laser-induced microexplosions: creating stellar conditions ... · creating stellar conditions on an...
TRANSCRIPT
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Laser-Induced Microexplosions:creating stellar conditions on an optical bench
Chris B. SchafferAndré Brodeur
José GarciaEric Mazur
Hong Kong University
23 October 1999
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Introduction
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Introduction
microstructuring of transparent materials
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Introduction
microstructuring of transparent materials
laser surgery
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Introduction
microstructuring of transparent materials
laser surgery
electronic and structural transitions
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Introduction
microstructuring of transparent materials
laser surgery
electronic and structural transitions
laser assisted chemistry
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Introduction
5 mm
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Introduction
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Introduction
transparentmaterial
objective
100 fs
focus laser beam inside material…
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Introduction
transparentmaterial
objective
100 fs
high intensity at focus…
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Introduction
transparentmaterial
objective
100 fs
… causes nonlinear ionization…
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Introduction
transparentmaterial
objective
and microscopic bulk damage
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Introduction
laser field ionization
multiphoton…
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Introduction
laser field ionization
…or tunneling
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Introduction
avalanche ionization
free carrierabsorption…
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Introduction
avalanche ionization
…and impactionization
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Introduction
Damage mechanisms:
explosive
thermal
defect forming
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Introduction
Applications:
data storage
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Introduction
Applications:
data storage
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Introduction
Applications:
data storage
photonic devices
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Introduction
Applications:
data storage
photonic devices
internal micromachining
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Outline
Damage morphology
Energy deposition
Dynamics
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Damage morphology
40 nJ, 120 fs0.65 NA
Corning 0211
3 µm
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Damage morphology
3 µm distance (µm)
inte
nsity
0
100
200
300
0 62 4
top view
250 nm
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Damage morphology
3 µm40 nJ, 120 fs
0.65 NACorning 0211
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Damage morphology
3 µm distance (µm)
inte
nsity
0
100
200
300
0 62 4
side view
2 µm
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Damage morphology
10 µm100 fs1.4 NA
Corning 0211
mo
re s
ho
tsmore energy
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Damage morphology
20 µm25,000 shots at 25 MHz
4.5 nJ, <100 fs1.4 NA
Corning 0211
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Damage morphology
Electron Microscopy:
explosive damage
forms voids
100 fs, 500 nJ0.65 NA
fused silica
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Damage morphology
summary of damage mechanisms
single shot multiple shot(25 MHz)
low energy
high energy
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Damage morphology
summary of damage mechanisms
single shot multiple shot(25 MHz)
low energy
high energy explosive
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Damage morphology
summary of damage mechanisms
single shot multiple shot(25 MHz)
low energy thermal
high energy explosive
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Damage morphology
summary of damage mechanisms
single shot multiple shot(25 MHz)
low energy ? thermal
high energy explosive
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Outline
Damage morphology
Energy deposition
Dynamics
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Energy deposition
Optical microscopy
Transmission
Dark field scattering
Determine threshold for damage:
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Energy deposition
optical microscopy
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Energy deposition
optical microscopy
6.6 nJ
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Energy deposition
laser energy (µJ)
tran
smis
sion
damage criticalself-focusing
0
1.0
101
100
10–1
10–2
10–3
10–4
800 nm, 110 fs0.65 NA
fused silica
transmission of pump beam in fused silica
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Dark-field scattering
Energy deposition
sample
objective
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block probe beam…
Energy deposition
sample
detector
objectiveprobe
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…bring in pump beam…
Energy deposition
sample
detector
objective
pump
probe
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…damage scatters probe beam
Energy deposition
sample
detector
objective
pump
probe
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Energy deposition
time (µs)
fused silica1.0 µJ
sign
al (
a.u.
)
–0.2 0 0.2 0.4 0.6 0.8
3
2
1
0
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Energy deposition
numerical aperture
thre
shol
d (n
J)
0
100
200
0 1.50.5 1.0
vary numerical aperture in Corning 0211
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Energy deposition
numerical aperture
thre
shol
d (n
J)
0
100
200
0 1.50.5 1.0
minimal self focusing, sospot size determined by:
and thus
E �I�
(NA)2
I �E
�A�
E�
(NA)2
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Energy deposition
numerical aperture
thre
shol
d (n
J)
0
100
200
0 1.50.5 1.0
fit gives threshold intensity: Ith = 2.5 x 1017 W/m2
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Energy deposition
bandgap (eV)
thre
shol
d in
tens
ity (
1017
W/m
2 )
3 5 7 9 11
6
5
4
3
2
1
threshold fluence (kJ/m2)
0.6
0.4
0.2
numerical aperture
thre
shol
d (n
J)
0
100
200
0 1.50.5 1.0
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Energy deposition
bandgap (eV)
0211
SF11
CaF2
fusedsilica
thre
shol
d in
tens
ity (
1017
W/m
2 )
3 5 7 9 11
6
5
4
3
2
1
threshold fluence (kJ/m2)
0.6
0.4
0.2
vary material…
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Energy deposition
bandgap (eV)
0211
SF11
CaF2
fusedsilica
thre
shol
d in
tens
ity (
1017
W/m
2 )
3 5 7 9 11
6
5
4
3
2
1
threshold fluence (kJ/m2)
0.6
0.4
0.2
threshold increases with bandgap…
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Energy deposition
bandgap (eV)
0211
SF11
CaF2
fusedsilica
thre
shol
d in
tens
ity (
1017
W/m
2 )
3 5 7 9 11
6
5
4
3
2
1
threshold fluence (kJ/m2)
0.6
0.4
0.2
…but not very much
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Energy deposition
bandgap (eV)
thre
shol
d in
tens
ity (
1017
W/m
2 )
3 5 7 9 11
6
5
4
3
2
1
threshold fluence (kJ/m2)
0.6
0.4
0.2
800 nm400 nm
same trend at 400 nm
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Outline
Damage morphology
Energy deposition
Dynamics
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imaging setup
Dynamics
sample
objective
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imaging setup
Dynamics
sample
objective
pump
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imaging setup
Dynamics
sample
objective
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imaging setup
Dynamics
sample
objective
probe
CCD
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Dynamics
sapphire
3 µJ pulse
3.8 ns delay
40 µm radius
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Dynamics
water (“self-healing”)
1.0 µJ pulse
35 ns delay
58 µm radius
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Dynamics
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Dynamics
time (ns)
sapphire
radi
us (
µm)
500
400
300
11.4 µm/ns
200
100
00 10 20 30 40 50
3 µJ
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Dynamics
time (ns)
water
radi
us (
µm)
500
400
300
1.48 µm/ns
200
100
00 10 20 30 40 50
1 µJ
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Dynamics
time (ns)
water
radi
us (
µm)
100
80
60
40
20
00 10 20 30 40 50
1 µJ
![Page 65: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/65.jpg)
Dynamics
water
1 µJ
time (ps)
radi
us (
µm)
0.1 1 10 100 1000
10
8
6
4
2
0
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time-resolved scattering setup
Dynamics
sample
detector
objectiveprobe
![Page 67: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/67.jpg)
time-resolved scattering setup
Dynamics
sample
detector
objective
pump
![Page 68: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/68.jpg)
time-resolved scattering setup
Dynamics
sample
detector
objective
![Page 69: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/69.jpg)
time-resolved scattering setup
Dynamics
sample
detector
objectiveprobe
![Page 70: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/70.jpg)
time-resolved scattering setup
Dynamics
sample
detector
objectiveprobe
signal proportional to area of scatterer
![Page 71: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/71.jpg)
Dynamics
water
1 µJ
time (ps)
radi
us (
µm)
0.1 1 10 100 1000
10
8
6
4
2
0
![Page 72: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/72.jpg)
Dynamics
water
1 µJ
100 µm/ns!
time (ps)
radi
us (
µm)
0.1 1 10 100 1000
10
8
6
4
2
0
![Page 73: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/73.jpg)
Conclusions
submicron-scale bulk micromachining
weak bandgap and wavelength dependence
only a few nanojoules required
![Page 74: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/74.jpg)
Laser micromachining simplified
5-nJ threshold: unamplified micromachining
![Page 75: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/75.jpg)
Laser micromachining simplified
5-nJ threshold: unamplified micromachining
![Page 76: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/76.jpg)
Laser micromachining simplified
waveguide machining
![Page 77: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/77.jpg)
Laser micromachining simplified
waveguide machining
![Page 78: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/78.jpg)
Future applications
Photonic devices
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Future applications
Photonic devices
Wavelength-selective splitter
![Page 80: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/80.jpg)
wavelength selective splitter
Future applications
![Page 81: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/81.jpg)
wavelength selective splitter
Future applications
![Page 82: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/82.jpg)
wavelength selective splitter
Future applications
![Page 83: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/83.jpg)
wavelength selective splitter
Future applications
![Page 84: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/84.jpg)
Future applications
Photonic devices
Wavelength-selective splitter
Photonic bandgap materials
![Page 85: Laser-Induced Microexplosions: creating stellar conditions ... · creating stellar conditions on an optical bench Chris B. Schaffer André Brodeur José Garcia Eric Mazur Hong Kong](https://reader036.vdocuments.us/reader036/viewer/2022071215/6044cc67301e626f53469e0b/html5/thumbnails/85.jpg)
Open questions
Propagation of pulses
Mechanisms
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Funding: National Science Foundation
Acknowledgments:Prof. Alex Gaeta (Cornell)
Prof. Nico Bloembergen (Harvard)W. Leight
Carl Zeiss, Inc
For a copy of this talk andadditional information, see:
http://mazur-www.harvard.edu