Leader in Vacuum Valves

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Vacuum Valve Applications

1 VAT Swiss Headquarters and R&D2 Cleanroom Assembly3 Parts Production4 Sales & Service Center

Today’s high-tech manufacturing andresearch often require a reliable, highquality vacuum environment. Appli-cations for vacuum valves include:

- Semiconductor manufacturing - Solar cell manufacturing- Flat panel production- Glass and tool coating- Metallurgy- Surface analysis- High energy physics- Synchrotrons- Laser technology- Space simulation- Nuclear processes

Such a variety of applications asks for a wide choice of vacuum valves.

VAT offers by far the largest choice of vacuum valves worldwide: A variety of more than 1000 stand ard valves can be ordered from our catalog.

VAT valves have the highest market share worldwide. They are standard components in production equip -ment as well as at R&D facilities.

Final Products based on Vacuum Technologies

Vacuum Production Systems

Vacuum Valves

VATLOCK VATRING MONOVAT

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Committed to Inno ion

InnoVATion

Since its foundation in 1964 VAT has fully specialized in vacuum valve technology. One third of the company is R&D, product groups and labs.

Important sealing technologies have been invented and patented by VAT under trade names such as VATLOCK, VATRING and MONOVAT.

Long-Term Commitment

VAT today employs more than 700 people, mainly technical staff. VAT is family owned and totally self financed. We are committed to be the best partner to our customers for vacuum valves. We are proud to both support valves sold more than 20 years ago and collaborate in engineering the vacuum systems of tomorrow.

Development and Verification

Virtual Prototype

During product development, many calculations and simulations are carried out to allow a high degree of product maturity to be reached by the time of the first prototoye.

Design Verification

Innovation is important, but equally important is reliability. This is why we verify the specification of our products.We do both design verification of new products and product audits from routine manufacturing.

Valve Laboratory

This is our most important lab. Typical tests done here are:- Vacuum performance- Lifetime (cycle life) and mechanical wear- Bake-out- Pressure rise tests, spectrum analysis

of residual gases- Opening / closing speed- Pressure control performance- Alternative sealing materials

Quality & Process Management

Quality for us means …

meeting commitmentsand continuous improvement.

We are committed to …

ingenious products, state-of-the-art manufacturing and excellent customer service.

acting environmentally conscious and adhering to the standards regarding work safety and busi-ness ethics.

Particle Laboratory

Especially for semiconductor equipment it is essential to keep particle counts at the lowest levels. In this lab we measure particles generated by cycling valves under various conditions.

Quality & Process Management

VAT maintains a company wide, intranet based Quality & Process Management System (QMS) according to ISO 9001/ 14001. This QMS covers all aspects of product quality, process excellence, work safety and environmental protec-tion.

Closed loop controls and monitoring of key performance indicators ensure ongoing improvements and progress.

On request, we provide Certificates of Compliance, Inspection & Test Certifi-cates, ISO Assessment Certificates etc.

Customer acceptance tests at our Swiss manufacturing facilities are always wel-come upon agreement.

Manufacturing

Competence Centers for Parts

In order to enable short lead times and develop key manufacturing technologies, one third of VAT's parts manufacturing is done internally in specialized production cells. Each cell’s responsibilities include process quality - first article inspection (FAI) and statistical process control (SPC) as well as on time deliveries and cost control.

Machined Parts Cell

Machining is fully automated. Our machines are linked together with direct numerical control (DNC). For extended capacity an unmanned night shift can easily be brought on-line.

Vulcanized Parts Cell

Today’s semiconductor processing tools demand a variety of sealing compounds. Here we develop the bonding and vulcanization tools and processing equipment.

Electronic Controller Cell

Design and development for all electronicvalve controllers is carried out by VAT.This includes both software and hardware.Design verification, order configuration, 100% final inspection and testing are allcarried out internally.

Valve Assembly

All valves undergo a computer control led final inspection which includes several functional cycles, leak rate measurements and other parameters.

Data is stored and analyzed for assur ance of a good safety margin for long -term reliability.

Welded Components Cell

For precise alignment of flanges and narrow tolerances of valve bodies both semiautomatic tooling and robot welding is applied.

Angle Valves

Vacuum10-7

Series 24 Aluminum, Stainless Steel

Angle or inline valve with shaft feedthrough for large gas flows

Actuation: Manual, pneumaticFlange: ISO-KF, ISO-KSizes: I.D. 10 to 1000 mm (⅜" to 40")

HighVacuum10-8

Series 26 Aluminum, Stainless Steel

Angle or inline valve with bellows feedthrough

Actuation: Manual, pneumatic, electro-magneticFlange: ISO-KF, ISO-K, CF-R Sizes: I.D. 10 to 160 mm (⅜" to 6")

UltraHighVacuum10-10

Series 28 Stainless Steel

Angle valve with bellows feedthrough and metal bonnet seal for extremely low outgassing rate

Actuation: Manual, pneumaticFlange: CF-R Sizes: I.D. 16 to 63 mm (⅝" to 2½")

ExtremeHighVacuum<10-10

Series 54, 57 Stainless Steel

All-metal angle valve for UHV and XHV applications

Actuation: Manual, pneumaticFlange: CF-R Sizes: I.D. 16 to 160 mm (⅝" to 6")

Vacuum range in mbar / mtorr

Gate Valves

Series 012, 08, 12 Aluminum

Low cost gate valve with shaft feedthrough

Actuation: Manual, pneumaticFlange: ISO-KF, ISO-F, JIS, DIN insertSizes: I.D. 16 to 320 mm (⅝" to 12") (for sizes > DN 320 see series 19)

Series 26 Aluminum, Stainless Steel

Angle or inline valve with bellows feedthrough

Actuation: Manual, pneumatic, electro-magneticFlange: ISO-KF, ISO-K, CF-R Sizes: I.D. 10 to 160 mm (⅜" to 6")

Series 14 Stainless Steel

General purpose gate valve with rotary feedthrough

Actuation: Manual, pneumaticFlange: ISO-F, CF-F, ASA-LP, ASA, JISSizes: I.D. 63 to 400 mm (2½" to 16")

Series 010, 10 Stainless Steel

Gate valve with bellows and metal bonnet seal for UHV applications

Actuation: Manual, pneumaticFlange: ISO-KF, CF-F, ISO-F, ASA-LPSizes: I.D. 25 to 320 mm (1" to 12") (for sizes > DN 320 see series 19)

Series 48 Stainless Steel

All-metal gate valve for UHV and XHV applications

Actuation: Manual, pneumaticFlange: CF-FSizes: I.D. 16 to 320 mm (⅝" to 12")

Transfer Valves

Door Valve Series 07 Aluminum, Stainless Steel

Door valve for load lock chambers, virtually particle and vibration free

Actuation: PneumaticFlange: SEMI interface and various other typesSizes: Height: 37 mm (1.5") to 250 mm ( 10") Width: 160 mm (6.3") to 3500 mm (140")

Transfer Valvewith linear drive

Series Aluminum, Stainless Steel02, 03 Transfer valve or insert, virtually particle and vibration free

Actuation: PneumaticFlange: SEMI interface and various other typesSizes: Height: 25 mm (1.0") to 56 mm (2.2") Width: 160 mm (6.3") to 700 mm (28")

Transfer Valvewith L-actuation

Series Aluminum04, 05 Transfer valve or insert for corrosive processes, virtually particle and vibration free

Actuation: PneumaticFlange: SEMI interface Sizes: 46 x 236 mm (1.8" x 9.3") 50 x 336 mm (1.9" x 13.2")

Large Size Transfer Valves

For FPD and PV production systems or any other large coating systems.

Wide variety of sizes up to 3000 mm (120")

Control Valves

Soft-pump / Vent Valve

Series 29 Aluminum, Stainless Steel

Angle valve with adjustable throttling position for pump down and venting with reduced turbulences, particle and substrate agitation and condensation

Actuation: PneumaticFlange: ISO-KFSizes: I.D. 25 to 250 mm (1" to 10")

Throttling System or Throttling & Isolation System

Series 61 Aluminum, Stainless Steel

Butterfly valve pressure control system for downstream applications

Actuation: Stepper motor, actuated via adaptive, integrated controller

Flange: ISO-KF, ISO-F, CF-F, ASA-LP, JISSizes: I.D. 25 to 250 mm (1" to 10")

Throttling &Isolation System

Series 64 Stainless Steel

Gate valve pressure control system for downstream applications

Actuation: 3-position pneumatics or stepper motor, actuated via adaptive pressure controller

Flange: ISO-F, CF-F, ASA-LP, ASA, JISSizes: I.D. 100 to 400 mm (4" to 16")

Throttling &Isolation System

Series 65 Aluminum (Option: hard anodized)

Pendulum valve pressure control system for downstream applications

Actuation: Stepper motor, actuated via adaptive, integrated controller and pneumatics for leaktight closing

Flange: ISO-F, JISSizes: I.D. 100 to 400 mm (4" to 16")

Compact Valves

Vatterfly Valve

Series 20 Aluminum, Stainless Steel Compact isolation valve with two-step turn-and-tilt mechanism, virtually particle free

Actuation: Manual, pneumaticFlange: ISO-F, CF-FSizes: I.D. 63 to 200 mm (2½" to 8")

Pendulum Valve

Self-regulating heating device with insulation

Uniform temperature distribution

Heating jackets for controlled bakeout Various surface coatings

Series 16 Aluminum (Option: hard anodized) Compact isolation valve, ideal for demanding semiconductor processes as well as for large coating and FPD production systems, virtually particle free

Actuation: Pneumatic Flange: ISO-F, ASA-LP, JISSizes: I.D. 63 to 500 mm (2½" to 20“)

Choice of sealing materials

Heating Compounds and Coatings

Valves for Specific Applications

Series 47RF-Bridge Valve

All metal gate valve used as sector valvein accelerators and storage rings

Series 19VERY LARGE Gate Valve

for large vacuum vessels used in e.g. fusion research and space simulation

Sizes: I.D. 400 to 1600 mm (16" to 63")

Series 75, 77Fast Closing Valves/Shutters

75: Seals vacuum-tight within milliseconds77: Reduces full conductance to a small leak within milliseconds

Accessories

Series 31 – 33 Fittings Range of quality accessories

Series 35 VATSEAL Patented metal seal for flat flanges

BellowsCOMVAT: www.comvat.com

Multi-valve Modules andCustomized Valves

Special Valves

Despite our vast choice, you may still require a special solution. With more than 40 years of experience and a broad knowledge of sealing and valve techno-logy, VAT has the resources to offer reliable and cost efficient solutions.

Inserts

A variety of valve types can be integrated. Early involvement of VAT’s pro-duct engineers in the design phase of customer systems ensures both optimized technical solutions and lowest cost.

Multi-valve Modules

Various valves or valve mechanisms are intercon-nected or integrated in a common housing to provide multiple functions within only one component. The design is customer- specific and thus allows optimal adaptation to the customer system and ample scope to meet also unusual customer requirements. Advantages are:- Compact- Cost-saving- Easy installation- Low risk of leakage- Only one contact

Engineering Support

Joint Development

In order to meet performance and cost targets of today’s OEM systems a close collaboration among engi neering is necessary.

Please contact us!

We offer a Variety of Support …

- On-site workshops- Valve specification advice- On-site design collaboration for specials and integrated solutions- Design verification

Engineering Compe tence through specialized Product Groups

PG 1 Angle ValvesPG 2 Gate ValvesPG 3 All-Metal ValvesPG 4 Transfer ValvesPG 5 Control ValvesPG 6 Large Transfer ValvesPG 7 Multi-valve Modules

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www.vatvalve.com

Global Support

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EA

— USA/CanadaVAT Inc. 500 West Cummings ParkSuites 5450-5650Woburn, MA 01801Tel (0781) 935 1446Fax (0781) 935 3940Email US@vatvalve.com

— Headquarters SWITZERLANDVAT Vakuumventile AGCH-9469 HaagTel +41 81 771 61 61Fax +41 81 771 48 30Email CH@vatvalve.com

— Representatives in many other countries

— BENELUXVAT Contact Office Zuiderstraat 30NL-3434 BN NieuwegeinTel (031) 30 6018251Fax (031) 30 6018252Email NL@vatvalve.com

— FRANCEVAT S.A.R.L. Z. I. des Godets, SILIC 419F-91374 Verrières-le-BuissonTel (0) 1 69 20 69 11 Fax (0) 1 69 20 90 08Email FR@vatvalve.com

— GERMANYVAT Deutschland GmbH Am Hochacker 4D-85630 GrasbrunnTel (089) 46 50 15Fax (089) 46 37 65Email DE@vatvalve.com

— GREAT BRITAINVAT Vacuum Products Ltd. Edmund House, Rugby Road Leamington Spa Warwickshire CV32 6ELTel 01926 45 27 53Fax 01926 45 27 58Email UK@vatvalve.com

— JAPANVAT Ltd. (Sales Office)Yokohama Plaza Building Kinko-cho Kanagawa-ku Yokohama 221-0056Tel (045) 440 0340Fax (045) 440 0342Email JP@vatvalve.com

(Sales & Service Center) 67-1325 Kizu, Ako City, Hyogo Pref. 678-0165Tel (079) 148 1680Fax (079) 148 1681

KOREAVAT Korea Ltd. # 391 Chilgue-DongPyongtaek-CityGyeonggi-Do, 459-050Tel (031) 662 68 56Fax (031) 662 68 71Email KR@vatvalve.com

— — CHINAVAT Vacuum Valves (Shanghai) Co., Ltd.848 Yunqiao Road, Building 1, 4th FloorPudong New Area Shanghai 201206Tel (021) 5032 6658Fax (021) 5032 6320Email CN@vatvalve.com

TAIWANVAT Taiwan Ltd. 8F-6, No. 81, Shui-Li RoadHsin-Chu City 300Tel (03) 516 90 88Fax (03) 516 90 99Email TW@vatvalve.com

— — SINGAPOREVAT Singapore Pte. Ltd. Wisdom Industrial Building38A Jalan Pemimpin # 01-01 Singapore 577179Tel +65 6252 5121 Fax +65 6252 5127 Email SG@vatvalve.com