ibex engineering high precision linear motion made easy presentation 2009
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High Precision Made Easy
Sub-Micron PositioningHosted by Electromate
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Agenda
• About Ibex • Considerations In Sub
Micron Position System• Projects
The Science Of Precision Motion
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Ibex Engineering Introduction
• Precision Stage Manufacturer• Forte
– Micron and under– Cross roller stages
• We make Nano technology easy
The Science Of Precision Motion
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Ibex History
• Founded By Andre Perrin in 1999
• Background – Metrology System
• Formed the company to fill a gap In Industry by providing non-standard precision motion control platforms
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The Markets We Serve
• Biomedical/Pharmaceutical• Life Sciences
– Cell Imaging…..• Medical Device • Semi Conductor Fab• Data Storage• National Lab/Research• Metrology• Photonics/Telecom• Aerospace and Defense….
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What We Look For When Designing A High Precision System
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When Reviewing a Sub-Micron Application• Basic Engineering
– Project scope– Specification review– Engineering challenges relative to
the specification– Motor Type – Stiffness (Nanomotion)– Component sizing– Materials– Control (Galil)
• Stiffness• Feedback compatibility• Capability• Who, what, where, and how
The Process
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The Main Decision Drivers
• Accuracy and Repeatability– Length of Travel
• Straightness/Flatness • Roll, Pitch and Yaw
– Envelope– Load and load position– Multi-axis Compounding– Environment
• Materials• Finish
– Feedback Type
Basic Engineering
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Concept Review
Accuracy• The closeness of agreement between the
results of a measurement and the true value of the object being measured
Repeatability• Under Identical conditions how well a
system can return to one commanded location– Unidirectional– Bi-Directional
Basic Engineering
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Resolution
Resolution• Smallest possible movement of a system• Resolution of the Encoder• Step size
Encoder Resolution doesn’t define the Accuracy of a Complete System
• Many Factors Determine Accuracy
Mechanical Concepts
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Concept Review• Straightness/Flatness – Run out• Not The Same As Running Parallelism
Straightness
FlatnessELECTROMATE
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Basic Engineering
• Roll, Pitch and Yaw – Arc-sec
RollPitch
Yaw
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Basic Engineering
• Pitch – Arc-sec
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Basic Engineering
• Yaw – Arc-sec
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Basic Engineering
• Roll – Arc-sec
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What will the stage be mounted on???
• If accuracy is critical to the application– Roll, Pitch and Yaw– Straightness/Flatness
• It doesn’t matter how good the stage is if you mount to a potato chip….
Basic Engineering
1 mm shim can twist the entire structure
4 M wide, 1.5 M tall
All Granite
Compensate for Sag
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Concept Review
• Envelope
Basic Engineering
Nothing is for freeELECTROMATE
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Determine position and state of the load
• Orientation of the Load– Bearings– Materials– Abbe Error
• Load Vibration - Work• Speed - CG
– Settling
Basic Engineering
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Specifications Drive The Choice of Bearing
• Bearing type– Crossed Roller
• Anti-Creep considerations– Profile Rails
• Precision/preload– Air bearing
• Size • Orientation• Cost
Basic Engineering
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Contact Area• Bearing Stiffness review
Ball versus Crossed Roller
Basic Engineering
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Crossed Roller Review
• Bearing– Anti-Creep Considerations– Materials
Basic Engineering
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Air Bearings Review
• Air Bearings– More surface area = High Stiffness – High pressure = less deformation– No friction = no heat– Precision parts– Control Flatness and Straightness
Basic Engineering
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Velocity Control Considerations• Ball Screws
• Lead Error• Ball entering and exiting the return tube
• Profile Rails• Ball entering and exiting the return tube• Seal Drag• Preload
• Best – Linear Servo
• (Piezo - NanoMotion or Ironless)– Air Bearing or Crossed Rollers
Basic Engineering
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Environment other Error Causing Factors
• Thermal expansion errors • Feedback • Cosine errors• Abbé offsets
Basic Engineering
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Environment
Basic Engineering
Temperature
Thermal Expansion• Stainless Screw = 12ppm/deg C• Aluminum = 23 ppm/deg. C• 3 degree rise makes a 100mm screw grow ~7
microns
• Areas of concern– Type of motor and associated duty– Temperature swings of the environment– Adjacent equipment ELECTROMATE
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Environment
Basic Engineering
Materials• Granite
– Hardness – good for lapping– Best commercially available flatness spec’s– Size = Thermal inertia
• Stainless Steel– Good stiffness – 3 times that of Aluminum– Half the expansion of Aluminum
• Aluminum – Stiffness to weight ratio– Rapidly adjusts to temp change
Stiffness
F= KX
F= Force
K = Modulus of elasticity
X= DeflectionELECTROMATE
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Feedback
• Feedback type– Linear
• Digital vs Analog– Scale Type – Typically
20um grating
• Tape• Glass 1.8 µm/m/°C • Invar 0.6 µm/m/°C
– Rotary– Interferometer
Basic Engineering
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Feedback – Cosine Error
Cosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage.
Basic Engineering
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Abbé errors– Encoder Measurement vs. Actual Position
• Mechanical Errors
Basic Engineering
Control thinks you are
moving in a straight line
The encoder head doesn’t care or know that there is
a shift
The work is really out
here
Control thinks the work is
here
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Concept Review
Other Considerations• Structural Stiffness
– What are we mounting too– Mechanical Vibration dampening– The building and traffic
• Wire Management• Controls
– Features based relative to the end goal– Mapping, Notch filtering, Adaptive tuning for
variable inertias, Sin-Cosine inputs….
Basic Engineering
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Natural Frequencies and Gain Control
Basic Engineering
• All mechanical systems have a natural frequency • Sometimes the system frequency can be in a range that causes
instability issues• Advanced Gain controls such as FRF (Frequency Response
Function) can be used to improve your mechanical system stability when applications demand– Velocity control– Short/fast settling times– Crisp Movements
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Natural Frequencies and Gain Control
Basic Engineering
• DSA (Digital Signal Analyzers) included in today’s controls make it possible to Characterize the system dynamics with FRF
• The Idea is Analyze and Monitor the resonance so that you can enhance the stability of the system through the optimization of Gains and System bandwidth.
• A perfect world is you get back what you put in - unity
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Natural Frequencies and Gain Control
Basic Engineering
• Through the use of FRF and Notch filters one can effectively dampen out some of the resonance.
• There are various levels of filters offered by many different control companies
•• Example show cause and effect
of a notch at 140Hz…thin line is the result thick line is the first analysis
• From here gains can be optimized for desired results
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A World Of Choice
Custom and OEM Built Motion Platforms
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System Technologies and Configurations
• Positioning stages– X,Y,Z, Theta– Z-Wedges– Goniometer– Gantries– Various compound stages– Granite Stages– Assemblies
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System Technologies and Configurations
• Bearing Technologies– Air Bearings– Crossed Roller– Recirculating Ball
• Round and Profile– Cam Rollers
• Screw Technologies– Precision Ground – Precision Rolled / Standard Rolled– Lead/acme
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System Technologies and Configurations
• Controls– Galil– Yaskawa– Trio– ACS– Elmo– PLC….
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System Technologies and Configurations
–Motor Technologies– Nano Motion– Rotary
• Stepper • Servo / Frameless
– Linear Servo• Nippon Pulse• Yaskawa• Technotion
– Integrated Lead/acme motors– Voice Coil ELECTROMATE
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Product and Capabilities Review
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National Labs / Research
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Kinematics Systems
5 and 6 Degrees of freedomMultiple sizes and configurations.
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Multi Pod Systems
6 Degrees of freedomMultiple sizes and configurations.
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High and Ultra High VacuumIbex has the Vacuum solutions with years of experience building stages in a range atmospheres from 10-3 to 10-10. We’ve built an array of precision stage configurations using multiple combinations of bearing and motors.
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Semi Conductor Research
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The Sciences
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Gantry and Granite
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Gantry and Granite
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Metrology
Metrology Platforms
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Metrology
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Semiconductor
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Semiconductor
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Nano Positioning
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Medical OEM’s
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Medical OEM’sLaser Based Scan Scopes
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Custom OEM Screw Applications
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Precision Screw Platforms
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Life Sciences - OEM Builds
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Life Sciences - OEM Builds
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Linear Crossed Roller Screw Stage
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Multi Axis Screw Stages
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Multi Axis Microscope Screw Stages
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Precision Screw Stage
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Vacuum Screw Stages
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Standard Screw Stages
• Configurable stages– Acme, Ball and Linear
Servo– Open or closed loop
• 10nm to 5um– Sizes
• 300,200,150,100 and 50mm
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Screw Driven Actuator
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Custom Screw Stages
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Stainless Screw Stages
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Linear Servo Applications
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Linear Servo Applications
500mm x 500mm Precision Linear Servo stage
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Linear Servo Applications
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Linear Servo Applications
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Always Developing New Products
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Always Developing New Products
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Always Developing New Products
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Voice Coil Linear Applications
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Custom Applications
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Custom Applications
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Exotic Platforms
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Custom Applications
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Aerospace - Gimbal
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Aerospace - Gimbal
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Exotic Nano Platforms
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Multi Axis Nano Stages
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Counter Balance Configurations
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Miscellaneous Assemblies
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Rotary Stages and Goniometers
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Rotary – Nano Direct Drive
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Rotary –Direct Drive Servo
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Rotary – Worm Gear
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Multiple Z-Wedge Configurations
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What’s New?
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All mechanical designs are created in 3D
IBEX is a Fully Integrated Company –
From 3D Design
Design To MFG
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Fully Integrated Manufacturing From SolidWorks
To Master Cam CAD/CAM
From 3D Design – To Mastercam
Design To MFG
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5 Fully Integrated CNC Mills
Mastercam to Machine Centers
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From Assembly to QA
In House Measuring Systems• Laser Interferometer – 1nm res• Auto Collimator• Laser Rotary Calibrator
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Thank You!
• For allowing our organization to present today
• We look forward to the partnership
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