interpretation of gas delivery diagrams
DESCRIPTION
Interpretation of Gas Delivery Diagrams. Gas delivery diagram symbols—gas panel 1 right side. Gas delivery diagram interpretation—gas panel 3. Pump. Gas delivery diagram interpretation—gas panel 2. Chamber. First work out the I/Os; Then work out the main p rocess gas flow route - PowerPoint PPT PresentationTRANSCRIPT
![Page 1: Interpretation of Gas Delivery Diagrams](https://reader036.vdocuments.us/reader036/viewer/2022081517/56815ff6550346895dcef4a1/html5/thumbnails/1.jpg)
Interpretation of Gas Delivery Diagrams
![Page 2: Interpretation of Gas Delivery Diagrams](https://reader036.vdocuments.us/reader036/viewer/2022081517/56815ff6550346895dcef4a1/html5/thumbnails/2.jpg)
Gas delivery diagram symbols—gas panel 1 right side
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Gas delivery diagram interpretation—gas panel 3
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Gas delivery diagram interpretation—gas panel 2
First work out the I/Os;Then work out the mainprocess gas flow routeincluding the choking valves;See next slide for results
ChamberPump
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Gas delivery diagram interpretation
Process chamber
V5
MFC 2
V20V22 Hand valve
Gas 2 supply
MFC 4
V40V42 Hand valve
Gas4 supply
V4
PSH3
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Gas delivery diagram interpretation—gas panel 2
Now we will deal with theside branches. But we willMap it out more symmetricallyAround the I/Os. See nextSlide
ChamberPump
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Gas delivery diagram interpretation—gas panel 2
MFC
N2pump
V4 V1
V2 V3
V85
outlet inlet
V42 V41
PSH9PSH2
Forward purging: V4 and V1 open, V41, V42 open, all others closed.Reverse purging: V2 and V3 open, V41, V42 open, all others closed, V85 is the pump ballast valve—dummy load for the pump when chamber iso valve is closed.