intelligent deposition of high grade ito film for touch ... · touch screen & optical film market...

1 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information

Intelligent Deposition of High Grade ITO Film for Touch Screen Process in a High Vacuum Sputter Web Coater

Eiichi SasakiFPDPV Division ULVAC Inc.October 8, 2019


• IntroductionULVAC Corp.

• Roll to Roll sputtering system SPW series-025, -060, -165

• Touch Sensor – ITO film processCathode and Pre. Process

• Other ProcessAR, FCCL

• Summary

Agenda


AIIoT Cloud Big DataAR, VRTechnology for Smart Society（Smart system）

〇Smart semiconductor（Smart ICT）

CPU、DRAM、NAND〇Smart Functional Device（Smart Functionalities）MEMS, Sensor, Communication(５G) 〇Smart Energy

Li Battery, PV, Power Device

Cloud Server

Portable Power Supply & Management

〇New Packaging〇New Material

Smart Society：Electronics （Electronic Device, Semiconductor）⇒Anytime, Anywhere, Safe, Wireless, High-speed, Low power, Automatic, Prospective.

ULVAC Technical portfolio for Smart Society

Smart Devices (e.g. Smart Phones)w/Edge computing

http://www.google.co.jp/url?sa=i&rct=j&q=&esrc=s&source=images&cd=&cad=rja&uact=8&ved=0ahUKEwjMl_zlwtrVAhVPOrwKHcBnB80QjRwIBw&url=http://www.linuxacademy.ne.jp/lablog/infrastructure/65/&psig=AFQjCNEWqc5r1ebRygFTGUR4RQNbP6joMg&ust=1502930557203680


Display

High Freq.device

TSVLogic EMIShieldCPULogic Board

Microphone

DisplayOptical Film

AdvancedPackaging

TFTBack plane Touch Screen

Optical FilmAR/AS

OLEDFront plane

AntennaComm.5G

DataProcess

MEMS

BatteryEnergy LiBTFB

AdvancedElectronic

Equip.

Semiconductor

Equip.

Flat PanelDisplayEquip.

ULVAC Technologies within Smart Device

Camera CMOSsensor

Non Volatile

Photo

DataStorage Memory

MEMSDetectSensorFinger Print


Display

Metal/ITO IGZO Metal/ITO PE-CVD for LTPS

Touch Panel / AR film OLED Color Filter

Vacuum Equipment for Smart Device


R2R Equipment for Smart DeviceSPW Series is high performance type sputtering roll coater for touch panel, optical film, window film, electric device. It is ideal for multi layer deposition.

SPW-165C1

80+Records SPW-025


Touch Screen & Optical film Market Portfolio

Wor

ld W

ide

Mar

ket S

ize

(Yea

r 202

2 M

$)

2018-2022 CAGR (%)

ULVAC research based on Fuji Chimera Research Institute

-5.0% 0.0% 5.0% 10.0%

5,000

10,000Wet AGLR2022 Market 1,000M$2018-2022 CAGR 1.8%

0

-10.0%

Dry AR2022 Market 140M$

2018-2022 CAGR 9.7%

MM Touch Screen2022 Market 130M$

2018-2022 CAGR 3.2%

ITO Touch Screen2022 Market 460M$2018-2022 CAGR -3.3%

M.$

0

200

400

600

800

1,000

1,200

2018 2019 2020 2021 2022

0200400600800

1,0001,200

2018 2019 2020 2021 2022

Wet AG/LR

Dry AR

ITO Touch

MM Touch

M.$

W/W Touch Screen Market Growth

W/W Optical Film Market Growth

Touch Screen & Optical film Market

Technical Trend

Market Trend


【ITO film】Key Points;• Sputtering Process • Index Matching(IM) layer. • Low Resistivity.

Touch Sensor – ITO film process

PETNbO : 10nm

SiO2 : 60nm

ITO : 20nm

PET

IM Layer

Adhesion LayerITO : 20nm

A BINVISIBLE

Dry Invisible IM Film


• Index matching Layer to make ITO “invisible”

Touch Sensor – ITO film process

Rs (Ω/☐) T (%) Haze (%) b*

Layer Structure A B A B A B A B0 Base Film 91.6 0.51 Film/Nb2O5/SiO2/ITO 188 184 88.2 88.5 0.6 0.7 1.662 Film/Nb2O5/SiO2 90.0 0.7

ITOSiO2

PET Film

RR

05

10152025303540

400 450 500 550 600 650 700 750 800λ（nm)

R (%

)

ITONon-ITO

With IM Layer

Without IM Layer

Wavelength (nm)

Refle

ctio

n (%

)

Graph1

800800

799799

798798

797797

796796

795795

794794

793793

792792

791791

790790

789789

788788

787787

786786

785785

784784

783783

782782

781781

780780

779779

778778

777777

776776

775775

774774

773773

772772

771771

770770

769769

768768

767767

766766

765765

764764

763763

762762

761761

760760

759759

758758

757757

756756

755755

754754

753753

752752

751751

750750

749749

748748

747747

746746

745745

744744

743743

742742

741741

740740

739739

738738

737737

736736

735735

734734

733733

732732

731731

730730

729729

728728

727727

726726

725725

724724

723723

722722

721721

720720

719719

718718

717717

716716

715715

714714

713713

712712

711711

710710

709709

708708

707707

706706

705705

704704

703703

702702

701701

700700

699699

698698

697697

696696

695695

694694

693693

692692

691691

690690

689689

688688

687687

686686

685685

684684

683683

682682

681681

680680

679679

678678

677677

676676

675675

674674

673673

672672

671671

670670

669669

668668

667667

666666

665665

664664

663663

662662

661661

660660

659659

658658

657657

656656

655655

654654

653653

652652

651651

650650

649649

648648

647647

646646

645645

644644

643643

642642

641641

640640

639639

638638

637637

636636

635635

634634

633633

632632

631631

630630

629629

628628

627627

626626

625625

624624

623623

622622

621621

620620

619619

618618

617617

616616

615615

614614

613613

612612

611611

610610

609609

608608

607607

606606

605605

604604

603603

602602

601601

600600

599599

598598

597597

596596

595595

594594

593593

592592

591591

590590

589589

588588

587587

586586

585585

584584

583583

582582

581581

580580

579579

578578

577577

576576

575575

574574

573573

572572

571571

570570

569569

568568

567567

566566

565565

564564

563563

562562

561561

560560

559559

558558

557557

556556

555555

554554

553553

552552

551551

550550

549549

548548

547547

546546

545545

544544

543543

542542

541541

540540

539539

538538

537537

536536

535535

534534

533533

532532

531531

530530

529529

528528

527527

526526

525525

524524

523523

522522

521521

520520

519519

518518

517517

516516

515515

514514

513513

512512

511511

510510

509509

508508

507507

506506

505505

504504

503503

502502

501501

500500

499499

498498

497497

496496

495495

494494

493493

492492

491491

490490

489489

488488

487487

486486

485485

484484

483483

482482

481481

480480

479479

478478

477477

476476

475475

474474

473473

472472

471471

470470

469469

468468

467467

466466

465465

464464

463463

462462

461461

460460

459459

458458

457457

456456

455455

454454

453453

452452

451451

450450

449449

448448

447447

446446

445445

444444

443443

442442

441441

440440

439439

438438

437437

436436

435435

434434

433433

432432

431431

430430

429429

428428

427427

426426

425425

424424

423423

422422

421421

420420

419419

418418

417417

416416

415415

414414

413413

412412

411411

410410

409409

408408

407407

406406

405405

404404

403403

402402

401401

400400

399399

398398

397397

396396

395395

394394

393393

392392

391391

390390

389389

388388

387387

386386

385385

384384

383383

382382

381381

380380

379379

378378

377377

376376

375375

374374

373373

372372

371371

370370

369369

368368

367367

366366

365365

364364

363363

362362

361361

360360

359359

358358

357357

356356

355355

354354

353353

352352

351351

350350

349349

348348

347347

346346

345345

344344

343343

342342

341341

340340

339339

338338

337337

336336

335335

334334

333333

332332

331331

330330

329329

328328

327327

326326

325325

324324

323323

322322

321321

320320

319319

318318

317317

316316

315315

314314

313313

312312

311311

310310

309309

308308

307307

306306

305305

304304

303303

302302

301301

300300

ITO

No ITO

λ（nm)

R (%)

10.64

10.03

10.63

10.04

10.45

10.01

10.38

10.1

10.4

10.15

10.16

10.08

10.16

9.95

9.97

9.96

9.87

9.88

9.76

9.98

9.77

9.98

9.73

9.91

9.62

9.85

9.61

9.8

9.59

9.73

9.54

9.66

9.51

9.55

9.54

9.64

9.45

9.6

9.4

9.56

9.48

9.59

9.42

9.55

9.52

9.52

9.6

9.62

9.66

9.51

9.61

9.68

9.68

9.68

9.7

9.81

9.76

9.79

9.74

9.79

9.78

9.88

9.78

9.96

9.78

10.06

9.82

10.07

9.77

10.17

9.83

10.18

9.73

10.34

9.69

10.26

9.75

10.28

9.67

10.34

9.63

10.32

9.58

10.31

9.44

10.36

9.4

10.31

9.42

10.36

9.25

10.26

9.16

10.23

9.19

10.09

9.22

9.99

9.14

9.99

9.06

9.93

9.03

9.77

9.07

9.67

9

9.49

9.02

9.34

9

9.27

9.02

9.19

9.01

8.97

9.12

8.87

9.24

8.77

9.33

8.71

9.38

8.65

9.54

8.47

9.6

8.38

9.74

8.32

9.78

8.26

10.01

8.2

10.11

8.19

10.28

8.24

10.37

8.26

10.52

8.27

10.62

8.25

10.79

8.4

10.88

8.46

10.93

8.4

11.03

8.48

11.07

8.66

11.19

8.64

11.29

8.73

11.25

8.84

11.26

8.9

11.27

8.97

11.34

8.99

11.35

9.12

11.25

9.23

11.23

9.2

11.15

9.26

11.1

9.25

11.05

9.29

10.96

9.23

10.93

9.27

10.83

9.29

10.78

9.27

10.72

9.21

10.62

9.19

10.63

9.14

10.53

9.18

10.53

9.19

10.52

9.13

10.49

9.19

10.47

9.08

10.48

9.13

10.52

9.11

10.51

9.17

10.46

9.19

10.54

9.26

10.49

9.3

10.6

9.35

10.53

9.46

10.55

9.56

10.57

9.66

10.47

9.75

10.58

9.9

10.48

9.97

10.5

10.07

10.45

10.19

10.41

10.28

10.32

10.42

10.24

10.49

10.13

10.49

10.05

10.57

9.98

10.61

9.85

10.66

9.87

10.69

9.69

10.62

9.61

10.6

9.52

10.57

9.42

10.49

9.39

10.44

9.33

10.31

9.3

10.23

9.23

10.19

9.29

10.07

9.26

9.95

9.33

9.83

9.33

9.7

9.42

9.63

9.53

9.48

9.59

9.38

9.72

9.34

9.83

9.3

9.92

9.28

10.07

9.17

10.23

9.1

10.27

9.15

10.4

9.15

10.5

9.16

10.62

9.23

10.66

9.24

10.67

9.21

10.72

9.23

10.79

9.34

10.8

9.27

10.87

9.37

10.82

9.31

10.83

9.32

10.82

9.29

10.8

9.27

10.81

9.24

10.8

9.22

10.8

9.14

10.76

9.09

10.79

9.05

10.8

9

10.77

8.93

10.84

8.86

10.88

8.83

10.83

8.79

10.93

8.76

10.99

8.74

10.98

8.77

11.01

8.76

11.09

8.88

11.04

8.91

11.08

9.03

11.07

9.14

11.09

9.25

11.05

9.3

11.05

9.43

10.94

9.57

10.91

9.66

10.82

9.8

10.69

9.87

10.62

9.96

10.53

10.07

10.38

10.14

10.28

10.2

10.17

10.25

10.11

10.3

9.99

10.28

9.9

10.28

9.77

10.25

9.76

10.22

9.71

10.2

9.71

10.19

9.73

10.12

9.76

10.07

9.78

10.03

9.79

9.98

9.83

9.99

9.87

9.95

9.92

9.94

10

9.9

10.02

9.93

10.12

9.95

10.16

9.88

10.22

9.96

10.24

9.91

10.28

9.98

10.3

9.98

10.36

9.91

10.39

9.91

10.35

9.87

10.44

9.83

10.42

9.8

10.45

9.76

10.51

9.63

10.54

9.57

10.62

9.54

10.65

9.47

10.65

9.38

10.76

9.29

10.82

9.22

10.87

9.14

10.93

9.11

10.97

9.08

11.02

9.06

11.05

9.04

11.09

9.1

11.11

9.11

11.11

9.14

11.13

9.18

11.1

9.26

11.04

9.25

11

9.34

10.97

9.38

10.9

9.43

10.85

9.54

10.77

9.6

10.72

9.6

10.62

9.61

10.57

9.64

10.51

9.7

10.44

9.72

10.45

9.75

10.38

9.79

10.32

9.81

10.36

9.86

10.25

9.84

10.24

9.88

10.21

9.94

10.19

10.01

10.19

10.02

10.14

10.01

10.16

10.07

10.11

10.14

10.1

10.09

10.14

10.1

10.16

10.12

10.19

10.1

10.2

10.09

10.25

10.06

10.34

10

10.36

9.97

10.37

9.96

10.45

9.94

10.52

9.91

10.58

9.87

10.63

9.81

10.67

9.78

10.72

9.78

10.71

9.71

10.79

9.69

10.79

9.66

10.83

9.6

10.85

9.61

10.83

9.56

10.85

9.52

10.87

9.48

10.86

9.41

10.88

9.41

10.9

9.37

10.94

9.38

10.96

9.35

10.96

9.35

10.94

9.39

11

9.39

10.95

9.45

10.96

9.49

10.88

9.58

10.8

9.64

10.69

9.7

10.65

9.71

10.51

9.74

10.48

9.83

10.4

9.79

10.4

9.78

10.4

9.75

10.33

9.73

10.3

9.7

10.4

9.69

10.47

9.66

10.51

9.64

10.6

9.66

10.72

9.72

10.79

9.83

10.76

9.79

10.79

9.9

10.8

9.94

10.72

10

10.79

10.01

10.64

10.05

10.67

10.01

10.64

9.96

10.61

9.9

10.61

9.82

10.72

9.7

10.85

9.62

10.88

9.49

10.97

9.44

11.09

9.37

11.16

9.38

11.31

9.43

11.37

9.5

11.37

9.57

11.29

9.65

11.23

9.78

11.04

9.82

11.03

9.87

10.81

9.94

10.77

9.89

10.74

9.8

10.76

9.72

10.81

9.52

10.82

9.4

11.05

9.32

11.1

9.24

11.3

9.21

11.41

9.25

11.52

9.31

11.59

9.42

11.51

9.58

11.44

9.74

11.33

9.73

11.14

9.94

11.01

9.84

10.93

9.89

10.84

9.75

10.88

9.69

11.02

9.43

11.26

9.25

11.38

9.28

11.58

9.19

11.85

9.22

11.87

9.33

11.94

9.46

11.89

9.7

11.8

9.85

11.66

10.03

11.49

10.16

11.42

10.13

11.32

10.05

11.38

9.84

11.58

9.69

11.77

9.45

12

9.22

12.31

9.03

12.55

8.92

12.76

8.99

12.79

9.14

12.79

9.32

12.76

9.55

12.47

9.72

12.16

9.77

12.08

9.74

11.96

9.58

11.97

9.28

12.16

8.95

12.4

8.71

12.64

8.56

12.9

8.51

13.08

8.51

13.21

8.77

13.04

9.09

12.88

9.48

12.65

9.76

12.48

9.97

12.34

10.04

12.4

9.92

12.68

9.62

12.98

9.35

13.43

9.17

13.91

8.98

14.3

8.91

14.64

8.97

14.73

9.28

14.59

9.64

14.47

9.93

14.29

10.05

14.12

9.94

14.16

9.63

14.27

9.07

14.51

8.71

14.84

8.2

15.03

7.93

15.24

7.85

15.31

8.04

15

8.34

14.85

8.87

14.32

9.24

14.2

9.43

14.14

9.38

14.33

9.11

14.66

8.75

15.36

8.42

15.84

8.27

16.42

8.37

16.55

8.8

16.81

9.23

16.67

9.75

16.69

10.14

16.76

10.27

16.86

9.8

17.14

9.33

17.68

8.62

18.03

7.89

18.23

7.64

18.05

7.71

18.15

8

17.31

8.41

16.81

8.8

16.58

8.66

16.66

8.27

16.95

7.75

17.32

7.25

17.77

6.9

18.2

6.92

18.48

7.36

18.56

8.28

18.6

8.84

18.78

9.41

19.3

9.35

19.61

9.09

19.98

8.48

20.86

7.96

21.29

7.62

21.31

7.81

20.95

8.15

20.38

8.62

20.14

8.48

19.82

8.32

19.84

7.42

19.89

6.42

20.17

5.8

20.5

5.47

20.23

6

20.71

6.64

20.41

7.59

20.94

7.93

21.52

7.66

22.53

7

22.86

6.8

23.73

6.63

23.73

7.11

23.84

7.96

23.53

8.11

23.63

7.95

23.89

7.15

23.59

6.47

23.62

5.58

23.23

4.74

22.94

5.01

23.05

5.2

22.43

5.22

23.2

4.92

23.94

4.25

23.59

3.96

24.98

3.93

25.6

4.09

26.2

4.48

26.8

4.55

27.04

4.5

26.41

4.13

26.71

4.03

26.62

3.71

25.87

3.3

25.94

2.78

25.4

2.38

25.91

1.96

26.05

1.63

25.77

1.42

26.53

1.23

27.33

1.29

27.69

1.36

28.66

1.65

29.2

1.97

29.41

2.2

29.9

2.47

29.82

2.52

29.03

2.5

28.18

2.24

MEMO

DesignBSTAR

Reference Wavelength (nm)550

Incident Angle0

Wavelength

(nm)Reflectance

(%)Transmittance

(%)R-Phase

(deg)T-Phase

(deg)%T(貼り付け用）ハツヨウ

3907.1312887.06707148.546-85.23550.8706707

4004.6309290.58399151.207-82.858340.9058399

4102.7798793.19225153.6004-80.630770.9319225

4201.5525695.10246155.7639-78.536530.9510246

4300.7831496.50366157.7282-76.558750.9650366

4400.3856497.47498159.5181-74.688690.9747498

4500.2757398.09873161.1541-72.917720.9809873

4600.3838598.16659162.6555-71.234680.9816659

4700.6165898.09147164.0386-69.63330.9809147

4800.9698897.8845165.3196-68.109410.978845

4901.3284197.65067166.4979-66.654420.9765067

5001.7204197.37135167.5884-65.264280.9737135

5102.1549797.00743168.6016-63.933930.9700743

5202.5545796.66862169.5479-62.661190.9666862

5302.9409696.33709170.4302-61.440220.9633709

5403.311296.01664171.2542-60.267730.9601664

5503.6606195.71249172.0235-59.141330.9571249

5603.9860595.42829172.7413-58.058590.9542829

5704.2878695.16402173.4143-57.016050.9516402

5804.5702394.91634174.0462-56.011660.9491634

5904.8240794.69448174.6417-55.044130.9469448

6005.0508994.49712175.1988-54.111020.9449712

6105.2536494.31435175.7232-53.20990.9431435

6205.4653894.12179176.2174-52.339110.9412179

6305.6243793.97994176.6835-51.49710.9397994

6405.7607293.85948177.1235-50.682460.9385948

6505.9234293.71261177.5386-49.894230.9371261

6606.0228693.62382177.9302-49.131160.9362382

6706.1590293.4987178.3-48.391940.934987

6806.2253193.44167178.6505-47.675380.9344167

6906.3374793.33939178.9826-46.980260.9333939

7006.3748593.31015179.2974-46.305570.9331015

7106.4676593.2232179.5955-45.650820.932232

7206.4821193.21297179.877-45.015410.9321297

7306.5567593.14359-179.8557-44.397860.9314359

B star 計算

S(λ)y(λ)S(λ)y(λ)S(λ)zλ)T(λ）

波長(nm) ハチョウ"x""y""z"D65"x"D65"y"D65"z"D65S(λ)x(λ) T(λ)S(λ)y(λ) T(λ)S(λ)zλ) T(λ)

3900.00420.00010.020154.650.229530.0054651.0984650.87067070.19984504580.00475821540.9564012905

4000.01430.00040.067982.751.1833250.03315.6187250.90583991.07190299970.02998330075.0896652921

4100.04350.00120.207491.493.9798150.10978818.9750260.93192253.70887914430.102313907417.6832536675

4200.13440.0040.645693.4312.5569920.3737260.3184080.951024611.9420082940.355416913557.3642898408

4300.28390.01161.385686.6824.6084521.005488120.1038080.965036623.74805684930.9703327209115.9045705194

4400.34830.0231.7471104.8636.5227382.41178183.2009060.974749835.6005315612.3508820726178.5750464833

4500.33620.0381.7721117.0139.3387624.44638207.3534210.980987338.59082591974.361842311203.4110726126

4600.29080.061.6692117.8134.2591487.0686196.6484520.981665933.63103735476.9390035807193.0430796162

4700.19540.0911.2876114.8622.44364410.45226147.8937360.980914722.015300321210.2527754822145.0711396803

4800.09560.1390.813115.9211.08195216.1128894.242960.97884510.847513305415.772012023692.2492501812

4900.0320.2080.4652108.813.4819222.6324850.6184120.97650673.400118208922.100768357649.4292184614

5000.00490.3230.272109.350.53581535.3200529.74320.97371350.52173029934.391609505728.9613553732

5100.00930.5030.1582107.81.0025454.223417.053960.97007430.972538288752.600726798616.5436083092

5200.06330.710.0782104.796.63320774.40098.1945780.96668626.412229668671.92232329767.9215854674

5300.16550.8620.0422107.6917.82269592.828784.5445180.963370917.169865722689.42854533454.3780563957

5400.29040.9540.0203104.4130.32066499.607142.1195230.960166429.112882798595.63942902812.0350947686

5500.43340.9950.0087104.0545.09527103.529750.9052350.957124943.161805789299.09090161580.8664229589

5600.59450.9950.003910059.4599.50.390.954282956.73211840594.951148550.372170331

5700.76210.9520.002196.3373.41309391.706160.2022930.951640269.862850505187.27126844360.192510151

5800.91630.870.001795.7987.77237783.33730.1628430.949163483.310327779479.10071501480.1545646155

5901.02630.7570.001188.6991.02254767.138330.0975590.946944886.193327564463.57629247420.0923829877

6001.06220.6310.000890.0195.60862256.796310.0720080.944971290.347394261753.67087721630.0680454862

6101.00260.5030.000389.689.8329645.06880.026880.943143584.725372309842.50634577280.0253516973

6200.85440.3810.000287.774.9308833.41370.017540.941217970.526285518831.44957254520.016508962

6300.64240.265083.2953.50549622.0718500.939799450.284433037520.74311138690

6400.44790.175083.737.4892314.647500.938594835.18719633413.7480673330

6500.28350.107080.0322.6885058.5632100.937126121.26199020558.02480759080

6600.16490.061080.2113.2266294.8928100.936238212.3832753274.58083562730

6700.08740.032082.287.1912722.6329600.9349876.72374583352.46178337150

6800.04680.017078.283.6635041.3307600.93441673.42323931811.24348436770

6900.02270.0082069.721.5826440.57170400.93339391.47723025550.53362502620

7000.01140.0041071.610.8163540.29360100.93310150.76174114190.27395953350

7100.00580.0021074.350.431230.15613500.9322320.40200640540.14555404330

7200.00290.001061.60.178640.061600.93212970.16651564960.05741918950

7300.00140.0005069.890.0978460.03494500.93143590.09113727710.03254902750

1003.9982981056.7796361149.602456L*955.96725869981010.68504098021120.404645149

XnYnZn98.28XYZ

1003.9982981056.7796361149.602456a*90.4695.64106.02

K0.0946271073-0.83X/XnY/YnZ/Zn

b*0.0901001690.09049966380.0922237509

-1.25f(X/Xn)f(Y/Yn)f(Z/Zn)

0.44830667150.44896827640.4518014225

10

AimCoreサンプリング

＜今回の目的＞コンカイモクテキ

目的モクテキInvisibleのサンプル作成サクセイ

100118－2

KeywordAimCore、タッチパネル。

＜ハード条件＞ジョウケン

フィルム客先支給基材（東山、両面クリアHC、125μm）キャクサキシキュウキザイヒガシヤマリョウメン

張力150N、成膜MR温度：0℃ チョウリョクセイマクオンド

脱ガスダツMR

BMBDC BMB

Nb2O55inch*18inch Normal Mag, DC-Pulse

SiO2130*510mm DL AC

ITOSnO2:3wt％、強磁場、DC-Pulse キョウジバ

＜プロセス条件＞ジョウケン

到達圧力トウタツアツリョク×10-4Pa(巻取室）マキトシツ

×10-4Pa(成膜室）セイマクシツ

脱ガスダツ80℃×1.0m/min

BMBAr:500sccm, 1000V, 0.02A

Nb2O5Ar：300sccm、75sccm、Power4.0kw、D.Rate71Åm/min、酸化物モード0.45Pa サンカブツ

SiO2Ar：300sccm、O2：76sccm、Power8kw、D.Rate：520Åm/min、710V設定、遷移モード、0.45Pa セッテイセンイ

ITOAｒ：200sccm、O2：2.5sccm、Power:2.5kw、D.Rate：250Åm/min、バルブ全開、272V、13.03A、0.13Pa ゼンカイ

＜条件表＞ジョウケンヒョウ

SiO2Nb2O5SiO2ITO

No膜厚マクアツ速度ソクド膜厚マクアツ速度ソクド膜厚マクアツ速度ソクド膜厚マクアツ速度ソクド

11005.2780.953012101.2Invisible Film(200Ω/□狙い）ネラ

単位：Å、m/min Pass数タンイスウ

＜結果＞ケッカ

Rs％THazeB*

NoSiO2Nb2O5SiO2ITOABABABAB

110078530210********

単位：Å、Ω/□ タンイ

A：As-depo、B：150℃×１hr大気アニールタイキ

＜サンプル巻姿＞マスガタ

％T％R

AA

＜結果＞ケッカITOITO

80088.1711.03

79988.0411.02

79888.4410.94

79788.3910.9

79689.0110.69

79588.4810.73

79488.5710.51

79388.4110.51

79288.6510.26

79188.7410.4

79089.0910.07

78989.1610.05

78888.969.88

78789.289.92

78688.969.77

78588.69.9

78489.29.87

78389.389.71

78289.229.75

78188.699.71

78088.899.73

77988.679.76

77888.869.72

77789.519.73

77688.759.78

77589.079.8

77488.879.89

77389.059.85

77289.039.82

77188.739.89

77088.69.92

76988.859.92

768899.95

76789.1210.04

76688.9310

76589.0310.04

76489.139.92

76389.169.91

76289.199.9

76189.199.83

76089.629.77

75989.529.7

75889.549.61

75789.689.55

75689.759.48

75589.889.42

75489.839.25

75390.099.13

75290.199.11

75190.129

75090.688.87

74990.688.86

74890.278.82

74790.578.78

74690.338.74

74590.578.62

74490.328.61

74390.548.71

74290.418.69

74190.188.74

74090.248.77

＜結論＞ケツロン73990.358.82

予備テストとほぼ同等。ヨビドウトウ73889.648.96

73790.139.03

73689.99.15

以上イジョウ73589.479.34

73489.39.43

73389.39.59

73289.239.66

73189.249.9

73088.6910.02

72988.7110.14

72888.8310.38

72788.7810.41

72688.3310.57

72588.4910.77

72488.2310.74

72388.0110.93

72287.9911.02

72188.1711.06

72087.8911.07

71987.9911.16

71888.0111.19

71788.1211.23

71687.7911.21

71588.3211.18

71488.0911.15

71388.111.09

71288.2811.07

71188.3911.03

71088.3510.94

70988.2910.88

70888.5510.82

70788.3310.77

70688.3710.73

70588.3410.69

70488.7410.65

70388.5410.62

70288.1110.6

70188.6810.64

70088.3210.59

69988.3310.55

69888.2810.65

69788.1810.64

69688.1510.7

69588.4110.65

69488.0210.7

69388.0710.79

69287.9510.75

69187.8410.76

69087.8510.78

68987.9810.85

68887.9510.81

68788.110.84

68688.1810.81

68588.2810.71

68488.2110.67

68388.2510.61

68288.5310.45

68188.6610.39

68088.6510.3

67988.7510.15

67889.0510.02

67789.269.87

67689.19.77

67589.449.67

67489.729.51

67389.599.43

67289.829.29

67189.649.21

67089.979.09

66989.959.06

66889.919.06

66789.768.99

66689.79.01

66589.99

66489.379.03

66389.629.13

66289.69.18

66189.389.19

66089.269.35

65989.259.42

65889.329.51

65789.129.62

65688.999.73

65589.029.83

65488.859.98

65388.8210.08

65288.6610.12

65188.6610.24

65088.7710.29

64988.610.41

64888.5510.42

64788.4510.49

64688.6610.47

64588.5710.52

64488.5110.54

64388.6310.48

64288.6710.55

64188.6310.49

64088.7110.5

63988.5810.48

63888.710.5

63788.4710.53

63688.2510.55

63588.4510.55

63488.2310.58

63388.3910.63

63288.1410.69

63187.8810.74

63087.9810.81

62987.710.88

62887.7310.98

62787.6211.03

62687.5611.07

62587.4811.1

62487.8411.16

62387.4211.17

62287.7211.2

62187.3211.18

62087.7411.12

61987.7911.13

61888.0410.97

61787.910.99

61687.6910.86

61588.2810.73

61488.1510.6

61388.3510.5

61288.3810.34

61188.4510.25

61088.5810.08

60988.799.98

60888.889.9

60788.549.79

60688.929.72

60588.849.72

60489.039.68

60388.759.64

60288.749.66

60188.839.66

60088.799.63

59988.799.75

59888.779.8

59788.869.8

59688.589.89

59588.659.94

59488.549.93

59388.769.99

59288.8210.01

59188.7810.03

59088.8110.06

58988.6410.06

58888.6410.07

58788.6310.03

58688.9210.03

58588.6910.01

58488.7210.03

58388.5810.07

58288.6710.1

58188.5510.1

58088.6210.2

57988.4410.27

57888.2210.36

57788.2510.42

57687.810.48

57587.9810.61

57487.9110.67

57387.8110.79

57287.6410.85

57187.510.91

57087.5110.99

56987.5810.97

56887.5510.94

56787.7811.03

56687.510.99

56587.5611.01

56487.6810.95

56387.7610.9

56287.810.8

56187.8410.76

56088.0510.68

55987.7410.59

55887.910.55

55787.9410.46

55688.1310.48

55588.0410.4

55487.9910.37

55387.9710.35

55288.110.25

55187.9210.28

55088.1210.25

54988.2510.24

54888.0710.21

54788.1610.18

54688.2710.12

54588.310.13

54488.3110.08

54388.2810.06

54288.3610

54188.469.95

54088.289.95

53988.49.94

53888.429.95

53788.29.99

53688.2510.03

53588.1710.04

53488.310.11

53388.0910.13

53288.0610.19

53187.9910.32

53087.7710.38

52987.9910.42

52887.9610.5

52787.8210.52

52687.7410.56

52587.7610.65

52487.7910.61

52387.6410.59

52287.7610.65

52187.6810.66

52087.5710.64

51987.710.66

51887.6110.69

51787.2610.69

51687.4610.69

51587.410.67

51487.2210.7

51387.610.78

51287.1610.73

51187.3410.81

51087.310.8

50987.2110.71

50887.5310.66

50787.510.66

50687.6210.54

50587.7510.47

50487.8810.46

50387.7910.33

50287.6710.29

50188.1110.26

50087.5310.21

49987.6210.24

49887.6410.26

49787.5810.3

49687.6910.39

49587.3710.43

49487.4110.49

49386.9810.55

49287.1610.55

49187.4110.62

49087.2810.62

48987.3910.56

48887.410.51

48787.2910.49

48687.3210.47

48587.4210.45

48487.2710.44

48387.3210.49

48287.2310.53

48187.1310.56

48087.1110.65

47986.6810.78

47886.710.92

47786.7810.95

47686.6611.08

47586.4311.1

47486.7711.09

47386.8311.04

47286.6811.01

47186.7910.96

47087.1310.83

46986.9610.79

46886.9610.74

46786.9610.68

46686.6510.76

46586.6810.75

46486.4210.98

46386.4311.02

46286.0311.22

46185.9511.32

46085.8211.42

45985.7311.4

45886.0211.46

45785.8711.42

45686.0611.28

45585.9711.13

45486.2611.01

45386.2710.89

45285.8510.86

45186.0610.88

45086.0411.01

44985.4911.09

44885.4811.19

44785.6411.42

44685.1511.6

44584.9711.67

44485.0611.73

44385.2411.74

44285.611.66

44185.111.54

44085.6711.42

43985.4611.32

43885.6411.29

43785.1711.26

43685.0411.37

43584.7611.51

43484.3811.94

43384.4812.23

43283.7612.47

43183.912.63

43083.6412.91

42983.4312.85

42883.4712.85

42783.5512.7

42683.5912.54

42583.5912.48

42483.5812.3

42383.3412.27

42283.0312.43

42182.3612.62

42082.3712.88

41981.8913.07

41882.0113.24

41781.7413.27

41681.6813.2

41581.9713.05

41482.4812.8

41382.0812.67

41282.4312.51

41182.0512.42

41081.512.61

40981.1612.92

40880.6513.34

40779.9813.82

40679.514.3

40579.5214.53

40479.2414.74

40379.1614.88

40278.9314.76

40178.9314.64

40078.8314.64

39978.1714.72

39877.914.91

39777.4315.16

39676.6315.42

39576.1815.82

39475.815.92

39376.0815.99

39275.7715.86

39176.3715.39

39076.4415.09

38976.2914.66

38876.2214.59

38775.5814.7

38674.514.99

38574.2215.45

38473.5115.87

38373.1916.21

38273.0716.64

38172.2516.97

38072.4416.8

37971.9116.85

37871.0717.19

37770.5517.23

37669.4617.86

37568.4518.53

37467.519.03

37366.6819.53

37266.9919.53

37166.8919.06

37067.0418.95

36966.8518.35

36866.2217.96

36766.0217.88

36665.1617.71

36564.2218.01

36463.5818.27

36363.2318.59

36262.4918.72

36162.6618.57

36061.9219.1

35961.1419.03

35860.0819.58

35758.8119.93

35657.4120.99

35556.1521.75

35455.2622.11

35354.4722.32

35254.7322.26

35154.5922.15

35053.5822.13

34953.3621.4

34852.2321.44

34751.221.56

34650.6821.72

34550.4421.49

34450.1721.3

34349.8720.77

34249.0820.83

34148.421.04

34046.4721.84

33945.922.28

33844.6323.34

33742.6923.95

33642.3224.94

33541.0124.66

33440.725.03

33339.5825.19

33238.7725.27

33136.7325.04

33036.5325.5

32935.6624.62

32835.2124.05

32734.4623.96

32632.823.55

32530.7224.02

32428.0923.91

32325.724.94

32223.5125.45

32120.625.79

32017.1326.77

31914.1926.97

31811.2527.5

3177.5627.98

3164.4428.71

3152.3828.39

3141.1228.45

3130.3527.85

3120.1226.93

3110.0826.66

3100.0726.6

3090.0526.58

3080.0326.39

3070.0427.53

3060.0428.18

3050.0328.73

3040.0329.73

3030.0230.64

3020.0230.83

3010.0331

3000.0330.74

１

12

No.1

No.2

No.3

No.4

No.5

30mm

30mmm

150mm

測定ポイント(透過率・反射率)

Center

１

12

10m

Invisible(250Ω/□）

10

ITO

λ（nm)

%T

Invisible Film

9

ITO

λ（nm)

%R

Invisible Film

8

ITO

λ（nm)

%R

Invisible Film(拡大）

7



目的モクテキInvisibleの予備テストヨビ

100118－1



フィルム客先支給基材（東山、両面クリアHC、125μm）をPETに貼り付けキャクサキシキュウキザイヒガシヤマリョウメンハツ

張力150N、成膜MR温度：0℃（結晶化のため。成膜は全て0℃）チョウリョクセイマクオンドケッショウカセイマクスベ

脱ガスダツMR

BMBDC BMB


SiO2130*510mm DL AC



到達圧力トウタツアツリョク2.8×10-4Pa(巻取室）マキトシツ

4.5×10-4Pa(成膜室）セイマクシツ

脱ガスダツ80℃×0.5m/min（結晶化は3Pass）ケッショウカ






SiO2Nb2O5SiO2ITO


11005.2780.953012101.2Invisible Film(200Ω/□狙い）ネラ



Rs％THazeB*


11007853021018818488.288.50.60.71.66*

2100785300**90*0.7***




％T％R

ABAB

＜結果＞ケッカITONo-ITOITOITONo-ITOITO

80088.4989.388.6610.6410.0310.73

79988.7489.7188.910.6310.0410.81

79888.4489.1788.6510.4510.0110.6

79788.7789.6588.8510.3810.110.59

79688.7589.3188.7710.410.1510.54

79588.8989.3189.1310.1610.0810.53

79489.1689.388.9910.169.9510.5

79389.3889.789.249.979.9610.41

79289.0889.4588.589.879.8810.35

79189.3289.7989.319.769.9810.36

79089.689.5489.329.779.9810.32

78989.5989.2589.089.739.9110.26

78889.3389.7889.79.629.8510.4

78789.5789.7189.549.619.810.4

78689.7590.1689.379.599.7310.41

78589.8289.8889.319.549.6610.36

78489.789.7789.569.519.5510.54

78389.5889.3489.299.549.6410.4

78289.6989.9689.269.459.610.49

78190.0189.9789.089.49.5610.51

78089.8689.9789.139.489.5910.49

77989.6689.6889.039.429.5510.56

77889.8889.6789.29.529.5210.71

77789.5489.5788.979.69.6210.62

77689.2889.6289.279.669.5110.53

77589.6789.8589.39.619.6810.73

77489.4689.5288.979.689.6810.63

77389.2789.1689.259.79.8110.7

77289.2289.6388.899.769.7910.8

77189.789.8188.789.749.7910.54

77089.2389.2789.299.789.8810.6

76989.1289.1389.259.789.9610.65

76889.2189.0489.149.7810.0610.53

76789.2589.2389.29.8210.0710.44

76689.4389.4689.329.7710.1710.35

76588.8188.6689.039.8310.1810.28

76489.6489.1489.579.7310.3410.23

76389.3689.0589.789.6910.2610.08

76289.7389.3289.579.7510.289.96

76189.1588.7989.769.6710.349.86

76089.5688.7690.089.6310.329.72

75989.6589.2189.869.5810.319.58

75889.5188.8989.999.4410.369.44

75789.7189.0990.069.410.319.23

75689.4788.9190.249.4210.369.16

75589.5389.0690.59.2510.269.07

75489.9589.4690.979.1610.238.94

75389.5789.2990.519.1910.098.85

75289.9289.4790.349.229.998.81

75189.7989.4690.679.149.998.66

75089.8889.7290.749.069.938.6

74989.5289.5490.569.039.778.54

74889.4289.8590.839.079.678.56

74789.7689.9590.6599.498.58

74689.8790.290.589.029.348.51

74589.7789.9790.3799.278.56

74489.9390.5690.59.029.198.6

74390.190.5590.229.018.978.58

74289.8490.7690.399.128.878.66

コメント400nmで多少ずれがある。もう少し調整の余地があるが、これ以上時間をかけない。タショウスコチョウセイヨチイジョウジカン74189.5390.890.419.248.778.77

74089.8491909.338.718.8

＜結論＞ケツロン73989.5590.9489.969.388.658.95

この条件でサンプルを作成する。ジョウケンサクセイ73889.2890.8689.719.548.479.1

73789.391.2989.679.68.389.21

以上イジョウ73689.0690.5889.349.748.329.43

73589.3591.3489.299.788.269.5

73488.7591.0789.3910.018.29.61

73388.7291.0788.9810.118.199.78

73288.1790.718910.288.249.9

73188.6491.1488.7210.378.269.99

73088.189188.8210.528.2710.09

72988.491.2588.6210.628.2510.21

72887.6490.9288.6910.798.410.26

72788.190.8988.3710.888.4610.37

72687.8391.0588.0810.938.410.5

72587.7890.7788.2311.038.4810.51

72487.6890.5988.4511.078.6610.59

72387.9291.0388.3211.198.6410.6

72287.490.4588.311.298.7310.62

72187.4590.3388.0711.258.8410.64

72087.5590.4688.3511.268.910.65

71987.6490.4388.2711.278.9710.68

71887.7690.488.3711.348.9910.6

71787.8390.3588.5711.359.1210.62

71687.4689.9388.3311.259.2310.59

71587.8690.4288.2911.239.210.56

71487.8289.9388.3211.159.2610.58

71388.1390.1988.3711.19.2510.56

71287.8390.1988.5311.059.2910.49

71188.1590.2388.4610.969.2310.5

71088.2690.4888.5210.939.2710.58

70988.5290.2888.3310.839.2910.59

70888.5690.4288.610.789.2710.54

70788.490.2788.6110.729.2110.63

70688.490.1588.5310.629.1910.65

70588.590.3188.4910.639.1410.78

70488.6990.8188.3410.539.1810.76

70388.6990.3888.2910.539.1910.83

70288.6490.3988.4810.529.1310.91

70188.290.1588.3610.499.1911.03

70088.6890.5488.2110.479.0811.06

69988.6290.3588.2310.489.1311.19

69888.5990.1888.1110.529.1111.2

69788.6690.3188.2810.519.1711.32

69688.690.3688.2410.469.1911.35

69588.6290.288.0810.549.2611.39

69488.8790.3787.910.499.311.44

69388.4989.7888.0610.69.3511.48

69288.5289.9287.9410.539.4611.49

69188.5489.7888.1210.559.5611.51

69088.5589.888.1810.579.6611.44

68988.6489.7588.3210.479.7511.35

68888.5989.5888.1310.589.911.32

68788.5589.4588.2610.489.9711.28

68688.6989.1888.2710.510.0711.12

68588.6989.2388.5110.4510.1911.06

68488.6589.0988.7310.4110.2810.9

68388.8389.2788.8510.3210.4210.8

68288.6888.8888.9510.2410.4910.6

68188.9188.9289.2410.1310.4910.48

68088.9488.8889.2610.0510.5710.28

67988.9788.8889.589.9810.6110.18

67889.1888.989.599.8510.6610.01

67789.3188.7289.829.8710.699.88

67689.5288.9589.829.6910.629.72

67589.2888.72909.6110.69.6

67489.5589.0989.859.5210.579.55

67389.588.990.029.4210.499.39

67289.338990.269.3910.449.33

67189.7189.0789.989.3310.319.31

67089.6689.3690.079.310.239.31

66989.6989.4890.119.2310.199.27

66889.5189.489.959.2910.079.3

66789.5189.3789.99.269.959.31

66689.6989.6189.759.339.839.37

66589.3489.6289.689.339.79.41

66489.6689.9189.649.429.639.43

66389.1889.7489.819.539.489.48

66289.1690.1389.459.599.389.61

66189.289.8289.249.729.349.65

66088.8390.1589.389.839.39.67

65988.8890.0389.069.929.289.73

65888.7890.0989.1610.079.179.8

65788.3590.0788.9510.239.19.86

65688.1789.8389.0110.279.159.88

65588.1289.9388.5910.49.159.86

65488.1690.0688.8210.59.169.95

65387.8189.8188.6310.629.239.95

65288.2290.0688.9310.669.249.94

65187.8389.8888.6810.679.2110.04

65087.7389.8888.6510.729.239.96

64987.9390.0588.4710.799.349.98

64887.6289.8388.6810.89.279.95

64787.6989.9588.8510.879.379.96

64687.829088.8910.829.319.93

64587.8189.9988.7210.839.329.92

64488.2290.1288.5710.829.299.91

64387.5789.7988.7210.89.279.91

64287.99088.7610.819.249.93

64187.9590.2588.5710.89.229.96

64087.7990.3188.6510.89.1410.02

63987.9190.1688.6610.769.0910.15

63888.1490.5588.5210.799.0510.22

63787.7590.2388.4310.8910.29

63687.9790.4988.2810.778.9310.37

63587.8190.3788.2510.848.8610.54

63487.9490.5188.1610.888.8310.65

63387.9590.5388.0910.838.7910.74

63287.9390.3688.1310.938.7610.87

63187.9890.6288.0310.998.7411.02

63087.9290.6487.7710.988.7711.15

62987.6990.4287.8711.018.7611.22

62887.8190.7287.8111.098.8811.35

62787.9790.5187.5211.048.9111.37

62687.9990.287.8711.089.0311.44

62587.6690.1587.4611.079.1411.49

62487.8689.8587.5811.099.2511.51

62387.7889.9287.7511.059.311.51

62287.9489.7687.8611.059.4311.44

62187.8789.6587.710.949.5711.44

62088.1189.5387.7710.919.6611.34

61987.8989.3187.9210.829.811.3

61888.1389.587.8910.699.8711.21

61788.1389.288.2310.629.9611.03

61688.3689.3288.410.5310.0710.92

61588.4389.2188.2510.3810.1410.83

61488.4789.1888.5410.2810.210.74

61388.4988.8288.7610.1710.2510.65

61288.8289.0788.8510.1110.310.57

61188.7989.2388.929.9910.2810.49

61088.8188.8888.819.910.2810.37

60988.9689.1789.049.7710.2510.34

60888.7788.8288.969.7610.2210.27

6078989.2689.169.7110.210.26

60689.0189.2788.859.7110.1910.23

60588.9789.1189.019.7310.1210.22

60488.9889.3189.119.7610.0710.21

60389.0689.389.079.7810.0310.21

60288.7489.3188.869.799.9810.2

60188.689.0788.999.839.9910.24

60088.789.388.919.879.9510.15

59988.7389.4688.969.929.9410.2

59888.4989.2988.96109.910.14

59788.6889.2488.9310.029.9310.15

59688.5589.3988.7910.129.9510.09

59588.3989.388.9710.169.8810.05

59488.1789.289.0610.229.9610.02

59388.1489.2288.8910.249.919.95

59288.2389.4588.9610.289.989.87

59188.1589.2188.8910.39.989.86

59088.0589.1488.9210.369.919.77

58987.8289.188.8910.399.919.74

58888.2489.428910.359.879.71

58787.9889.2488.8210.449.839.7

58688.1789.6988.7810.429.89.74

58587.989.4189.0210.459.769.74

58487.8189.6188.710.519.639.79

58388.0189.5888.6810.549.579.76

58287.8389.788.6610.629.549.86

58187.7189.6288.5710.659.479.97

58087.7889.7888.4210.659.3810.02

57987.7689.9288.3610.769.2910.17

57887.6589.9888.3510.829.2210.32

57787.6690.2387.7810.879.1410.4

57687.4389.9988.1110.939.1110.55

57587.5690.2487.8510.979.0810.62

57487.4190.0487.9411.029.0610.72

57387.7790.4187.9711.059.0410.78

57287.4990.187.6611.099.110.84

57187.490.0887.811.119.1110.91

57087.5190.187.5311.119.1410.98

56987.4989.8887.7111.139.1810.96

56887.3189.8287.7211.19.2611

56787.5189.8287.7311.049.2510.98

56687.689.9587.83119.3411

56587.6789.6387.8410.979.3811.01

56487.3389.6587.8410.99.4310.98

56387.7889.9287.7610.859.5410.94

56287.7989.7487.9510.779.610.93

56187.7389.487.7810.729.610.93

56087.8289.558810.629.6110.9

55988.0889.5888.1510.579.6410.83

55887.9489.4688.0310.519.710.85

55788.1189.4587.7410.449.7210.82

55688.0889.2788.0510.459.7510.85

55588.2189.5288.0710.389.7910.79

55488.1989.3688.2410.329.8110.8

55388.289.2588.1510.369.8610.75

55288.1589.2988.310.259.8410.76

55188.2389.3188.2510.249.8810.69

55088.2189.1888.210.219.9410.66

54988.2889.3588.3510.1910.0110.58

54888.1489.0388.4210.1910.0210.51

54788.1589.0788.510.1410.0110.45

54688.2389.1388.4910.1610.0710.39

54588.3189.1988.5210.1110.1410.31

54488.0789.0688.3910.110.0910.24

54388.1789.1688.4910.1410.110.13

54288.0989.0388.6710.1610.1210.06

54188.1989.0888.6710.1910.110.06

54087.9388.9488.5110.210.0910.03

53987.988.9488.7310.2510.069.99

53887.8589.0588.4310.34109.97

53787.8389.0288.510.369.979.96

53687.8789.1688.4310.379.9610.03

53587.7289.0688.2310.459.949.99

53487.4989.0188.210.529.9110.06

53387.6189.2988.3110.589.8710.09

53287.6389.2588.0610.639.8110.11

53187.6489.2188.1410.679.7810.16

53087.5189.2888.1910.729.7810.22

52987.4489.1587.9210.719.7110.26

52887.2889.2987.9410.799.6910.28

52787.4489.4487.8910.799.6610.33

52687.489.4387.9810.839.610.35

52587.4289.4487.9710.859.6110.38

52487.3489.4887.8910.839.5610.45

52387.2589.4487.7910.859.5210.51

52287.2989.4787.8410.879.4810.56

52187.2289.6587.5310.869.4110.6

52087.3189.6387.6310.889.4110.66

51987.2189.7187.6410.99.3710.71

51887.3889.6687.610.949.3810.77

51787.2589.687.5510.969.3510.88

51687.1789.5687.3210.969.3510.89

51587.2589.7487.610.949.3910.93

51487.2289.3787.46119.3910.91

51387.1189.5587.7410.959.4510.94

51287.2989.4587.3910.969.4910.93

51187.2489.3987.6610.889.5810.89

51087.489.3287.6510.89.6410.89

50987.5989.5587.5510.699.710.81

50887.489.2287.8110.659.7110.8

50787.3989.1687.7910.519.7410.67

50687.5689.2387.9310.489.8310.65

50587.689.3888.0110.49.7910.64

50487.6489.3387.8810.49.7810.65

50387.6789.3987.9710.49.7510.51

50287.5489.1887.9810.339.7310.57

50187.4788.9587.9410.39.710.56

50087.5289.2887.9910.49.6910.6

49987.4789.387.8310.479.6610.59

49887.3289.2587.6310.519.6410.63

49787.1889.0387.710.69.6610.61

49687.3589.2987.6410.729.7210.64

49587.1188.9187.4410.799.8310.56

49487.1388.9287.610.769.7910.49

49387.1788.8187.5910.799.910.5

49286.9588.7587.9310.89.9410.44

49187.0288.7987.7510.721010.35

49087.2188.7887.8210.7910.0110.3

48986.8588.7187.9110.6410.0510.28

48887.1188.8387.6510.6710.0110.29

48787.0288.5187.810.649.9610.3

48687.2489.0487.6810.619.910.4

48586.8388.5587.4810.619.8210.43

48487.1289.187.5310.729.710.48

48386.9889.4987.5110.859.6210.58

48286.7289.186.9610.889.4910.73

48186.7989.2687.2410.979.4410.76

48086.689.1487.0511.099.3710.87

47986.3489.1286.7611.169.3810.95

47886.4389.186.8311.319.4310.96

47786.4589.3186.9911.379.510.92

47686.3188.938711.379.5710.91

47586.388.7887.1311.299.6510.83

47486.6388.9887.211.239.7810.83

47386.4888.7587.2211.049.8210.71

47286.6588.8287.1611.039.8710.74

47186.6788.8787.0310.819.9410.67

47086.8888.9987.0410.779.8910.76

46986.8589.1187.1110.749.810.79

46887.0589.3186.8410.769.7210.94

46786.7589.1886.8610.819.5211.04

46686.6689.3586.6610.829.411.18

46586.3489.286.7611.059.3211.34

46486.4889.6186.3811.19.2411.39

46386.0489.186.4211.39.2111.42

46286.1289.3986.2511.419.2511.36

46185.8188.986.211.529.3111.36

46085.9589.0886.3311.599.4211.3

45986.1688.9286.6311.519.5811.18

45885.6288.386.9511.449.7411.04

45786.288.4486.5211.339.7310.9

45686.3388.586.7511.149.9410.9

45586.2288.5186.8411.019.8410.83

45486.3388.7586.6210.939.8910.91

45386.2388.4786.5210.849.7510.99

45286.2588.9686.1410.889.6911.1

45186.2689.1286.1411.029.4311.28

45086.0489.1785.811.269.2511.49

44985.6389.3285.911.389.2811.67

44885.5489.2485.7711.589.1911.6

44785.1989.0185.4311.859.2211.58

44685.1388.9985.4211.879.3311.58

44585.2288.5685.7411.949.4611.52

44484.9388.5185.8211.899.711.34

44384.8988.385.7811.89.8511.08

44285.2688.3185.8911.6610.0311.07

44185.2187.8785.8411.4910.1611.04

44085.4488.1886.1411.4210.1311.04

43985.1488.3386.0511.3210.0511.2

43885.1388.5385.311.389.8411.4

43785.0889.0385.1211.589.6911.7

43684.9688.9484.9911.779.4511.78

43584.2288.6984.38129.2212.12

43484.1589.1183.9412.319.0312.26

43383.8589.0483.9612.558.9212.4

43283.788.8584.2212.768.9912.37

43183.4188.4983.8212.799.1412.29

43083.4888.4684.1112.799.3212.13

42983.7288.3484.4612.769.5512.07

42883.8888.3184.212.479.7211.95

42783.8588.0784.2512.169.7712.01

42684.1388.3784.1112.089.7412.15

42584.0188.6183.3811.969.5812.37

42484.0988.983.4911.979.2812.63

42383.5588.8383.0312.168.9512.89

42283.489.1782.812.48.7113.22

42182.7789.3182.5512.648.5613.29

42082.989.282.3212.98.5113.42

41982.4689.0482.4113.088.5113.2

41882.588.5182.7913.218.7712.99

41782.3988.1282.9513.049.0912.75

41682.2787.9782.9712.889.4812.51

41582.4487.5482.9212.659.7612.3

41482.5887.682.8312.489.9712.32

41382.2987.1382.9812.3410.0412.29

41282.0287.6282.512.49.9212.48

41181.8288.181.5512.689.6212.86

41081.4888.4481.0812.989.3513.18

40980.6688.3980.7313.439.1713.44

40880.3188.3280.5413.918.9813.52

40779.5488.2880.2214.38.9113.63

40679.4687.880.3614.648.9713.63

40579.2287.488014.739.2813.44

40479.0486.9679.9114.599.6413.5

40379.3986.9580.0514.479.9313.46

40279.5687.3879.8714.2910.0513.63

40179.7987.4479.3814.129.9413.94

40079.3287.578.7514.169.6314.37

39979.128878.2214.279.0714.8

39878.7788.7377.3614.518.7115.37

39778.0588.8977.0914.848.215.63

39677.4688.576.7115.037.9315.82

39577.4788.4376.8515.247.8515.7

39477.4688.2177.0115.318.0415.49

39377.0987.6976.48158.3415.24

39277.2987.4777.1914.858.8715.01

39177.3787.1777.1614.329.2414.77

39077.1287.2177.2114.29.4314.81

38977.1887.3576.614.149.3814.92

38876.5687.375.9514.339.1115.23

38775.7487.8275.414.668.7515.48

38674.9787.8774.7215.368.4215.58

38573.9487.6273.9815.848.2715.69

38473.4687.3473.7716.428.3715.41

38372.386.1373.5416.558.815.23

38272.9385.9773.6116.819.2315.04

38172.4185.8773.216.679.7514.99

38072.428573.1416.6910.1415.08

37972.2285.7571.7816.7610.2715.74

37871.6985.7770.9116.869.816.54

37770.9786.2869.7117.149.3316.96

37670.6287.0469.2417.688.6217.65

37569.2686.5668.9818.037.8918.15

37469.338767.818.237.6418.3

37368.8786.2568.1918.057.7118.39

37268.7585.1968.1518.15818.29

37168.6685.3668.2217.318.4118.07

37069.1784.7567.816.818.818.21

36969.0585.0267.3716.588.6618.39

36867.7785.1466.1816.668.2718.57

36767.0785.5865.7816.957.7518.69

36666.4685.9165.1217.327.2518.59

36565.3385.6564.6317.776.918.7

36464.1785.5364.2718.26.9218.28

36363.3284.1163.9618.487.3617.59

36263.283.0463.2918.568.2817.27

36162.3482.0362.818.68.8417.08

36061.981.6262.0918.789.4117.42

35960.7781.5560.9119.39.3518.03

35860.4582.1259.119.619.0918.81

35759.1182.158.3819.988.4819.15

35658.4782.4357.3420.867.9619.84

35557.481.3956.8921.297.6220.13

35457.0680.4256.0321.317.8120.24

35357.4179.8155.9820.958.1520.83

35257.1979.3555.2720.388.6221.05

35156.9679.0154.7820.148.4821.42

35056.4479.5253.8219.828.3221.75

34955.8980.4353.1619.847.4221.95

34854.5480.4852.419.896.4222

34752.5479.6251.7320.175.822.36

34652.1279.4952.0720.55.4721.68

34551.3978.3851.7320.23621.36

3445177.4651.3220.716.6420.43

34350.0775.9550.3320.417.5920.23

34249.2975.9348.8120.947.9320.59

34147.9475.8548.1921.527.6621.06

34046.7776.2346.1622.53721.26

33945.4375.3945.2822.866.821.2

33843.917444.0923.736.6321.44

33743.6972.5243.2923.737.1121.87

33643.371.1142.2823.847.9622.57

33543.570.7741.4523.538.1123.07

33442.7369.6740.6623.637.9524.13

33342.4870.839.3623.897.1524.72

33240.7770.1938.1923.596.4725.2

33139.969.537.723.625.5825.25

33038.5568.3436.9223.234.7425.15

32937.3866.5235.9422.945.0125.04

32835.5364.6334.9623.055.224.48

32734.3262.6333.4522.435.2224.3

32632.760.6631.8823.24.9224.23

32530.1258.4829.6123.944.2524.04

32427.4756.4527.5923.593.9623.25

32325.1152.1125.1124.983.9323.57

32222.6747.0923.0125.64.0923.7

32119.9140.3820.1826.24.4823.95

32017.8435.2416.6426.84.5524.62

31914.6129.413.3227.044.524.84

31811.1122.4310.5126.414.1326.39

3177.5315.67.2126.714.0326.56

3164.6810.114.1726.623.7127.75

3152.645.492.2125.873.327.56

3141.032.10.9625.942.7828.16

3130.310.640.2925.42.3828.29

3120.110.260.1225.911.9628.11

3110.080.180.0726.051.6327.99

3100.050.180.0725.771.4227.38

3090.060.140.0526.531.2326.8

3080.040.10.0427.331.2926.49

3070.040.10.0527.691.3626.25

3060.040.10.0328.661.6526.8

3050.040.090.0229.21.9727.31

3040.020.070.0429.412.227.48

3030.030.070.0329.92.4728.75

3020.020.080.0429.822.5229.54

3010.030.070.0129.032.530.23

3000.030.060.0428.182.2430.75

１

12

No.1

No.2

No.3

No.4

No.5

30mm

30mmm

150mm


Center

１

12

10m

Crystal(250Ω/□）

7

ITO

No-ITO

λ（nm)

%T

Invisible Film

6

ITO

No ITO

λ（nm)

%R

Invisible Film

5

ITO

No ITO

λ（nm)

%R

4



目的モクテキInvisibleのシミュレーション結果ケッカ

基材　Galss キザイ

simulation

4層ソウITO210ÅITO210Å

3層ソウSiO2530ÅSiO2530Å

2層ソウTiO278ÅTiO278Å

1層ソウSiO2100ÅSiO2100Å

λ％R％Tλ％R％T%R 差サ指標シヒョウ

3907.6581287.296033907.6421592.23620.01597

4007.0020388.862464007.5963592.30967-0.594320.59432

4106.6628789.814194107.5476992.3784-0.884820.88482

4206.4405290.595674207.4936592.45021-1.053131.05313

4306.2891.261194307.4477192.50589-1.167711.16771

4406.1640291.848664407.4068392.56222-1.242811.24281

4506.081292.359864507.3628592.61269-1.281651.28165

4606.1701692.397484607.3150592.66133-1.144891.14489

4706.2622892.42234707.262892.71436-1.000521.00052

4806.3515792.441544807.2098192.76809-0.858240.85824

4906.4318992.465834907.1574292.8248-0.725530.72553

5006.5061692.490345007.0996592.88763-0.593490.59349

5106.6361992.413395107.0450292.94471-0.408830.40883

5206.7547892.344355206.9866793.0052-0.231890.23189

5306.8582992.286985306.9316793.06174-0.073380.07338

5406.9495192.239135406.8742793.120520.075240.07524

5507.027292.202365506.8225993.173330.204610.20461

5607.0938392.17455606.7683293.228690.325510.32551

5707.150192.155055706.7116893.286380.438420.43842

5807.1965592.143715806.6576693.341360.538890.53889

5907.2345792.139245906.6041693.395790.630410.63041

6007.2634892.141626006.5516893.448330.71180.7118

6107.2865392.138816106.4984293.501580.788110.78811

6207.3028792.140526206.449293.549360.853670.85367

6307.3127492.147866306.3996693.597430.913080.91308

6407.3176892.160026406.3529693.643250.964720.96472

6507.3175992.176736506.3071793.688341.010421.01042

6607.3134492.192456606.261493.733441.052041.05204

6707.3046992.212326706.2157593.778431.088941.08894

6807.2930592.235166806.1725293.821481.120531.12053

6907.2786892.260736906.1312293.862961.147461.14746

7007.2605192.289767006.0891793.905251.171341.17134

7107.2465992.30997106.0469793.947721.19962

7207.2316592.331117206.0088393.986331.22282

7307.2161992.35297305.9742994.021531.2419

0.7837548387

4

A

B

C

3

A

B

C

2

A

B

1



目的モクテキInvisible、結晶化フィルムのサンプル作成ケッショウカサクセイ

100114－1




張力150N、成膜MR温度：0℃（結晶化のため。成膜は全て0℃）チョウリョクセイマクオンドケッショウカセイマクスベ

脱ガスダツMR

BMBDC BMB


SiO2130*510mm DL AC





脱ガスダツ80℃×0.5m/min（結晶化は3Pass）ケッショウカ






SiO2Nb2O5SiO2ITO


NG11005.2780.95301.3*22101.2Invisible Film(200Ω/□狙い）ネラ膜厚が計算間違いのためNG マクアツケイサンマチガ

2****2362.21661.5結晶化フィルム（250Ω/□狙い）ケッショウカネラ



Rs％THazeB*


NG110078530210********NG

2**236166254*87.688.80.60.72.672.09




％T

＜結果＞ケッカABAB

80089.5289.848009.638.64

79989.5789.867999.68.64

79889.689.877989.558.63

79789.6189.937979.488.64

79689.7290.067969.428.63

79589.7690.117959.368.63

79489.7990.137949.318.63

79389.7890.227939.268.64

79289.8490.217929.228.67

79189.9490.247919.198.71

79089.8790.147909.158.73

78989.8590.17899.18.8

78889.8190.027889.068.88

78789.8390.047879.028.96

78689.8590.067869.019.05

78589.7790.047859.039.16

78489.6289.977849.079.27

78389.4889.97839.19.41

78289.5189.937829.159.56

78189.4589.887819.249.69

78089.3989.747809.339.81

77989.2589.677799.429.93

77889.1589.567789.5310.05

77789.0689.537779.6410.14

77688.9389.447769.7410.16

77588.7889.367759.8310.21

77488.7189.37749.9210.22

77388.6389.197739.9910.22

77288.6689.1577210.0410.21

77188.6189.0677110.1210.18

77088.5389.0377010.2210.15

76988.5389.0176910.2910.13

76888.5289.0576810.3410.09

76788.4589.1276710.399.99

76688.5189.276610.429.87

76588.5589.2776510.429.73

76488.689.2676410.419.59

76388.6589.3276310.389.45

76288.7289.4376210.349.29

76188.7789.5176110.299.14

＜結論＞ケツロン76088.9389.7276010.248.99

結晶化については特に問題なし。ケッショウカトクモンダイ75989.0289.9175910.188.84

75889.1190.175810.068.67

75789.2290.257579.948.49

75689.3990.447569.88.32

H2分圧ブンアツ75589.6790.597559.648.17

75489.8790.797549.478.03

75389.9890.937539.317.9

75290.1791.17529.157.78

75190.3391.297518.997.67

75090.4191.387508.827.58

74990.591.467498.667.52

74890.6191.597488.517.48

74790.791.667478.377.45

74690.8991.77468.247.46

7459191.767458.127.49

74491.0491.7474487.53

74391.0691.657437.917.58

74291.0791.577427.837.65

74191.1291.517417.87.74

74091.1291.477407.787.84

73991.0391.357397.797.96

73890.9391.197387.828.08

73790.8291.097377.878.21

73690.6590.927367.918.31

73590.5190.747357.978.41

73490.3690.587348.058.51

※詳細なQuleeデータは、別ファイル参照。ショウサイベツサンショウ以上イジョウ73390.2190.397338.148.6

73290.1790.247328.278.71

73190.1190.167318.398.81

73090.0790.117308.548.88

72989.95907298.678.94

72889.8289.897288.798.98

72789.6589.797278.919.01

72689.5289.7272699.01

72589.4389.687259.098.99

72489.4389.647249.188.97

72389.489.637239.268.94

72289.4189.657229.328.89

72189.4589.77219.378.81

72089.4689.777209.418.75

71989.4889.797199.448.67

71889.589.847189.458.6

71789.5289.887179.438.53

71689.5789.937169.418.46

71589.65907159.378.39

71489.7890.17149.338.34

71389.8490.177139.288.31

71289.8890.217129.218.28

71189.9190.267119.158.29

71089.9890.37109.18.32

70989.9690.327099.078.38

70889.9290.327089.038.46

70789.9190.277078.998.56

70689.8490.247068.978.68

70589.8290.27058.968.81

70489.7890.17048.988.95

70389.7489.997039.029.1

70289.6589.887029.079.26

70189.5889.777019.159.42

70089.4189.587009.259.59

69989.389.436999.369.76

69889.0789.196989.499.94

69788.8789.016979.6110.11

69688.788.836969.7610.25

69588.5388.766959.910.38

69488.3788.6769410.0610.49

69388.2788.5669310.2310.58

69288.1688.5269210.3910.63

69188.0988.569110.5510.67

69088.0388.4769010.710.68

68987.9488.4268910.8410.67

68887.8488.3968810.9410.61

68787.888.468711.0210.54

68687.7488.4168611.0910.46

68587.7888.5168511.1310.35

68487.7988.6168411.1310.22

68387.8588.7568311.1210.07

68287.9788.9768211.099.91

68188.1289.1768111.039.74

68088.2289.3268010.959.58

67988.3289.4267910.859.42

67888.4389.5367810.749.27

67788.5489.667710.69.13

67688.6889.7567610.459.02

67588.8389.9567510.38.92

67488.9890.1367410.138.82

67389.1190.36739.978.75

67289.2690.466729.818.72

67189.3890.556719.688.7

67089.4790.596709.558.72

66989.5490.576699.438.75

66889.6190.586689.358.8

66789.6290.566679.288.87

66689.690.476669.228.95

66589.5790.416659.189.03

66489.5290.346649.179.12

66389.4990.256639.169.19

66289.4490.176629.189.28

66189.3790.086619.219.34

66089.3289.986609.289.39

65989.2589.886599.359.42

65889.1489.786589.429.44

65789.0589.676579.59.44

65688.9389.576569.589.43

65588.8989.526559.659.38

65488.8589.466549.719.32

65388.7989.476539.769.23

65288.7789.476529.799.12

65188.889.556519.819.01

65088.8189.586509.818.89

64988.989.696499.788.76

64888.9889.776489.738.65

64789.0589.876479.678.52

64689.1589.986469.68.43

64589.3590.126459.538.34

64489.4590.26449.448.27

64389.690.316439.348.22

64289.6390.46429.258.19

64189.7290.476419.168.2

64089.7690.476409.088.24

63989.7190.463998.33

63889.6890.276388.938.43

63789.6890.216378.98.58

63689.5990.036368.898.76

63589.5689.946358.98.95

63489.589.776348.959.13

63389.3289.586339.049.33

63289.1389.416329.149.53

63188.9589.216319.289.72

63088.7589.026309.449.91

62988.5988.826299.6210.08

62888.4488.676289.7910.22

62788.2788.516279.9910.34

62688.1288.3562610.1810.44

62587.9488.2462510.3710.5

62487.888.1462410.5610.52

62387.6488.1262310.7410.52

62287.4688.0662210.8910.49

62187.3488.0762110.9910.44

62087.3488.1562011.0810.37

61987.3588.2161911.1410.29

61887.4588.3461811.1610.19

61787.5688.4261711.1610.07

61687.6688.5861611.139.96

61587.7388.6961511.119.86

61487.8388.8561411.069.77

61387.8988.9661310.989.72

61287.9489.0461210.899.68

61188.0189.161110.799.68

61088.189.1561010.689.71

60988.1889.260910.579.74

60888.1989.2360810.499.78

60788.1989.2260710.419.84

60688.1989.2460610.379.91

60588.1289.1860510.3510.02

60488.0789.160410.3610.12

60388.0288.9960310.3810.22

60287.9688.9360210.410.3

60187.8888.8760110.4610.36

60087.8188.7960010.5210.4

59987.7488.7259910.6110.41

59887.6788.7159810.6910.38

59787.688.6859710.7710.33

59687.5588.6659610.8410.24

59587.5888.6759510.8810.14

59487.5488.6959410.910

59387.5488.7459310.899.84

59287.6288.8559210.859.67

59187.7688.9859110.789.5

59087.8889.1159010.79.33

58988.0489.2558910.619.18

58888.1889.3758810.499.05

58788.3389.5358710.358.92

58688.4989.6358610.198.84

58588.6389.7158510.048.81

58488.7289.735849.98.8

58388.8189.755839.778.84

58288.8489.735829.658.91

58188.8989.695819.599.01

58088.8589.615809.559.15

57988.7389.485799.559.31

57888.6289.365789.589.48

57788.5289.215779.659.66

57688.3989.035769.769.83

57588.2888.855759.889.98

57488.1288.6457410.0210.11

57387.9588.4757310.1710.2

57287.7888.3157210.3310.27

57187.6188.1957110.4910.32

57087.4488.0857010.6410.33

56987.3588.0356910.7910.32

56887.2687.9956810.9110.3

56787.2488.0356711.0210.26

56687.2688.0556611.0910.2

56587.2588.0556511.1310.14

56487.2888.1656411.1410.09

56387.388.2856311.1210.05

56287.3288.3456211.110.03

56187.388.3756111.0710.05

56087.2888.4156011.0410.09

55987.388.415591110.14

55887.3288.3855810.9810.25

55787.3188.3555710.9710.37

55687.2588.2955610.9810.48

55587.2188.2355511.0110.61

55487.1188.1655411.0410.75

55387.0188.0855311.1210.88

55286.9187.9955211.2110.97

55186.7287.8155111.3111.06

55086.6387.755011.4211.12

54986.5287.6254911.5311.13

54886.4587.5854811.6411.09

54786.3687.5454711.7311.03

54686.3487.5954611.810.93

54586.3787.6354511.8410.79

54486.487.7154411.8410.64

54386.4887.8654311.8110.48

54286.5787.9754211.7410.31

54186.6988.154111.6510.18

54086.888.2854011.5410.07

53986.9288.3853911.429.98

53887.0488.5353811.299.93

53787.1388.653711.169.91

53687.2588.6653611.049.93

53587.3588.6853510.939.96

53487.3888.6653410.8410.02

53387.3188.5753310.7810.11

53287.2588.4653210.7510.22

53187.288.2753110.7610.33

53087.0888.1153010.8110.44

52986.9387.9552910.8810.52

52886.8287.8152810.9710.58

52786.7187.6552711.0710.6

52686.6687.6252611.1810.59

52586.6487.5952511.2610.56

52486.5887.5952411.3410.52

52386.5587.6152311.3910.46

52286.5387.6452211.4210.41

52186.5387.6552111.4310.35

52086.5687.7352011.4310.31

51986.5687.7551911.4110.3

51886.5687.7851811.3910.3

51786.5787.7451711.3710.35

51686.687.7451611.3610.43

51586.687.7151511.3510.55

51486.5587.6551411.3610.69

51386.4587.5451311.410.83

51286.3487.451211.4710.98

51186.287.2351111.5611.11

51086.0287.0451011.6711.22

50985.8786.8950911.7911.32

50885.7286.7950811.9211.39

50785.5986.750712.0511.43

50685.586.6950612.1611.42

50585.4586.7150512.2511.39

50485.486.7950412.3111.32

50385.4186.8150312.3511.24

50285.4786.8850212.3511.14

50185.5386.9650112.3311.06

50085.687.0450012.2910.99

49985.6387.149912.2410.94

49885.787.1649812.1810.93

49785.7587.1849712.1210.93

49685.7687.249612.0810.96

49585.7387.1749512.0411.02

49485.6787.0949412.0211.08

49385.6386.9849312.0211.15

49285.6386.949212.0511.22

49185.5686.8149112.0711.26

49085.4786.7849012.1111.29

48985.3986.7148912.1711.3

48885.3186.6348812.2211.3

48785.2486.5748712.2711.28

48685.2586.5948612.311.23

48585.2186.5848512.3211.17

48485.2186.5748412.3311.12

48385.2686.6748312.3111.06

48285.386.7448212.2811.01

48185.3286.8148112.2610.99

48085.2686.8348012.2310.99

47985.2286.847912.2111.02

47885.1886.7147812.2111.09

47785.1186.5947712.2211.18

47685.0686.5247612.2511.27

47584.9986.4347512.311.35

47484.8986.3447412.3511.44

47384.7786.2347312.4211.51

47284.6886.1547212.511.55

47184.686.0447112.5911.57

47084.5285.8747012.6611.59

46984.4485.8246912.7211.58

46884.485.7946812.7611.57

46784.3685.7646712.7911.57

46684.3285.7846612.8311.56

46584.385.8446512.8411.55

46484.2885.8646412.8511.55

46384.2685.8746312.8711.58

46284.2285.8846212.911.63

46184.1985.8146112.9411.69

46084.0685.746012.9911.77

45983.9485.6245913.0211.83

45883.8485.5445813.0711.89

45783.8185.4945713.1311.95

45683.7885.4245613.1812.01

45583.7185.3545513.2312.04

45483.6885.3145413.2712.05

45383.6285.2745313.312.07

45283.5785.2345213.3412.07

45183.5285.1945113.3812.08

45083.4285.1845013.4112.08

44983.3485.1344913.4512.07

44883.2785.1344813.512.07

44783.2385.1344713.5412.1

44683.1185.0744613.612.12

44582.9985.0244513.6512.15

44482.9284.9844413.712.17

44382.8784.9344313.7412.21

44282.8484.9144213.7812.24

44182.884.8544113.812.26

44082.7684.8144013.8112.27

43982.7384.7843913.812.27

43882.784.7643813.812.27

43782.6484.743713.7912.24

43682.5284.6343613.812.23

43582.4684.5643513.8112.21

43482.3784.5243413.8512.18

43382.384.5143313.912.17

43282.284.4843213.9412.15

43182.1184.4343113.9812.13

43082.0784.4543014.0112.15

4298284.442914.0112.19

42881.9984.3842814.0112.27

42781.9384.2442714.0112.36

42681.8384.1342614.0412.48

42581.6883.9342514.0412.61

42481.5683.842414.0912.73

42381.3583.6342314.1712.83

42281.0783.4242214.3112.93

42180.8883.2542114.4713.01

42080.6783.1342014.6313.05

41980.448341914.8113.11

41880.2882.9741814.9813.15

41780.1382.9141715.1313.19

41679.9882.9141615.2313.25

41579.882.8641515.2813.29

41479.7482.8641415.313.36

41379.6282.8341315.3113.41

41279.5782.8741215.3313.44

41179.4282.841115.3713.46

41079.3282.7541015.4213.42

40979.1582.7140915.4713.33

40878.9582.6740815.5413.22

40778.7882.6140715.613.1

40678.6182.6140615.6312.96

40578.5182.5640515.6112.85

40478.5682.6240415.5112.76

40378.6182.6440315.4112.74

40278.6482.6140215.2712.78

40178.5882.4640115.1412.88

40078.5182.2240015.0813.02

39978.3181.8939915.0513.16

39878.0181.5439815.1413.28

39777.6481.239715.3113.38

39677.3380.9639615.5113.45

39576.9980.7739515.7713.5

39476.6880.6839416.0213.57

39376.480.5539316.2113.68

39276.0380.3739216.3613.87

39175.7180.239116.4814.14

39075.3879.9739016.5814.39

38975.0179.7138916.714.65

38874.6179.4638816.8614.84

38774.1779.2338717.0714.93

38673.8279.0938617.3214.91

38573.579.0638517.5314.78

38473.2879.1238417.7514.57

38373.0779.2638317.8514.34

3827379.4738217.7814.13

38172.9979.638117.5913.99

38073.0479.6438017.3113.89

37973.0779.5537916.9913.87

37872.9379.2937816.7313.85

37772.6678.9337716.5813.87

37672.2778.4937616.5513.81

37571.8578.0637516.6113.7

37471.3677.7137416.7513.62

37370.9877.4537316.8913.61

37270.5577.1537216.9713.76

37170.2176.7837117.0114.07

37069.8976.3937017.0514.49

36969.4575.8536917.1715.02

36868.7775.2736817.3415.53

36767.9774.5636717.6815.91

36667.1373.9736618.1216.09

36566.3573.536518.5916.16

36465.6373.2436419.0216.05

36365.0173.136319.3515.99

36264.6273.0536219.4815.88

36164.472.9936119.4215.8

36064.2172.8436019.315.74

35964.172.6235919.115.65

35863.7872.2635818.9115.47

35763.4871.9435718.8315.16

35663.1271.6835618.7514.74

35562.8571.5535518.6714.33

35462.4271.2635418.4614.12

35362.0470.7735318.1514.11

35261.670.1335217.8314.32

35161.1269.1735117.5814.77

35060.4968.2235017.4715.27

34959.667.1134917.6215.82

34858.6366.134817.9816.27

34757.6565.334718.4916.6

34656.7164.7634619.116.82

34555.9564.3534519.5717.09

34455.3664.0234419.9417.41

34354.6963.5834320.2217.73

34254.0663.0234220.4217.94

34153.5762.6234120.6417.9

34052.962.1534020.8217.61

33952.3461.7533920.8917.14

33851.8961.4733820.816.55

33751.6161.1933720.5215.99

33651.3960.8333619.9615.54

33551.0160.133519.3215.35

33450.4959.1233418.7515.4

33349.757.9533318.3615.59

33248.6356.6533218.1415.86

33147.4455.2233118.1616.28

33046.1753.7633018.3916.83

32944.7552.1832918.7517.5

32843.2550.5332819.1518.23

32741.5848.6332719.5418.9

32639.5346.5132620.0219.37

32537.3344.1832520.4619.57

3243541.7932420.8519.47

32332.4739.1832321.1219.09

32229.643632221.1618.47

32126.4432.1632121.0217.79

32022.8327.6332020.7617.07

31918.7822.5331920.3416.46

31814.4617.1731819.7116

31710.2612.0231719.0915.86

3166.467.4831618.4615.98

3153.524.0231518.0716.42

3141.551.831417.8817.14

3130.450.5231317.7818.01

312-0.06-0.0631218.0519.01

311-0.15-0.1531118.5619.96

310-0.010.0131019.2820.73

3090.120.1530920.0221.3

3080.130.1630820.7821.54

3070.080.1130721.3121.37

3060.060.0830621.6520.69

3050.050.0730521.5919.8

3040.050.0630421.1118.87

3030.050.0630320.3418.17

3020.050.0530219.417.74

3010.050.0530118.5917.66

3000.050.0530018.0217.86

12

１

12

No.1

No.2

No.3

No.4

No.5

30mm

30mmm

150mm


Center

１

12

10m

Crystal(250Ω/□）

1

As-depo

After Anneal

λ（nm)

%T

Crystal Film

As-depo

After Anneal

λ（nm)

%R

Crystal Film



目的モクテキ高透過率（200、400Ω/□）のサンプル作成コウトウカリツサクセイ

100113－1




張力150N、成膜MR温度：常温チョウリョクセイマクオンドジョウオン

脱ガスダツMR

BMBDC BMB


SiO2130*510mm DL AC





脱ガスダツ80℃×1m/min






SiO2Nb2O5SiO2ITO


11005.22500.351712101.2200Ω/□狙いネラ

210052500.35740.91252400Ω/□狙いネラ



ロールで提出のため未確認。テイシュツミカクニン

＜サンプル概要＞ガイヨウ

＜結論＞ケツロン

特に問題なし。トクモンダイ

１

12

No.1

No.2

No.3

No.4

No.5

30mm

30mmm

150mm


Center

１

12

No1(200Ω/□）

No2(400Ω/□）

10m

10m



目的モクテキ予備テストヨビ

100112－1



フィルムPET100μmに客先支給基材を貼り付けキャクサキシキュウキザイハツ

張力100N、成膜MR温度：常温チョウリョクセイマクオンドジョウオン

脱ガスダツMR

BMBDC BMB


SiO2130*510mm DL AC



到達圧力トウタツアツリョク6×10-4Pa(巻取室）マキトシツ


脱ガスダツ80℃×0.5m/min






SiO2Nb2O5SiO2ITO


71005.22500.351712101.2

62050.7*2L*L*L*L*L*L*L*L*L*L*L*L*L*L*L*

51500.496.572879514896.313933635396.613988042396.081062975796.477675519695.884910551896.311047714396.170059935696.373881587896.199811798696.374980034496.122837675496.335072287396.221352789296.41626332

42500.35740.91252a*a*a*a*a*a*a*a*a*a*a*a*a*a*a*

32050.7*2-0.1167124516-2.2567558914-2.2991041196-1.7428532495-1.5685947801-1.3158039758-1.1608365007-1.1224912533-1.2568622561-0.7988897512-1.0890985039-0.5639658795-0.731045105-0.8579575004-1.0665735054

21500.4b*b*b*b*b*b*b*b*b*b*b*b*b*b*b*

12050.7*25740.91321.90.46644885140.48914643360.15241817530.1564843484-0.49645336840.1016554096-0.7267350688-1.5818876128-1.484904385-1.519083889-1.2804733274-1.3799148687-1.3168042454-1.3701765105-1.2578424745


No7No6No5No4No3No2No1

＜結果＞ケッカBaseABABABABABABAB

Rs％THazeB*80091.8285.8486.2685.9586.2486.6187.3385.5286.0786.4786.5387.187.1386.6486.98

NoSiO2Nb2O5SiO2ITOABABABAB79992.2586.1986.4986.3486.4886.9587.5585.7486.286.9386.9687.0187.2287.0587.06

Base************79891.7985.3986.2285.9285.9586.4787.1985.4585.8486.0386.4986.8787.0786.586.64

710025051721018618891.692.60.50.60.490.1579791.6685.986.0485.6986.2286.7387.2485.7986.0586.8186.8287.287.0586.8287.29

620519319291.192.30.50.70.16-0.5079692.2886.3386.5286.4786.7686.5687.6686.3886.6687.5687.3187.5287.4586.8387.15

515019319790.491.90.60.70.10-0.7379592.5186.6386.5385.9786.9587.288.0585.9786.5986.9287.3387.2287.6787.1387.75

42505741253793869192.20.50.7-1.58-1.4879492.3885.7286.3186.2986.4986.8287.7785.8986.1986.5186.7486.9687.2987.0687.34

320538541290.992.20.60.7-1.52-1.2879392.0886.6886.2686.1986.6787.2487.6686.0186.6787.1787.4387.5287.7187.0187.06

215038240290.7920.60.7-1.38-1.3279292.586.2886.9286.6687

intelligent deposition of high grade ito film for touch ... · touch screen & optical film market...

Documents