Hollow Cathode Discharge Facility Experiment

Name:

Date:

Goal:

Substrate:

Sample Name:

Turn on Rotary Pump and Chiller

P = 0.03 Torr

Turn on TMP

B.P. = 3.0 x 10-5 Torr

Slow Down TMP

Turn off TMP

Feed in gases

W.P. =

Start RUN

V =

I =

Time =

End run

Shutdown

Remarks:

Hollow Cathode Discharge Facility Experiment

Name:

Date:

Goal:

Substrate:

Sample Name:

Turn on Rotary Pump and Chiller

P = 0.03 Torr

Turn on TMP

B.P. = 3.0 x 10-5 Torr

Slow Down TMP

Turn off TMP

Feed in gases

W.P. =

Start RUN

V =

I =

Time =

End run

Shutdown

Remarks: