LAM ALLIANCE A6 9600-DFM | PTXConfiguration Datasheet

Tool ID OEM / Model LRC ALLIAMCE A6 9600DFM 9600PTX & STRIP

Serial Number 8987 Process Metal

Vintage 2000 Wafer Size 200MM FLAT

System Configuration

No. Module Configuration (Model, P/N,S/N)

1 S/W TBD

2 TM A6 SERIAL : 8987 VINTAGE : 00/01/11

3 VCE LIP SEAL TYPE

4 ROBOT MAGNATRAN 7 003-1600--27

5 PM-4 M/W SERIAL: STRIP - 204

6 PM-1 M/W SERIAL: STRIP - 203

7 PM-2 9600 DFM SERIAL: 96-608DFM/ Korea

8 PM-3 9600 PTX From Taiwan

9 ALIGNER 001-2980-16 (S/N 0001-10094)

10 COOL PM EXIST

11 USER INTERFACE Monitor, Keyboard, Computer

12 AUX RACK-1 N/A

13 AUX RACK-2 N/A

14 GASBOX Enhenced Analog

15 RPM YES

16 MAIN POWER 200/220VAC 400A 50/60HZ 3PH-5WIRE

17 UPS POWER 200/220VAC 80A 50/60HZ 1PH-3WIRE

18 SIGNAL TOWER 4COLOR (RED,GREEN,YELLOW,BLUE)

19 EMO Push Button

System Configuration (Transfer Module)

No. Description Configuration (Model, P/N,S/N)

1 Transfer Module Type A6 SERIAL : 8987 VINTAGE : 01/11/00

2 VCE Type LIP SEAL TYPE

3 Aligner 001-2980-16 (S/N 0001-10094)

4 Robot MAGNATRAN 7 003-1600-27

5 Arm Type DUAL THIN BLADE

6 User Interface Monitor, Keyboard, Computer

7 Lid Lifter AIR CYLINDER

8 Wafer Detection system STANDARD

9 EMO Hub STANDARD

10 Cable receways STANDARD

11 Facilities Distribution STANDARD

12 PM Slot Valves 853-012200-002

13 Signal Tower 4COLOR (RED,GREEN,YELLOW,BLUE)

14 PRS Gauge-1 (TM) MKS (HPS)109070019CE

15 PRS Gauge-2(RVCE) MKS (HPS)109070019CE

16 PRS Gauge-3 (LVCE) MKS (HPS)109070019CE

System Configuration (PM2)

No. Module Configuration (Model, P/N,S/N)

1 Process Module Type 9600 DFM

2 Serial No SERIAL: F69486 PM2 96-608DFM

3 RF Generator ( Source ) RFDS 660-024637-026 SERIAL: 351625

4 RF Generator ( Bias ) RFG1250 660-024637-028 SERIAL: 250580

5 RF Match ( Source ) 853-032294-003 (RF05687)

6 RF Match ( Bias ) 853-250001-024 (A10014177)

7 Turbo Pump ALCATEL STP-H1300

8 Turbo Pump Controller STP-C1300

9 Throttle Valve VAT 64046-PH52-AET1/0044

10 Throttle Valve Controller PM7

11 CM Gauge-1 ( Process C/B ) MKS E29B-1TDFL58 0.1TORR

12 CM Gauge-1 ( Manifold C/B ) MKS 625A-14059 10TORR

13 CM Gauge-1 ( Foreline ) MKS 623A-22367 10TORR

14 Turbo Bypass Valve MKS 100011745 796-094363-002

15 Turbo Exhaust Valve BOC EDWARDS C41415000 853-001879-001

16 Slot Valve 853-012200-002

17 Endpoint Detector 853-540066-011

18 Cooling He MFC UNIT UPC-8130

19 Cooling He CM

20 ESC 718-094523-003

System Configuration (PM3)

No. Module Configuration (Model, P/N,S/N)

1 Process Module Type 9600 PTX

2 Serial No SERIAL:

3 RF Generator ( Source ) RFDS 660-024637-026 SERIAL: C55195

4 RF Generator ( Bias ) RFG1250 660-024637-028 SERIAL: C599365

5 RF Match ( Source ) 853-330476-002 (A10039723)

6 RF Match ( Bias ) 853-250001-021

7 Turbo Pump STP- H1301L1B

8 Turbo Pump Controller STP- H1301L1B

9 VAT Valve VAT 64046-PH52-AET1/0044

10 VAT Valve Controller PM7

11 CM Gauge-1 ( Process C/B ) MKS E29BUSTDFL5B (000895867) 0.1TORR

12 CM Gauge-1 ( Manifold C/B ) MKS 655A11TDE (000420368) 10TORR

13 CM Gauge-1 ( Foreline ) MKS 623A-22367 10TORR

14 Turbo Bypass Valve MKS 100937702 (0408702191)

15 Turbo Exhaust Valve BOC EDWARDS C41415000

17 Endpoint Detector 853-540066-005

20 ESC 718-094523-282

System Configuration (PM1)

No. Module Configuration (Model, P/N,S/N)

1 Process Module Type M/W

2 Serial No SERIAL: STRIP - 203

3 Control module AS Tex 685-097952-001

4 Inverter module AS Tex 685-097950-001

5 Buss module AS Tex 685-097951-001

6 CPS Applicator AS Tex 790-097959-002

7 VAT VALVE F64-110091/2 64040-PE52-1009

8 VAT CONTROLLER 796-093088-007

9 VAPOR MFC VC-4900VR H20 (1000sccm)

10 Magnetron Head AS Tex 660-097960-001

11 C/B MANOMETER 722A11TCE2FA(10TORR)

722A12TCE2FA(100TORR)

System Configuration (PM4)

No. Module Configuration (Model, P/N,S/N)

1 Process Module Type M/W

2 Serial No SERIAL: STRIP - 204

3 Control module AS Tex 685-097952-001 (FI20051)

4 Inverter module AS Tex 685-097950-001(FI20049)

5 Buss module AS Tex 685-097951-001(FI20050)

6 CPS Applicator AS Tex 790-097959-002(FI10003)

7 VAT VALVE F64-110091/2 64040-PE52-1009/0071 A-224568

8 VAT CONTROLLER 796-093088-007 (641PM-16PM-1009/086)

9 VAPOR MFC VC-4900VR H20 (1000sccm)

10 Magnetron Head AS Tex 660-097960-0001(FI10002)

11 C/B MANOMETER 722A11TCE2FA(10TORR) 000339842

722A12TCE2FA(100TORR)000339422

Tool ID OEM / Model LRC ALLIAMCE A6 9600DFM

Serial Number Process Metal

Vintage Wafer Size 200MM FLAT

TM

Tool ID OEM / Model LRC ALLIAMCE A6 9600DFM

Serial Number Process Metal

Vintage Wafer Size 200MM FLAT

PM2,3

Tool ID OEM / Model LRC ALLIAMCE A6 9600DFM

Serial Number Process Metal

Vintage Wafer Size 200MM FLAT

Tool ID OEM / Model LRC ALLIAMCE A6 9600DFM

Serial Number Process Metal

Vintage Wafer Size 200MM FLAT

PM1,4