ibex nanotechnology symposium presentation oct. 2007

Nano SymposiumIbex EngineeringOctober 31, 2007

ELECTROMATEToll Free Phone (877) SERVO98

Toll Free Fax (877) SERV099www.electromate.com

[email protected]

Sold & Serviced By:

Agenda

• About Ibex • Mechanical Considerations

in Nano Positioning applications

• Examples of Nano Positioning In Industry

The Science Of Precision Motion



[email protected]

Sold & Serviced By:

Introduction

• Precision Stage Manufacturer• Forte

– Micron and under– Cross roller stages

• We make Nano technology easy

The Science Of Precision Motion



[email protected]

Sold & Serviced By:

Ibex History

• Founded By Andre Perrin in 1999• Background – Metrology System• Formed the company to fill a gap

by providing non-standard precision motion control platforms



[email protected]

Sold & Serviced By:

What We Look For When Designing A High Precision Stage



[email protected]

Sold & Serviced By:

When Reviewing a Nano Application

• Basic Engineering– Project scope– Specification review– Engineering challenges

relative to the spec– Component sizing– Materials– Control

• Who, what, where, and how • Feedback compatibility

The Process



[email protected]

Sold & Serviced By:

The Decision Driver

• Accuracy and Repeatability– Length of Travel

• Straightness/Flatness • Roll, Pitch and Yaw

– Envelope– Load and load position– Multi-axis Compounding– Environment

• Materials• Finish

Basic Engineering



[email protected]

Sold & Serviced By:

Concept Review

Accuracy• The closeness of agreement between the

results of a measurement and the true value of the object being measured.

Repeatability• Under Identical conditions how well a

system can return to one commanded location– Unidirectional– Bi-Directional

Basic Engineering



[email protected]

Sold & Serviced By:

Encoder Resolution doesn’t define the Accuracy of a Complete System

1. Pitch2. Roll3. Yaw4. Flatness5. Straightness 6. Scale

The combined interacting effects of all contributing factors must be analyzed before total system precision can be determined.

Mechanical Concepts



[email protected]

Sold & Serviced By:

Basic Engineering



[email protected]

Sold & Serviced By:

Concept Review

• If Straightness/Flatness is critical to application– Then what will the stage be mounted to….

• This Very important!!!

Basic Engineering

1 mm shim

4 M wide, 1.5 M tall

All Granite



[email protected]

Sold & Serviced By:

Concept Review

• Envelope

Basic Engineering

Nothing is for freeELECTROMATE

Toll Free Phone (877) SERVO98Toll Free Fax (877) SERV099

[email protected]

Sold & Serviced By:

Determine position and state of the load

• Orientation of the Load– Bearings– Materials– Abbe Error

• Vibration - Work• Speed & loading

– Settling

Basic Engineering



[email protected]

Sold & Serviced By:

Specifications Drive Bearing Choice

• Bearing type– Crossed Roller

• Anti-Creep considerations– Profile Rails

• Precision/preload– Air bearing

• Size • Orientation• Cost

Basic Engineering



[email protected]

Sold & Serviced By:

Contact Area

• Bearing Stiffness review

Basic Engineering



[email protected]

Sold & Serviced By:

http://images.google.com/imgres?imgurl=http://www.isocalc.com/isocalc3/examples/images/sphere-iso.png&imgrefurl=http://www.isocalc.com/isocalc3/examples/spheres.htm&h=400&w=400&sz=32&hl=en&start=3&um=1&tbnid=sZXqJ91dMM-1IM:&tbnh=124&tbnw=124&prev=/images%3Fq%3Dsphere%26svnum%3D10%26um%3D1%26hl%3Den%26sa%3DN

http://www.mscsoftware.com/support/prod_support/nastran/performance/cylinder_modesX_100k.gif

Crossed Roller Review

• Bearing– Anti-Creep Considerations– Materials

Basic Engineering



[email protected]

Sold & Serviced By:

Air Bearings Review

• Air Bearings– High pressure = less deformation– No friction = no heat– Precision parts– Control Flatness and Straightness

Basic Engineering



[email protected]

Sold & Serviced By:

Velocity Control Considerations

• Ball Screws• Lead Error• Ball entering and exiting the return tube

• Profile Rails• Ball entering and exiting the return tube• Seal Drag

• Best – Linear Servo (Piezo or Ironless)– Air Bearing or Crossed Rollers

Basic Engineering



[email protected]

Sold & Serviced By:

Environment other Error Causing Factors

• Thermal expansion errors • Feedback Position• Cosine errors• Abbé offsets

Basic Engineering



[email protected]

Sold & Serviced By:

Environment

Basic Engineering

Temperature

Thermal Expansion• Stainless Screw = 12ppm/deg C• Aluminum = 23 ppm/deg. C• 3 degree rise makes a 100mm screw grow 7

microns

• Areas of concern– Type of motor and associated duty– Temperature swing of the environment– Adjacent equipment ELECTROMATE


[email protected]

Sold & Serviced By:

Feedback

• Feedback type– Linear

• Digital vs Analog– Scale Type – Typically

20um grating

• Tape• Glass 1.8 µm/m/°C • Invar 0.6 µm/m/°C

– Rotary– Interferometer

Basic Engineering



[email protected]

Sold & Serviced By:

Feedback – Cosine Error

Cosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage.

Basic Engineering



[email protected]

Sold & Serviced By:

Abbé errors result from a positioning measuring device (typically a linear encoder) being offset from the point of work (end-effector) due to mechanical errors

Basic Engineering



[email protected]

Sold & Serviced By:

Concept Review

Other Considerations• Structural Stiffness

– What are we mounting too– Vibration dampening– The building and traffic

• Wire Management• Controls

– Features based relative to the end goal– Mapping, Notch filtering, Adaptive tuning for

variable inertias, Sin-Cosine inputs….

Basic Engineering



[email protected]

Sold & Serviced By:

A World Of Choice

Custom and OEM Built Motion Platforms



[email protected]

Sold & Serviced By:

System Technologies and Configurations

• Positioning stages– X,Y,Z, Theta– Z-Wedges– Goniometer– Gantries– Various compound stages– Granite Stages– Assemblies



[email protected]

Sold & Serviced By:


• Bearing Technologies– Air Bearings– Crossed Roller– Recirculating Ball

• Round and Profile– Cam Rollers

• Screw Technologies– Precision Ground – Precision Rolled / Standard Rolled– Lead/acme



[email protected]

Sold & Serviced By:


• Controls– ACS-Tech80– Galil– Yaskawa– Trio– PLC….



[email protected]

Sold & Serviced By:

http://www.acsmotioncontrol.com/media/solutions/SPiiPlus PCI.jpg

http://www.acsmotioncontrol.com/Portals/8/Images/SPiiPlusPCI.jpg


–Motor Technologies– Nano Motion– Rotary

• Stepper • Servo

– Linear Servo• Nippon Pulse• Yaskawa• Technotion

– Integrated Lead/acme motorsELECTROMATE


[email protected]

Sold & Serviced By:

The Markets We Serve

• Biomedical/Pharmaceutical• Life Sciences

– Cell Imaging…..• Medical Device • Semi Conductor Fab• Data Storage• National Lab/Research• Metrology• Photonics/Telecom• Aerospace and Defense….



[email protected]

Sold & Serviced By:

National Labs / Research



[email protected]

Sold & Serviced By:

Kinematics Systems

5 and 6 Degrees of freedomMultiple sizes and configurations.



[email protected]

Sold & Serviced By:

High and Ultra High VacuumIbex has the Vacuum solutions with years of experience building stages in a range atmospheres from 10-3 to 10-10. We’ve built an array of precision stage configurations using multiple combinations of bearing and motors.



[email protected]

Sold & Serviced By:

Gantry and Granite



[email protected]

Sold & Serviced By:

The Sciences



[email protected]

Sold & Serviced By:

Multi Axis Nano Stages



[email protected]

Sold & Serviced By:

Metrology

Metrology Platforms



[email protected]

Sold & Serviced By:

Metrology



[email protected]

Sold & Serviced By:

Exotic Platforms



[email protected]

Sold & Serviced By:

Life Sciences - OEM Builds



[email protected]

Sold & Serviced By:

Semiconductor



[email protected]

Sold & Serviced By:

Medical OEM’s



[email protected]

Sold & Serviced By:

Rotary – Nano and Direct Drive Servo



[email protected]

Sold & Serviced By:

Custom Applications



[email protected]

Sold & Serviced By:

All mechanical designs are created in 3D

IBEX is a Fully Integrated Company –

From 3D Design

Design To MFG



[email protected]

Sold & Serviced By:

Fully Integrated Manufacturing From SolidWorks

To Master Cam CAD/CAM

From 3D Design – To Mastercam

Design To MFG



[email protected]

Sold & Serviced By:

Fully Integrated CNC Mills

Mastercam to Machine Centers



[email protected]

Sold & Serviced By:

From Assembly to QA

In House Measuring Systems• Laser Interferometer – 1nm res• Auto Collimator• Laser Rotary Calibrator



[email protected]

Sold & Serviced By:

Thank You!

• For allowing our organization to present today

• We look forward to the partnership



[email protected]

Sold & Serviced By:

ibex nanotechnology symposium presentation oct. 2007

Technology

free toll free fax

electromatetoll free

servo98toll free fax

servo98 toll free fax

basic engineeringsold

basic engineering environment

basic engineeringcontact

ironless air bearing