integrated design of run-to-run pid controller and spc monitoring...

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Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. Integrated design of run-to-run PID controller and SPC monitoring for process... Fugee Tsung; Jianjun Shi IIE Transactions; Jun 1999; 31, 6; ABI/INFORM Global pg. 517

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Page 1: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Integrated design of run-to-run PID controller and SPC monitoring for process...Fugee Tsung; Jianjun ShiIIE Transactions; Jun 1999; 31, 6; ABI/INFORM Globalpg. 517

Page 2: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 3: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 4: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 5: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 6: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 7: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 8: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 9: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 10: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 11: Integrated design of run-to-run PID controller and SPC monitoring …qlab.ieda.ust.hk/upload/paper03.pdf · 2017. 12. 14. · lection and time series model fitting. The model fitting

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.