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3. 50 µm SU-8 coating and exposure

4. 0.8 µm grid patterning

5. SU-8 development

2. 0.2 µm anode patterning

1. 0.2 µm Si wafer oxidation

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Cathode

Grid

Anode

L3 (single!)

SHV connectors

SHV

SHV

LEMO connectors

Preamp PowerNot shown

10 M10 M

10 M1 M

1 M

0.47 nF1000 V

0.47 nF1000 V

0.47 nF1000 V 0.47 nF

1000 V

10 pF *500 V

50

CAL

*This capacitor must be measured

Ω

Ω ΩΩ

Ω

ΩHoney_strip

HV

Gri

dH

V C

ath

Cat

h -

Cat

h +

Gri

d -

Gri

d +

An

o -

An

o +

Grid OutAno Out

+ -

MZØlÏMãµîMãCä5赃 h'ï[ÊÍp̵ÌMÉÊÈ×ØlÍpÌCÝ'Ô̵Û:ÒEÉÔÛMÍpÖMÈ5Ê°ØlÒEÊ°ÖCØlÈÒ×ÐÕÍÑPÈ×ËMÉ*ÈÉÝ×È'ÊE˵ÔÓ àuÉ°Ò

output pulse (mV)

coun

ts

55Fe spectrum in Helium + 20% iC4H10

Vgrid = 400V

Edrift = 1kV.cm-1

0

5000

10000

15000

20000

25000

30000

35000

40000

0 20 40 60 80 100

Vgrid = 400V

Edrift = 1kV.cm-1

55Fe spectrum in Argon + 20% iC4H10

output pulse (mV)

coun

ts

0

1000

2000

3000

4000

5000

0 10 20 30 40 50 60 70

Vgrid = 400V

Edrift = 1kV.cm-1

55Fe spectrum in Argon + 20% iC4H10

output pulse (mV)

coun

ts

1

10

10 2

10 3

10 4

0 10 20 30 40 50 60 70

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vâ

Vgrid (V)

Gai

n

Gain in Argon + 20% iC4H10

slope = 0.0334 V-1

10 3

10 4

360 380 400 420 440

Vgrid (V)

Gai

n

Gain in Argon + 20% CO2

slope = 0.0269 V-1

10 3

10 4

380 400 420 440 460 480 500

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vv

Ianode

Igrid

Icathode

Vgrid (V)

Cur

rent

(nA

)

Electrode currents in Argon + 20% iC4H10

10-1

1

10

340 360 380 400 420 440

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