kempur microelectronics inc. · 2016. 11. 15. · kempur microelectronics inc. the company was...
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Kempur Microelectronics Inc.
The Company was founded on August 13, 2004 in Tongzhou Beijing. It moved to
the current location in Shunyi District, Beijing Tianzhu Free Trade Zone in August of
2006. Kempur is the only company capable of developing, manufacturing, and
selling advanced IC photoresist in China.
Legal representative: Cindy Chen Economic nature: Joint Venture Company US and China
About Us
Kempur Beijing Site Map
Kempur Beijing Site Map Tianzhu, HQ /R&D/MFG
Fengyuan, Sales Office
Yanshan, MFG
Manufacturing capacity:
•500 ton/year G/I line photoresist
•30 ton/year KrF photoresist
•1000 ton/year photoresist ancillaries.
•300 ton/year polyisoprene photoresist
•1000 ton/year negative photoresist ancillaries.
货物出口
办公入口
Kempur Manufacturing Capacity
KemLab, Inc. was founded in 2012 to fill needs in R&D, engineering, scale-up and custom solutions.
KemLab and Kempur are partnered to serve US and Asian markets.
The partnership allows KemLab to be agile and flexible with the strength of Kempur to solve problems both large and small.
www.KemLab.com [email protected] 254 West Cummings Pk, Woburn, MA 781-281-0174
Partnership: +
2004 2006 2008 2010 2011 2012 2013 2014 2015
First Advanced
I-Line
Production
Line
First KrF
Production
Line
First
Lift-Off
Resist for
IC/LED
Fab
First ArF
Dry Pilot
sample
First I-Line
Resist for
IC- Fab 6
inch
First I-
Line
Resist
for IC-
8” Fab
First KrF
Resist for
8” Fab
First
Internatio
nal Resist
Sales
90 nm 45 nm 65 nm 14 nm 32 nm 22 nm
International Technology Roadmap for Semiconductors
China’s Technology Roadmap for Semiconductors
Kempur’s Technological Achievements
90 nm 28 nm 65 nm 40 nm
Technical Development at Kempur – 8 firsts
ISO 9001 and 14001 Certification
Product Control (Our Product) Example: IC Resist: 5315
Management of Raw Materials
All vendors provide CoA’s
We test all incoming materials to verify they meet
requirements
Logistics department is responsible for planning, ordering and
ensuring sufficient onsite supply of raw materials
Variations from specification are negotiated with vendors
How has the China materials supply chain changed and what
is anticipated for the future?
China is pushing to localize their IC supply chain, and is
focused on reducing the demand on imported materials. It’s
intent is to be able to supply it’s local fabs with domestically
made materials.
We expect to increase the fraction of our raw materials
sourced from local vendors
What do fabs inside China need to do to get better and more
reliable materials in a predictable lead times?
Switch to (or second source) domestic vendors.
产业布局
Shenzhen sales
Suzhou, Warehouse
Beijing, Headquarter
Shenzhen, Sales Office
Anhui Quanjiao, MFG (UC)
Why it is difficult to ship materials to fabs in China, and
what can be done to make this easier? -- This is not an issue
for us (please see next page)
Logistics
Logistics Team that works very closely with purchasing departments to
prepare for any upcoming events that may disturb regular shipments.
e.g. APEC Meeting in Beijing
G20 Summit in Hangzhou
Beijing Olympics
Nanjing Youth Olympics
Internal Quarterly Meetings to discuss possible national events that may
disrupt shipments for certain customers.
Disaster Recovery capabilities
e.g. Tianjin Port closure
We have a localized logistics team with high expertise.
Issues with local suppliers
Although China has a lot of chemical manufacturers,
it is difficult for them to produce electronic grade
materials (The market demand is still small).
There are small institutes and vendors that are
capable of producing electronic grade materials but
most lack the quality control system and engineering
to produce stable batch to batch materials.
What do fabs outside of China need to do to get materials
from a China supplier without interruption?
We consider this doable
We have a partner in the US that can help support demand
there
We have a distributor supporting us in Taiwan
Please describe what you would consider your Supply Chain
risks – short term (6‐12 months) and long term (3‐5 years)
Short Term
Difficult to import new materials into China (Customs
Restrictions)
We use partnership with Kemlab to do some testing of new
materials, where appropriate
Long Term
Geopolitical instability
Finding local vendors to supply electronic grade materials.
KMP CPxxxx Positive tone
Thick Film resist
Kempur Resist Portfolio
10mm FT
1mm FT
100mm FT
50mm FT
25mm FT
5mm FT
2mm FT
0.5mm FT
KrF Resist I line Resist Crossover
Resist
Broadband/
G line
DK
1xxx R
esis
t
seri
es for
L/S
C5xxx,
C6xxx,
C7xxx a
nd
C8xxx
seri
es R
esis
t fo
r L/S
E3xxx s
eri
es N
eg.
Resis
t fo
r Lift off
EP
3xxx s
eries
Pos. R
esis
t off
BN
xxx s
eri
es
Neg. cycliz
ed
rubb
er
resis
t
Permanent
Resist
HA
RE
SQ
Epoxy r
esis
t fo
r
ME
MS
and o
ther
applic
ations
KrF Resists
DK1080 – High
resolution
material for use
on Silicon
DK1087 – Thick
resist for use on
silicon (implants,
metal levels)
DK1088 – Line
and space
material for use
on BARC
DK1086 –
Contact Hole
resist under
development
350nm L/S 300nm L/S 250nm L/S
350nm L/S 300nm L/S 250nm L/S
1um L/S at 3um Film Thickness
400nm C/H 300nm C/H 250nm C/H
I line Resists
C7500 – High
resolution
material for use
on Silicon
C8315 for 1 to 2um
thick resist for good
thermal flow
C6111A1 space
resist
C5315 line and
space resist
0.5um 0.45um 0.4um
1.5um 1.0um 0.75um
1.0um 0.8um 0.6um
4.0um L/S at 5.0um Film Thickness
Lift Off Resists
E3130A – 2 to 5um
material for lift off
applications
E3260 – 5 to 10um
material for lift off
applications
E3175 – 2 to 5um
high resolution
material for lift off
applications
5um 4um 3um
5um 4um 3um
4um 3um 2um
FT: 8um
FT: 3.8um
FT: 3.8um
Broad Band Resists
EP3200A – 1 to
2um thick line
and space
positive resist
EN3120 – x to xx
thick negative tone
resist for high heat
resistance
BN series
cyclized rubber
resist
5um L/S Before HB 5um L/S After 200C HB
4um L/S 2um L/S
Photospeed
60mJ/cm2
2.0um 1.5um 1.0um
Thick Film Resists
CP4000 – TMAH
developable material
for 10 to 25um
thickness applications
HARE SQ epoxy resist
for permanent high
aspect ratio features
Negative tone thick film materials are also under development
CP1000 – TMAH
developable material
for 5 to 10um
thickness applications
25um Post 25um C/H 15um L/S 10um L/S
Logo at 50um Film thickness 5um L/S at 25um Film Thickness
Under development
KemLab Photoresists for i-Line, g-line, & broadband;
designed for use with industry standard 0.26N TMAH
Product Suite Attributes
KL Lift Off 1600 Negative Tone
Negative Lift Off Retrograde profile
2 - 10 mm FT
KL Image Reversal Negative / Positive tone
Lift Off Lift off Profile
1 - 2.5 mm FT
KL 5300 Positive tone
Advanced Photoresist 0 - 2 mm FT
for IC fabrication CD 0.55 mm
KL 6000 Positive tone
Thick Photoresist 2 - 12 mm FT
no PEB required
KL 8000-HR Positive tone
Increased Heat Resistance 0 - 2 mm FT
Increased Heat resistance
Short Term Technology Roadmap
Support new, smaller nodes for KrF resists
Improve packaging resist product line
Develop high heat resistance I line materials
Long Term Roadmap
Expand types of products Kempur produces
Grow sales to export markets
Improve synthetic capability
Research quantities made in house
Partner or other arrangement for supply of materials for new products
that require Kempur developed materials
Explore production of ArF materials
Strength of Our Market
The market for replacement I line and G line resists is large and many
opportunities exist in China
The Chinese KrF and ArF resist market is growing strongly
The overall IC market in China is growing rapidly as new fabs are built
1 new 8” line in 2016
12 new 12” lines in 2016
For cyclized rubber resist, global demand is shrinking but the related
device production is moving to the far east.
There are opportunities for this material in China and Taiwan for Kempur
Our sales have been constrained by supply
New capacity coming on line in 2017
Business Outlook
Kempur’s business outlook is strong
Growing markets in China
Strong interest in locally produced photoresists
Kempur is introducing new materials in response to
this demand
New factory for cyclized rubber coming on line in
2017. Will enable serving more customers