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    EE1411

    MemorySTMicro/Intel/UCSD/THNU

    DRAM: Dynamic RAM DRAM: Dynamic RAM  Store their contents as charge on a capacitor rather

    than in a feedback loop.

    1T dynamic RAM cell has a transistor and a capacitor 

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    EE1412

    MemorySTMicro/Intel/UCSD/THNU

    DRAM Read DRAM Read 

    1. bitline precharged to VDD/2

    2. wordline rises, cap. shares it

    charge with bitline, causing a

    voltage V

    3. read disturbs the cell

    content at x, so the cell must be

    rewritten after each read

    bit cell 

    cell  DD

    C C 

    C V 

    V +

    =∆2

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    EE1413

    MemorySTMicro/Intel/UCSD/THNU

    DRAM writeDRAM writeOn a write, the bitline is driven

    high or low and the voltage is

    forced to the capacitor

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    EE1414

    MemorySTMicro/Intel/UCSD/THNU

    DRAM Array DRAM Array 

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    EE1415

    MemorySTMicro/Intel/UCSD/THNU

    DRAM DRAM 

    Bitline cap is an order of magnitude

    larger than the cell causing !ery small

    !oltage s"ing. A sense amplifier is used.

    Three different bitline architectures

    open folded and t"isted offer differentcompromises bet"een noise and area.

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    EE1416

    MemorySTMicro/Intel/UCSD/THNU

    DRAM in a nutshell DRAM in a nutshell 

    Based on capaciti!e #non$regenerati!e%

    storage

    &ighest density #'b(cm)%

    *arge e+ternal memory #'b% or embedded

    ,RAM for image graphics multimedia-

    eeds periodic refresh $/ o!erhead slo"er 

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    7MemorySTMicro/Intel/UCSD/THNU

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    8MemorySTMicro/Intel/UCSD/THNU

    Classical DRAM OrganizationClassical DRAM Organization

    (square)(square)r ow

    de

    coder 

    rowaddress

    Column Selector &  I/O Circuits Column

    Address

    data

    RAM Cell  Array

    word (row) select

    bit (data) lines

    ach intersection represents

    a 1!" D#$% &ell

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    9MemorySTMicro/Intel/UCSD/THNU

    DRAM logical organization (4DRAM logical organization (4

    Mbit)Mbit)

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    EE14110

    MemorySTMicro/Intel/UCSD/THNU

    DRAM hysical organization (4 Mbit!"#$)DRAM hysical organization (4 Mbit!"#$)

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    EE14111MemorySTMicro/Intel/UCSD/THNU

    AD

    OE_L

    2'() x *

    D#$%9 8

    WE_L

    0ontrol Signals #RAS* 0AS* 2E* 3E*% are all acti!e lo"

    ,in and ,out are combined #,%

    2E* is asserted #*o"% 3E* is disasserted #&igh%

     5 , ser!es as the data input pin

    2E* is disasserted #&igh% 3E* is asserted #*o"%

     5 , is the data output pin

    Ro" and column addresses share the same pins #A% RAS* goes lo" 6ins A are latched in as ro" address

    0AS* goes lo" 6ins A are latched in as column address

    RAS(0AS edge$sensiti!e

    CAS_LRAS_L%ogic Diagram o& a 'yical DRAM %ogic Diagram o& a 'yical DRAM 

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    EE14112MemorySTMicro/Intel/UCSD/THNU

    DRAM OerationsDRAM Oerations 2rite

    Charge bitline HIH or !O" and set wordline HIH Read

    #it line is $recharged to a %oltage halwaybetween HIH and !O"' and then theword line is set HIH

    e$ending on the charge in the ca$' the

    $recharged bitline is $ulled slightly higher or lower

    Sense Am$ etects change

    E+plains "hy 0ap can7t shrink *eed to suiciently dri%e bitline

    Increase density +, increase $arasiticca$acitance

    Word

    Line

    Bit Line

    C

    SenseAmp

    .

    .

    .

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    EE14113MemorySTMicro/Intel/UCSD/THNU

    AD

    OE_L

    2'() x *

    D#$%9 8

    WE_LCAS_LRAS_L

    O+

    $ #ow $ddress

    -+

    un 

    #ead $ccess

    "ime

    Output nable

    Dela0

    &$+

    #$+

    &ol $ddress #ow $ddress un  &ol $ddress

    D igh Data Out

    D#$% #ead &0cle "ime

    arl0 #ead &0cle4 O+ asserted before &$+ ate #ead &0cle4 O+ asserted after &$+

    E!ery ,RAM access begins at

    The assertion of the RAS*

    ) "ays to readearly or late !. 0AS 

    un Data Out igh

    DRAM Read 'imingDRAM Read 'iming

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    EE14114MemorySTMicro/Intel/UCSD/THNU

    AD

    OE_L

    2'() x *

    D#$%9 8

    WE_LCAS_LRAS_L

    -+

    $ #ow $ddress

    O+

    un 

    -# $ccess "ime -# $ccess "ime

    &$+

    #$+

    &ol $ddress #ow $ddress un  &ol $ddress

    D un un  Data 5n Data 5n un  

    D#$% -# &0cle "ime

    arl0 -r &0cle4 -+ asserted before &$+ ate -r &0cle4 -+ asserted after &$+

    E!ery ,RAM access begins at

    The assertion of the RAS*

    ) "ays to "riteearly or late !. 0AS

    DRAM rite 'imingDRAM rite 'iming

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    EE14115MemorySTMicro/Intel/UCSD/THNU

     A 89 ns #tRA0% ,RAM can

    perform a ro" access only e!ery 119 ns #tR0%

    perform column access #t0A0% in 1: ns but timebet"een column accesses is at least ;: ns #t60%.

     5

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    EE14116MemorySTMicro/Intel/UCSD/THNU

    #*'ransistor Memory Cell (DRAM)#*'ransistor Memory Cell (DRAM)

    2rite

    1. ,ri!e bit line

    ).. Select ro"

    Read

    1. 6recharge bit line

    ).. Select ro"

    ;. 0ell and bit line share charges

     5 @ery small !oltage changes on the bit line

    4. Sense #fancy sense amp%

     5 0an detect changes of 1 million electrons

    :. 2rite restore the !alue

    Refresh

    1. ust do a dummy read to e!ery cell.

    row select

    bit

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    EE14117MemorySTMicro/Intel/UCSD/THNU

    DRAM architectureDRAM architecture

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    EE14118MemorySTMicro/Intel/UCSD/THNU

    Cell read: correct re&resh is goal Cell read: correct re&resh is goal 

    b s

     s

     BLSN  BL BL

    C C 

    C V V V V V 

    +−=−=∆   )('

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    EE14119MemorySTMicro/Intel/UCSD/THNU

    +ense Amli&ier +ense Amli&ier 

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    EE14120MemorySTMicro/Intel/UCSD/THNU

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    EE14121MemorySTMicro/Intel/UCSD/THNU

    DRAM technological requirementsDRAM technological requirements

    Cnlike SRAM large 0b must be charged by small sense DD. Thisis slo".

    Make 0b small backbias unction cap. limit blocksiFe

    Backbias generator reGuired. Triple "ell.

    6re!ent threshold loss in "l pass @' / @ccsH@Tn

    ReGuires another !oltage generator on chip

    ReGuires @Tn"l/ @tnlogic and thus thicker o+ide than logic

    Better dynamic data retention as there is less subthreshold

    loss.

    ,RAM 6rocess unlike *ogic processI

    Must create >large? 0s #19..;9fD% in smallest possible area

    #$/ ) poly$/ trench cap $/ stacked cap%

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    EE14122MemorySTMicro/Intel/UCSD/THNU

    Re&reshing O,erhead Re&reshing O,erhead  *eakage

     unction leakage e+ponential "ith tempI

    )-: msec J =99 0

    ,ecreases noise margin destroys info

     All columns in a selected ro" are refreshed "hen read

    0ount through all ro" addresses once per ; msec. #no

    "rite possible then%

    3!erhead J 19nsec read time for =1K)L=1K)84Mb

    =1K)L1e$=(;e$; ).NO

    ReGuires additional refresh counter and

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    EE14123MemorySTMicro/Intel/UCSD/THNU

    RAM-.n 0chi$

    RAMController 

    address

    Memory1imingController 

    #us ri%ers

    n

    n/-

    w

    1c + 1cycle 2 1controller 2 1dri%er 

    DRAM Memory +ystemsDRAM Memory +ystems

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    EE141 24MemorySTMicro/Intel/UCSD/THNU

    DRAM er&ormanceDRAM er&ormance

    DRAM (Read/Write) Cycle Time

    DRAM (Read/Write)

    Acce!! Time

     !  2"1# $%y&

    DRAM (Read/Write) Cycle Time"

     ! '$ re*+e,t ca, y+

    i,itiate a, acce!!&

    DRAM (Read/Write) Acce!!

     Time"

     ! '$ *+ic-ly $ill y+ .et$%at y+ $a,t ,ce y+

    i,itiate a, acce!!&

    DRAM a,d$idt% imitati,"

     ! imited y Cycle Time

    "ime$ccess "ime

    &0cle "ime

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    EE141 25MemorySTMicro/Intel/UCSD/THNU

    -ast age Mode-ast age Mode

    OerationOeration

    Dast 6age Mode ,RAM + M >SRAM? to sa!e a ro"

     After a ro" is read into the register 

    3nly 0AS is needed to access

    other M$bit blocks on that ro"

    RAS* remains asserted "hile

    0AS* is toggled

    $ #ow $ddress

    &$+

    #$+

    &ol $ddress &ol $ddress

    1st %!bit $ccess

       N   r

      o  #  $

     N col$

    D#$%

    &olumn

    $ddress

    %!bit Output

    M %it$

    6 x % 7#$%8

    #ow

    $ddress

    &ol $ddress &ol $ddress

    2nd %!bit 3rd %!bit 9th %!bit

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    EE141 26MemorySTMicro/Intel/UCSD/THNU

    age Mode DRAM .andwidth /"amleage Mode DRAM .andwidth /"amle 6age Mode ,RAM E+ample

    18 bits + 1M ,RAM chips #4 nos% in 84$bit module #= MBmodule%

    89 ns RASH0AS access timeP ): ns 0AS access time

    *atency to first access89 ns *atency to subseGuentaccesses): ns

    119 ns read("rite cycle timeP 49 ns page mode access time P):8 "ords #84 bits each% per page

    Band"idth takes into account 119 ns first cycle 49 ns for 0AS cycles

    Band"idth for one "ord = bytes ( 119 ns 8K.;: MB(sec

    Band"idth for t"o "ords 18 bytes ( #119H49 ns% 191.N; MB(sec

    6eak band"idth = bytes ( 49 ns 1K9.N; MB(sec

    Ma+imum sustained band"idth #):8 "ords L = bytes% ( # 119ns H):8L49ns% 1==.N1 MB(sec

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    EE141 27MemorySTMicro/Intel/UCSD/THNU

     4 'ransistor Dynamic Memory  4 'ransistor Dynamic Memory 

    Re&o'e te MOS/re$i$tor$

    *ro& te SRAM &e&or+ cell

    ,-l.e $tore

    on te r-in o* M0 -n M21.t it i$ el tere onl+ %+

    te c--cit-nce on to$e

    noe$

    Le-3-4e -n $o*t5error$ &-+e$tro+ '-l.e

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    EE141 28MemorySTMicro/Intel/UCSD/THNU

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    EE141 29MemorySTMicro/Intel/UCSD/THNU

    -irst #' DRAM (40 Density)-irst #' DRAM (40 Density)

      Te6-$ In$tr.&ent$

    TMS7 intro.ce

    09:

      NMOS; 0M0; TTL I/O   0T Cell; Oen 1it Line;

    Di**erenti-l Sen$e A&

      ,

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    EE141 30MemorySTMicro/Intel/UCSD/THNU

    #$1 DRAM (Double oly Cell)#$1 DRAM (Double oly Cell)

      Mo$te3M>700?;intro.ce 09::

     Are$$ &.ltile6

     -4e &oe

     NMOS; 20M

     ,

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    EE141 31MemorySTMicro/Intel/UCSD/THNU

    $40 DRAM$40 DRAM

      Intern-l,%%4ener-tor 

     1oo$te Worline-n Acti'eRe$tore@ !  eli&in-te ,tlo$$ *or

    0B

     67 ino.t

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    EE141 32MemorySTMicro/Intel/UCSD/THNU

     23$0 DRAM  23$0 DRAM 

     ole %itline-rcitect.re !  Co&&on &oe noi$e to

    co.lin4 to 1/L$ !  E-$+ 5-cce$$

     NMOS 20M !  ol+ 0 l-te

     !  ol+ 2 (ol+cie) 54-te;W/L

     !  &et-l 51/L

      re.n-nc+

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    EE141 33MemorySTMicro/Intel/UCSD/THNU

    #M DRAM #M DRAM 

      Trile ol+ l-n-r cell;

    0M

     !  ol+0 54-te; W/L

     !  ol+2 !l-te

     !  ol+ (ol+cie) 51/L

     !  &et-l 5W/L $tr-

     ,/2 %itlinere*erence; ,/2 cell

     l-te

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    EE141 34MemorySTMicro/Intel/UCSD/THNU

    On*chi oltage 5eneratorsOn*chi oltage 5enerators

     o#er $.lie$ !  *or lo4ic -n &e&or+

      rec-r4e 'olt-4e

     !  e4 ,DD/2 *orDRAM 1itline

     %-c34-te %i-$

     !  re.ce le-3-4e  WL $elect o'erri'e

    (DRAM)

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    EE141 35MemorySTMicro/Intel/UCSD/THNU

    Charge um Oerating rincileCharge um Oerating rincile

    23in

    3in

    4 23in

    23in

    3in d@

    d@3o

    3in + d3 5 3in 2 d3 23o

    3o + -63in 2 -6d3 4 -63in

    Charge Phase

    Discharge Phase

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    EE141 36MemorySTMicro/Intel/UCSD/THNU

    oltage .ooster &or %oltage .ooster &or %

    C C!

    3hi d@ 3+3hi

    C!C 

    3c 4 3hi

    3hi 3c(7) 4 3hi2

    3 4 3hi 2

    3hi

    d

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    EE141 37MemorySTMicro/Intel/UCSD/THNU

    .ac1gate bias generation.ac1gate bias generation

    8se charge $um$

    #ac9gate bias:

    Increases 3t ;, reduces lea9age

    < reduces C= o nMOS1 when a$$lied to $;well

    (tri$le well $rocess>)'

    smaller C= ;, smaller Cb ? larger readout @3

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    EE141 38MemorySTMicro/Intel/UCSD/THNU

    dd 6 2 5enerationdd 6 2 5eneration)!

    1!

    1!

    9.:!

    9.:!

    1.:!

    1!

    9.:!

    1

    !

    @tn Q@tpQ9.:!

    u ) u6

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    EE141 39MemorySTMicro/Intel/UCSD/THNU

     4M DRAM  4M DRAM 

      D $t-c3e or trenc cell

     CMOS 70M

     60? intro.ce  Sel* Re*re$

      1.il cell in 'ertic-li&en$ion 5$rin3 -re-

    #ile &-int-inin4 *cell c--cit-nce

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    EE141 40MemorySTMicro/Intel/UCSD/THNU

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    EE141 41MemorySTMicro/Intel/UCSD/THNU

    +tac1ed*Caacitor Cells+tac1ed*Caacitor Cells

    6oly plate

    &itachi 84Mbit ,RAM 0ross Section

    Samsung 84Mbit ,RAM 0ross Section

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    EE141 42MemorySTMicro/Intel/UCSD/THNU

    /,olution o& DRAM cell structures/,olution o& DRAM cell structures

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    EE141 43MemorySTMicro/Intel/UCSD/THNU

    .uried +tra 'rench Cell .uried +tra 'rench Cell 

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    EE141 44MemorySTMicro/Intel/UCSD/THNU

    ./+' cell Dimensions./+' cell Dimensions

    ,eep Trench etch "ith

    !ery high aspect ratio

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    EE141 45MemorySTMicro/Intel/UCSD/THNU

     23$0 DRAM  23$0 DRAM 

     ole %itline-rcitect.re !  Co&&on &oe noi$e to

    co.lin4 to 1/L$

     !  E-$+ 5-cce$$

     NMOS 20M !  ol+ 0 l-te

     !  ol+ 2 (ol+cie) 54-te;W/L

     !  &et-l 51/L

      re.n-nc+

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    46MemorySTMicro/Intel/UCSD/THNU

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    EE141

    48MemorySTMicro/Intel/UCSD/THNU

    +tandard DRAM Array Design+tandard DRAM Array Design

    /"amle/"amle

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    EE141

    49MemorySTMicro/Intel/UCSD/THNUB* direction col

    2* direction

    #ro"%

    B cells

     (-D-D)

    0M cells +

    B0

    lobal "! decode 2 dri%ers

    !ocal "!

    ecode

       C  o

       l  u  m  n  $  r  e   d  e  c  o   d  e

    2

    DRAM Array /"amle (cont7d)DRAM Array /"amle (cont7d)

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    EE141

    50MemorySTMicro/Intel/UCSD/THNU

    DRAM Array /"amle (cont d)DRAM Array /"amle (cont d)

    D0- Array *mat+0 ( -D "! -7BE SA)

    Interlea%ed S  A & Hierarchical Row ecoder/ri%er 

    (shared bit lines are not shown)

    )94=

    -D

    ):8+):8

    B

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    51MemorySTMicro/Intel/UCSD/THNU

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    54

    +tandard DRAM Design -eature+tandard DRAM Design -eature

    ・ &ea!y dependence on technology・ The ro" circuits are fully different

    from SRAM.・ Almost al"ays analogue circuit

    design・ 0A, Spice$like circuits simulator 

    Dully handcrafted layout