invensense mpu-6050es 3-axis r-1208-901 … · 1.0.0 top level diagram ... 12.1.0 resistor ladder...
TRANSCRIPT
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InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC Circuit Analysis of Analog Blocks Chapter Excerpt - Voltage ReferenceGenerator
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
Overview
Introduction
Brief Design Overview
Component Descriptions
Device Summary
References
Figures To view, please click on the appropriate bookmark in the panel on the left.
0.1.1 Package Markings 0.1.2 Package X-Ray 0.1.3 Pin Configuration 0.1.4 Die Markings 0.2.1 Die Photograph 0.2.2 Annotated Die Photograph 0.2.3 Die Architecture 0.2.4 Block Diagram 0.2.5 Single-Axis Gyroscope Signal Path
Schematics
1.0.0 Top Level Diagram 2.0.0 I/O Interface 2.1.0 Enabled Schmitt Trigger 3.0.0 SDA Interface 3.1.0 Buffer 3.2.0 Enable Generator 4.0.0 Self-Test Accelerometer and Second Order Sigma-Delta ADC 4.1.0 Latch 4.2.0 1 Bit DAC B 4.3.0 1 Bit DAC 4.4.0 Amplifier 4 4.5.0 Amplifier 3 4.6.0 Amplifier 2 4.7.0 Variable Capacitor Feedback 4.8.0 Variable Capacitor Feedback Controller
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
4.9.0 Reference Generator 4.10.0 Data Path Selector 5x 4.10.1 Data Path Selector 4.11.0 Clock 4.11.1 Nonoverlapping Clock Generator 2 4.11.2 Counter 4.11.3 Clock Selector 4.11.4 Latch 4.12.0 Level Shifter 4.13.0 Integrator 4.13.1 Amplifier 4.13.2 Buffer 4.13.3 Bias Reference 4.13.4 Variable Capacitor Feedback Controller 4.13.5 Variable Capacitor Feedback 4.14.0 Switch Capacitor Control 4.15.0 Data Path Selector 3x 5.0.0 SCL Interface 6.0.0 I/O Interface 7.0.0 Self-Test Accelerometer and Second Order Sigma-Delta ADC 7.1.0 Clock 7.1.1 Nonoverlapping Clock Generator 1 7.2.0 Integrator 7.2.1 Variable Capacitor Feedback Controller 7.2.2 Variable Capacitor Feedback 7.3.0 Data Path Selector 3x 8.0.0 Clock Data Interface 9.0.0 Single-Axis Gyroscope Signal Path 9.1.0 Second Order Sigma-Delta ADC 9.1.1 1 Bit DAC 9.1.2 1 Bit DAC 9.1.3 Latch 9.1.4 Latch 9.1.5 Comparator 9.1.6 Amplifier
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
9.1.7 Reference Generator Amplifier 9.1.8 Amplifier 9.1.9 ADC Clock 9.1.9.1 Integrator Switch Clock 9.1.9.2 VIN Switch Clock 9.1.9.3 Voltage Reference Generator Clock 9.2.0 Anti-Aliasing Filter 9.2.1 AAF Bias Generator 9.2.2 Switch Control 9.2.3 Switch Control 9.2.3.1 Decoder (3-to-8 Bit) 9.2.4 Feedback Amplifier 9.2.5 AAF Integrator Amplifier 9.2.6 AAF Integrator Amplifier 2 9.2.7 Feedback Amplifier 2 9.2.8 AAF Integrator Amplifier Type 2 9.2.9 Feedback Amplifier Type 2 9.3.0 Demodulator 1 9.3.1 Switch 9.3.2 Switch Control 9.3.2.1 Decoder (3-to-8 Bit) 9.3.3 Buffer 1 9.3.4 Bias Generator 9.3.5 Buffer 2 9.4.0 Coriolis Sense Amplifier 9.4.1 Variable Feedback Capacitor 9.4.2 Switch 9.4.3 Switch Control 9.4.3.1 Decoder (3-to-8 Bit) 9.4.4 Integrator Amplifier 9.4.4.1 Variable Compensation Capacitor 2 9.4.4.2 Variable Compensation Capacitor 1 9.4.5 Feedback Amplifier 9.4.6 Integrator 1 Bias 9.4.7 Subthreshold MOSFET Bias 9.4.8 Capacitor Switch Control 9.4.9 Voltage Reference Generator 9.4.9.1 Amplifier 9.5.0 Sense Amplifier 9.5.1 Switch
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
9.5.2 Switch 9.5.3 Switch 9.5.4 Switch Control 9.5.4.1 Decoder (3-to-8 Bit) 9.5.5 Switch 9.5.6 Variable Feedback Capacitor 9.5.7 Subthreshold MOSFET Bias 9.5.8 Integrator 2 Bias 9.5.9 Feedback Amplifier 9.5.10 Sense Amplifier 9.5.10.1 Variable Compensation Capacitor 1 9.5.10.2 Variable Compensation Capacitor 2 9.5.11 Capacitor Switch Control 9.5.12 Voltage Reference Generator 9.5.12.1 Amplifier 9.6.0 Feedthrough Cancellation 9.7.0 Amplitude Control 9.7.1 Buffer 9.7.2 Buffer 9.7.3 Data Switch 9.7.4 Switch 9.7.5 Counter 9.7.6 Amplifier 9.7.7 Amplifier 9.7.8 Amplifier 9.7.9 Amplifier 9.7.10 Comparator 9.7.11 Variable RC Feedback 9.7.12 Amplitude Switch Control 9.8.0 Shutdown Interface 9.9.0 Clock Divider 9.10.0 Drive Loop Data Interface 9.11.0 Bias Generator 9.12.0 Bias Generator 9.13.0 Shutdown Control Interface 9.14.0 Level Shifter 9.15.0 Quadrature Sine Wave Oscillator 9.15.1 5 Bit Decoder 9.15.2 Resistor Ladder (32 Bit) 9.15.3 Amplifier
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
9.15.4 Amplifier 9.15.5 Bias Generator 9.15.6 Switch 9.15.7 Amplifier 9.15.8 Variable Feedback Capacitor 9.15.9 Variable Capacitor Feedback Controller 9.15.10 Amplifier 10.0.0 Self-Test Accelerometer and Second Order Sigma-Delta ADC 10.1.0 Integrator 10.1.1 Variable Capacitor Feedback 10.2.0 Data Path Selector 5x 10.3.0 Data Path Selector 3x 10.3.1 Data Path selector 10.4.0 1 Bit DAC 11.0.0 VLOGIC Interface and ESD 12.0.0 Reference Generator and Temperature Sensor 12.1.0 Resistor Ladder (16 Bit) 12.2.0 4 Bit Decoder 12.3.0 Bias Generator 12.4.0 Level Shifter 12.5.0 Buffer 12.6.0 Buffer 12.7.0 Buffer 12.8.0 Buffer 12.9.0 Bias Generator 12.10.0 Bias Generator 12.11.0 Control Interface 12.12.0 Amplifier 12.13.0 Amplifier 12.14.0 Voltage Reference Generator 12.14.1 Amplifier 12.15.0 Regulator 12.15.1 Level Shifter 12.15.2 Level Shifter 12.15.3 Amplifier 12.15.4 Amplifier 12.16.0 Bias Generator
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
12.16.1 Variable Bias Generator 1 12.16.2 Variable Bias Generator 2 12.16.3 Voltage Reference Generator 2 12.16.3.1 Amplifier 13.0.0 Charge Pump with Clock Input Control 13.1.0 Bias Generator 13.2.0 Buffer 13.3.0 Charge Pump 13.4.0 Clock Data Interface 13.5.0 Internal Bypass Capacitor Selector 13.6.0 Amplifier 13.7.0 Clocked Comparator 13.7.1 Nonoverlapping Clock Generator 13.8.0 Clock Divider 13.9.0 Counter 13.10.0 Local Oscillator 14.0.0 SAR ADC (12 Bit) 14.1.0 Buffer 14.2.0 Comparator with Sample-and-Hold 14.2.1 Comparator 14.2.2 Amplifier 14.3.0 Counter 14.3.1 S/R Latch 14.4.0 SAR Control 14.5.0 Successive Approximation Register 14.6.0 DAC (12 Bit) 14.6.1 Resistor Ladder 2 14.6.2 Resistor Ladder 1a 14.6.3 Resistor Ladder 1b 14.6.4 Resistor Ladder 1c 14.6.5 Resistor Ladder 1d 14.6.6 Resistor Ladder 1e 14.6.7 Resistor Ladder 1f 14.6.8 Resistor Ladder 1g 14.6.9 Resistor Ladder 1h
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
15.0.0 I/O Interface 16.0.0 Charge Pump Supply Enable 16.1.0 ESD Protection 17.0.0 Bandgap Voltage and Current Reference 17.1.0 Voltage Reference Generator 17.2.0 Bandgap Reference Generator 18.0.0 Voltage Reference Generator 18.1.0 Amplifier 18.2.0 Bias Generator 18.3.0 Amplifier 18.4.0 Bias Generator 18.5.0 Amplifier 18.6.0 Charge Pump 18.7.0 Clock Divider 18.8.0 Buffer 18.9.0 Switch 18.10.0 Amplifier 18.11.0 Bias Generator 19.0.0 Switch 20.0.0 Output Interface 20.1.0 Enabled Schmitt Trigger 21.0.0 I/O Interface 21.1.0 Schmitt Trigger 21.2.0 Tri-State Buffer with Level Shifter 22.0.0 Clock Generator Subset 22.1.0 Nonoverlapping Clock Generator Interface 22.2.0 Core Logic Clock Interface 22.2.1 Core Clock Frequency Divider 1 22.2.2 Core Clock Frequency Divider 2 22.2.3 Nonoverlapping Clock Generator 22.2.4 Level Shifter
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
22.2.5 Temperature Sensor with Hysteresis Feedback 22.2.5.1 Amplifier 22.2.6 Bias Generator 27.0.0 Clock Circuitry 27.1.0 Control Logic 27.1.1 S/R Generator Counter 27.1.2 Digital Logic 27.1.3 Digital Logic 27.1.4 S/R Clock Divider 27.2.0 Level Shifter 27.3.0 Clock Divider 27.3.1 Combinational Logic 27.3.2 Combinational Logic 27.3.3 Combinational Logic 27.3.4 Combinational Logic 27.3.5 Combinational Logic 27.3.6 Clock Divider 27.3.7 Combinational Logic 27.4.0 Output Routing Stage 27.6.0 Unused Transistors 27.7.0 Clock Source Selector 27.7.1 PDF Clock Selector Control Logic 27.7.2 Decoder 27.8.0 Combinational Logic 27.8.1 Digital Logic 27.8.2 Control Logic 27.9.0 Clock Switch 27.10.0 Clock Switching Interrupt Generator 27.10.1 Combinational Logic 27.10.2 Combinational Logic 27.10.3 Combinational Logic 27.10.4 Combinational Logic 27.10.5 Combinational Logic 27.10.6 Combinational Logic 27.10.7 Combinational Logic 27.11.0 Clock Generator 27.11.1 Clock Divider 27.11.2 Variable Bias Current Generator with Controller
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
27.11.3 Relaxation Oscillator 27.11.3.1 Double-Ended Differential Amplifier 27.11.3.2 Double-Ended Differential Amplifier 27.11.3.3 Single-Ended Differential Amplifier 27.11.3.4 Single-Ended Differential Amplifier 27.11.4 Phase-Locked Loop 27.11.4.1 Bias Generator 27.11.4.2 Charge Pump 27.11.4.3 Loop Filter 27.11.4.4 Phase Frequency Detector 27.11.4.5 Voltage Controlled Oscillator 27.11.4.5.1 Variable Bias Generator 27.11.4.5.2 Level Shifter 27.11.4.6 S/R Generator Counter 27.12.0 CLKIN Interface 27.12.1 Control Logic 27.12.2 Clock Divider 27.13.0 I/O Interface 27.14.0 Clock Divider 27.15.0 AN_HJ_OSC_2 28.0.0 OTP Memory Block 28.1.0 OTP Memory 28.1.1 Dummy Cell 28.1.2 Dummy Cell 28.1.3 Memory Select Switch 28.1.4 OTP Memory 28.1.5 Memory Select Switch 28.1.6 OTP Memory 28.1.7 OTP Memory 28.1.8 Memory Select Switch 28.1.9 OTP Memory 28.1.10 OTP Memory 28.1.11 OTP Memory 28.1.12 OTP Memory 28.1.13 OTP Memory 28.1.14 OTP Memory 28.1.15 OTP Memory 28.1.16 Memory Select Switch 28.1.17 OTP Memory
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
28.1.18 OTP Memory 28.1.19 OTP Memory 28.1.20 OTP Memory 28.1.21 OTP Memory 28.1.22 Memory Select Switch 28.1.23 Memory Select Switch 28.1.24 OTP Memory 28.2.0 OTP Memory Controller 28.2.1 Level Shifter 28.2.2 Decoder 28.2.3 Level Shifter 28.2.4 Decoder 28.2.5 Decoder 28.2.6 Combinational Logic 28.2.7 Combinational Logic 30.0.0 Single-Axis Gyroscope Signal Path 30.1.0 Second Order Sigma-Delta ADC 30.1.1 1 Bit DAC 30.1.2 ADC Clock 30.1.2.1 VIN Switch Clock 30.1.2.2 Integrator Switch Clock 30.2.0 Quadrature Sine Wave Oscillator 30.2.1 Amplifier 30.2.2 Resistor Ladder (32 Bit) 30.3.0 Sense Amplifier 30.3.1 Variable Feedback Capacitor 30.3.2 Sense Amplifier 30.3.2.1 Variable Compensation Capacitor 2 30.3.2.2 Variable Compensation Capacitor 1 30.4.0 Anti-Aliasing Filter 30.5.0 Demodulator 1 30.6.0 Coriolis Sense Amplifier 30.6.1 Integrator Amplifier 30.6.2 Capacitor Switch Control 30.7.0 Amplitude Control 30.7.1 Amplifier 30.7.2 Amplifier 30.7.3 Variable RC Feedback 30.7.4 Buffer
InvenSense MPU-6050ES 3-Axis Gyro/Accelerometer ASIC
30.7.5 Buffer 30.8.0 Bias Generator 30.9.0 Bias Generator 30.10.0 Shutdown Control Interface 30.11.0 Level Shifter 30.12.0 Drive Loop Data Interface 31.0.0 Single-Axis Gyroscope Signal Path 31.1.0 Second Order Sigma-Delta ADC 31.1.1 1 Bit DAC 31.1.2 Amplifier 31.2.0 Quadrature Sine Wave Oscillator 31.2.1 Amplifier 31.2.2 Resistor Ladder (32 Bit) 31.3.0 Sense Amplifier 31.4.0 Anti-Aliasing Filter 31.5.0 Demodulator 1 31.6.0 Coriolis Sense Amplifier 31.7.0 Amplitude Control 31.7.1 Variable RC Feedback 31.7.2 Amplitude Switch Control 31.8.0 Bias Generator 31.9.0 Bias Generator 31.10.0 Shutdown Control Interface 31.11.0 Drive Loop Data Interface
Cell Library
About Chipworks
BIA
S1
BIA
S2
NINV
SD
OUT
18.8.0 Buffer
MI353INV
ENP
18.9.0 Switch
MI354
Z1 Z2
SDSD2
IREF
BREF1
BREF4BREF3
BA
MP
4B
AM
P3
BA
MP
1
BP
2B
P1
BA
MP
2
BREF2
18.11.0 Bias generator
MI357
C1320NMOSCAParea=1.148n
C1321NMOSCAParea=0.394n
C1322NMOSCAParea=0.297n
R1323
sq=0.745kRPOLY
R1335
sq=0.745kRPOLY
R1345
sq=0.745kRPOLY
R13
24
sq=9
57.0
RP
OLY
R13
33
sq=9
57.0
RP
OLY
R13
39
sq=9
57.0
RP
OLY
C1346NMOSCAParea=0.21n
R15
16
sq=2
.509
kR
PO
LY
R1517
sq=0.627kRPOLY
V1G_AND22_14_9
X2632
V1G_INV_14_7
X3188
V1G_INV_14_7
X3359
X2840
V1G_OR3_14_7B
P2
BP
1
INV
NINVSD
OUT
18.1.0 Amplifier
MI343
BP
2B
P1
INV
NINVSD
OUT
18.3.0 Amplifier
MI345
IREFSD
BP1BP2
BREF1BREF2BREF3BREF4
18.4.0 Bias generator
MI346
VPP2
SD
N
INV BIA
S
NINV
SD
OUT
18.5.0 Amplifier
MI347
CDNCK VPP2
18.6.0 Charge pump
MI350
CDNCK
SDSDN
18.7.0 Clock divider
MI352
BIA
SB
P2
BP
1
INV
NINVSD2
OUT
18.10.0 Amplifier
MI355
GNDGNDGND
GND
GND
GND
GND
GND
IREFSD
BP1BP2
BREF1BREF2BREF3BREF4
18.2.0 Bias generator
MI344
CDNCTL3CDNCTL2CDNCTL1
SDCTL<4>
BREF23
BREF32
BREF11
LSUPPBUFENA
SD4
CK
LSUPPBUF
SD2
SD3
LSUPP
LGCSUP2
LGCSUP
LSUPP2
BREF24
BREF22BREF21
BREF14
BREF12BREF13
BREF33BREF34
BREF31
VBG1N3
VBG1N2
VBG1N1
BUFVREF24
Note: Device sizes in microns (as measured from images) Device Type:InvenSense MPU-6050ES
Copyright (C) 2012 Chipworks Incorporated
18.0.0 Voltage Reference GeneratorDie Markings:
Date Code:
3-Axis Gyro/Accelerometer ASICMANTIS-B3 <InvenSense logo>REV.B.3 2011 CC1129Template: dsheetp
N16621.00u/8.00u
m=6
GN
D
R13
41
sq=0
.525
kR
PO
LYR
1338
sq=4
6.4
RP
OLY
P16
30
m=4
1.00
u/2.
00u
P16
31
m=4
1.00
u/2.
00u
P16
28
m=8
1.50
u/1.
00u
N16
381.
00u/
8.00
um
=8
N16
391.
00u/
8.00
um
=8
N16
631.
00u/
8.00
um
=2
N16462.00u/8.00u
m=1
N16
472.
00u/
8.00
um
=1
N16
481.
50u/
2.00
um
=1
N16
512.
00u/
1.00
um
=2
N16
492.
00u/
1.00
um
=2
N16
502.
00u/
1.00
um
=2
N16
521.
50u/
1.00
um
=3N
1664
2.00
u/1.
00u
m=2
GN
DG
ND
GN
DG
ND
GN
DG
ND
GN
D
GN
D
GN
D
P16
55
m=2
1.60
u/1.
00u
N16
54A
1.50
u/1.
00u
m=1
P16
34
m=2
2.00
u/1.
00u
P16
35
m=2
2.00
u/1.
00u
P16
36
m=2
2.00
u/1.
00u
P16
37
m=2
2.00
u/1.
00u
P16
58
m=2
2.00
u/1.
00u
P16
21
m=8
8.00
u/8.
00u
P16
22
m=2
8.00
u/8.
00u
P16
25
m=1
2.00
u/0.
18u
P16
26
m=2
4.00
u/8.
00u
P16
27
m=2
4.00
u/8.
00u
P16
23
m=1
61.
50u/
1.00
u
P16
24
m=4
1.50
u/1.
00u
P16
29
m=4
1.50
u/1.
00u
N16
531.
50u/
1.00
um
=1
P16
72
m=2
8.00
u/8.
00u
C1681METALCAParea=0.994n
V1G
_IN
V_1
4_7
X56
00
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
SD
BP
1
BP
2
OU
T
NIN
VIN
V
Not
e: D
evic
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in m
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Am
plifi
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Dat
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(C) 2
012
Chi
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corp
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heet
Tem
plat
e:
R13
43
sq=3
2.8
RP
OLY
R13
44
sq=3
2.8
RP
OLY
P16
79
m=4
8.00
u/8.
00u
GN
D
R13
42
sq=0
.262
kR
PO
LY
P16
56
m=2
2.00
u/1.
00u
P16
57
m=2
2.00
u/1.
00u
P16
59
m=2
2.00
u/1.
00u
P16
60
m=2
2.00
u/1.
00u
P16
61
m=2
2.00
u/1.
00u
P16
74
m=2
2.00
u/1.
00u
P16
75
m=2
2.00
u/1.
00u
P16
76
m=2
2.00
u/1.
00u
P16
20
m=1
4.00
u/0.
60u
P16
67
m=4
8.00
u/8.
00u
P16
68
m=4
8.00
u/8.
00u
P16
69
m=4
8.00
u/8.
00u
P16
70
m=4
8.00
u/8.
00u
P16
71
m=4
8.00
u/8.
00u
P16
73
m=4
8.00
u/8.
00u
P16
77
m=2
8.00
u/8.
00u
P16
78
m=2
8.00
u/8.
00u
X65
27
V1G
_BU
F2_1
5_7
X7211
VSG_TRIGATE_40L6X3_40L6
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
BR
EF3
SD
BP
1
BP
2
BR
EF4
BR
EF2
BR
EF1
IRE
FUnused
Not
e: D
evic
e si
zes
in m
icro
ns (a
s m
easu
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from
imag
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Dev
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Type
:In
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MP
U-6
050E
S
Cop
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) 201
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hipw
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Inco
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18.2
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ias
Gen
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arki
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Dat
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3-A
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AS
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201
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C11
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mpl
ate:
bshe
et
N16002.00u/8.00u
m=1
GN
D
P15
84
m=4
1.00
u/2.
00u
P15
85
m=4
1.00
u/2.
00u
N15
701.
00u/
8.00
um
=2
N15
921.
00u/
8.00
um
=8
N15
931.
00u/
8.00
um
=8
N16
012.
00u/
8.00
um
=1
N16
021.
50u/
2.00
um
=1
N15691.00u/8.00u
m=6
GN
DG
ND
GN
DG
ND
GN
DG
ND
GN
D
R13
30
sq=0
.525
kR
PO
LYR
1337
sq=4
6.4
RP
OLY
P16
09
m=2
1.60
u/1.
00u
N16
08A
1.50
u/1.
00u
m=1
P15
62
m=2
2.00
u/1.
00u
P15
88
m=2
2.00
u/1.
00u
P15
89
m=2
2.00
u/1.
00u
P15
90
m=2
2.00
u/1.
00u
P15
91
m=2
2.00
u/1.
00u
P15
75
m=8
8.00
u/8.
00u
P15
76
m=2
8.00
u/8.
00u
P15
79
m=1
2.00
u/0.
18u
P15
80
m=2
4.00
u/8.
00u
P15
81
m=2
4.00
u/8.
00u
P15
77
m=1
61.
50u/
1.00
u
P15
78
m=4
1.50
u/1.
00u
P15
82
m=8
1.50
u/1.
00u
P15
83
m=4
1.50
u/1.
00u
N16
052.
00u/
1.00
um
=2
N16
032.
00u/
1.00
um
=2
N16
042.
00u/
1.00
um
=2
N16
071.
50u/
1.00
um
=1
N16
061.
50u/
1.00
um
=3N
1571
2.00
u/1.
00u
m=2
P16
15
m=2
8.00
u/8.
00u
C1680METALCAParea=0.994n
V1G
_IN
V_1
4_7
X56
11
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
GN
D
GN
D
VD
D1
SD
OU
T
BP
1
BP
2
NIN
VIN
V
Not
e: D
evic
e si
zes
in m
icro
ns (a
s m
easu
red
from
imag
es)
Dev
ice
Type
:In
venS
ense
MP
U-6
050E
S18
.3.0
Am
plifi
erD
ie M
arki
ngs:
Dat
e C
ode:
3-A
xis
Gyr
o/A
ccel
erom
eter
AS
ICM
AN
TIS
-B3
<Inv
enS
ense
logo
>R
EV
.B.3
201
1 C
C11
29C
opyr
ight
(C) 2
012
Chi
pwor
ks In
corp
orat
edcs
heet
Tem
plat
e:
R13
32
sq=3
2.8
RP
OLY
R13
36
sq=3
2.8
RP
OLY
R13
31
sq=0
.262
kR
PO
LY
P15
60
m=2
2.00
u/1.
00u
P15
61
m=2
2.00
u/1.
00u
P15
63
m=2
2.00
u/1.
00u
P15
64
m=2
2.00
u/1.
00u
P15
65
m=2
2.00
u/1.
00u
P15
66
m=2
2.00
u/1.
00u
P15
67
m=2
2.00
u/1.
00u
P15
68
m=2
2.00
u/1.
00u
P15
74
m=1
4.00
u/0.
60u
P16
10
m=4
8.00
u/8.
00u
P16
11
m=4
8.00
u/8.
00u
P16
12
m=4
8.00
u/8.
00u
P16
13
m=4
8.00
u/8.
00u
P16
14
m=4
8.00
u/8.
00u
P16
16
m=4
8.00
u/8.
00u
P16
19
m=4
8.00
u/8.
00u
P16
17
m=2
8.00
u/8.
00u
P16
18
m=2
8.00
u/8.
00u
X65
26
V1G
_BU
F2_1
5_7
X7210
VSG_TRIGATE_40L6X3_40L6
GN
D
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
BR
EF1
SD
BP
1
BP
2
BR
EF4
BR
EF2
BR
EF3
IRE
F
Unused
Not
e: D
evic
e si
zes
in m
icro
ns (a
s m
easu
red
from
imag
es)
Dev
ice
Type
:In
venS
ense
MP
U-6
050E
S
Cop
yrig
ht (C
) 201
2 C
hipw
orks
Inco
rpor
ated
18.4
.0 B
ias
Gen
erat
orD
ie M
arki
ngs:
Dat
e C
ode:
3-A
xis
Gyr
o/A
ccel
erom
eter
AS
ICM
AN
TIS
-B3
<Inv
enS
ense
logo
>R
EV
.B.3
201
1 C
C11
29Te
mpl
ate:
bshe
et
VPP2
VPP2
VPP2
VPP2
N15
254.
20u/
0.60
um
=1
N15
314.
20u/
0.60
um
=1
N15
324.
20u/
0.60
um
=1
GN
DG
ND
GN
D
GN
DG
ND
R15
18
sq=6
7.2
RP
OLY
P15
21
m=3
4.00
u/0.
60u
N15
244.
20u/
0.60
um
=1
N15
261.
60u/
4.00
um
=4
N15
281.
60u/
4.00
um
=4
N15
291.
60u/
4.00
um
=4
N15
271.
60u/
4.00
um
=2
N15
301.
60u/
4.00
um
=8
P15
33
m=6
4.00
u/4.
00u
P15
34
m=6
4.00
u/4.
00u
C1547METALCAParea=1.468n
P15
53
m=1
4.00
u/0.
60u
P15
54
m=6
4.00
u/8.
00u
P15
55
m=2
44.
00u/
8.00
uP
1556
m=3
64.
00u/
8.00
u
C1557METALCAParea=1.26n
X72
77
V1V
SG
_IN
VD
IF_2
0L5_
60L6
LS
GN
DG
ND
GN
D
SD
N
SD
OU
T
BIA
S
NIN
V
VP
P2
INV
Not
e: D
evic
e si
zes
in m
icro
ns (a
s m
easu
red
from
imag
es)
Dev
ice
Type
:In
venS
ense
MP
U-6
050E
S
Cop
yrig
ht (C
) 201
2 C
hipw
orks
Inco
rpor
ated
18.5
.0 A
mpl
ifier
Die
Mar
king
s:
Dat
e C
ode:
3-A
xis
Gyr
o/A
ccel
erom
eter
AS
ICM
AN
TIS
-B3
<Inv
enS
ense
logo
>R
EV
.B.3
201
1 C
C11
29Te
mpl
ate:
bshe
et
N15696A1.40u/0.60um=1
N15697A1.40u/0.60u
m=1
V1G
_AN
D22
_14_
9
X15
56X
1455
V1G
_BU
FSE
R_1
4_9D
16
2 of
4 ...
X15
37
V1G
_BU
FSE
R_1
4_9D
16
2 of
4 ...
X15
57
V1G
_NA
ND
2_14
_9
VD
D
C13
17N
MO
SC
AP
area
=6.0
6n
C13
18N
MO
SC
AP
area
=0.2
02n
C13
19N
MO
SC
AP
area
=0.1
62n
R15
15
sq=2
2.4
RP
OLY
R15
19
sq=2
2.4
RP
OLY
C15
20N
MO
SC
AP
area
=2.0
n
C15
41M
ETA
LCA
Par
ea=4
.56n
C15
42M
ETA
LCA
Par
ea=2
.555
n
C15
43M
ETA
LCA
Par
ea=0
.192
n
C15
44M
ETA
LCA
Par
ea=3
.809
n
C15
52N
MO
SC
AP
area
=0.8
n
C15
58M
ETA
LCA
Par
ea=3
.864
n
C15
59M
ETA
LCA
Par
ea=7
.2n
C30
70N
MO
SC
AP
area
=0.1
6n
N15
693A
1.40
u/0.
60u
m=1
N15
695A
1.40
u/0.
60u
m=1
P15698
m=16.00u/0.50u
P15699
m=16.00u/0.50u
P15
700
m=1
6.00
u/0.
50u
P15
701
m=1
6.00
u/0.
50u
GN
DG
ND
GN
DG
ND
GN
DG
ND
GN
DG
ND
GN
DG
NDG
ND
VD
D
CK
CD
N
VP
P2
Unused
Not
e: D
evic
e si
zes
in m
icro
ns (a
s m
easu
red
from
imag
es)
Dev
ice
Type
:In
venS
ense
MP
U-6
050E
S18
.6.0
Cha
rge
Pum
pD
ie M
arki
ngs:
Dat
e C
ode:
3-A
xis
Gyr
o/A
ccel
erom
eter
AS
ICM
AN
TIS
-B3
<Inv
enS
ense
logo
>R
EV
.B.3
201
1 C
C11
29C
opyr
ight
(C) 2
012
Chi
pwor
ks In
corp
orat
edcs
heet
Tem
plat
e:
V1G
_AN
D22
_14_
9
X26
02
X29
84
V1G
_OR
2_14
_7
V1G
_DFC
_14_
9
X63
6
Q
QN
CP
D CD
NDFF
V1G
_IN
V_1
4_7
X32
26
V1G
_IN
V_1
4_7
X34
16
V1G
_DFC
_14_
9
X63
8
Q
QN
CP
D CD
NDFF
V1G
_DFC
_14_
9
X66
3
Q
QN
CP
D CD
NDFF
V1G
_DFC
_14_
9
X66
4
Q
QN
CP
D CD
NDFF
V1G
_DFC
_14_
9
X66
5
Q
QN
CP
D CD
NDFF
V1G
_DFC
_14_
9
X66
8
Q
QN
CP
D CD
NDFF
V1G
_DFC
_14_
9
X67
2
Q
QN
CP
D CD
NDFF
ZN
SE
GC
OR
E01
S3
X24
44
X23
537
V1G
_BU
F2_1
4_9
SD
NS
D
CK
CD
N
Not
e: D
evic
e si
zes
in m
icro
ns (a
s m
easu
red
from
imag
es)
Dev
ice
Type
:In
venS
ense
MP
U-6
050E
S18
.7.0
Clo
ck D
ivid
erD
ie M
arki
ngs:
Dat
e C
ode:
3-A
xis
Gyr
o/A
ccel
erom
eter
AS
ICM
AN
TIS
-B3
<Inv
enS
ense
logo
>R
EV
.B.3
201
1 C
C11
29C
opyr
ight
(C) 2
012
Chi
pwor
ks In
corp
orat
edcs
heet
Tem
plat
e:
VDD1!
VDD1! VDD1!
VDD1! VDD1!
VDD1! VDD1!
VDD1! VDD1!
VDD1!
VDD1!
VDD1!
GND!GND!
GND!
GND!GND!
GND!GND!
GND!GND!
GND!GND!
GND!
GND!GND!
GND!GND!
GND!
GND!
GND!
GND!
GND!
P14
13
m=3
2.00
u/0.
18u
P14
14
m=1
82.
00u/
4.00
uP
1417
m=1
2.00
u/4.
00u
P14
18
m=1
2.00
u/4.
00u
P14
19
m=1
2.00
u/4.
00u
P14
20
m=4
4.00
u/0.
18u
P14
21
4.00
u/0.
50u
m=8
P14
22
4.00
u/0.
50u
m=8
P14
40
4.00
u/0.
50u
m=8
P14
41
4.00
u/0.
50u
m=8
P14
29
m=1
4.00
u/1.
00u
P14
30
m=1
4.00
u/1.
00u
P14
39
m=1
4.00
u/1.
00u
P14
56
m=1
1.80
u/1.
00u
P14
57
m=1
1.00
u/1.
00u
N14
704.
00u/
0.30
um
=4
N14
714.
00u/
8.00
um
=8
N14
724.
00u/
8.00
um
=8
N14
884.
00u/
8.00
um
=2
N14
894.
00u/
8.00
um
=1
N14
914.
00u/
8.00
um
=1
N14
874.
00u/
0.30
um
=6
N14
920.
50u/
1.00
um
=1
N14
940.
50u/
1.00
um
=1
N14
930.
50u/
8.00
um
=1
N14
954.
00u/
0.30
um
=2
N14
962.
00u/
0.18
um
=2
N14
971.
00u/
0.18
um
=1
N14
981.
00u/
0.18
um
=1
N14
992.
00u/
0.50
um
=8
N15
002.
00u/
0.50
um
=8P
1416
m=2
2.00
u/0.
18u
P18
607
m=1
1.20
u/0.
18u
V1G
_IN
V_9
_6
X67
42 D OE
Z
V1G_DATAOUT_14_7D2
X825
VD
D1
VD
D1
GN
DG
ND
GN
DG
ND
GN
D
GN
D
GN
D
VD
D1
SD
OU
T
BIA
S1
BIA
S2
NIN
V
Unused
Unused
Not
e: D
evic
e si
zes
in m
icro
ns (a
s m
easu
red
from
imag
es)
Dev
ice
Type
:In
venS
ense
MP
U-6
050E
S18
.8.0
Buf
fer
Die
Mar
king
s:
Dat
e C
ode:
3-A
xis
Gyr
o/A
ccel
erom
eter
AS
ICM
AN
TIS
-B3
<Inv
enS
ense
logo
>R
EV
.B.3
201
1 C
C11
29C
opyr
ight
(C) 2
012
Chi
pwor
ks In
corp
orat
edcs
heet
Tem
plat
e:
P1461
m=163.00u/0.18u
P1463
m=163.00u/0.18u
N1466A1.50u/0.18um=12
N1467A1.50u/0.18um=12
X64
59
V1G
_BU
FF_2
0_10
EN
P
Z2Z1
Not
e: D
evic
e si
zes
in m
icro
ns (a
s m
easu
red
from
pho
togr
aphs
)D
evic
e Ty
pe:
Inve
nSen
se M
PU
-605
0ES
Cop
yrig
ht (C
) 200
8 C
hipw
orks
Inco
rpor
ated
18.9
.0 S
witc
h
Die
Mar
king
s:
Dat
e C
ode:
3-A
xis
Gyr
o/A
ccel
erom
eter
AS
ICM
AN
TIS
-B3
<Inv
enS
ense
logo
>R
EV
.B.3
201
1 C
C11
29Te
mpl
ate:
ashe
et
R13
26
sq=3
2.8
RP
OLY
R13
29
sq=3
2.8
RP
OLY
R13
28
sq=0
.525
kR
PO
LY
R13
47
sq=4
6.4
RP
OLY
P13
48
m=2
1.60
u/1.
00u
N13
49A
1.50
u/1.
00u
m=1
P13
50
m=4
1.00
u/2.
00u
P13
51
m=4
1.00
u/2.
00u
P13
54
m=2
2.00
u/1.
00u
P13
55
m=2
2.00
u/1.
00u
P13
56
m=2
2.00
u/1.
00u
P13
57
m=2
2.00
u/1.
00u
P13
58
m=8
8.00
u/8.
00u
P13
59
m=2
8.00
u/8.
00u
P13
60
m=1
2.00
u/0.
18u
P13
61
m=2
4.00
u/8.
00u
P13
62
m=2
4.00
u/8.
00u
P13
64
m=4
1.50
u/1.
00u
P13
65
m=8
1.50
u/1.
00u
P13
66
m=4
1.50
u/1.
00u
N13
681.
00u/
8.00
um
=8
N13
691.
00u/
8.00
um
=8
N14
011.
00u/
8.00
um
=2
N13762.00u/8.00u
m=1
N13
772.
00u/
8.00
um
=1
N13
781.
50u/
2.00
um
=1
N13
882.
00u/
1.00
um
=2
N13
892.
00u/
1.00
um
=2
N13
902.
00u/
1.00
um
=2
N13
911.
50u/
1.00
um
=1
C1393METALCAParea=0.994n
N13
982.
00u/
1.00
um
=2
N14021.00u/8.00u
m=6
P14
12
m=4
8.00
u/8.
00u
V1G
_IN
V_1
4_7
X56
09
GN
DG
ND
GN
D
VD
D1
GN
D
VD
D1
GN
DG
ND
GN
DG
ND
GN
D
GN
D
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
P13
63
m=1
61.
50u/
1.00
u
N13
921.
50u/
1.00
um
=3 GN
D
VD
D1
SD
2B
P1
BP
2
OU
T
NIN
V
BIA
S
INV
Unused
Not
e: D
evic
e si
zes
in m
icro
ns (a
s m
easu
red
from
imag
es)
Dev
ice
Type
:In
venS
ense
MP
U-6
050E
S18
.10.
0 A
mpl
ifier
Die
Mar
king
s:
Dat
e C
ode:
3-A
xis
Gyr
o/A
ccel
erom
eter
AS
ICM
AN
TIS
-B3
<Inv
enS
ense
logo
>R
EV
.B.3
201
1 C
C11
29C
opyr
ight
(C) 2
012
Chi
pwor
ks In
corp
orat
edcs
heet
Tem
plat
e:
R13
27
sq=0
.262
kR
PO
LY
P13
79
m=2
2.00
u/1.
00u
P13
80
m=2
2.00
u/1.
00u
P13
81
m=2
2.00
u/1.
00u
P13
83
m=2
2.00
u/1.
00u
P13
84
m=2
2.00
u/1.
00u
P13
85
m=2
2.00
u/1.
00u
P13
86
m=2
2.00
u/1.
00u
P13
87
m=2
2.00
u/1.
00u
P13
67
m=1
4.00
u/0.
60u
P1394
m=14.00u/0.60u
P13
95
m=1
4.00
u/0.
60u
P13
96
m=1
4.00
u/0.
60u
P1397
m=14.00u/0.60u
P14
03
m=4
8.00
u/8.
00u
P14
04
m=4
8.00
u/8.
00u
P14
05
m=4
8.00
u/8.
00u
P14
06
m=4
8.00
u/8.
00u
P14
07
m=4
8.00
u/8.
00u
P14
08
m=4
8.00
u/8.
00u
P14
10
m=2
8.00
u/8.
00u
P14
11
m=2
8.00
u/8.
00u
X48
74
V1G
_BU
F2_1
5_7
X56
08
V1G
_BU
F2_1
5_7
X7209
VSG_TRIGATE_40L6X3_40L6
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
VD
D1
P13
82
m=2
2.00
u/1.
00u
P14
09
m=2
8.00
u/8.
00u
VD
D1
BR
EF2
SD
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About Chipworks Chipworks is the recognized leader in reverse engineering and patent infringement analysis of semiconductors and electronic systems. The company’s ability to analyze the circuitry and physical composition of these systems makes them a key partner in the success of the world’s largest semiconductor and microelectronics companies. Intellectual property groups and their legal counsel trust Chipworks for success in patent licensing and litigation – earning hundreds of millions of dollars in patent licenses, and saving as much in royalty payments. Research & Development and Product Management rely on Chipworks for success in new product design and launch, saving hundreds of millions of dollars in design, and earning even more through superior product design and faster launches.
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