet(Applicable air hose: ID ø2.5)

4.99.2

0- 0.009

542-223

113

40.9

21.2

15.4

34.9 7.3

59.2 14.3 10

Compatible air hose(ID: ø2.5)

ø8 0-0.009

542-421

ø4.2ø7.9

ø12

ø14

113

20.2

15.9

34.9

4.9

(thre

ad)

Clamp nutNo.200365

Knurl

L

L = 11.5 to 13.0

ø9.5 0-0.009

113

15.4

34.9

ø8 0-0.009

G

Linear Gage LGBSERIES 542 — Extra-slim type

SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force* Stem dia. Remarks5mm (.2”) 542-204 0.001mm 2µm 0.65N / 0.6N / 0.55N 8mm —10mm (.4”) 542-222 0.001mm 2µm 0.8N / 0.75N / 0.7N 8mm —10mm (.4”) 542-222H 0.001mm 1µm 0.8N / 0.75N / 0.7N 8mm —10mm (.4”) 542-401 0.001mm 2µm 0.8N / 0.75N / 0.7N 8mm Sine wave output10mm (.4”) 542-224 0.001mm 2µm 0.6N / 0.55N / 0.5N 8mm Low measuring force10mm (.4”) 542-230 0.001mm 2µm 0.8N / 0.75N / 0.7N 8mm w/ pneumatic cylinder10mm (.4”) 542-223 0.001mm 2µm 0.8N / 0.75N / 0.7N 8mm w/ pneumatic cylinder5mm (.2”) 542-244 0.001mm 2µm 0.65N / 0.6N / 0.55N 9.5mm —10mm (.4”) 542-262 0.001mm 2µm 0.8N / 0.75N / 0.7N 9.5mm —10mm (.4”) 542-262H 0.001mm 1µm 0.8N / 0.75N / 0.7N 9.5mm —10mm (.4”) 542-421 0.001mm 2µm 0.8N / 0.75N / 0.7N 9.5mm Sine wave output10mm (.4”) 542-264 0.001mm 2µm 0.6N / 0.55N / 0.5N 9.5mm Low measuring force10mm (.4”) 542-270 0.001mm 2µm 0.8N / 0.75N / 0.7N 9.5mm w/ pneumatic cylinder

**Orientation of gage: Spindle DOWN / Horizontal / Spindle UP

542-204 542-222,542-222H,542-224


(excludes quantizing error)Resolution: 1µmScale type: Photoelectric linear encoderMax. response speed: 900mm/sContact point: ø3mm carbideStem: ø8mm or ø9.5mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square

wave (RS-422A equivalent) (Sign-wave output: 542-401, 542-421)

Signal pitch: 4µmDust/Water protection level: IP54

OptionalAccessories238773: Rubber boot for 5mm LGB (spare)238772: Rubber boot for 10mm LGB (spare)902434: Extension cable (5m)902433: Extension cable (10m)902432: Extension cable (20m)


542-244 542-262,542-262H,542-264

FEATURES•Extremelycompactdesign.Availablewith

an outside diameter as small as 8mm.•Thesmallphotoelectriclinearencoder

assures high precision over the entire stroke range.

•Theballbearingsusedinthespindleunitensure superb durability.

542-270

542-230

DIMENSIONS

Unit: mm


G-10

G

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

(screw top height)

Connecting cable 2m

M14×0.5Attachment thread for thrust stemM18×1

Thrust stem

Clamp nut

02ADN371

02ADB692

18.5

95

（24.2）

21

142

34

13.8

（31

6）

0.637

208.

6

61.7

20.6

56.1

8.6

4.5

124.

9

174

629

.6

20

51.5

or l

onge

r(st

roke

)

ø18 -0.018 0 ø15 -0.015

0

Connectingcable2m

(screw top height)

M14×0.5

M18×1

Thrust stem

Clamp nut

02ADN371

02ADB692

21

（24.2）

ø18 -0.018 0

5918

.5

20.6

30.7

61.7

ø15 -0.0150

13.8

(208

.3)

34

8.6

93.6

114.

76.

522

200.6

4.5

84.1 Attachment thread

for thrust stem

26 or

long

er(st

roke)

37

208.6

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d(screw top height)

02ADB681Thrust stem

02ADB682Clamp nut

M9.5×0.5Attachment thread for thrust stem

M9.5×0.5

46.9

61.515.4

6.9（

129.

5）

34

12.3

17.3

20

37

8.6

6

9.514

.54

ø8 -0.009 0

（13.8）

12

545

.9

75.7

14

14.80.6

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

Connectingcable2m

10.6

or l

onge

r(st

roke

)

ø9.5 -0.015 0

Linear Gage LGDSERIES 575 — with ABSOLUTE Linear Encoder

SPECIFICATIONSMetric

Range OrderNo. Resolution Accuracy Measuring force* Stem dia.10mm 575-326 0.01mm 20µm 1.2N / 1.1N / 1.0N 8mm10mm 575-326-3 0.01mm 20µm 1.2N / 1.1N / 1.0N 8mm10mm 575-326-5 0.01mm 20µm 1.2N / 1.1N / 1.0N 8mm10mm 575-326-7 0.01mm 20µm 1.2N / 1.1N / 1.0N 8mm25mm 575-327 0.01mm 20µm 4.6N / 4.3N / 4.0N 15mm25mm 575-327-3 0.01mm 20µm 4.6N / 4.3N / 4.0N 15mm25mm 575-327-5 0.01mm 20µm 4.6N / 4.3N / 4.0N 15mm25mm 575-327-7 0.01mm 20µm 4.6N / 4.3N / 4.0N 15mm50mm 575-328 0.01mm 30µm 5.7N / 5.3N / 4.9N 15mm50mm 575-328-3 0.01mm 30µm 5.7N / 5.3N / 4.9N 15mm50mm 575-328-5 0.01mm 30µm 5.7N / 5.3N / 4.9N 15mm50mm 575-328-7 0.01mm 30µm 5.7N / 5.3N / 4.9N 15mm

Connecting cable length : 2m (no suffix), 3m ( suffix “-3”), 5m (suffix “-5”), 7m (suffix “-7”) *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP


(excludes quantizing error)Resolution: 10µm or .0005”Scale type: Capacitance-type ABSOLUTE linear encoderMax. response speed: UnlimitedContact point: ø3mm carbideStem: ø8mm or ø15mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: Digimatic outputExternal input: Origin-setting signal (Absolute origin position

can be changed externally.)Dust/Water protection level: IP66

OptionalAccessories238772: 10mm rubber boot (spare)962504: 25mm rubber boot (spare)962505: 50mm rubber boot (spare)02ADB680: Thrust stem set (for 10mm model)02ADN370: Thrust stem set (for 25mm/50mm model)02ADB683: Thrust stem wrench (for 10mm range models) 02ADB693: Thrust stem wrench (for 25mm/50mm range models)965275*: Digimatic Power Supply Unit* To denote your AC line voltage add the following suffixes to the order No. (e.g.:

965275A): A for UL/CSA, D for CEE, E for BS, F for SAA, DC for China, K for EK, No suffix is required for JIS/100V


The LGD is an ultra-compact ABS Linear Gage designed to fit into very tight spaces. It keeps track of its origin point once set.

FEATURES•Theuseofanabsolutescale*inthesensor

makes it possible to maintain the origin setting even when the power is switched off.

•Speciallinearballbearingsareusedforthespindle guide to ensure a long service life.

•Optionalthruststemandtighteningnutfacilitate setup of the LGD linear gage in holes of a plate or fixture.

Inch

Range OrderNo. Resolution Accuracy Measuring force* Stem dia..4” 575-336 .0005” .001” 1.2N / 1.1N / 1.0N 8mm.4” 575-336-3 .0005” .001” 1.2N / 1.1N / 1.0N 8mm.4” 575-336-5 .0005” .001” 1.2N / 1.1N / 1.0N 8mm.4” 575-336-7 .0005” .001” 1.2N / 1.1N / 1.0N 8mm1” 575-337 .0005” .001” 4.6N / 4.3N / 4.0N 15mm1” 575-337-3 .0005” .001” 4.6N / 4.3N / 4.0N 15mm1” 575-337-5 .0005” .001” 4.6N / 4.3N / 4.0N 15mm1” 575-337-7 .0005” .001” 4.6N / 4.3N / 4.0N 15mm2” 575-338 .0005” .0012” 5.7N / 5.3N / 4.9N 15mm2” 575-338-3 .0005” .0012” 5.7N / 5.3N / 4.9N 15mm2” 575-338-5 .0005” .0012” 5.7N / 5.3N / 4.9N 15mm2” 575-338-7 .0005” .0012” 5.7N / 5.3N / 4.9N 15mm

Connecting cable length : 2m (no suffix), 3m ( suffix “-3”), 5m (suffix “-5”), 7m (suffix “-7”) *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP

DIMENSIONS

Unit: mm


(Refer to page VIII for details.)

575-326: 10mm range model 575-327: 25mm range model 575-328: 50mm range model

575-326,-326-3,-326-5,-326-7

575-327,-327-3,-327-5,-327-7

575-328,-328-3,-328-5,-328-7

G-11

38.7

15.2

6.2

66.2

26

146.

1

35 17.4

ø10.9

ø8

7.6

25

0-0.009

G

Linear Gage LGSSERIES 575 — IP66 Water/Dust Protection with ABSOLUTE Linear Encoder

SPECIFICATIONSMetric

Range OrderNo. Resolution Accuracy Measuring force* Stem dia.12.7mm 575-303 0.01mm 0.015mm 2.0N / 1.8N / 1.6N 8mm

*Orientation of gage: Spindle DOWN / Horizontal / Spindle UP

575-303


(excludes quantizing error)Resolution: 0.01mm or .0005”Scale type: Capacitance-type ABSOLUTE linear encoderMax. response speed: UnlimitedContact point: ø3mm carbideStem: ø8mm or 3/8” DIABearing type: Slide bearingMeasuring force: Refer to the list of specificationsOutput signal: Digimatic outputDust/Water protection level: IP66

OptionalAccessories238774: Spare rubber boot 903594: Air Drive Unit (metric)903598 Air Drive Unit (inch)02ADF640: SPC cable extension adapter02ADD950: Extension cable (0.5m)936937: Extension cable (1m)965014: Extension cable (2m)

Inch

Range OrderNo. Resolution Accuracy Measuring force* Stem dia..5” 575-313 .0005” .0008” 2.0N / 1.8N / 1.6N 3/8” DIA


The LGS is a compact Linear Gage designed to fit into tight spaces.

DIMENSIONSUnit: mm


(Refer to page VIII for details.)

G-12


30

82.7

20.4

ø9

18

ø9

ø14 ø9.5 0

- 0.009 75

6.3

15.9

25.1

4.9

(thre

ad)

(HIROSE)RM12BPG-6PH

Clamp nut (No.200365)

L

L=11.5~13.0

5 (Measuring range)

45.4

0.1m type with R1.5 carbide point

Connector for lifting cable

Stem dia

85

148.

3 (0

.1m

type

)

25

10 (M

easu

ring

rang

e)

10 20

ø15h6

18 40

0 -0.011


30

82.7

20.4

(HIROSE)RM12BPG-6PH

G

Laser HologageSERIES 542 — 0.0001mm Resolution Type

Linear Gage LGBSERIES 542 — 0.0001mm Resolution Type

SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force* Stem dia. Remarks10mm (.4”) 542-711-1 0.1µm 0.2µm 0.55N / 0.45N / 0.35N 15mm —10mm (.4”) 542-712-1 0.1µm 0.2µm 0.1N / — / — 15mm Low measuring force


542-711-1

542-246


(excludes quantizing error)Resolution: 0.1µmScale type: Laser-hologram measurement sensorMax. response speed: 250mm/sContact point: R1.5mm carbideStem: ø15mmBearing type: High precision linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square

wave (RS-422A equivalent)Signal pitch: 0.25µm

OptionalAccessories902434: Extension cable (5m)902433: Extension cable (10m)902432: Extension cable (20m)238773: Rubber boot

SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force* Stem dia.5mm (.2”) 542-246 0.1µm 0.8µm 0.65N / 0.60N / 0.55N 9.5mm


These extra-high accuracy gaging heads have a resolution up to 0.0001mm. The compact dimensions allow easy installation into very tight spaces. The Laser Hologage utilizes a unique holography scale as the length standard, ensuring excellent measuring accuracy and repeatability.

FEATURES•Alinearballbearinginthespindle

guide provides excellent durability for an extended service life.

•The0.0001mmreadingtypeLGBlineargage (542-246) comes with a clamp nut on the stem.

DIMENSIONS Unit: mm

DIMENSIONS Unit: mm



(excludes quantizing error)Resolution: 0.1µmScale type: Photoelectric linear encoderMax. response speed: 380mm/sContact point: R1.5mm carbideStem: ø9.5mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square

wave (RS-422A equivalent)Signal pitch: 0.4µmDust/Water protection level: IP54


OptionalAccessories971751: Stem fixture for fixing to top surface971752: Stem fixture for fixing to bottom surface971753: Spindle lifting cable971750: Laser Hologage stand

G-13

G

M14×0.5Attachment thread for thrust stem

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

M18×1

Thrust stem02ADN371

02ADB692

21

（24.2）

ø18 -0.015 0

5918.5

20.6

30.7

61.7

ø15

13.8

(208

.3)

34

8.6

93.6

82.7

114.

76.

522

200.6

4.5

84.1

20.4 30

Clamp nut

(screw top height)

26 o

r lon

ger

(stro

ke)

Connectingcable

2m2m

(screw top height)

10.6

or l

onge

r(st

roke

)Connecting cable

2m

Dim

ensio

ns w

ith a

thru

st ste

m in

stalle

d

M9.5×0.5


M9.5×0.5

Clamp nut02ADB682

Thrust stem02ADB681

6

17.3

ø8-0.009 0

12.3

34

6.9（

129.

5）

61.5

46.9

15.4

82.7

12

（13.8）

ø9.5 -0.015 0

-0.018 0

414.5

9.5

14.80.6

75.7

14

545

.9

20.4 30

Linear Gage LGFSERIES 542 — 0.0001mm Resolution Type

SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force* Stem dia.10mm (.4”) 542-181 0.0001mm (0.8+L/50)µm 1.2N / 1.1N / 1.0N 8mm25mm (1”) 542-182 0.0001mm (0.8+L/50)µm 4.6N / 4.3N / 4.0N 15mm

*L = measued length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP


(excludes quantizing error)Resolution: 0.1µmScale type: Transmission-type photoelectric linear

encoderMax. response speed: 400mm/sContact point: ø3mm carbideStem: ø8mm or ø15mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90º phase difference, differential square wave (RS-422A equivalent)Signal pitch: 0.4µmDust/Water protection level: IP66

OptionalAccessories902434: Extension cable (5m) 902433: Extension cable (10m) 902432: Extension cable (20m) 238772: Rubber boot (10m)962504: Rubber boot (25m)02ADB680: Thrust stem set (for 10mm range models)02ADN370: Thrust stem set (for 25mm range models)02ADB683: Thrust stem wrench (for 10mm range models)02ADB693: Thrust stem wrench (for 25mm range models)

DIMENSIONS Unit: mm


542-181

542-182

542-181

542-182

StandardAccessories538610: Wrench for contact point (for 10mm range models)210187: Wrench for contact point (for 25mm range models)

G-14

45.4

85

146

(0.0

1m ty

pe)

25

10 (M

easu

ring

rang

e)

10 20

ø15h6

18 40

0 -0.011

100

107

235

8

5 13

Display Unit


(Stem dia.)

0.01µm type with R5 carbide point

45.4

85

146

25

10 (M

easu

ring

rang

e)

10

20

ø15h6

18

40

0-0.011

Display Unit


SR5 carbide point

144

156.7148.2

13711.2

72(3

.1)

G

Laser HologageSERIES 542 — 0.00001mm Resolution Type

SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force** Stem dia. Remarks10mm (.4”) 542-925* 0.01µm / 1µinch 0.1µm 0.55N / 0.45N / 0.35N 15mm —10mm (.4”) 542-926* 0.01µm / 1µinch 0.1µm 0.1N / — / — 15mm Low measuring force

* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for EK, Nosuffix is required for JIS/100V** Orientation of gage: Spindle DOWN / Horizontal / Spindle Up

Gagehead

Displayunit


(excludes quantizing error)Resolution: 0.01µmScale type: Laser-hologram measurement sensorMax. response speed: 250mm/sContact point: R5mm carbideStem: ø15mmBearing type: High precision linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, two-phase sine waveSignal pitch: 0.25µm

OptionalAccessories971751: Stem fixture for fixing to top surface971752: Stem fixture for fixing to bottom surface971753: Spindle lifting cable971750: Laser Hologage stand


The Mitutoyo Laser Hologage is a high-end digital gaging system that employs laser beam interference to make highly accurate and repeatable measurements. It features ultra-fine diffraction gratings which create a holographic pattern that acts as a very finely graduated scale. The Laser Hologage is suitable for measuring ultra-high precision parts, especially those in semiconductor and related industries.

FEATURES•Highlyaccuratemeasurementdueto

an ultra-high resolution of 0.00001mm (0.01µm), which is close to the performance of laser interferometers.

•Excellentmeasuringstability—thedesignis also highly resistant to unfavorable environmental conditions such as air movement and atmospheric pressure changes.

•Highprecisionlinearballbearingsareused in the guide for extremely smooth movement and exceptional durability.

•Adisplayunitisprovided.

DIMENSIONS Unit: mm


G-15

RM12

BPG-

6P (H

IROS

E)

Cabl

e len

gth

(2m

)

2-ø4

.5, ø

9 de

pth

5

33

34

17 20

ø6

49

50

13

429

Stro

ke 1

02 o

r lon

ger

191.

5 6

7 36

243.

5 68

49 33

34

17

50

36 7

20

Stro

ke 1

02 o

r lon

ger

Rubb

er b

oot

67

236

243.

5

473.

5

6 RM

12BP

G-6P

(HIR

OSE)

(A co

unte

r var

ies d

epen

ding

on

the

gage

)

(A co

unte

r var

ies d

epen

ding

on

the

gage

)

Conn

ectin

g ca

ble

(2m

)

2-ø4

.5, ø

9 de

pth

4

Outp

ut ca

ble

lengt

h (2

m)

Drive

uni

t cab

le len

gth

(2m

)

2-ø4

.5, 9

dep

th 5

RM12

BPG-

6P (H

IROS

E)

HR10

A-7P

-6P

(HIR

OSE)

13

50

6 19

1.5

Stro

ke 1

02 o

r lon

ger

ø6

429

17

34

49 33

7 36

243.

5 68

50

36 7

17 20

34

ø20

33

Outp

ut ca

ble

lengt

h (2

m)

Drive

uni

t cab

le len

gth

(2m

)

2-ø4

.5, ø

9 de

pth

4 RM12

BPG

-6P

(HIR

OSE

)

HR10

A-7P

-6P

(HIR

OSE)

Stro

ke 1

02 o

r lon

ger

Rubb

er b

oot

236

67

243.

5

473.

5

(A co

unte

r var

ies d

epen

ding

on th

e gag

e)

( A co

unte

r var

ies d

epen

ding

on th

e gag

e)

-0.013 0

ø20 -0.013 0

ø20 -0.013 0

ø20 -0.013 0

G

Long Stroke Linear GageSERIES 542 — 100mm Stroke Type

DIMENSIONS

SPECIFICATIONSRange OrderNo. Resolution Accuracy* Measuring force** Stem dia. Remarks100mm (4”) 542-312 0.1µm (2+L/100)µm ≤ 2.5µm 8.0N / 6.5N / 5.0N 20mm Standard100mm (4”) 542-316 0.1µm (2+L/100)µm ≤ 2.5µm 3.0N / — / — 20mm Low measuring force100mm (4”) 542-314 0.1µm (2+L/100)µm ≤ 2.5µm 8.0N / 6.5N / 5.0N 20mm w/ rubber boot100mm (4”) 542-332 1µm (2.5+L/100)µm ≤ 3µm 8.0N / 6.5N / 5.0N 20mm Standard100mm (4”) 542-336 1µm (2.5+L/100)µm ≤ 3µm 3.0N / — / — 20mm Low measuring force100mm (4”) 542-334 1µm (2.5+L/100)µm ≤ 3µm 8.0N / 6.5N / 5.0N 20mm w/ rubber boot


542-312

Motordriveunit

542-313


(excludes quantizing error)Resolution: 1µm or 0.1µmScale type: Photoelectric linear encoderMax. response speed: 400mm/s or 800mm/sContact point: ø3mm carbideStem: ø20mmBearing type: Bearing guideMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square

wave (RS-422A equivalent)Dust/Water protection level: IP54


FEATURES•Threeversionareavailable;standard

model, low measuring force model, and rubber boot model (special order).

Range OrderNo. Resolution Accuracy* Measuring force** Stem dia. Remarks100mm (4”) 542-313 0.1µm (2+L/100)µm ≤ 2.5µm 3.0N / 6.5N / 9.5N 20mm Motor-driven Type100mm (4”) 542-315 0.1µm (2+L/100)µm ≤ 2.5µm 4.5N / — /6.0N 20mm Motor-driven Type100mm (4”) 542-333 1µm (2.5+L/100)µm ≤ 3µm 3.0N / 6.5N / 9.5N 20mm Motor-driven Type100mm (4”) 542-335 1µm (2.5+L/100)µm ≤ 3µm 4.5N / — /6.0N 20mm Motor-driven Type

*L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP With rubber boot: 542-315,542-335

•Theresolutionofeachmodelcanbeselected to be 0.1µm or 1µm.

Unit: mm

542-312,-316,-332,-336Standard/Lowmeasuringforcetype

542-314,-334Rubberboottype

542-313,-333Standardtype(motor-driventype)

542-315,335Rubberboottype(motor-driventype)

G-16

48

96 6.6 67 (8)

44.

4

91.4

44.

4

G

EC CounterSERIES 542 — Low-cost, Assembly Type Display Unit for LGD and LGS

DIMENSIONSUnit: mm

SPECIFICATIONSOrderNo. 542-007*Applicable input Digimatic code (SPC)Applicable gage LGD, LGSNumber of gage input 1Resolution 0.01mm, 0.001mm

(Automatically set depending on the gage.)Display 6-digit and a negative [-] sign LED (Amber, Green, Red)

* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for EK, Nosuffix is required for JIS/100V

542-007

FEATURES•EmploysDINsize(96X48mm)andmount-

on-panel configuration to facilitate system integration.

•AbletoproducetolerancejudgmentorDigimatic measurement data output.

FunctionsPreset,GO/±NGjudgment

Output(selectable)Tolerancejudgment: -NG, OK, +NG (open-collector)Data: Digimatic code

ExternalcontrolsignalinputPreset, data hold

PowersupplyVia AC adapter

OptionalAccessories936937: SPC data output cable (1m)965014: SPC data output cable (2m)214938: DC plug PJ-2C162-155: I/O cable


G-17

G

EG CounterSERIES 542 — Low-cost, Assembly Type Display Unit

542-015

542-016

542-017

FEATURES•Abletoproduce3-step/5-stepX3kindsof

tolerance output and BCD output.•Asmoothingfunctionreducesdisplaydigit

fluctuations.

SPECIFICATIONSOrderNo. 542-015 542-017 542-016Applicable input Differential square-wave Differential square-wave

with origin point markDigimatic code (SPC)

Applicable gage LGK, LGF, LGB, LGM, (excluding with origin point

and sign wave types)

LGF with origin point mark LGD, LGS

Number of gage input 1Resolution (Depending on the linear gage type connected)

0.01mm, 0.005mm, 0.001mm, 0.0005mm, 0.0001mm 0.01mm, 0.001mm

Tolerancejudgmentdisplay LED display (3 steps: Amber, Green, Red/5 steps: Amber, Amber flashing, Green, Red flashing, Red)

•EmploysDINsize(96X48mm)andmount-on-panel configuration to facilitate system integration.

FunctionsPreset,directionswitch,tolerancejudgment(3/5-step,3kinds). peak (max., min., runout) measurement, constant number, smoothing, error display/output, protection over keys

OutputTolerancejudgment: L1 to L5 (Switchover between open-collector output and BCD output by means of a parameter)Control: NOM (normal signal) open-collectorBCD: 6-digit (positive/negative-true logic) open-collector (Switchoverbetweentolerancejudgmentoutputbymeansof a parameter)

ExternalcontrolsignalinputPreset,displayhold,peakvalueclear,tolerancejudgmentBANK switch

Quantizationerror±1 count

Maximuminputfrequency1.25MHz (The response speed depends on the gage being used.)

PowersupplyvoltageDC+12 to 24V

Powerconsumption6W (500mA) or less (Secure power supply more than 1A for each unit.)

OptionalAccessories02ADB440: I/O output connector02ADF180: 10-key unit936937: SPC data output cable (1m)965014: SPC data output cable (2m)02ADN460: AC adapter02ZAA000: AC cable (Japan)02ZAA010: AC cable (USA)02ZAA020: AC cable (EU)02ZAA030: AC cable (Britain)02ZAA040: AC cable (Chine)02ZAA050: AC cable (korea)02ADD930: Terminal connecting cable


DIMENSIONSUnit: mm

154

.6

48

96 96

6.6

1

37

(11)

91.4

44.4

154

.6

48

96 96

6.6

1

37

(11)

91.4

44.4

154

.6

48

96 96

6.6

1

37

(11)

91.4

44.4

542-015 542-017 542-016

G-18

G

EB CounterSERIES 542 — Assembly Type Display Unit with Multiple Limit Setting

FEATURES•Abletoproduce3-step/5-stepX7kinds

of tolerance output and limit value output independently for each of 7 channels.

•ComeswithserialBCDoutputcapability,for connection to a programmable controller or personal computer, etc. when minimum cabling requirement is met.

•Dynamicmeasurementpossiblewithsimplified analog output.

•EmploysDINsize(96X48mm)andmount-on-panel configuration to facilitate system integration.

OptionalAccessories02ADB440: I/O output connector02ADF180: 10-key unit936937: SPC data output cable (1m)965014: SPC data output cable (2m)02ADN460: AC adapter02ZAA000: AC cable (Japan)02ZAA010: AC cable (USA)02ZAA020: AC cable (EU)02ZAA030: AC cable (Britain)02ZAA040: AC cable (Chine)02ZAA050: AC cable (korea)02ADD930: Terminal connecting cable

SPECIFICATIONSOrderNo. 542-092-2 542-094-2 542-093-2Applicable input Differential square-wave Differential square-wave

with origin point markDigimatic code (SPC)

Applicable gage LGK, LGF, LGB LGF with origin point mark LGD, LGSNumber of gage input 1Resolution 0.01mm, 0.005mm, 0.001mm, 0.0005mm, 0.0001mm 0.01mm, 0.001mmTolerancejudgmentdisplay LED display (3 steps: Amber, Green, Red/5 steps: Amber, Amber flashing, Green, Red flashing, Red)

FunctionsPreset,tolerancejudgmentoutput(3/5-stepX7kinds),limit value output (2 kinds independently for each of the 7 channels), peak (maximum, minimum, runout) measurement, diverse data output (serial BCD, simplified analog)

OutputTolerancejudgment:L1 to L5, open-collectorControl: Normal operation signal (NORMAL), open-collector

ExternalcontrolsignalinputPreset,displayhold,peakvalueclear,tolerancejudgmentBANK switch, open-collector or no-voltage contact signal (with/without contact point)

InterfaceSerial BCD: Bit-serial format, open-collectorAnalogoutput:2.5V+CountingvalueXvoltageresolution(25mV/2.5mV): Full-scale 0 to 5VDigimaticinput/output: •Connectingtotheexternalswitchbox(No.02ADF180)makes it easy to enter tolerance limits and preset values. Note) This can not be used when the gage is connected to a Mitutoyo DP-1VR Digimatic Mini-Processor •CanconnecttoaMitutoyoDP-1VRDigimaticMini-Processor. •Numberoftolerancestepscanbeexpandedbymakingaset of EB-D counters.

Quantizationerror±1 count

Maximuminputfrequency1.25MHz (The response speed depends on the gage being used.)

PowersupplyvoltageDC+12 to 24V

Powerconsumption6W (500mA) or less (Secure power supply more than 1A for each unit.)

DIMENSIONS Unit: mm

542-094-2

542-092-2 542-094-2 542-093-2

ACadapter/ACcable137

6.6

96

154.

6

48

96

91.4

44.4

(11)

137

6.6

91.4

96

154.

6

48

96

44.4

(11)

137

(11)

6.6

91.4

44.4

96

154.

6

48

96

542-092-2542-093-2

G-19

27

11.2

137

5.1

137

156.7

144

72（

3.1）

68

138

148.2

AC adapter

(Approx. 10º)

G

EH CounterSERIES 542 — Multi-function Display Unit

FEATURES•EmploysDINsize(144X72mm)andmount-

on-panel configuration to facilitate system integration.

•Countercanbeusedonadesktopmounted to a display stand (included).

•ThestandardRS-232CandUSBinterfaceallows easy communication with an external PC.(USB used only with SENSORPAK.)

•Amulti-pointmeasuringsystemcaneasilybe created with the built-in networking function (RS link). (Max. 12points.)

•The2-gageinputtypecanperform2-axisdisplay and make addition or subtraction calculations between 2 gages.

SPECIFICATIONSOrderNo. 542-075* 542-075-1** 542-071* 542-071-1** 542-073* 542-073-1** 542-074* 542-074-1** 542-072* 542-072-1**Applicable input Differential square-wave Differential sine-wave Digimatic code outputApplicable gage LG, LGB, LGF, LGK LGF with Origin Point Mark LGB with sine-wave output LGD, LGS, ID-CNumber of gage input 1 2Resolution 0.01mm, 0.005mm, 0.001mm, 0.0005mm,0.0001mm Depends on the gage head

connected— 0.01µm,0.001µmTolerancejudgmentdisplay LED display (3 steps: Amber, Green, Red/5 steps: Amber, Amber flashing, Green, Red flashing, Red)

* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for EK, Nosuffix is required for JIS/100V** For those models of the Order No. with Suffix "1", AC adapter is not attached as a standard accessory.

FunctionsZeroset,preset,limitsetting(3or5-step),GO/±NGjudgement,GO/±NGsignaloutput,MAX/MIN/TIR(runout)measurement,counting direction switching, double reading, mm/inch switching, sum/difference calculation of 2 gages, output mode selection

OutputI/O:Tolerancejudgmentoutput(3/5stages),normaloperationoutput RS-232C, USB or Digimatic code (selectable): Various measurement data(USB used only with SENSORPAK)

ExternalControlI/O: Preset, Data hold and Error clear RS-232C: Displayed value output,MAX/MIN/TIRswitching,Zeroset,peakvalueclear,preset value input, tolerance value input and error clear

RS LinkUp to six EH counters may be connected via one RS-232C or USB port. (daisy chain)(USB used only with SENSORPAK)

Errordisplay/outputPower-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error

Maximuminputfrequency2.5MHz (differential square-wave): 542-075,542-071,542-0731MHz (differential square-wave): 542-074

PowersupplyVia AC adapter (12 - 24V DC, 700mA (max))


DIMENSIONS Unit: mm

542-075 542-071

542-073 542-074 542-072

G-20

LG-DA1 (542-003)

Inputs the zero-setting signal from such as a push-switch.

Analog connection cable

Linear gage

Connecting cable (optional)

Linear gage counter

LG-DF (542-004)(rear panel)

Linear gage counter

D= (Displacement of Linear Gage A)+ (Displacement of Linear Gage B)

H= (Displacement of Linear Gage B)- (Displacement of Linear Gage A)

Workpiece

Linear Gage A

Linear Gage A

Linear Gage B

Linear Gage B

D

H

G

Difference/Sum UnitSERIES 542

D/A Conversion UnitSERIES 542

FEATURES•Usedtooutputadifferentialcalculation

result (A+B, A-B) or single value (A, B) of the counting values obtained from the linear gages that are connected to A and B input connectors, respectively.

* The minimum readings of the linear gages that are connected to A and B input connectors should be identical.

542-004

CONNECTIONEXAMPLEMeasurementofacurvedplatethickness

Stepmeasurement

Over-speederroroutputandtheremediesIf either of the gages being connected A and B input connectors displaces as to exceed the rated moving speed, the counter will display over-speed error.

TechnicalDataResponse speed: 250mm/s (when 5/10µm linear gages are connected) 50mm/s (when 1µm linear gages are connected)Power supply: Via AC adapter (DC9V, 500mA) Power consumption: 4.5WDimensions: 236 (w) x 160 (D) x 44.2 (H) mm

FEATURES•Thisunithasapulsecontrolcircuit,

counting circuit, and D/A conversion circuit for output of linear gage displacement amount in the form of analog voltage.

542-003*

CONNECTIONEXAMPLE

TechnicalDataPower supply: Via AC adapter (DC9V, 500mA) Dimensions: 236 (w) x 160 (D) x 44.2 (H) mm

SwitchingofD/AconversionrangeandresolutionWhenconnectedtoa0.001mmlineargageRange Resolution±1mm 0.001mm±2mm 0.002mm±5mm 0.005mm±10mm 0.01mm±20mm 0.02mm±50mm 0.05mm

Whenconnectedtoa0.01mmlineargageRange Resolution±5mm 0.005mm±10mm 0.01mm±25mm 0.025mm±50mm 0.05mm±100mm 0.10mm±250mm 0.25mm

* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, E for BS, Nosuffix is required for JIS/100V

G-21

144

6.5

4.5

4 4136

672

5 5161

16 16139

InterconnectingEV counters

Affixing anEV counter

44

64

Linear gage

RS-232C output

Tolerance judgment output BCD output Segment output RS-232C output

Display unit

Programmable controller

Linear gage

PC system

EV Counter EH Counter

G

EV CounterSERIES 542 — For Multi-gage System

542-063 542-064 542-067

FEATURES•Uptosixgagescanbeconnectedtoone

unit.•Abletoconnectupto10EVcountersto

one personal computer using the RS link function to facilitate the configuration of a multi-point measurement system comprising a maximum of 60 gages.

•Arangeofoutputmodestochoosefrom;I/Ooutputfortolerancejudgmentand

segment output, BCD data output and RS-232 output are available.

•Peak-holdmeasurementsarepossibleformaximum value, minimum value, runout (TIR), etc.

•Abletocalculateasum,average,maximum, minimum, maximum difference, etc., between gages connected to the same unit.

SPECIFICATIONSOrderNo. 542-063 542-067 542-064Applicable input Differential square-wave Digimatic code (SPC)Applicable gage LGB (ex. 0.0001mm resolution),

LGF, LG, LGKLGF with origin point mark LGD, LGD-M, LGS

Number of gage input 6Resolution (internal) - no display capability

0.0001mm**, 0.0005mm, 0.001mm, 0.005mm, 0.01mm, .000005”, .00005”, .0005”

0.001mm*, 0.01mm, .00005”*, .0005”

*: Will not be indicated when combined with a LG gage.**: D-EV is required when the resolution is 0.0001mm.

FunctionsGO/±NGjudgment,GO/±NGsignaloutput,MAX/MIN/TIR(runout) measurement, counting direction switching, mm/inch switching, calculation of sum, average, maximum, minimum and maximum difference between specified axes, and output-mode selection

OutputI/O: Normal operation output and GO/±NG signal (three steps), measurement data (BCD code), or 21-stage segment output (selectable) RS-232C: Various measurement data

ExternalControlI/O: Axis designation, preset, data hold, and error clear RS-232:Displayedvalueoutputcommand,MAX/MIN/TIRswitching and peak value clear, zero set, preset value input, tolerance value input, error clear, and command to output calculated value between specified axes

RS LinkUp to 10 EV counters may be connected via a single RS-232 port. (daisy chain) EV and EF counters can be mixed (in which case a total of six counters can be connected).

Errordisplay/outputPower-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error

Maximuminputfrequency1.25MHz (differential square-wave): Max counting Speed : 5MHz

PowersupplyTerminal block (M3 screws), DC +12 to +24V, 700mA (max.)

System Diagram

DIMENSIONSUnit: mm

G-22

-V+V

-V+V

96 6.6 67 （11） 91.4

44.448

OUT000001EV-I02ADD400

MADE IN JAPANSerial No.ModelCode No.

200mADC12-24V

INRS LIN

K

MODE P.SETFnDISP

GAGE

MAX MINTIR

UNIT +NG

GO

-NG

000001EV-I02ADD400

MADE IN JAPAN

Serial No.ModelCode No.

200mADC12-24V

OUTIN RS LINK

G

D-EV Display Unit

02ADD400

FEATURES•DisplayunitfortheEVcounter.•Allowsset-upofEVcounterwithouta

personal computer or other equipment.•Abletodisplayeachaxismeasurement

valueandGO/NGjudgmentresult,totalGO/NGjudgmentresultforallaxes,settingdetails, and errors.

+0.8 0

+0.8 0

•DINcompatiblecompactpanel-mounting-cutout dimensions 45 x 92

•TherequiredpowersupplyisDC+12to+24V, 200mA at the terminal block.

TechnicalDataNumber of connectable units: One display unit allows external display and setting for one EV counter.Displayed digits: Uses a single sign plus six digits (EV counter operates on eight-digit data internally but displays only the last six digits). LEDdisplay: Channeldisplay(alsofordisplayofjudgment result): 3 (three-color LED) Measurement mode display (current, maximum, minimum, runout): 2 Status display: 1 (two-color)Operating switches: 4Switches and their functions: Channel switching, measurement mode switching (current value, maximum value, minimum value and runout), parameter setting, preset, and tolerance settingInput/output: RS Link connectors: 1 in and 1 out.Error display: Overspeed, gage error and others.Power supply: Terminal block (M3 screws), DC +12 to +24V, 200mA


DIMENSIONSUnit: mm

G-23

PLC

I/O cable

License key RS-Link

GO/NO-GO signal

External trigger signal

SENSORPAK

CPU: 2GH or faster OS: Windows 2000 or XP Memory: 256MB or more

RS-232Ccable (option)

CD-ROM

Linear gage / EH, EV counter (max. 10 pcs.)

Measurement screen

Meter screen

Chart screen

G

SENSORPAK

This software facilitates the loading of measurement data from a linear gagecounter into a personal computer. USB connection is possible with the EH counter.

FEATURES•Maximum60channelsofmeasuringpoints

can be processed.•Possibletoperformarithmeticalcalculation

and maximum width calculation using the measurement data.

•Possibletoexportthemeasurementdatainto MS-Excel.

SPECIFICATIONSOrderNo. 02ADM260-2

(Softwareonly)02ADM270-2

(SoftwareplusI/Ocable)Display function Display type: Counter, bar graph, meter, chart (capable of simultaneous display)

Tolerancejudgmentresult:Colordisplay(green/red)Connectable gages: Max. 60 gages

Calculation function Calculation items: Sum, difference, total, average, maximum, minimum, range (maximum–minimum), calculation with a constantConnectable gages: Max. 30 calculation items (between desired gages)

Totaltolerancejudgment GO/NGjudgment(byspecifyinggagestobeusedfortotaltolerancejudgment)GO/NG signal output with optional I/O cable

Input function Trigger function: by means of key, timer or external TRG (with optional I/O cable)Data input frequency: Max. 9999 times (with 60 gages connected) to 60000 times (with 6 gages connected)

Output function DirectoutputtoEXCELspreadsheet,CSVfileoutput(compatiblewithMeasureLink)Connectable items Various Mitutoyo counters (those compatible with RS_LINK)Product requirement Recommendation: PC/AT compatible machine, CPU: Pentium4 2GHz or higher, Memory: 256MB or more

Disk: 100MB or moreOS:WindowsME,2000,XP

Currently supported languages: English, German, French, SpanishUser’s manual: English

•Diversegraphicfunctions(numericvaluedisplay, meter display, bar-graph display, overalljudgmentdisplay)

•Frequencyofdataloading:Max.9999times (60ch) to 60000 times (6CH)

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