high & ultrahigh vacuum thin film deposition technologyfrom an art form to a precise science...
TRANSCRIPT
e-Vap® Summary
Vacuum coating technology has evolvedfrom an art form to a precise science overthe past 40 years. It is now commonplaceto evaporate metals, alloys, compoundsand polymers, and control their desiredthicknesses from mere atomic layers toactual microns.
Thin Film Deposition
MDC produces state-of-the-art thin filmvacuum coating equipment. We currentlysupply users in the optical, metallurgical,medical, semiconductor, research &development, university and OEMmarketplace.Numerous applications include sunglasses,mirrors, laser optics, camera lenses, opticalfilters, infrared detectors, anti-reflectivecoatings, nano-technologies, medicaldevices, superconductors, telecommuni-cations, automotive decorative trim,costume jewelry, corrosion resistantcoatings, stage & entertainment lighting,fiber optic coating, display technologiesand MEMs technology.
The e-Vap® Product Line
MDC offers a wide range of choices andoptions. We understand that every vacuumsystem configuration may be different. Weoffer many standard off-the-shelfcomponents as well as customized designsto suit your particular deposition equipmentneed. The e-Vap® product line supportstwo distinct evaporation methods: the firstbeing thermal or resistive evaporation andthe second being electron beamevaporation.
Resistive Evaporation
The Re-Vap™ resistive sources are by farthe most economical and reliable methodof depositing thin films onto surfaces. Ingeneral terms, electric current passesthrough a resistive element that generatessufficient heat to melt and evaporatevarious coating materials. Materialscommonly evaporated include iron, nickel,aluminum, copper, tin, silver, gold andchrome. Three basic resistive elementdesigns are offered: filament coil, metal foiland oxide crucible types. Filament coildesigns are the most popular. All resistiveelements are relatively inexpensive andcan be discarded after each use or afterseveral uses.
Electron Beam Evaporation
MDC offers an unprecedented selection ofelectron beam evaporation sources andcontrol electronics. Electron beamevaporation is the most versatile means ofvacuum evaporation and deposition. Thistechnique allows the production of thin filmcoatings from pure elements, numerousalloys and compounds. Electron beamevaporation offers several advantages overcompeting processes including precisecontrol of low or high deposition rates,excellent material utilization, sequential &co-deposition and uniform low temperaturedeposition. It also offers relatively highevaporation rates, freedom from sourcecontamination, precise film compositionsand cooler substrate temperatures. Thematerials used for evaporation areavailable in near limitless shapes andforms, the most common being pellets,slugs and disks. Since the 1950s, thedevelopment of higher performance filmsand complex coating processes has beenobstructed by the lack of modern electronbeam evaporation equipment andtechnology. The e-Vap® product line hastaken this challenge head-on and provideselectron beam evaporation sources andcontrol electronics that incorporate leadingedge technologies unmatched in theindustry.
Frame 6 Electron Beam Source
Mighty Source™ mounted on a 6-inch CF flange
XY Programmable Sweep Controller
CVS High Voltage Power Supply
Copyright © 2005 MDC Vacuum Products CorporationReproduction in any manner, in whole or in part, in English or
in other languages, is prohibited. All rights reserved.
1
Miniature Evaporation Systems
Introduction 2
e-Vap® 100 10e-Vap® 3000 12Mighty Source™ 14
Modular Evaporation SourcesIndividual Source 17
Power Supplies 27
XY Programmable Sweep Controller 29
Ordering Information 43Index 44
Horizontal Source Assembly 23Vertical Source Assembly 25
Source Control Module 28Controls & Measurement
Deposition Monitoring and Control 33Crucible Indexer 36
Evaporation Source Accessories 37HF Emitter Assembly 41
Thin FilmDeposition
Thermal EvaporationRe-Vap™ 900 4Re-Vap™ 3000 6
e-Vap®
2 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
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micro-electronic, optical coating andsemiconductor industries. Electron beamevaporation sources are employed in theproduction of a multitude of low and hi-tech products including: sunglasses,camera lenses, optical filters, infrareddetectors, superconductors, automotivedecorative trim, costume jewelry, corrosionresistant surfaces and many others.Electron beam deposition is ideal forresearch and production applications dueto its widespread material availability,efficient material utilization and unmatchedfilm purity and uniformity.
e-Vap® Product Line
The e-Vap® product line is as vast as theapplications requiring electron beamevaporation. Each and every e-Vap®source is designed to meet or surpass thestringent requirements put forth by thevacuum coating world. As a leader andinnovator in this field, MDC holds variouspatents in electron-beam evaporationtechnology. Two notable patents includeU.S. patent numbers 5,418,348 and5,473,627. The first is for MDC’s uniqueelectron source design, which incorporateshigher material capacity with adramatically smaller source footprint. Thesecond, for an ingenious coolant deliverysystem incorporated into MDC’s UHV multi-pocket rotary sources. e-Vap® electronbeam sources are available in six basicsizes, called Frames, which canaccommodate small research as well aslarge production coating requirements withcrucible capacities from 2cc to 400cc. Thesources are offered individually or ascomplete turn-key, flange-mountedsystems with all necessary serviceconnections, including fluid and electricalfeedthroughs. These state-of-the-artevaporation sources are powered andcontrolled with equally advanced solidstate switching power supplies, beamsweepers and control electronics. Thehighest rated power supply is capable of a15,000 Watt output at negative 10,000Volts, fits on a standard 19" rack, is only10-1/4" tall and weighs 100 pounds.Flange-mounted units are factoryassembled and tested including allfeedthroughs. A range of standard optionsinclude a watercooled collimator roof, astepper motor indexer and aprogrammable XY sweep controller.
Introduction
Thin Film Deposition
Thin film deposition of metallic, insulating,conductive and dielectric materials playsan important role in a large number ofmanufacturing, production and researchapplications. Resistance heating, sputteringand electron beam are the processes mostwidely used. Techniques employed toperform these processes differ in degree ofsophistication and quality of film produced.A resistance heated evaporation source isrelatively simple and inexpensive, but thematerial capacity is very small. Sputterdeposition can be used to coat large areasand complex surfaces in productioncoating environments utilizing time andpower for rate control.
Electron beam evaporation is the mostversatile means of vacuum evaporationand deposition. This technique allows theproduction of thin film coatings from pureelements, including most metals, as wellas numerous alloys and compounds.Electron beam evaporation offers severaladvantages over competing processesincluding precise control of low or highdeposition rates, excellent materialutilization, co-deposition and sequentialdeposition systems and a uniform lowtemperature deposition. Electron beamoffers higher evaporation rates, freedomfrom contamination, precise rate control atvery low deposition levels, precise filmcomposition and cooler substratetemperatures. The materials used forevaporation are available in near limitlessshapes and forms, the most commonbeing pellets, slugs and disks. Since theintroduction of electron beam evaporationin the 1950s, the development of higherperformance films and complex coatingprocesses has been delayed by the lack ofmodern electron beam equipment andtechnology. MDC’s e-Vap® product linehas taken this challenge head-on andprovides electron beam evaporationsources and control electronics thatincorporate leading edge technologiesunmatched in the industry.
Thin Film Applications
Thin film applications requiring electronbeam evaporation are continuallyincreasing. Applications are found in themedical, metallurgical, telecommunication,
All dimensions in this catalog are given ininches unless specified otherwise.
Miniature Evaporation Systems
Miniature evaporation systems include thee-Vap® 100, a precision wire fed electronbeam source designed specifically fordepositing monolayer thin films in ultrahighvacuum environments. It can depositrefractory metals at an atomic level.
e-Vap® 3000 is a 2cc capacity, miniatureelectron beam evaporation system with a3kW power supply. This is a versatiledeposition tool used for thin film coatingprocesses in high and ultrahigh vacuumenvironments. The e-Vap® 3000 systemevaporates virtually all rare earth refractoryand dielectric materials. It providesresearchers a simple, relatively low-costmeans of depositing high purity thin filmcoatings.
Re-Vap™ resistive heater sources are alsopart of the miniature product line. Thesesources are available with filament boatsor coils and oxide crucibles. Re-Vap™
sources are by far the most economicalmethod of depositing thin films.
Evaporation Materials
MDC e-Vap® sources are rugged, reliableand easy to maintain. Electron beamevaporation is an extremely versatilemeans of depositing uniform high-puritythin films. Capable of reaching elevatedtemperatures in excess of 3500°C,evaporation of virtually any material can beaccomplished.
The Silica, Hafnia and Magnesium Fluoridematerials shown at right were producedusing an e-Vap® power supply, e-Vap®Source controller and e-Vap®Programmable Sweep Controller with astandard figure-eight pattern at 200Hzsweep frequency. The continuous andsuperior performance of this arrangementpermits the routine evaporation of theseand other difficult materials.
3MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
Introductione-Vap®
Material Samples
Silica (SiO2)
FilamentTransformer
SourceControl Module
ProgrammableX-Y Sweep
DepositionRate Monitor
Auto Indexer Drive
SourceControl Module
ProgrammableX-Y Sweep
DepositionRate Monitor
FilamentTransformer
Fixed-Pocket UHV Sourcewith
Manual Controls
Rotary-Pocket UHV Sourcewith
Automatic Controls
Power Supply
Electronic components fit on standard 19" rack. Filament transformer can be mounted remotely as shown or directly on source flange.
Crystal SensorFeedthrough
Water CooledRoof
Shutter
Substrate Fixture
Single-PocketSource
Multi-PocketSource
Typical e-Vap® Installation
Magnesium Fluoride (MgF2)
Hafnia (HfO2)
Silica (SiO2) Carousel Source
004221-2.7x3.6
Re-Vap™
4 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
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Thermal Evaporation Systems
Resistive Heater Evaporation
MDC’s Re-Vap™ resistive filament heater evaporation is an econom-ical and reliable method of depositing thin film coatings in vacuum.Current passing through a resistive element generates sufficientheat to melt and evaporate various coating materials. Materials com-monly evaporated using resistive heating include iron, nickel, alu-minum, copper, tin, silver, gold and platinum. Re-Vap™ resistiveevaporation can be used for decorative metallizing as well asdemanding research applications. Three basic resistive elementdesigns are offered: filament coil, metal foil boat and oxide crucibletypes. Filament coil designs are by far the most popular. Re-Vap™
heater elements are economical and disposable. They can be dis-carded after each use to prevent material contamination.
Re-Vap™ coiled filaments are typically three stranded tungsten wireslooped into coils. Multistrand filaments are generally used becausethey offer a greater surface area than single wire filaments. Underthese conditions, the evaporant charge should be small comparedwith the mass of the filament. The filament can hold up to 1 gram ofevaporant material which is formed into staple-like shapes and hungon the central helix of the tungsten filament. Upon melting, the evap-orant wets to the filament and is held in place by surface tension.Spreading of the molten evaporant across the wire is desirable toincrease evaporation surface area. This is accomplished by distrib-uting the initial charge evenly over the entire length of the filament
coil. To minimize dripping of the molten material, the filament coiltemperature must be increased rapidly to 1200-1500°C. Using thistechnique, the molten material will climb or cling to the hot wire andvaporize efficiently. Another type of element coil is the filament bas-ket, used to evaporate pellets or chips of materials which either sub-lime or do not wet the filament wire upon melting. If wetting occurs,the coils of the basket are shorted and the temperature of the sourcedrops.
Metal foil boat type resistive elements are yet another choice forsmall evaporation applications. Metal foil boats are made from thinrefractory metal stampings, usually tungsten, molybdenum or tanta-lum. These boats have dimples which hold the evaporation material.Their miniature size and small capacity make them ideal for smallevaporation jobs. Metal foil boats operate at very high temperaturesand may cause alloying to occur with certain types of evaporationmaterials. Wetting of the metal surface by the molten evaporant isdesirable in the interest of good thermal contact, however, themolten metal will lower the electrical resistance of the foil in the meltarea, thereby causing a drop in temperature. This problem can beeliminated by using a boat which has been coated with a thin layerof aluminum oxide. The oxide coating will not allow wetting of themolten metal evaporant to the metal foil element.
Crucible heaters are an open circular wound filament which allowcrucibles to be inserted inside the windings. The crucibles are com-monly manufactured from alumina, carbon, quartz and boron nitride.Crucibles have insulating properties which form a thermal barrierbetween the filament and melt, allowing a uniform melt temperature.Crucible evaporation is very stable because of its uniform heating. Awide range of low to moderate temperature metals like palladium,tin, selenium, arsenic, indium and organic materials evaporate wellfrom crucibles. Crucibles are less prone to failure compared to metalfoil boats because of the complete isolation between the evaporantand the heater element, thus eliminating shorting or alloying.
Features
■ 900W power supply■ 2-3/4" Del-Seal™ CF flange mount■ Ideal for organic material evaporation■ Contact factory for higher current models
Specifications
Cooling Air cooled
Input power 208 V ±10%, Single-phase, 50/60 Hz, 7 Amperes
Voltage output 0 to 6 VAC
Current output 0 to 150 A
Weight 45lb
Dimensions
Power Supply 16" W x 6" H x 12" L
Output Cable 2 AWG x 10' L
Re-Vap™ 900 Watt Power Supply
5MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
Thermal Evaporation SystemsRe-Vap™
Heater Elements
Coated Metal Foil Boat
5.00
7.25
.77
3.75
2.75
2.75 Del-Seal™CF Flange
Acrylic High-Voltage
Shield
Resistive Heater Source Assembly
Oxide Crucible
Filament Coil
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
3450
2450
1100
245
20
17
28
13
25
25
14
17
20
25
20
RH-900
RH-PS-900
RH-F-900
RH-CEK-900
RH-PSPK-900
RH-MFB-900TU
RH-MFB-900TA
RH-MFB-900M
RH-CFB-900TU
RH-CFB-900M
RH-FC-900
RH-FB-900
RH-OC-900A
RH-OC-900BN
RH-OC-900Q
992626
991256
992625
992619
991257-08
992624-01
992624-02
992624-03
992623-01
992623-02
992622
992621
992620-01
992620-02
992620-03
COMPLETE SYSTEM 1
900W POWER SUPPLY
RESISTIVE SOURCE ASSEMBLY 2
CONDUCTOR EXTENSION KIT
POWER SUPPLY SPARE PARTS KIT
METAL FOIL BOAT, TUNGSTEN
METAL FOIL BOAT, TANTALUM
METAL FOIL BOAT, MOLYBDENUM
COATED FOIL BOAT, TUNGSTEN
COATED FOIL BOAT, MOLYBDENUM
FILAMENT COIL
FILAMENT BASKET
OXIDE CRUCIBLE, ALUMINA
OXIDE CRUCIBLE, BORON NITRIDE
OXIDE CRUCIBLE, QUARTZ
1 Includes power supply and resistive source assembly. 2 Includes filament coil heater element.
Conductor Extension Kit
Standard Elements
Re-Vap™ Source Assembly
e-Vap®
6 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
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Thermal Evaporation Systems
Features
■ 3000 Watt output■ Designed for industrial / production applications■ Compact size - mounts underneath chamber■ High frequency switching power supply■ 5 or 10 Volt tap option■ Connects to Sigma or Inficon rate controllers —
making it stand-alone capable■ CE compliant■ 6000 Watt stack option
Re-Vap™ Power Supply
MDC’s high powered Re-Vap™ resistive evaporation system is a highlyindustrial, robustly designed, economical method of depositing thin filmcoatings. The current passing through a resistive element (filament, boat,etc.) is produced by a unique high current, low voltage switch-mode highfrequency power supply that produces ample amounts of current needed toevaporate materials such as iron, nickel, aluminum, copper, silver, gold andplatinum. Silicon-monoxide, magnesium fluoride, as well as zinc selenideare readily evaporated.
Re-Vap™ Power Supply & Controller
MDC has taken advantage of its extensive knowledge of high frequencysolid-state switching power supplies by incorporating that technology into apatent applied high-powered 3000 watt Re-Vap™ power supply. Tremendoussize and weight reductions are the result. With overall dimensions of 5" x 8"x 13" and a total weight of 20-pounds, the power supply can be mountedunderneath the vacuum coating system just inches away from the high cur-rent feedthroughs. The power supply is only one-eighth the size and one-tenth the weight of a typical 3000 watt resistive power supply. Two uniqueadvantages include higher power efficiency and floor space savings. Powerefficiency is greater because the output cable length is reduced with aresulting lower power loss. The Re-Vap™ controller is a half-rack width dis-play module displaying the current, voltage, safety interlock and status/oper-ation indicators. For automated coating processes, it may be connected to arate/thickness controller for precise control. Power can also be controlledthrough the front panel or with the hand-held remote control.
Re-Vap™ clamp, High Current feedthrough and Z-bar™ extensions
The Re-Vap™ positive clamping method is universally designed for heavy useand quick-change capability. Thumbscrews are provided for fast installationof boats or filaments. Air-side clamping uses silver-plated battery clamp-style hard copper connections designed for maximum surface contact andhigh current carrying capacity.
The Re-Vap™ high current 3/4-inch feedthroughs are rated at 600 amps. Ituses high purity alumina ceramic as the dielectric material, which is hermet-ically sealed to a flexible metal transition using vacuum grade braze alloysin a vacuum brazing furnace. Additionally, a removable snap-on groundshield provides protection from line-of-sight coating on exposed ceramicsurfaces. Re-Vap™ feedthroughs are fitted with Del-Base™ baseplate mountsin standard one-inch, 32mm or 34mm sizes for use in most vacuum coatingsystems, including Balzers and Leybold systems.
Z-bar™ extensions are used in cases where normally an evaporation sourcecannot be positioned because of spacing limitations. The modular Z-bar™
extensions allow you to maneuver your evaporation sources around fixedequipment inside your vacuum coating system. Its versatility allows you touse them singularly or in multiples for those hard to reach locations.
Power Supply Specifications
Cooling Air cooled
Input power 208/220/240 VAC, Single-phase, 50/60 Hz, 25 Amperes
Power output 0 to 5 VDC @ 600 amps
Option: 0 to 10 VDC @ 300 amps
Cable 6-foot cable included
Weight 30 lb shipping
Dimensions 5" W x 8" H x 13" D
Weighs only20 pounds
Weighs only20 pounds
Power Supply
Description
7MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Thermal Evaporation Systems
Features■ Industrial design■ Feedthroughs rated at 600 amps■ Removable snap-on ground shield protects
against coating build-up■ Z-bars allow installation of sources in difficult or
hard to reach locations■ Z-bars may be used singularly or in multiples■ Clamp designed for virtually any type of
commercial heater elements up to 1.25" wide ■ Ultra positive clamping method
Resistive Heater Evaporation
Re-Vap™ typical source installation, shown with two Z-bars and boat clamps
Typical Heater Elements
Metal Foil Boat
Typical Installation Schematic
Baffled Boat
Filament
Re-Vap™ clamp & Z-bar™ extension
Z-bar™
Resistive source
Silver platedairside clamps
1" Bolt hole mountfeedthrough
In-vacuumshield
Standard Elements
All dimensions are given in inchesunless specified otherwise.
• Only one Z-bar shown ~ may be used inmultiples
Re-Vap™ rigid clampRe-Vap™ rigid clamp
e-Vap®
8 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
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Thermal Evaporation Systems
Re-Vap™ Resistive Controller
DescriptionThe Re-Vap™ Resistive Controller is designed for use with theRe-Vap™ 3000 Power Supply. The controller is a half-rack widthdisplay module displaying the current, voltage, safety interlock andstatus/operation indicators. For automated coating processes, itmay be connected to a rate/thickness controller for precise control.Power can also be controlled through the front panel or with thehand-held remote control. Cabling and connectors are provided.
Features
■ Front panel LED displays current and voltage■ On-Off switch■ Safety interlock■ Hand-held remote control■ Contact factory for CE compliance
Resistive Controller SpecificationsConstructionCase Aluminum sheetReadout LED displayMount Half-rack standard electronics cabinet Input power 110 volts, 50/60 HzWeight 11 poundsDimensions 8.5" W x 5.25" H x 14" D
COMPLETE SYSTEM 50
POWER SUPPLY 30
RESISTIVE CONTROLLER 10
REFERENCEPART
NUMBERPRICE
$
6150
3000
975
992970
991301
991303
WTDESCRIPTION LB
RV-3000-SYS
RV-3000-PS
RV-3000-RC
Resistive Controller
Complete SystemA complete Re-Vap™ 3000 system includes:• One 3000 watt power supply• One resistive controller• Two high current electrical feedthroughs, 1-inch bolt style• Two electrical airside clamps• Two Z-bars with bolts• Two rigid boat clamp assemblies• One metal foil boat heater element
Ordering Information
Metal Foil Boat
Resistive heater elements are soldindividually.
REFERENCEPART
NUMBERPRICE
$
16
15
50
METAL FOIL
FILAMENT
BAFFLED
993037
993038
993039
Filament Baffled Boat
Components may be purchased as a complete systemor individually.
9MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Thermal Evaporation Systems
.56 dia (2 places)
2.00
5.19
2.19 .94
1.00
.63
1.75Fits 3/4" conductor
1.25
.25
.375-16 bolt, nut and washer (x2)
1.00
Airside Clamps
Made of OFE copper with silverplate to minimize oxidation andcontact resistance. Two 9/16-inchholes are provided for fasteningeyelet-fitted power cables. Soldindividually.
Rigid clamp1-1/4" width3-1/2" length
.250-20 Thread in Helicoil insert
.50
.25
REFERENCEPART
NUMBERPRICE
$
325RIGID 992968-02
Boat clamps use thumbscrews forfast installation of boats or filaments.Two boat clamps are required.Includes bolts. Sold individually.
REFERENCEPART
NUMBERPRICE
$
185HCC-750 640070
Boat Clamps
REFERENCEPART
NUMBERPRICE
$
450
450
450
95
1-IN. BOLT
32MM BOLT
34MM BOLT
32MM - 1"
992966
993040
993041
991813
High Current Feedthough
1.50 Hex
F
1.00 1.88
3/8-16 UNC-2A 1-14 UNS-2A
.75 dia.
2.253.32 4.68
30 x 1.5mm thread
2.125 dia.2.00
1.61
1.00
3/8-16 UNC-2A
.75 dia.
2.253.32 4.68
Z-bar™
.500
1.625
1.000
1.875�2 places .386�
2 places
2.813 2.813 6.250
.500
Z
.813�2 places
R .188 typ. R .812 typ. MDC Z-bar™ extensions are usedwhere normally an evaporationsource cannot be positionedbecause of spacing limitations. Maybe used singularly or in multiplesfor hard to reach locations. Soldindividually.
REFERENCEPART
NUMBERPRICE
$
295Z-BAR 992969
High current feedthroughs are avail-able for mounting to baseplates inthree standard sizes. A removableshield protects ceramic insulatorfrom contamination during deposi-tion.An adapter is available to mount a1-inch bolt feedthrough to a 32mmbolt hole. Adapter not shown.Two feedthroughs required. Soldindividually.
Standard 1" bolt mount
Metric style for 32mmand 34mm bolt mount
Boat Clamps
e-Vap®
10 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
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Miniature Evaporation Systems
e-Vap® 100 SystemFeatures
■ 100 Watt power supply■ Monolayer E-Beam deposition■ Precision control deposition rates■ 1mm wire feed mechanism, 2mm optional■ Refractory materials evaporation■ UHV compatible to 10-11 Torr■ Bakeable to 250°C■ No water cooling required■ Mounted on 2-3/4" Del-Seal™ CF flange
Li0.4
Lithium
O
Oxygen
Be1.3
Beryllium
C2.8
Carbon
N
Nitrogen
Na0.4
Sodium
S
Sulfur
Mg0.6
Magnesium
B2.2Boron
Al1.2
Aluminum
Si1.5
Silicon
P
Phosphorus
K0.3
Potassium
Se
Selenium
Sc1.2
Scandium
Ca0.6
Calcium
Ti1.6
Titanium
V2.0
Vanadium
Cr2.0
Chromium
Mn1.7
Manganese
Fe2.1Iron
Co2.2Cobalt
Ni2.2Nickel
Cu2.1
Copper
Zn0.9Zinc
Ga1.8
Gallium
Ge2.1
Germanium
As
Arsenic
Rb0.4
Rubidium
Te1.4
Tellurium
Y1.4
Yttrium
Sr0.7
Strontium
Zr2.1
Zirconium
Nb2.7
Niobium
Mo2.8
Molybdenum
Tc3.0
Technetium
Ru3.1
Ruthenium
Rh2.8
Rhodium
Pd2.4
Palladium
Ag1.9Silver
Cd1.1
Cadmium
In1.9
Indium
Sn
Tin
Sb1.4
Antimony
Cs
Cesium
Po1.5
Polonium
La1.7
Lanthanum
Ba0.8
Barium
Hf3.0
Hafnium
Ta4.0
Tantalum
W4.3
Tungsten
Re4.4
Rhenium
Os4.5
Osmium
Ir4.2
Iridium
Pt3.7
Platinum
Au2.9Gold
Hg
Mercury
Tl
Thallium
Pb1.7Lead
Bi1.7
Bismuth
Fr0.4
Francium
Ac2.0
Actinium
Ra
Radium
Lu2.1
Lutetium
Pr1.7
Praseody-mium
Nd1.7
Neodymium
Pm
Promethium
Sm1.4
Samarium
Eu1.0
Europium
Gd1.8
Gadolinium
Tb1.9
Terbium
Dy1.7
Dysprosium
Ho1.8
Holmium
Er1.8
Erbium
Tm1.6
Thulium
Yb1.4
Ytterbium
Lr
Lawrencium
Pa
Protactinium
U3.3
Uranium
Np
Neptunium
Pu
Plutonium
Am2.1
Americium
Cm
Curium
Bk
Berkelium
Cf
Californium
Es
Einsteinium
Fm
Fermium
Md
Mendelevium
No
Nobelium
Ce2.6
Cerium
Th
Thorium
Numbers indicate the time, in minutes, required to deposit one monolayer of the specified elements.
Deposition rates are calculated at element melting point, using a substrate area of 1cm2, a source to
substrate distance of 10cm and a vapor pressure of 10-3 Torr. These values are intended as reference
only, actual rates may vary from those listed.
La1.7
Lanthanum
Ac2.0
Actinium
Monolayer Deposition Rates
e-Vap® 100 is a precision monolayer deposition source employed forevaporative coatings in UHV applications. Its unique design uses anelectron beam power source for thermionic emission and pinpointelectrostatic focusing of an electron beam onto a 1-millimeter diam-eter wire. The wire being evaporated is at ground potential and servesas the source anode, thus attracting electron bombardment. The con-stant stream of electrons heats the wire tip to its melting point form-ing a very small liquid ball, which is subsequently vaporized. The wire
Specifications
Metering Digital Emission Current
Cooling Air cooled
Input power 208 V ±10%, Single-phase, 50/60 Hz, 3 Amperes
Voltage output 2 kV DC negative polarity
Output Ripple Less than 2% RMS
Voltage Regulation 1%
Current output 0 to 0.05 Amperes
Emission Current Regulation 1%
Efficiency 85%
Weight 20lb
Dimensions 19" W x 3.5" H x 18" L
11MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
Miniature Evaporation Systemse-Vap®
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
13500
3775
9500
30
155
60
EV-100
EV-SA-100
EV-PS-100
EV-PS-SPK-100
EV-2MM-100
EV-FIL-100
991029
992458
991192
991257-07
992589
992596
COMPLETE SYSTEM 1
SOURCE ASSEMBLY
100W POWER SUPPLY
POWER SUPPLY SPARE PARTS KIT
2MM WIRE-FEED ADAPTER
FILAMENT SET, 5 ea.1 Includes source and power supply
Source Assembly
SourceAperture
TantalumShield,
1.29" O.D.x 0.02" wall
2.75Del-Seal™ CF
Flange
SHVCoaxial
Feedthroughs
Linear MotionFeedthrough
High Temperature
3.75
7.45
1.63
Wire FeedAdapter
is manually fed by a precision linear drive feedthrough, and must befed periodically as determined by source evaporation rates. The e-Vap® 100 source evaporates high temperature refractory metalsincluding Tantalum, Molybdenum and Tungsten and most other mate-rials manufactured in wire form. High temperature materials are notreadily evaporated using Knudsen or Effusion cells, making thee–Vap® 100, because of its miniature size, an excellent PhysicalVapor Deposition (PVD) evaporation source. The elements table at leftdepicts calculated deposition rates for various pure materials.Thee-Vap® 100 source is constructed with refractory metals for rapidequilibrium with minimal outgassing, to withstand elevated tempera-tures without the need for water cooling and to reduce the possibilityof contamination in sensitive UHV applications. The source has anoutgas mode to allow vacuum conditioning of the evaporation head.This degas feature allows heating of the e-Vap® 100 head to driveoff any adsorbed contaminant. The source is mounted on a 2-3/4"Del-Seal™ CF flange. Power connections are made via four SHV coax-ial connectors clearly labeled for filament positive, filament negative,anode and screen inputs. Maintenance on the evaporation head ismade simple with easy replacement of all key components.
The e-Vap® 100 power supply incorporates all switching technologyfor the high-voltage and filament sections. This translates to a small-er and lighter package, greatly improved arc-suppression and betteremission current control. Arcs are suppressed in the order ofmicroseconds rather than the millisecond response in other 50/60Hzsystems. This, combined with lower levels of stored energy, preventthe molten tip of the evaporant rod from being “blown away” duringan arc, a common occurrence with older systems.
Complete System
e-Vap®
12 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Miniature Evaporation Systems
e-Vap® 3000 System
Deposition Rate vs Emission Current
0
200
400
600
800
1000
1200
1400
0 100 200 300 400 500 600
SiO
SiO2
HfO2
Fe Pd
Ti
Co
Si
NiGe
Mo
Ta W
Emission Current in mA
Stab
le D
epos
ition
Rat
e in
Å /
min
This graph represents stable rates (not maximum rates) @ 3kW with a source to substrate distance of 10 inches. These values are intended as reference only, actual rates may vary.
Specifications
Metering Digital Emission Current
Cooling Power Supply: Air cooled
Source: Watercooled
Input power 225 V ± 25 V, Single-phase, 50/60 Hz, 18 Amperes
Voltage output 5 kV DC negative polarity
Output Ripple Less than 1% RMS
Voltage Regulation .025%
Current output 0 to 0.6 Amperes
Emission Current Regulation 0.25%
Efficiency 85%
Weight 65lb
Dimensions 19" W x 10.5" H x 19" L
MDC’s 3kW Electron Beam Source is a versatile and economicaldeposition tool used for thin film coating processes in high and ultra-
high vacuum environments. The e-Vap® 3000 system evaporatesvirtually all rare earth refractory and dielectric materials. It providesresearchers a simple, relatively low-cost means of depositing highpurity thin film coatings. The source is manufactured using all metalsealed gaskets, is extremely compact and has a high level ofruggedness, reliability and efficiency. The compact source designallows the entire source assembly to fit through a 2.75" Del-Seal™
CF port opening and eliminates internal water and electrical connec-tions. This 3kW source is available free standing or as a completeturnkey system. The filament/emitter assembly has a heat-sink andfeatures a unique single piece high voltage insulator design. Theentire emitter assembly slides out for easy maintenance.
A new 3kW Switching Power Supply is available to drive these minia-ture sources. State-of-the-art switching technology renders a com-pact rack mountable power supply. The built-in source controller alsoemploys switching technology and provides extremely accurate
Features
■ 3kW Switching technology power supply■ UHV compatible■ 2.75" Del-Seal™ CF flange mount
■ Includes water and electrical connections■ Evaporates refractory and dielectric materials■ CE compliant
13MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
Miniature Evaporation Systemse-Vap®
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
17400
5985
14500
60
195
155
7
125
30
EV-CE-3000
EV-SA-3000
EV-PS-CE-3000
EV-FIL-3000
EV-A-3000
EV-BF-3000
EV-IBF-3000
EV-IHV-3000
EV-PS-SPK-3000
992600
992601
991221
992610
991929
991922
990529
991921
991257-03
COMPLETE SYSTEM 1
SOURCE ASSEMBLY
3000W POWER SUPPLY
FILAMENT SET, 5 ea.
ANODE
BEAM FORMER
BEAM FORMER INSULATOR
HIGH VOLTAGE INSULATOR
POWER SUPPLY SPARE PARTS KIT1 Includes source and power supply
Power Supply Source Assembly
3.75
.63 Source Face toFlange Center Line
2.75
7.25
7.87
9.00
2.75Del-Seal™ CF
Flange
AcrylicHigh-Voltage
Shield
2 ccCrucible
Source Assembly
Source Detail Filament Detail
Vap® evaporation sources. These liners offer improved thermal sta-bility while reducing the transfer of heat to the crucible. Liners pro-vide the ability to easily and quickly switch evaporant materialswithout removing the crucible for cleaning. They also reduce powerrequirements to achieve specific evaporation rates. See page 39 fora detailed list of crucible liner materials.
2.75Del-Seal™ CFFlange
Sourcefits withina 1.38 insidediameter tube
• Source can be installed in a portwith 2-3/4" Del-Seal™ CF flanges
e-Vap®
14 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Miniature Evaporation Systems
Features
■ Ideal for evaporating metals, oxides, magneticmaterials and dielectrics
■ Ideal for universities, lab/R&D, pilot productionusers
■ Applications include metallization, MBE, nano-technology, optics, microscopy and thin filmheads
■ Rated for 3000 Watts of deposition power■ Four pocket x 2cc rotating crucible■ Ultra small footprint – total size is 2.4" H x 4.1" L
x 2.8" W■ A contained permanent magnet design produces
a very small, highly dense beam spot■ XY sweep coils are included■ Crucible drive can be driven from any position –
left, right, down, even angled■ Stand-alone, flange-mounted or turn-key assem-
blies are standard offerings■ Flange-mounts are installed on a 2.75-inch Del-
Seal CF flange■ Turnkey assemblies are installed onto a 6-inch
and 10 inch Del-Seal CF flange and include shut-ter and all electrical, water, and mechanicalfeedthroughs –ready to operate
■ See the MDC web site for actual deposition ratedata on up to 27 different materials as well asdownloadable layout, e-drawings for the DesignEngineer
Specifications
Maximum Power 3000 watts
Operating Voltage 5000 volts
Beam Current 600 milli-amperes
Compatible Vacuum 2 x 10E-8 torr
Water Flow 65 psi or .62 gpm
XY Sweep Frequency 0 – 50Hz, 1.0 amps
Beam Spot Size 3-4 mm
Crucible Material OFE copper
Bakeout Temperature 150oC
Crucible Geometry 2.0 cc volume crucibles x 4
Weight 6 lbs
Dimensions 2.4" H x 4.1" L x 2.8” W
Description
Practical, low-cost, and highly reliable electron beam depositionsources are the future as we know it today. MDC introduces the e-
Vap® “Mighty Source™”– a 4 pocket x 2cc rotary electron beamsource. Affordable and extremely compact, it stands just 2.4-inchestall by 4-inches long by 2.8-inches wide. Is there anything smaller
out there? The Mighty Source™ is rated for 3 kilowatts of powerwhich makes it an ideal deposition tool for evaporating metals,oxides, metal-oxides, and magnetic materials. Designed into thesource body are two hermetically-sealed XY-axis sweep coils thatallow you to sweep the electron beam across the crucible pocket,resulting in the maximization of your coating process in terms of
material stability and consistency. The Mighty Source™ design isspecifically tailored for the following uses – pilot production,lab/R&D applications, and the university marketplace. Its compactdesign features allow it to be mounted onto a 2-3/4-inch Del-SealCF flange or onto a 6-inch or 10-inch Del-Seal CF flange in eitherhorizontal or vertical configurations. To complete this product sys-tem, MDC also offers a 3kw power supply and low cost XY sweepcontroller.
e-Vap® Mighty Source™ 4 Pocket Evaporation Source
MODULAR SOURCE SERIES
e-Vap® Mighty Source™ Horizontal Source Assembly (6-inch CF flange)
4 inches
15MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Miniature Evaporation Systems
1000 400200 6000.0
5.0
10.0
15.0
20.0
25.0
300 500
Ta2O5
Ti
Co
Ge
Mo
Al
*Al
MODULAR SOURCE SERIES
Flange Mounted Assemblies
■ Complete turnkey assemblies -plug ‘n play■ Horizontal assembly is supplied on a 6" flange■ Vertical assembly is supplied on a 10" flange■ Water-cooled roofs are available as an option■ Different flange sizes are available upon request■ Physical dimensions are available at
www.mdcvacuum.com/3kw.htmor call 1-800-443-8817 for further details
e-Vap® Mini Sweep Controller e-Vap® 3kW Power Supply
Deposition Rate vs PowerDepositin rate vs Power
MATERIAL SWEEP USEDYES OR NO
No
No
Yes
No
No
Yes
No
No
Yes
Yes
No
Yes
No
Yes
No
No
No
Yes
Yes
No
Yes
No
Yes
No
No
Yes
Yes
Yes
Al
*Al
Al2O3
Ag
Co
Cr
Cu
Ge
Hf
HfO2
In
ITO
Mo
MgF2
Nb
Ni
Pd
Si
Si02
Ta
Ta2O5
Ti
TiO2
W
Y
ZnS
ZnSe
ZrO2
500
100
100
150
200
50
500
300
250
150
200
20
500
10
500
300
100
300
40
500
150
300
150
500
150
30
10
200
4.5
28.0
8.0
13.0
9.0
13.0
2.2
3.0
7.0
9.0
18.0
10.0
8.5
7.0
1.0
3.0
50.0
1.0
25.0
8.0
7.0
20.0
7.5
8.0
40.0
10.0
40.0
10.0*with crucible liner
Deposition Rate Table
* Indicates “with” crucible liner
Deposition Rate vs. Emission CurrentNo Crucible Liners Used
Depo
sitio
n Ra
te (Å
/sec
Emission Current (mA)Accelerating Voltage of 5.25 kV
All rates measured on a Crystal Rate Monitor at 10 inch crucible to sensor distance.
DEPOSITION RATE(Å/SEC)
EMISSION CURRENT (MA)
☛ <None> Power Supplies description
e-Vap®
Miniature Evaporation Systems
16 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
MODULAR SOURCE SERIES
DESCRIPTION REFERENCE
Ref# EV-MS* (Mighty Source™
)
Ref# EV-MS-F275-H
Ref# EV-MS-F1000
Ref# EV-MS-F600H
Ref# Sweep-MS
EV-PS-CE-3000
EV-PS-SPK-3000
EV-FIL-3000
EV-A-3000
EV-BF-3000
EV-IBF-3000
EV-IHF-3000
Ref# ERK-MS
Ref# CSRK-MS
Cajon Fitting Gasket
Fil Clamp Sleeve-MS
Stand Alone Source
3/4" Del Seal CF Flange (horizontal mount)
10" Del Seal CF Flange (vertical mount)
6" Del Seal CF Flange (horizontal mount)
3KW Mini Sweep Controller
Power Supply
Power Supply (spare parts kit)
Filament (pack of 5)
Anode
Beam Former
Beam former Insulator
High Voltage Insulator
Emitter Rebuild Kit1 (Mighty Source)
Crucible Seal Rebuild Kit (Mighty Source)
Gasket (1/8” VCR
Filament Clamp Sleeve
993400
993450
993431
993430
991374
991221
991257-03
992610
991929
991922
990529
991921
993410
993439
042064
993415
5500
6750
11050
10250
1495
14500
30
60
195
155
7
125
250
7.50
3
35
1
2
3
4
5
6
7
8
9
Mighty Source™ Details Table
PRICE FIGPART #
*MS indicates Mighty Source™1 includes 2 filaments, high voltage insulator, beam form, fasteners
Figure 3
Figure 5
Figure 7
Figure 1
Figure 9Figure 8
Figure 6
Figure 4
Figure 2e-Vap® Mighty Source™ Vertical Source Assembly (10-inch CF flange)
17MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Modular Evaporation Sources
Filament Assembly
■ Filament is shielded from ion bombardment■ No shorting■ Longer filament life■ Reduced coating of ceramic insulators■ Reduced arcing
Emitter Assembly
■ 270° arc emitter module■ Heat sunk emitter■ Consistent electrostatic field■ Longer life anode and beam former■ Reduced filament distortion■ Modular plug-in emitter design■ Simple maintenance■ Simple filament replacement■ Minimal adjustment...
only requires verification of filament tolerance
Open Cathode Design
■ No space charging■ Increased emission■ Cooler operating filament...
requires only 42 amps for 15 kW
Shielded High Voltage Ceramics
■ Reduces coating of ceramic insulators■ Prevents arcing
■ Unique high voltage insulator design...no screws to reduce dielectric breakdown
Beam Sweep Coil Assembly
■ Helmholtz design principle produces a uniformmagnetic field
■ No tunneling■ Beam maintains constant density and shape
when swept across crucible
Magnet Assembly
■ Permanent magnets■ 270° arc beam deflection...
with positive beam containment■ Reliable beam positioning■ No pole pieces■ Efficient magnetic field generation■ Beam travels vertically through crucible
Crucible Module / Replaceable Modules
■ Capacity from 6cc to 400cc■ Complete flush-top design■ No condensate build up■ No contamination from flaking condensate■ Complete utilization of vapor cone during deposi-
tion... no shadowing■ Reduced cross-contamination during changes of
evaporant material
Individual Source
MDC modular e-Vap® sources are state-of-the-art electron-beamevaporation sources designed for the demanding and exacting worldof vacuum coatings. This unprecedented selection of electron-beamevaporation sources provides vacuum coating solutions for mostapplications including medical, metallurgical, telecommunications,micro-electronics and optics.
Modular sources are offered in six standard frame sizes and are standalone components for maximum installation flexibility in existing vac-uum systems. For those desiring standard off-the-shelf solutions,complete horizontal and vertical flange mounted systems are alsoavailable. For a detailed presentation of horizontal and vertical turnkeycoating systems please refer to products beginning on page.
Features
Modular sources are fitted with direct watercooled crucibles. Selectmodels have indirectly cooled crucibles that allow the user to changecrucibles without interrupting the flow of water to the source andwithout having to disassemble the source. Modular sources areoffered with material capacities from 6cc to 400cc in a multitude ofpocket geometries and arrangements. They are available in bothfixed and rotary pocket mechanisms for high and ultrahigh vacuum
environments. e-Vap® modular sources are designed for optimum
performance with e-Vap® power supplies, controls and electronics.Other essential components and hardware required for the installa-
tion of e-Vap® modular sources are detailed starting on page.Contact the MDC technical sales engineers for custom electron-beam evaporation requirements.
e-Vap®
18 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Modular Evaporation Sources
Custom source and source assemblies can be designed to fit anexisting chamber or for a special application. Contact MDC fordetails regarding custom source assemblies or custom sources.
Standard Multi Pocket Sources that havebeen identified by our customers as themost popular sources are listed to the right.MDC is has made a commitment with sub-component inventory to offer reduced leadtimes for standard multipocket sources.
Custom Sources and Assemblies
FRAME NUMBER VOLUME MAXIMUMSIZE OF POCKETS PER POCKET POWER
3 4 6cc 6kW
4 4 6cc 6kW
5 4 15cc 10kW
5 4 25cc 10kW
5 6 12cc 10kW
5 1 150cc 10kW
6 4 40cc 15kW
6 4 75cc 15kW
6 1 400cc 15kW
6 6 40cc 15kW
REFERENCEPART
NUMBERPRICE
$
10500
13750
11225
11225
11675
11250
14225
14625
14525
14725
EV-4000-66
EV-4000-66UHV
EV-4000-1015
EV-4000-1025
EV-6000-1012
EV-4000-150CA
EV-4000-1540
EV-4000-1575
EV-4000-400CA
EV-6000-1540
991600
991700
991900
991800
992100
992523
992405
992406
993101
993100
Single-Pocket Centered
Multi-Pocket 4 4@90°
Multi-Pocket 6 6@60°
Carousel 360° Pan
Crucible / Pocket Geometry
1x270°, 1@45°
Custom configurationsStandard configurations
Shown above is one of many possibilities.Contact factory for special geometries.
Custom source and source assemblies■ Six Frame Sizes
Features
■ Single, Multipocket or Carousel Crucibles■ Custom Crucible configurations available■ Crucible sizes from 6cc to 400cc■ Power ratings from 6kW to 15kW■ Direct or indirect water cooling
Options■ Source Options are available-Consult with MDC for existing
designs, availability and list prices.
■ Single Pocket Sources (Frame 1 and Frame 2) UHV com-patible sources, volumes 7cc to 100 cc.
■ UHV Rotary Mechanism (Frame 4 and Frame 5) allows forUHV operation of the multi pocket sources.
■ Direct and Indirect Cooling (Frame 5 and Frame 6) optionfor both of these frame sizes. direct cooling allows for higherpower levels to be applied during deposition, the water sealmust be disturbed to change the crucible. Indirect coolingallows the crucible to be removed without disturbing the waterto vacuum seal, however maximum power levels are lower withindirect cooling.
■ Custom Crucibles Can be machined with various pocketsizes and configurations depending upon your application. MDCwill manufacture any custom crucible that is required includiingsingle, four pocket, six pocket, pan carousel and bananas.
e-Vap® Modular Evaporation Sources
19MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
Modular Evaporation Sourcese-Vap®
8.2
Frame 2
Source Size Large
Source Type Fixed Pocket
Maximum Power 15kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Single-Pocket 75 & 100cc
X-Y Sweep Frequency 200Hz
Large Fixed Pocket
Evaporation Rate of Aluminum
50,000Å/min @15kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material OFHC Copper
Bakeout Temperature 200°C
Materials UHV Compatible
Compatible Vacuum 2x10-11 Torr
Water Flow
3GPM and / or 65PSIG inlet-outlet differential
Dimensions 6.60L x 5.50W x 2.25H
Weight 10 lbs
Specifications
CRUCIBLE MAXIMUMVOLUME POWER
7cc 6kW
15cc 10kW
25cc 10kW
40cc 15kW
REFERENCE PARTNUMBER
PRICE$
7850
7850
7850
7850
EV-1000-67
EV-1000-1015
EV-1000-1025
EV-1000-1540
990598
990599
990597
990600
CRUCIBLE MAXIMUMVOLUME POWER
75cc 15kW
100cc 15kW
REFERENCE PARTNUMBER
PRICE$
8750
11750EV-1000-1575
EV-1000-15100
992250
992430
Frame 1
Source Size Small
Source Type Fixed Pocket
Maximum Power 15kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Single-Pocket 7, 15, 25 & 40cc
X-Y Sweep Frequency 200Hz
Small Fixed Pocket
Evaporation Rate of Aluminum
50,000Å/min @14kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material OFE Copper
Bakeout Temperature 200°C
Materials UHV Compatible
Compatible Vacuum 2x10-11 Torr
Water Flow
3GPM and / or 65PSIG inlet-outlet differential
Dimensions 6.60L x 4.90W x 2.10H
Weight 9 lbs
Specifications
e-Vap®
20 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Modular Evaporation Sources
Frame 4
Source Size Small
Source Type UHV Rotary Pocket
Maximum Power 6kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Multi-Pocket 4x 6cc
X-Y Sweep Frequency 200Hz
Small UHV Rotary Pocket
Evaporation Rate of Aluminum
8,000Å/min @6kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material OFHC Copper
Bakeout Temperature 200°C
Materials UHV Compatible
Compatible Vacuum 2x10-11 Torr
Water Flow
1.75GPM or 65PSIG inlet-outlet differential
Dimensions 8.37L x 5.37W x 3.37H
Weight 17 lbs
Specifications
Frame 3
Source Size Small
Source Type Rotary Pocket
Maximum Power 6kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Multi-Pocket 4x 6cc, 6x 3cc
Carousel 360°, 15cc
X-Y Sweep Frequency 200Hz
Small Rotary Pocket
Evaporation Rate of Aluminum
8,000Å/min @6kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material OFHC Copper
Bakeout Temperature 150°C
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow
2GPM and / or 65PSIG inlet-outlet differential
Dimensions 5.32L x 5.12W x 2.46H
Weight 10 lbs
Specifications
CRUCIBLE MAXIMUMVOLUME POWER
4 X 6cc 6kW
6 X 3cc 6kW
REFERENCE PARTNUMBER
PRICE$
10500
10750EV-4000-66
EV-6000-66
991600
992166
CRUCIBLE MAXIMUMVOLUME POWER
4 X 6cc 6kW
REFERENCE PARTNUMBER
PRICE$
13750EV-4000-66UHV 991700
21MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
Modular Evaporation Sourcese-Vap®
8.2
CRUCIBLE MAXIMUM COOLINGVOLUME POWER
4 X 15cc
4 X 15cc
4 X 25cc
4 X 30cc
6 X 12cc
4 X 15cc
4 X 25cc
4 X 30cc
1 X 150cc
1 X 150cc
10kW
10kW
10kW
10kW
10kW
6kW
6kW
6kW
6kW
10kW
Direct
Direct
Direct
Direct
Direct
Indirect
Indirect
Indirect
Indirect
Direct
REFERENCEPART
NUMBERPRICE
$
10500
16625
11225
11675
11675
11435
11500
12550
11875
11250
EV-4000-1050
EV-6000-1015UHV
EV-4000-1025
EV-4000-1030
EV-6000-1012
EV-4000-615iEV-4000-625iEV-4000-630iEV-4000-150CARiEV-4000-150CAR
991900
992700
991800
992408
992100
992525
992500
992585
992502
992523
Frame 5
Source Size Large
Source Type HV Rotary Pocket
UHV Rotary Pocket
Maximum Power 10kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Multi-Pocket 4x... 15, 25 & 30cc, 6x 12cc
Carousel 360° 150cc
Combination Custom designs available
Large HV & UHV Rotary Pocket
Evaporation Rate of Aluminum
30,000Å/min @10kW with a source to
substrate distance of 250mm
X-Y Sweep Frequency 200Hz
Beam Spot Size 7mm
Crucible Material OFE Copper
Bakeout Temperature 150°C
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow
3GPM and / or 65PSIG inlet-outlet differential
Dimensions 6.20L x 5.62W x 3.25H
Weight 27 lbs
Specifications
e-Vap®
22 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Modular Evaporation Sources
CRUCIBLE MAXIMUM COOLINGVOLUME POWER
4 X 40cc
4 X 60cc
4 X 75cc
6 X 25cc
6 X 40cc
1 X 400cc
1 X 400cc
6 X 40cc
15kWW
15kW
15kW
15kW
15kW
6kW
15kW
6kW
Direct
Direct
Direct
Direct
Direct
Indirect
Direct
Indirect
REFERENCE PARTNUMBER
PRICE$
14225
15550
14625
15550
14725
16625
14525
15625
EV-4000-1540
EV-4000-1560
EV-4000-1575
EV-6000-1525
EV-6000-1450
EV-4000-400CARiEV-4000-400CAR
EV-6000-640i
992405
992400
992406
992599
993100
992720
993101
992674
Frame 6
Source Size Extra-Large
Source Type Rotary Pocket
Maximum Power 15kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume
Multi-Pocket 4x... 40, 60 & 75cc, 6x 40cc
Carousel 360° 400cc
Combination Custom designs available
X-Y Sweep Frequency 200Hz
Evaporation Rate of Aluminum
50,000Å/min @15kW with a source to
substrate distance of 250mm
Source-Substrate Distance 250mm
Beam Spot Size 7mm
Crucible Material OFE Copper
Bakeout Temperature 150°C
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow
3GPM and / or 65PSIG inlet-outlet differential
Dimensions 8.50L x 6.87W x 3.50H
Weight 40 lbs
Specifications
Extra-Large Rotary Pocket
23MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Modular Evaporation Sources
Horizontal Source Assembly
CoolingRoof
Source/CrucibleWater Lines
Cooling RoofWater Lines
Manual ShutterLinear Feedthrough
Pocket IndexerRotary Feedthrough
Filament TransformerHigh Voltage Feedthrough
X-Y SweepInstrumentation Feedthrough
Guide RodSupport Bushings
10.00 with 10" Flange8.00 with 8" Flange
Shown withUHV Rotary-Pocket Source
Frame Size 4
Shown with10" Del-Seal™ CF
Flange
10.75 Shutter Open8.75 Shutter Closed
14.0 with 10" Flange12.0 with 8" Flange
Crucible Face to Flange Center Line0.30" Fixed on 8" Flange0.14" Fixed on 10" Flange1.38" Rotary on 10" Flange
Features
■ UHV compatible system■ 8" or 10" Del-Seal™ CF flange mount■ Assembly includes rotary, linear and electrical
feedthroughs, clamps, linkages, water flow switchand water connections
■ Manual, push-pull shutter■ High temperature, 300°C manual rotary drive on
4 pocket models; blanked off on single pocket■ Flange seal surface to crucible centerline is 8" on
8" Del-Seal™ CF■ Flange seal surface to crucible centerline is 10"
on 10" Del-Seal™ CF■ Systems available with or without watercooled
roofsHorizontal Flange Mounted System
UHV Single-Pocket Source
UHV Rotary-Pocket Source
e-Vap®
24 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
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Modular Evaporation Sources
Optional Accessories
REFERENCEPART
NUMBERPRICE
$MOUNTING FRAME SOURCE COOLING SOURCE WEIGHT
FLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDS
13350
14100
13850
14600
19000
19750
EV-FMP-8H
EV-FMP-8RH
EV-FMP-10H
EV-FMP-10RH
EV-FMP-10HUHV
EV-FMP-10RHUHV
992515
992516
992499
992541
992498
992540
8" DEL-SEAL 1 ONE POCKET 7cc NO 990598 50
8" DEL-SEAL 1 ONE POCKET 7cc YES 990598 50
10" DEL-SEAL 1 ONE POCKET 7cc NO 990598 75
10" DEL-SEAL 1 ONE POCKET 7cc YES 990598 75
10" DEL-SEAL 4 FOUR POCKET 6cc NO 991700 95
10" DEL-SEAL 4 FOUR POCKET 6cc YES 991700 95
OPTIONNUMBER
PRICE$DESCRIPTION
450
3650
825
500
1250
Call
Call
Call
-01
-02
-03
-04
-05
-06
-07
-08
PNEUMATIC SHUTTER,TWO POSITION
AUTO INDEXER AND DRIVE
GUIDE RODS
CUSTOM SOURCE POSITION
CUSTOM COOLING ROOF PORTS
15cc CRUCIBLE
25cc CRUCIBLE
40cc CRUCIBLE
OPTION -03
Pneumatic Shutter
Pneumatic shutters are an excellent tool forprecise control of film thickness on to a sub-strate. The air actuated shutter masks off thevapor stream between source and substrate atthe beginning and finishing stages of the evap-oration/deposition cycle. The shutter alsoallows pre-melt or “soak” prior to deposition byblanketing the evaporation material. This is atwo position shutter with a 120VAC solenoid.
OPTION -04 TO -08
OPTION -05
OPTION -02
OPTION -01
Guide Rods
Two linear bearing guide rods allow the flange
mounted e-Vap® systems to be routinelymaintained by simply sliding in and out, indrawer-like fashion. A weldable support brack-et kit is provided to secure the guide rods ontothe user’s port flange. Installation is simple andself explanatory.
Crucible Indexer & Drive
The Auto-Indexer is a stepper motor drive unitwith optical encoding for rotating and position-
ing multi-pocket e-Vap® sources. The unit candrive sources with up to eight pockets in eithera unidirectional or bidirectional manner. It canalso drive continuous carousel-type sources ateight speed settings. Includes mounting brack-et for external drive.
Custom Source Position & Volume
The standard distance from the source centerto the mounting-flange seal face is 10" or 8"for horizontal systems. For custom positionsbetween 8" to 12" add option 4. Standard sin-gle-pocket crucible volume is 7cc. For pocketvolumes of 15, 25 or 40cc add option -06, -07or -08 respectively.
Custom Roof Ports
Watercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor deposi-tion rate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port loca-tions can be specified by the customer.
Horizontal Flange Mounted Source
MDC has eliminated the difficulties of flange mounting electronbeam sources. Problems associated with designing and fittingsources into coating systems have been solved with the introductionof standard horizontal flange mounted evaporation sources. Thecompact footprint of these flanged evaporation systems allows theinstallation of up to three individual sources onto one ten-inch cham-ber. The flanged assemblies include an electron beam source with allwater and electrical connections. A guide rod option provides adrawer like sliding action, ideal for installation and system mainte-
nance. Horizontal flange mounted assemblies come ready to acceptthis guide rod kit. Another option includes a water-cooled roof, which
mounts directly above the e-Vap® source. The water-cooled roofacts as a heat barrier between the source and substrate and alsoprevents vapor condensation on chamber walls. The water-cooledroof is fitted with a deposition port angled towards the substrate,which aids in deposition uniformity, even when source and substratecenterlines are offset. Horizontal systems purchased with a sourcecontrol module will be fitted with flange-mounted filament trans-formers.
When ordering e-Vap® assembly options, please add the option number(s) to the end of thedesired assembly Part Number listed above. For example 992515-01-02-03-04-05-08
25MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Modular Evaporation Sources
UHVSingle-Pocket
Source
6.00
10" Del-Seal™ CFFlange
CoolingRoof
Manual ShutterRotary Feedthrough
Filament TransformerHigh Voltage Feedthrough
Source/CrucibleWater Lines
X-Y SweepInstrumentation Feedthrough
Cooling RoofWater Lines
11.90
7.00
Vertical Source Assembly
Features
■ UHV compatible system■ 10.0" Del-Seal™ CF flange mount■ Assembly includes rotary and electrical
feedthroughs, clamps, linkages, water flow switchand water connections
■ Shutter is fitted with a high temperature, 300°Cmanual rotary drive
■ Flange seal surface to crucible centerline is 6"standard
■ Systems available with or without watercooledroofs
Vertical Flange Mounted System
UHV Single-Pocket Source
Vertical Flange Mount / Less Cooling Roof
e-Vap®
26 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
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Modular Evaporation Sources
REFERENCEPART
NUMBERPRICE
$MOUNTING FRAME SOURCE COOLING SOURCE WEIGHT
FLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDS
14750
15500
EV-FMP-10V
EV-FMP-10RV
992511
992513
10" DEL-SEAL 1 ONE POCKET 7cc NO 990598 50
10" DEL-SEAL 1 ONE POCKET 7cc YES 990598 50
Vertical Flange Mounted Source
MDC has eliminated the difficulties of flange mounting electronbeam sources. The effort that goes into designing and fitting asource to a vacuum coating chamber has been done for you with theintroduction of standard vertical flange mounted evaporationsources. The flanged assembly includes one 7cc electron beamsource with all water and electrical connections. This type of flangemounted system is typically installed vertically through the bottomside of a chamber. The compact footprint of these flanged evapora-tion systems requires only one port flange for installation. A popularoption commonly ordered with these systems is a water-cooled roof,
which mounts directly above the e-Vap® source. The water-cooledroof acts as a heat barrier between the source and substrate and
Optional Accessories
OPTIONNUMBER
PRICE$DESCRIPTION
1500
500
1250
Call
Call
Call
-01
-04
-05
-06
-07
-08
PNEUMATIC SHUTTER, TWO POSITION
CUSTOM SOURCE POSITION
CUSTOM COOLING ROOF PORTS
15cc CRUCIBLE
25cc CRUCIBLE
40cc CRUCIBLE
When ordering e-Vap® assembly options, please add the option number(s) to the end of thedesired assembly Part Number listed above. For example 992511-01-04-05-08
OPTION -05
Pneumatic Shutter
Shutters mask off the vapor stream betweensource and substrate. Shutters are ideal forpre-melt or “soak” prior to deposition by blan-keting the evaporation material. Pneumaticshutters for vertical flanged assemblies cannotbe mounted on source flange, but can beinstalled through a secondary 1.33" Del-Seal™
CF port. This shutter is a two position shutterwhich includes a 120VAC solenoid.
OPTION -04
OPTION -01
Custom Roof Ports
Watercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor deposi-tion rate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port loca-tions can be specified by the customer.
Custom Source Position
Source position is the distance from the sourceface to mounting flange seal face. This dimen-sion is standard at 6" for all vertical systems.Customer chamber layout or specificationsmay dictate a custom distance. Source posi-tions between 6" and 10" are optional andavailable at the price listed bellow. Dimensionsoutside these limits must be quoted separately.
also prevents vapor condensation on chamber walls.The watercooled roof is fitted with a deposition port, angled towardsthe substrate, which yields excellent deposition uniformity, evenwhen source to substrate centerlines are offset. The single-pocketsource comes standard with a 7cc capacity crucible. The sameassembly can be fitted with larger capacity sources including 15, 25and 40cc versions. To order the larger volume crucible option addone of the three option numbers to the end of the assembly partnumber. Vertical systems purchased with a source control modulewill be fitted with flange-mounted filament transformers.
OPTION -06 TO -08 Custom Crucible Volume
The standard volume for a single-pocket cru-cible is 7cc. For single pocket volumes of 15,25 or 40cc add option -06, -07 or -08 respec-tively.
27MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Modular Evaporation Sources
Features
■ 6kW, 10kW and 15kW models■ High frequency switching technology■ Excellent regulation■ Low stored energy■ Power efficiency greater than 85%■ Low ripple■ Rugged IGBT switches■ CE compliant■ Sequential or simultaneous operation of up to
three electron beam evaporation sources
e-Vap® CVS Series Power Supplies are constructed using state-of-the-art solid state high frequency switching technology. They areoffered in three standard models rated for 6kW, 10kW and 15kW.CVS series power supplies are for use with the horizontal and verti-cal flange mounted systems detailed on the previous four pages, as
well as the e-Vap® modular sources as detailed beginning on pageof this catalog. These power supplies are also compatible with mostcommercially available electron beam sources and are recommend-ed as upgrade power supplies in existing electron beam evaporationsystems.
Power supply enclosures are fully interlocked for operator safety.
e-Vap® CVS Series Power Supplies can power and control up tothree electron beam sources. Source controls and X-Y Sweeps arenot included with power supplies and must be purchased separate-ly. For ordering information please see the next three pages. The
e-Vap® source control module also employs solid state high fre-quency switching technology and is designed to precisely control
emission current when used with e-Vap® power supplies. MDC rec-ommends the use of a high voltage grounding hook when servicingor working with all high voltage power supplies. Grounding hooks aredetailed on page of this catalog.
CVS-6 Power Supply
REFERENCEPART
NUMBERPRICE
$POWER WEIGHTSUPPLY VOLTAGE POUNDS
15300
22575
24750
15300
22575
24750
CVS-6-2CE
CVS-10-2CE
CVS-15-2CE
CVS-6-4CE
CVS-10-4CE
CVS-15-4CE
991240
991275
991242
991193
991245
991246
6kW 208 75
10kW 208 90
15kW 208 100
6kW 400 75
10kW 400 90
15kW 400 100
Specifications
Metering Digital Voltage and Emission Current
Cooling Air cooled
Input power 208 V ±10%, Three-phase, 50/60 Hz, 30, 40, 60 Amperes
400 V ± 5%, Three-phase, 50/60 Hz, 15, 20, 30 Amperes
Voltage output 1 to 10 kV DC, negative polarity
Voltage Ripple Less than 1% RMS
Voltage regulation ± 0.25% of full scale output
Efficiency 85%Cables From – To LengthInput power cord Facilities outlet – Power Supply 12'8 gauge ground wire Power Supply – Ground 12'
Current output
6 kW 0 to 0.6 Amperes
10 kW 0 to 1.0 Amperes
15 kW 0 to 1.5 Amperes
Weight See Table
Dimensions 19" W x 10.25" H x 21" L
Power Supplies
e-Vap®
28 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
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Controls and Measurement
REFERENCEPART
NUMBERPRICE
$WEIGHT
DESCRIPTION POUNDS
5600
5750
6005
125
850
SCM2-DFM-CE
SCM2-RCM-CE
SCM2-RCM-1"B
EV-HRS
SCM-25FC-CE
991364-01
991364
991364-02
991062
991287
DIRECT PACKAGE 10
REMOTE PACKAGE 10
REMOTE FOR 2-1" BOLT FT10
HALF RACK SPACER 1
25-FOOT CABLE KIT 3
Source Control Module
Indirect
Source Control Module
Features
■ High frequency switching technology■ Improved emission stability over 60 Hz SCR
circuits■ Compact filament transformer■ Electrically isolated from high voltage unit■ Grounded and shielded filament transformer
offers improved safety over conventional designs■ Self contained emission current monitoring for
independent operation■ CE compliant■ Full remote control capability■ Touch screen programming■ PS/2 handheld mouse/trackball■ Rack mount brackets included
e-Vap® CVS Source Control Modules are designed for use withe-Vap® CVS Series Power Supplies. The source control module unitincludes filament transformer assembly, hand held mouse controland all necessary cables for hook-up with an e-Vap® CVS PowerSupply. A maximum output current of 70 amperes assures sufficientpower to drive virtually any commercially available electron beamsource. e-Vap® CVS Source Control Modules are available in threeinstallation packages, direct flange mount and two remote cablemounts. Direct flange mount packages are used on all MDC flangemounted evaporation systems. This package allows mounting of thefilament transformer to a high voltage feedthrough fitted with a2.75" Del-Seal™ CF flange. Filament transformer attachment isaccomplished by bolting the transformer housing via two of theflanges .250-28 bolts positioned 180° apart. The remote cablemount packages provide 36" of high voltage cable with OFE copperconnector lugs and an acrylic high voltage shield. This package istypically used with modular source installations where high voltageelectrical feedthroughs are fitted with 2-3/4 Del-Seal™ CF flanges,but limited space does not allow direct installation. The secondremote package is used on installations where high voltage are two1" feedthroughs.The source control module’s compact size occupies only half thewidth in a standard 19" electronics rack. To facilitate the installationinto a standard 19" rack, MDC offers half-rack spacers. However, ifthe source control module is purchased in conjunction with an e-Vap® programmable X-Y sweep controller the two units can be fas-tened together to form the standard 19" rack width and would notrequire the half-rack spacer.
SpecificationsMetering Digital Emission Current
Cooling Air cooled
Input power 208 V ±10%, Single-phase, 50/60 Hz, 8 Amperes
Voltage output 12 VAC
Current output 0 to 70 Amperes
Efficiency 85%Cables From – To Length
Input power cord1 Wall outlet – Source Control Module 7.5'
Interface cable1 Power Supply – Source Control Module 6'
Secondary cable1 Transformer – e-Vap® Source 3'
Control cable2 Source Control Module – Transformer 12'
Transformer input cable2 Source Control Module – Transformer 12'
High voltage cable2 Power Supply – Transformer 12'
Weight 20 lb
Dimensions 8.5" W x 5.25" H x 14" L1Fixed length cables; not available in other lengths
2A 25-foot cable kit may be purchased separately; three cables are included in one kit
Direct
29MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Controls and Measurement
Features
■ Use with virtually any electron beam source■ Large color LCD display■ Store up to 99 sweep patterns (up to 95
user programmable)■ Four pre-defined and highly expandable
patterns include CIRCLE, SPIRAL, FIGURE 8,and, LINE patterns
■ PS/2 handheld mouse/trackball control included■ An audible alarm warns of possible fault conditions■ Ability to custom name each sweep pattern■ Ability to choose a crucible pocket number to
correspond to specific sweep patterns and/orparameters such as beam centering or evaporation material specification
■ Ability to custom name the sweep controller itself for coating machine identification
■ Expanded beam power-profile capabilities allow the user to control erosion of difficult to evaporate materials
■ Customizable display color (foreground and background) to match your company colors or coating machine colors
■ Password option – requires a four digit password to access functions
■ RS-232 interface■ Safety-interlocked■ All cabling included■ CE compliant■ Rack mounting brackets included
e-Vap® XY Programmable Sweep Controller with mouse
The next generation e-Vap® Programmable Sweep Controller has taken electron beam sweep capabilities to a higher level in versatility and practicality.It combines years of customer feedback with the latest advances in electronicstechnology. It possesses profound advancements from its predecessor interms of functionality and ruggedness. It is designed with both the coatingengineer and coatingoperator in mind. Electronbeam control is dynami-cally precise allowing theuser optimum ability todeposit dielectrics andmetals in the mostdemanding of applications.The strength of the sweepcontroller lies in its abilityto easily adapt to differentevaporation processrequirements, using its many expandable sweep patterns. Four predefinedsweep patterns and up to 95 additional user-defined patterns can bestored. The predefined patterns include CIRCLE, SPIRAL, FIGURE 8, andLINE patterns. Each of the 95 user defined patterns may consist of up to 208 XY points with a different beam dwell time for each beam point.The user interface includes a large, vibrant color LCD display with six function keys and a smooth rolling adjustment knob. A handheld PS/2device/trackball is provided which allows beam maneuverability for crucible material preparation and evaporation. For computer-automatedvacuum systems, a detailed rear panel digital I/O port along with a standard RS-232 interface allows access to the most important sweeperfunctions and status signals. An optional interactive Windows program isavailable allowing desktop sweep pattern design and virtually unlimited sweep pattern storage.
Specifications
Graphic Display Color LCD
Input Power 100-120/200-240V, 50/60Hz, 3A
Max Coil Output (sweep + dc bias) 5 Amps
Max Sweep Frequency 200 Hz
Programming Interface Pushbutton, Digital I/O, or RS-232
Mouse Remote Input PS/2
Max Cable Length (18AWG) 25 feet (7.6 meters)
Weight 11 lbs
Dimensions 8.5" W x 5.25" H x 14” L, Rack-mountable
XY Programmable Sweep Controller
Description
Welcome Screen DisplayWelcome Screen Display
e-Vap®
30 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
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Controls and Measurement
Sweep Pattern Types
All of these patterns may have their sweep characteristics and parameters highly modified. These parameters include SPEED, PHASE,and POWER PROFILE.SPEED is defined as the speed of which the beam travels to completeone cycle of a given pattern. The fundamental frequency of beam sweepis speed. SPEED settings are Fast, Medium, and Slow. Fast is consideredthe base time, Medium takes twice as long, and Slow takes five times as long.PHASE is defined as angular pattern rotation per cycle. The pattern isrotated a few degrees after each sweep pattern cycle. PHASE settings areFast (50 degree steps), Medium (20 degree steps), Slow (10 degreesteps), and None.
POWER PROFILE is defined as speed of the beam based on its distancefrom the center of the crucible. It allows the beam to sweep faster throughthe center of the crucible than at the outer edges. The parameter of a pattern crossing a crucible too many times, thus resulting in “tunneling”of the material, may be adjusted to obtain “even” beam temperature distribution across the crucible surface. POWER PROFILE settings rangefrom 1 to 1/R2. A setting of 1 is considered as the beam dwell time, beingthe same for all points. A setting of 1/R2 is considered the beam dwelltimes being four times greater on the outer edges of the crucible. Adjustingthe profile between 1 and 1/R2 (twenty possible adjustments) is a new feature for the sweep controller and adds coating process optimization tothis already valuable parameter.
Circle Pattern
Figure 8 PatternSpiral Pattern
A CIRCLE pattern makes the beam sweep in concentric circles beginning atthe outer edge of the crucible and steps closer to the center of the cruciblewith each revolution. Upon reaching the center, a reverse cycle begins andthe beam sweep pattern continues.
A SPIRAL pattern makes the beam sweep in a continuous spiral, beginningat the outer edge of the crucible and advancing toward the center and thenback out again.
The FIGURE 8 pattern makes the beam sweep in a well-defined figure 8path across the crucible.
Select Pattern
The Select pattern allows the user to view patterns 1 through 99. All patterns may be started and/or edited from here as well.
31MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Controls and Measurement
Display Modes
System ParametersLine Pattern
A LINE pattern makes the beam sweep in a straight line across the crucible.As in all the predefined patterns (circle, spiral, figure 8 and line), the sweepamplitude, speed, phase, power profile, and XY offset can be readily adjusted.There is also easy access to selecting patterns and scrolling through different screen menus.
The System Parameter screen allows the XY offset to be adjusted andstored. Linearity and contrast adjustments can be implemented from here aswell. Foreground and background color selections can also be made fromthis screen and will affect all subsequent patterns. The maximum allowablesweep amplitude current can be set here for the pattern. You can also designate the coating machine’s name as well as adjust the sensitivity of themouse from this screen.
User Pattern: Ninety-six (96) user-defined patterns, completely customizableby the user, can be designed and stored into the sweep controller for instantaccess. Each of the user-defined patterns can contain up to 208 beam location points. Each point can possess its own dwell time ranging from 1 to 100mS. Patterns can be designed via front panel or through RS-232. Ifdesigned via the front panel, a color interactive matrix panel is displayed for
user feedback. It displays a crucible-shaped area showing all selected points(see the Interactive Matrix Panel screen shown on the left.) Custom namingof the generated pattern, adding and deleting points/patterns, and modifyingdwell times is all done on this same screen. A new feature of the sweep controller allows the user to access the SPEED function as well. Choices areFast, Medium, and Slow.
User Pattern User Pattern
e-Vap®
32 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Controls and Measurement
The XY Programmable Sweep Controller comes equipped with a handheld PS/2 mouse/trackball which allows activation, and XYoffsets and sweep amplitude adjustments from up to 6 feet away.
• Sweep On/Off – click the left mouse button• DC On/Off – click the right mouse button• Edit XY Offset – roll the trackball in the desired direction• Edit Amplitude – highlight amplitude, roll the trackball up or down.
Handheld PS/2 Mouse/Trackball
Ordering Information
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
4400
125
XYS2-CE
EV-HRS
991344
991062
XY PROGRAMMABLE SWEEP CONTROLLER
HALF RACK SPACER
The sweep controller has the ability to custom name each individual sweeppattern, whether pre-defined or user-defined. For example, when youchoose a specific pattern for a specific evaporation material, it may be desirable to name the pattern after the evaporation material, such as“QuartzPattern” or “TitaniumPattern.”The sweep controller also has the ability to store a name for itself. If yourcoating machine is called “Coating Machine One,” you could customize thename of the sweep controller as, “CoatingMachine1.”The sweep controller also has the ability to assign a specific pattern number (1 to 99) to a specific crucible number or crucible pocket. This is advantageous for users who always have a certain evaporation material ina certain crucible pocket. This allows the user to have saved custom sweepand beam parameters for a given crucible pocket. This is beneficial sincemost deposition controllers have the ability to invoke crucible pockets during a coating cycle.
Customize the Pattern/Controller Name
60
30
0
30
60
90 90
0.0 0.2 0.4 0.6 0.8 1.00.20.40.60.81.0
Rotary Pocket Evaporation Source with HF Emitter Assembly
Hidden Filament Emitter Assembly
Maximize coating distribution with optimal sweep patterns
Optical Coating Uniformity Solutions
33MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Controls and Measurement
Deposition Monitoring and Control
The SQC-122 controls deposition rate and thickness in multi-layerthing film deposition processes. The controller was designed forease of use with six content sensitive Softkeys providing rapidaccess to frequently used data. The 122C memory will hold up to 25processes consisting of 250 layers and 25 materials. Cut / Copy/Paste Capabilities make it easy to modify or duplicate processesand layers. The controller has inputs for two crystal sensors, two 0-10 volt outputs are available to control the evaporation rate. Eightrelays and digital inputs can be independently assigned to over 40possible events, including pocket rotation and external process con-trols. A windows program for set up and data acquisition is alsoincluded with the controller.
The SQC-222C model of the controller includes software for co-dep-osition control. The two crystal sensors and two outputs to controldeposition rate, along with special software features allow for co-deposition capability.
MDC offers a choice of four units with a range of capabilities frommonitoring the deposition process to controlling multiple depositionprocess or controlling co-deposition processes. The choices are tai-lored from introductory / economical thin film deposition to fullprocess control for a production process. Co-deposition of materialsfrom multiple sources allows easier fabrication and investigation ofcomplex material compositions and layers. All of the monitors andcontrollers utilize proven 6 MHz quartz crystal sensor technology tomeasure the thin film deposition process.
The SQM-160 measures thickness and deposition rate of the thinfilm deposition process. The base unit can monitor from 2 independ-ent measurement channels. Four relays are available to controlsource and crystal shutters during the deposition process. Up tonine films can be stored in memory in the SQM-160, active film canbe easily changed from the front panel. All parameters can also beset from the front panel of the monitor. The SQM-160 is a monitoronly it is not capable of controlling the rate during deposition.
SQM-122C Two Channel Deposition Controller
Description
SQM-160 Rate/Thickness Monitor
SQM-122C Screen Example
SQM-222C Co Deposition Controller
e-Vap®
34 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
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Controls and Measurement
Crystal Sensor Packages
REFERENCEPART
NUMBERPRICE
$WEIGHT
DESCRIPTION MOUNT POUNDS
1375
1425
1970
120
LPSP-1
LPSP-275
LPSP-HT-275
CRP-500-117
991310
991311
991637
991131
LOW PROFILE SENSOR PACKAGE 1" BASEPLATE 5
LOW PROFILE SENSOR PACKAGE 2.75" DEL-SEAL 5
BAKEABLE SENSOR PACKAGE 2.75" DEL-SEAL 5
SENSOR CRYSTALS, GOLD RATED BOX OF 10 5
1" Base-Plate Low Profile 2.75" Del-Seal™ CF Low Profile 2.75" Del-Seal™ CF Bakeable to 400°C
This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5
crystals per box, two Swagelok® compression fittingsand a 1" base-plate sensor feedthrough. Bakeable to180°C.
This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5
crystals per box, two Swagelok® compression fittingsand a 2.75" Del-Seal™ CF sensor feedthrough. Bakeableto 180°C.
This bakeable sensor package includes a 400°C bake-able sensor head, oscillator, 30" in-vacuum cable, 6"BNC cable, 10' BNC cable, and a box of gold coated sen-sor crystals with 5 crystals per box. Sensor head is preinstalled on a 2.75" Del-Seal™ CF flange, which includesthe sensor feedthrough.
Deposition Monitoring and Control
The SQM-242 is a thin film deposition controller and a standardPCI expansion card. Each SQM monitors from one to four crys-tal sensor inputs, and provides two control voltage outputs. Atypical single sensor deposition system is shown, the SQM-242card is installed in a computer, a quartz crystal sensor is con-nected to the input and the output is connected to a power sup-ply. The card will control the deposition rate and adjust the out-put of the power supply for constant deposition rate. The basicSQM-242 card includes software that is easily modified to
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
1295
2700
3150
1295
1075
SQM-160
SQC-122C
SQC-222C
SCM-242
SQS-242
991366
991309
991367
991327
991328
SQM-160 TWO CHANNEL DEPOSITION MONITOR
SQM-122C TWO CHANNEL DEPOSITION MONITOR
SQM-22C TWO CHANNEL DEPOSITION MONITOR
SQM-242 TWO CHANNEL DEPOSITION MONITOR
SQS-242 CO DEPOSITION SOFTWARE
SQM-242 Co Deposition Controller Software
SQM-242 Co Deposition Controller PCI Card
communicate with digital I/O cards. The SQS-242 software packagesupports multiple cards, co-deposition, digital I/O , graphing, anddata logging.
35MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Controls and Measurement
Features
■ Reliable■ Small Footprint■ Minimal Shadowing■ Minimal Crystal Handling■ Ease of Installation■ Works w/ Present Thin Film Controllers■ 1/3 The Price of Leading Competitors Units
XL12 Multi Crystal Sensor Head Package Includes:■ Multi Crystal Sensor Head■ Controller■ 1” Bolt Feedthrough or 2 3/4 Conflat■ 30” In-Vacuum Cable■ 12 Complementary Quartz Crystals■ 15 Crystal Carriages■ 2 Sensor Shields
Description
The XL12 Multi Crystal Sensor Head can hold up to 12, 6 MHzCrystal at one time. With the XL12, the customer can take financialadvantage of long term deposition runs! This instrument is anexclusive patent pending design ready to meet industry needs.
This revolutionary design is a small 1.5”w x 5.75”l x 1.4”h (seedrawings) sensor head that uses slide technology to transfer thecrystals. The crystals are seated in carriage assemblies in order toprovide guaranteed exchange during process. When the crystal inuse expires, an operator can manually signal the next crystal tomove into position or you can send a signal via your thin film moni-tor / controller. After a signal is given, the XL12 transfers the nextcrystal into position which moves the expired crystal into a holdingcompartment. To reload the XL12 you simply remove the self align-ing crystal cartridge from the main body. You remove 2 screws andthe top plate, you then re-load 12 new crystals, replace the topplate and reinstall the cartridge to the main body. This processtakes less than 5 minutes!
XL12 Multi Crystal Sensor Head
Deposition Monitoring and Control
XL12 Multi Crystal Sensor Head Specifications
Crystal loaded in cartridge
REFERENCEPART
NUMBERPRICE
$DESCRIPTION POUNDS
XL12 MULTI CRYSTAL SENSOR HEAD 2 EV-XL12CS 991375 Call
e-Vap®
36 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Controls and Measurement
The e-Vap® Crucible Indexer is a micro stepper controlled motor driveunit used to position and rotate a multi-hearth electron beam source.The crucible indexer will rotate and position up to eight pocket positions,additional eight preprogrammed configurations can be selected via dipswitch settings at the back of the controller. These include: 4 pocket, 6pocket, 2 pocket, 180° Banana, 3 pocket 90° Banana, 3 pocket 120°Banana, 3 pocket 135° Banana, 3 pocket 145° Banana, or Continuous360° rotation. An additional dip switch lets the user select the follow-ing modes: Bi-Direction (shortest path between pockets), CounterClockwise Rotation, UHV Source Type, High Speed Range, BCD I/O, andEnable Ethernet communications. In addition the indexer can be userconfigured for any pocket / banana crucible layout. The Indexer alsoeliminates mechanical adjustment of the home or 1st pocket location,the "home" position can be defined electronically.
The e-Vap® Crucible Indexer can be controlled either manually orremotely, it can be configured to interface with most deposition con-troller equipped to select pockets on a multi layer deposition. AWindows-based configuration screen can be used to customize thepocket layout. The drive motor comes with a bracket to attach to a 2.75inch Del Seal rotary feedthrough or to a 1 inch bolt type rotaryfeedthrough. The indexer is supplied with a coupling to connect the 1/4inch drive shaft to the 1/4 inch feedthrough shaft. The e-Vap® CrucibleIndexer is designed to be one of the most flexible methods to customizeor fine tune crucible rotation and control for multi hearth electron beamsources.
Specifications
MOTOR DRIVE
Motor type micro-stepper
Torque 1.4 N-m (200 oz-in)
Speed (RPM) low: 0.05, 0.06, 0.08, 0.10, 0.12, 0.15, 0.19, 0.24, 0.30, 0.37
high: 0.5, 0.6, 0.8, 1.0, 1.2, 1.5, 1.9, 2.4, 3.0, 3.7
Resolution 1.8ºl
Repeatability 0.25ºl
Size (height x width x depth) 89 x 89 x 122 mm (3.5" x 3.5" x 4.8")
Weight 1.5 Kg (3.2 lbs)
Power 12 W (supplied by controller)
Specifications
CONTROLLER
Pockets up to 8
digital inputs binary or BCD encoded
low = 0 to 2 Vdc, high = 4 to 24 Vdc, non-isolated
Communications RS-232 or Ethernet
Size (height x width x depth) 88 x 213 x 197 mm (3.5" x 8.4" x 7.75")
Weight 2.7 Kg (6 lbs)
Power 100-120 / 200-240 VAC, 50/60 Hz, 20W
Compliance CE (LVF & ECD)
Interconnecting cable 10ft (3m), standard DB25
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
2255EV-CI-INDEXER 991400CRUCIBLE INDEXER
Features
■ Direct drive-No pulleys or belts to set or adjust■ Electronic calibration of position■ 8 predefined pocket configurations included■ User configurable feature allows for custom or spe-
cial pocket configurations■ Can be operated manually or by external controller■ Two speed ranges for a total of 20 speed settings■ 1.8º resolution■ CE compliant
e-Vap® Crucible Indexer
Crucible Indexer
37MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Evaporation Source Accessories
Pneumatic Shutter Two Position
Pneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of theevaporation/deposition cycle. The shutter also allows pre-melt or “soak” prior todeposition by blanketing the evaporation material. Shutters with a 2" diameterand 2" stroke are used on sources with crucible volumes of less than 40cc.Shutters with a 3" diameter and 4" stroke are used on sources with crucible vol-umes of 40cc and greater. These shutters come standard with a 120VAC sole-noid valve.
REFERENCEPART
NUMBERPRICE
$NOM. SHUTTER STROKEFLANGE DIAMETER LENGTH
930
1500
950
1250
PS-2P2-133
PS-2P3-133
PS-2P2-275
PS-2P3-275
991796-02
991796-01
991794-02
991794-01
1-1/3 2.00 2.00
1-1/3 3.00 4.00
2-3/4 2.00 2.00
2-3/4 3.00 4.00
Pneumatic Shutter Three Position
Pneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of theevaporation/deposition cycle. The shutter also allows pre-melt or “soak” prior todeposition by blanketing the evaporation material. A three position shutter offersgreater process flexibility than other shutters. In position one the shutter willclose the deposition and rate monitoring ports on a horizontal e-Vap® systemfitted with a water-cooled roof. In position two the shutter continues to block thedeposition port, but opens the rate monitoring port. In position three all ports areopen and the system is ready to begin a coating cycle. This shutter includes a120VAC solenoid air control valve.
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
1650PS-3PU-133 996343SHUTTER 3-POSITION
High Voltage Safety Accessories
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
215
195
225
EV-SGH
HVE-2
BHVE-2
991106
640051
640057
HIGH VOLTAGE SAFETY GROUND HOOK
ACRYLIC SHIELD 2-3/4" DEL-SEAL
ACRYLIC SHIELD 1" BASE-PLATE
Grounding Hook... MDC recommends the use of a grounding hook prior to serv-ice or maintenance of any high voltage equipment. Connections which werepreviously energized should be discharged with a grounding hook solidly con-nected to a low impedance earth ground. Hook installation is made easy withthe supplied 64" insulated cable.
High Voltage Shield... To prevent accidental contact with exposed high voltageleads MDC recommends the use of high voltage acrylic shields. Shields areavailable for 2-3/4" Del-Seal™ CF flange and 1" Baseplate mounted feed-throughs. Strain relief will accept cable sizes from .23" to .47" diameters.
e-Vap®
38 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Evaporation Source Accessories
Manual Shutter Push-Pull
Manual shutters are an excellent tool for control of film thickness onto a sub-strate. The manually operated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of theevaporation/deposition cycle. The shutter also allows pre-melt or “soak” prior todeposition by blanketing the evaporation material. Shutters with a 2" diameterby 2" stroke are used on sources with crucible volumes of less than 40cc.Shutters with a 3" diameter by 4" stroke are used on sources with crucible vol-umes of 40cc and greater.
Linear Guide Rods
Linear bearing guide rods allow horizontal flange mounted e-Vap® systems tobe routinely maintained by simply sliding in and out, in drawer-like fashion. Twolinear ball bushings provide the smooth gliding action required for ease ofmovement. Weldable support brackets secure the guide rods onto the user’sport flange. The bracket installation procedure is simple and self explanatory.
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
825EV-LGRA 991791GUIDE RODS
Water Flow Switch
e-Vap® electron beam sources rely on water-cooling to dissipate the largeamounts of heat generated by an electron beam. Proper water flow is essentialfor normal system operation as well as for safety. The water flow switch will turnoff all power to the e-Vap® source when and if a preset water flow rate dropsbelow its set point.
REFERENCEPART
NUMBERPRICE
$DESCRIPTION
300
300
EV-WF110
EV-WF240
991031
991031-01
WATER FLOW SWITCH 110V
WATER FLOW SWITCH 24VDC
REFERENCEPART
NUMBERPRICE
$NOM. SHUTTER STROKEFLANGE DIAMETER LENGTH
825
975
925
985
MS-2-133
MS-3-133
MS-2-275
MS-3-275
991793-01
991793-02
991792-01
991792-02
1-1/3 2.00 2.00
1-1/3 3.00 4.00
2-3/4 2.00 2.00
2-3/4 3.00 4.00
39MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Evaporation Source Accessories
MDC recommends using crucible liners with all e-Vap® sources. Crucibleliners provide thermal isolation between a target material and a source’swatercooled crucible. These liners offer improved thermal stability whilereducing the transfer of heat to the crucible. Liners provide the ability to eas-ily and quickly switch evaporant materials without removing the source forcleaning. They also reduce power requirements to achieve specific evapora-tion rates. Graphite and vitreous carbon are the most popular liner materialsdue to their low cost and favorable thermal properties. Vitreous carbon isproduced using a patented glazing process baked above 1400°C eliminat-ing any porosity in the carbon. Please contact MDC sales for price and avail-ability on the various non-priced liner materials.
Crucible Liners
GRAPHITE 2cc
GRAPHITE 6cc
GRAPHITE 7cc
GRAPHITE 15cc
GRAPHITE 25cc
GRAPHITE 30cc
GRAPHITE 40cc
GRAPHITE 60cc
GRAPHITE 75cc
GRAPHITE 100cc
VITREOUS CARBON 2cc
VITREOUS CARBON 6cc
VITREOUS CARBON 7cc
VITREOUS CARBON 15cc
VITREOUS CARBON 25cc
VITREOUS CARBON 30cc
VITREOUS CARBON 40cc
VITREOUS CARBON 60cc
VITREOUS CARBON 75cc
VITREOUS CARBON 100cc
MOLYBDENUM 2cc
MOLYBDENUM 6cc
MOLYBDENUM 7cc
MOLYBDENUM 15cc
MOLYBDENUM 25cc
MOLYBDENUM 30cc
MOLYBDENUM 40cc
MOLYBDENUM 60cc
MOLYBDENUM 75cc
MOLYBDENUM 100cc
TUNGSTEN 2cc
TUNGSTEN 6cc
TUNGSTEN 7cc
TUNGSTEN 15cc
TUNGSTEN 25cc
REFERENCEPART
NUMBERPRICE
$LINER CRUCIBLEMATERIAL SIZE
80
55
75
70
80
135
Call
Call
Call
Call
135
135
135
150
225
225
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
EV-CL2G
EV-CL6G
EV-CL7G
EV-CL15G
EV-CL25G
EV-CL30G
EV-CL40G
EV-CL60G
EV-CL75G
EV-CL100G
EV-CL2VC
EV-CL6VC
EV-CL7VC
EV-CL15VC
EV-CL25VC
EV-CL30VC
EV-CL40VC
EV-CL60VC
EV-CL75VC
EV-CL100VC
EV-CL2M
EV-CL6M
EV-CL7M
EV-CL15M
EV-CL25M
EV-CL30M
EV-CL40M
EV-CL60M
EV-CL75M
EV-CL100M
EV-CL2TU
EV-CL6TU
EV-CL7TU
EV-CL15TU
EV-CL25TU
992584-01
990586-01
990587-01
990588-01
990589-01
992484-01
990590-01
992571-01
992572-01
992573-01
992584-02
990586-02
990587-02
990588-02
990589-02
992484-02
990590-02
992571-02
992572-02
992573-02
992584-03
990586-03
990587-03
990588-03
990589-03
992484-03
990590-03
992571-03
992572-03
992573-03
992584-04
990586-04
990587-04
990588-04
990589-04
TUNGSTEN 30cc
TUNGSTEN 40cc
TUNGSTEN 60cc
TUNGSTEN 75cc
TUNGSTEN 100cc
BORON NITRIDE 2cc
BORON NITRIDE 6cc
BORON NITRIDE 7cc
BORON NITRIDE 15cc
BORON NITRIDE 25cc
BORON NITRIDE 30cc
BORON NITRIDE 40cc
BORON NITRIDE 60cc
BORON NITRIDE 75cc
BORON NITRIDE 100cc
ALUMINA 2cc
ALUMINA 6cc
ALUMINA 7cc
ALUMINA 15cc
ALUMINA 25cc
ALUMINA 30cc
ALUMINA 40cc
ALUMINA 60cc
ALUMINA 75cc
ALUMINA 100cc
COPPER 2cc
COPPER 6cc
COPPER 7cc
COPPER 15cc
COPPER 25cc
COPPER 30cc
COPPER 40cc
COPPER 60cc
COPPER 75cc
COPPER 100cc
REFERENCEPART
NUMBERPRICE
$LINER CRUCIBLEMATERIAL SIZE
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
Call
EV-CL30TU
EV-CL40TU
EV-CL60TU
EV-CL75TU
EV-CL100TU
EV-CL2BN
EV-CL6BN
EV-CL7BN
EV-CL15BN
EV-CL25BN
EV-CL30BN
EV-CL40BN
EV-CL60BN
EV-CL75BN
EV-CL100BN
EV-CL2A
EV-CL6A
EV-CL7A
EV-CL15A
EV-CL25A
EV-CL30A
EV-CL40A
EV-CL60A
EV-CL75A
EV-CL100A
EV-CL2CU
EV-CL6CU
EV-CL7CU
EV-CL15CU
EV-CL25CU
EV-CL30CU
EV-CL40CU
EV-CL60CU
EV-CL75CU
EV-CL100CU
992484-04
990590-04
992571-04
992572-04
992573-04
992584-05
990586-05
990587-05
990588-05
990589-05
992484-05
990590-05
992571-05
992572-05
992573-05
992584-06
990586-06
990587-06
990588-06
990589-06
992484-06
990590-06
992571-06
992572-06
992573-06
992584-08
990586-08
990587-08
990588-08
990589-08
992484-08
990590-08
992571-08
992572-08
992573-08FABMATE 2cc
FABMATE 6cc
EV-CL2FM
EV-CL2FM
992584-10
990586-10
90
100
e-Vap®
40 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Evaporation Source Accessories
The spare parts detailed below are a list of e-Vap® consumable components which mayrequire periodic replacement. These components have been specifically designed for usewith MDC e-Vap® electron beam evaporation sources and systems.
ANODE 1-6 1
BEAM DEFLECTOR SHIELD 1, 2, 5, 6 2
BEAM DEFLECTOR SHIELD 3, 4 2
BEAM FORMER 1 - 6 3
CATHODE BLOCK, LH 1, 2 4
CATHODE BLOCK, RH 1, 2 4
CATHODE BLOCK, LH 3 - 6 4
CATHODE BLOCK, RH 3 - 6 4
EMITTER ASSEMBLY 1, 2 6
EMITTER ASSEMBLY, OLD 5 1 6
EMITTER ASSEMBLY 6 6
EMITTER ASSEMBLY 3 6
EMITTER ASSEMBLY 4 6
EMITTER ASSEMBLY, NEW 5 1 6
FASTENERS, NON-GALLING 1 - 6 5
FILAMENT CLAMP, LH 1 - 6 7
FILAMENT CLAMP, RH 1 - 6 7
FILAMENT SET, 5 ea. 1, 2, 6 8
FILAMENT SET, 5 ea. 3, 4, 5 8
INSULATOR, HIGH VOLTAGE 1 - 6 A
INSULATOR, FILAMENT BLOCK 1 - 6 B
INSULATOR, BEAM DEFLECTOR 1 - 6 C
INSULATOR, BEAM FORMER 1 - 6 D
REFERENCEPART
NUMBERPRICE
$USED WITH
DESCRIPTION FRAME SIZE FIGURE
325
115
65
40
200
200
200
200
1450
1450
1450
1450
1450
1450
50
40
40
60
60
15
20
15
7
EV-EA
EV-BDS
EV-BDS
EV-BF
EV-LCB
EV-RCB
EV-LCB
EV-RCB
EV-EA-1000
EV-EA-4010
EV-EA-4015
EV-EA-4066
EV-EA-4UHV
EV-EA-4010
EV-FK
EV-LFC
EV-RFC
EV-FIL
EV-FIL
EV-IHV
EV-IFB
EV-IBDS
EV-IBDS
990537
992201
990534
990533
990525-01
990526-01
990525-02
990526-02
990630-01
990630-02
990630-03
990630-04
990630-06
990630-05
990585
990531
990532
992330
990527
990530
990528
990535
990529
270º Emitter Consumable Accessories
Figure 1
Figure 3
Figure 5
Figure 6
Figure 8 Figure 9
Figure 7
Figure 4
Figure 2
1 Older frame-five emitter assemblies are fitted with short design anodes as pictured in figure seven and bottom of figureone. New frame-five emitter assemblies are fitted with new extended design anodes as shown at top of figure one.
A
B
C
D
C
D
41MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Evaporation Source Accessories
EMITTER RETROFIT KIT
EMITTER RETROFIT KIT 1, 2, 5 1
EMITTER RETROFIT KIT 6 2
EMITTER ASSEMBLY
EMITTER ASSEMBLY 1, 2, 5 1
EMITTER ASSEMBLY 6 2
REPLACEMENT PARTS
ANODE 1-6 3
BEAM DEFLECTOR SHIELD 1-6 4
FILAMENT INSTALLATION TOOL 1-6 5
CATHODE BLOCK, LH 1-6 6
CATHODE BLOCK, RH 1-6 6
FASTENERS, NON-GALLING (Set of 8) 1-6 7
FILAMENT CLAMP, LH 1-6 8
FILAMENT CLAMP, RH 1-6 8
CONSUMABLES
FILAMENT SET, 5 ea. 1-6 9
INSULATOR, HIGH VOLTAGE 1-6 10
REFERENCEPART
NUMBERPRICE
$USED WITH
DESCRIPTION FRAME SIZE FIGURE
3500
4100
2500
2500
250
125
15
650
650
50
95
95
60
235
EV-EAHF1-KIT
EV-EAHF6-KIT
EV-EAHF1
EV-EAHF6
EV-AHF
EV-BDSHF
EV-FIT
EV-LCBHF
EV-RCBHF
EV-FKHF
EV-LFCHF
EV-RFCHF
EV-FILHF
EV-IHVHF
992908
992909
992850-02
992850-01
992845
992846
992534-01
992853
992852
993042
992847-01
992847-02
990527
992414
Figure 3
Figure 5
Figure 7
Figure 1
Figure 9 Figure 10
Figure 8
Figure 6
Figure 4
HF Emitter Assembly
Retrofit KitA complete HF Emitter Assembly retrofit kit includes:• One HF Emitter Assembly• One filament installation tool• One face plate for emitter• Permanent magnets (Frame size 5 and 6 only)• Two installation screws• Detailed instructions
Components may be purchased individually or as acomplete retrofit kit.
The spare parts detailed below are a list of e-Vap® consumable com-ponents which may require periodic replacement. These compo-nents have been specifically designed for use with MDC e-Vap®
electron beam evaporation sources and systems equipped with theHF Emitter Assembly.
Figure 2
e-Vap®
42 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
Thin
Film
Dep
ositi
on
Evaporation Source Accessories
Installation Hardware
Listed below are the essential components required for a typical installation of stand-alonemodular e-Vap® electron beam sources. Included are feedthroughs for source water cool-ing and all electrical interfaces. Manual and auto-indexer type rotary feedthroughs areavailable for the installation of multi-pocket sources. All components are fitted with indus-try standard vacuum mounts to facilitate source installation onto existing coating systems.Standard mounts include... Del-Seal™ CF metal seal flanges and 1" baseplate O-ring sealmounts. Customers with Balzers systems with 1-1/4" base plate ports can use MDC 1-1/4"to 1" baseplate port adapters.
FEEDTHROUGHS, WATER & ELECTRICAL
WATER, DUAL .312" TUBES, 2.75" DEL-SEAL 1
WATER, DUAL .312" TUBES, 1" BASE-PLATE 1
SWEEP COIL, 4 PIN .056, 1.33" DEL-SEAL 2
SWEEP COIL, 4 PIN .056, 2.75" DEL-SEAL 2
SWEEP COIL, 4 PIN .056, 1" BASE-PLATE 2
TC-CRIMP CONTACTS FOR .056 PIN, Pkg of 5 2
HIGH VOLTAGE, 2 PIN .250, 12kV 2.75" DEL-SEAL 3
HIGH VOLTAGE, 1 PIN .312, 12kV 1" BASE-PLATE 10
CONNECTOR, RIGHT ANGLE POWER, .25" PIN 3
CONNECTOR, INLINE POWER, 25" PIN 3
CONNECTOR, RIGHT ANGLE, .312" PIN
FEEDTHROUGHS, ROTARY BELLOWS SEAL
ROTARY MANUAL, .250 SHAFT, 1.33" DEL-SEAL 4
ROTARY MANUAL, .250 SHAFT, 2.75" DEL-SEAL 4
ROTARY, .250 SHAFT BOTH ENDS, 1.33" DEL-SEAL 5
ROTARY, .250 SHAFT BOTH ENDS, 2.75" DEL-SEAL 5
FEEDTHROUGHS, ROTARY O-RING SEAL
ROTARY, .250 SHAFT BOTH ENDS, 1" BASE-PLATE 6
ASSEMBLY EQUIPMENT
BASE-PLATE ADAPTER BALZERS 1-1/4" TO MDC 1" 7
VCR® GLAND, .250" MODIFIED .218" BORE 8
VCR® GLAND, .250" TO .312" TUBE ADAPTER 8
WATER FLOW SWITCH, 110V 9
WATER FLOW SWITCH, 240V 9
HIGH VOLTAGE SAFETY GROUND HOOK 11
HIGH VOLTAGE ACRYLIC SHIELD, 2-3/4" DEL-SEAL 12
HIGH VOLTAGE ACRYLIC SHIELD, 1" BASE-PLATE 12
REFERENCEPART
NUMBERPRICE
$DESCRIPTION FIGURE
150
285
275
275
300
60
425
395
25
25
75
450
465
525
535
345
95
22
10
300
300
215
195
225
991534
991726
991531
991532
991727
991538
640005
992940
991537
991536
992818-03
670004
670005
991731
991730
652000
991813
990610
991809
991031
991031-01
991106
640051
640057
Figure 2
Figure 4
Figure 6
Figure 8
Figure 11
Figure 9
Figure 7
Figure 5
Figure 3
EV-LF275
EV-LF1
EV-IF133
EV-IF275
EV-IF1
TC-CRIMP
EV-HC275
EV-HC1
RAPC
ILPC
REVHVC
HTBRM-133
HTBRM-275
EV-BRMI-133
EV-BRMI-275
FRM-1
EV-BAI
EV-MVCR
EV-TAVCR
EV-WF110
EV-WF24D
EV-SGH
HVE-2
BHVE-2
Figure 1
Figure 10
Figure 12
43MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Ordering Information
Shipping Method
All standard shipments are made by thefollowing method unless otherwise specified:• FOB Hayward, California and Sarasota,
Florida.• prepay and added to invoice (PPA);• shipped via UPS ground service or best
way as determined by MDC.
Nonstandard shipments must be specified bythe customer. General notes include thefollowing:• orders may be specified to ship collect;• charges for nonstandard methods of
shipping are determined by the specifiedcarrier;
• in some cases, oversized items may becharged at a “dimensional weight” (dim-weight) rate which is substantially higherthan surface rates.
MDC recommends in all cases that analternative carrier be named at the time oforder.
Weights stated in this catalog are forreference only. Exact shipping weights aredetermined at the time of shipment.
Payment Terms
Net 30 days with prior credit approval.VISA®, MasterCard® and AmericanExpress® credit cards, prepaid, are alsoaccepted.
Prices and Specifications
Prices and specifications are subject tochange without notice.
Delivery
Every effort will be made to ship within three(3) days of receipt of an order. In the event ofback-order, a firm delivery date will beestablished and quoted.
Warranty
All products manufactured by MDC VacuumProducts Corporation are warranted to befree from defects in materials andworkmanship for a period of twelve (12)months from the date of shipment by MDCVacuum Products Corporation to the buyer.Liability under this warranty is expresslylimited to repair or replacement of defectiveproducts at the option of MDC VacuumProducts Corporation. Products returned toMDC Vacuum Products Corporation for repairor replacement shall be received prepaid.Expendable items such as gaskets, bellows,bearings, lubricants, etc., may have a servicelife of less than one year in normal usage. Ifsuch items fail to give reasonable service fora period of time, as determined by MDCVacuum Products Corporation, they will berepaired or replaced by MDC VacuumProducts Corporation at its election.
Return Policy
In the event that a product is to be returnedto MDC, a Return Authorization (RA) numbermust be obtained from the MDC SalesDepartment prior to shipment of the product.Call the toll free number listed at the bottomof this page and request an RA number. Tofacilitate processing, please provide theoriginal date of purchase and either theoriginal purchase order number or theoriginal MDC sales order number.
Products returned to MDC Vacuum Products
Corporation for repair or replacement shallbe received prepaid. Items arriving without aReturn Authorization number will be refused.
A product failing to give reasonable servicefor a period of time, as determined by MDCVacuum Products Corporation, will be repair-ed or replaced by MDC Vacuum ProductsCorporation at its election.
Trademark Ownership
American Express® American Express Co.MasterCard® Mastercard International Inc.VISA® VISA International Service AssociationApiezon® Avo Biddle InstrumentsAutoCad® AutoDesk CorporationConflat®, Fel-Pro® Varian Associates Inc.Corning®, Pyrex® Corning Inc.Dicronite® Rotary Components, Inc.Kovar® Carpenter TechnologyMazak® Yamazaki Mazak Corp.Slo-Syn® Superior Electric Co.Suprasil™ Heraeus Amersil Inc.Swagelok®, VCR® Swagelok Co.Teflon® E.I. DuPont de Nemours & Co., Inc.VacOptix® Insulator SealViton®, Buna®, Kapton®, Kalrez®,Krytox®, Vespel®, Delrin® DuPont Dow
ElastomersCab-Fast® Caburn-MDC LimitedDel-Seal™, Del-Base™, Del-Weld™, Kwik-Flange™, Large-Flange™, Mini-Scaffold™,Auto-Dock™, C-Loc™, Uni-Loc™, V-Plane™,Re-Vap™, e-Vap®
MDC Vacuum Products Corporation
MDC customer service and technical department MDC inventory and stock room MDC shipping and receiving department
All dimensions in this catalog are given ininches unless specified otherwise.
e-Vap®
44 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
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AAccessories, e-Vap®
Consumable. . . . . . . . . . . . . . . . . . . 40-44General . . . . . . . . . . . . . . . . . . . . . . . . . 37Installation . . . . . . . . . . . . . . . . . . . . . . 42
Acrylic, high voltage shieldFits 1" baseplate mounts . . . . . . . . . 37,42Fits 2-3/4" Del-Seal™ CF . . . . . . . . . 37,42
Adapter, e-Vap®
1/4" to 5/16" tube . . . . . . . . . . . . . . . . 421-1/4" to 1" baseplate . . . . . . . . . . . . . 422mm wire feed . . . . . . . . . . . . . . . . . . . 11
Alumina crucible liners . . . . . . . . . . . . . . . 39Anode, 3kW miniature source. . . . . . . . 13,16Anode, modular source. . . . . . . . . . . . . 40,41Applications, e-Vap® . . . . . . . . . . . . . . . . . 2
BBaseplate
Adapter, 1-1/4" to 1" . . . . . . . . . . . . . . 42Beam former
3kW source. . . . . . . . . . . . . . . . . . . . . . 13270º source. . . . . . . . . . . . . . . . . . . . . . 40
Block insulator, filament 270º . . . . . . . . . 482Block, cathode 270º . . . . . . . . . . . . . . . . . 40Boron Nitride crucible liners . . . . . . . . . . . 40
CCable, 25' source control. . . . . . . . . . . . . . 28Carbon crucible liners . . . . . . . . . . . . . . . . 39Carousel source, modular . . . . . . . . . . 21-22Cathode block 270º . . . . . . . . . . . . . . . . . . 40Coil feedthroughs . . . . . . . . . . . . . . . . . . . 42
Electrical 4 pin .056", 2-3/4" . . . . . . . . 42Electrical 4 pin .056", 1-1/3" . . . . . . . . 42Electrical 4 pin .056", 1" baseplate. . . . 42
Consumable accessories . . . . . . . . . . . 40-41Controller, deposition rate . . . . . . . . . . 33-34Copper crucible liners . . . . . . . . . . . . . . . . 39Crucible liners . . . . . . . . . . . . . . . . . . . . . . 39Crucible, resistive source oxide . . . . . . . . . . 5Crucible Indexer . . . . . . . . . . . . . . . . . . . . 36Crystal sensor packages
Low profile on 1" baseplate . . . . . . . . . 34Low profile on 2-3/4" . . . . . . . . . . . . . . 34High temperature on 2-3/4" . . . . . . . . . 34Low profile on 2-3/4" . . . . . . . . . . . . . . 34
XL-12 . . . . . . . . . . . . . . . . . . . . . . . . . . 35
DDeposition rate controller . . . . . . . . . . . 33-34Deposition rates
Monolayer . . . . . . . . . . . . . . . . . . . . . . . 10Stable . . . . . . . . . . . . . . . . . . . . . . . . . . 10
EElectrical feedthrough, e-Vap® Sweep,
4 pin, .056" on 2-3/4" . . . . . . . . . . . . . 424 pin, .056" on 1-1/3" . . . . . . . . . . . . . 424 pin, .056" on 1" baseplate . . . . . . . . . 424 pin, .056" on 2-3/4 . . . . . . . . . . . . . . 42High voltage, 2 pin .250 on 2-3/4" . . . . 42High voltage, 2 pin .250 on 1" baseplate 42High current, Re-Vap™ . . . . . . . . . . . . . . 9
Element, resistive source heater basketBaffled boat. . . . . . . . . . . . . . . . . . . . . . . 8Coil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5Filament . . . . . . . . . . . . . . . . . . . . . . . . . 8Foil boat, metal . . . . . . . . . . . . . . . . . . . . 5Foil boat, coated metal . . . . . . . . . . . . . . 5
Emitter assembly, 270º . . . . . . . . . . . . . . . 40Emitter assembly, HF. . . . . . . . . . . . . . . . . 41Extension kit, Re-Vap™ conductor . . . . . . . . 5
FFasteners, non-galling . . . . . . . . . . . . . 40,41Feedthroughs
Electrical . . . . . . . . . . . . . . . . . . . . . . . . 42Rotary . . . . . . . . . . . . . . . . . . . . . . . . . 42Water, dual 5/16 tube . . . . . . . . . . . . . . 42High current, Re-Vap™
Filament clamp . . . . . . . . . . . . . . . . . . . . . 42Filament sets,
EV-100 . . . . . . . . . . . . . . . . . . . . . . . . . 113kw single . . . . . . . . . . . . . . . . . . . . . . 13Mighty SourceTM. . . . . . . . . . . . . . . . . . . 16270º emitter . . . . . . . . . . . . . . . . . . . . . 40HF emitter . . . . . . . . . . . . . . . . . . . . . . . 41
Filament transformer, source control . . . . . 28Filament, resistive source
Re-Vap™900 . . . . . . . . . . . . . . . . . . . . . . 5Re-Vap™3000 . . . . . . . . . . . . . . . . . . . . . 8
Flange mounted sourcesHorizontal . . . . . . . . . . . . . . . . . . . . . . . 24
Miniature. . . . . . . . . . . . . . . . . . . . . . . . 13Mighty SourceTM. . . . . . . . . . . . . . . . . . . 16Vertical . . . . . . . . . . . . . . . . . . . . . . . . . 25
Flow switch, water . . . . . . . . . . . . . . . . . . 38Frame size, modular source
Frame 1, 2, . . . . . . . . . . . . . . . . . . . . . . 19Frame 3,4 . . . . . . . . . . . . . . . . . . . . . . . 20Frame 5 . . . . . . . . . . . . . . . . . . . . . . . . 21Frame 6 . . . . . . . . . . . . . . . . . . . . . . . . 22
GGland 1/4 VCR® with .218" bore . . . . . . . 42Gland 1/4 VCR® to 5/16"
tube adapter . . . . . . . . . . . . . . . . . . . . . 42Graphite crucible liners . . . . . . . . . . . . . . . 39Grounding hook, high voltage . . . . . . . . . . 37Guide rods, horizontal flanged
source. . . . . . . . . . . . . . . . . . . . . . . . . . 38
HHalf-rack spacer
3-1/2" high . . . . . . . . . . . . . . . . . . . . . . 365-1/4" high . . . . . . . . . . . . . . . . . . . 28,32
HF emitter . . . . . . . . . . . . . . . . . . . . . . . . . 41High voltage power supplies, 208 volt
100W-EV-100 . . . . . . . . . . . . . . . . . . . . 113kW . . . . . . . . . . . . . . . . . . . . . . . . 13,156kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27
High voltage power supplies, 400 volt6kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27
High voltage shield, acrylicFits 2-3/4" Del-Seal™ CF . . . . . . . . . 37,42Fits 1" baseplate mount . . . . . . . . . . 37,42
IIndexer, crucible . . . . . . . . . . . . . . . . . . . . 36Indirect watercooled sources . . . . . . . . 21,22Insulator
Beam deflector, 270º. . . . . . . . . . . . . . . 40Beam former, 270º . . . . . . . . . . . . . . . . 40Ceramic, 270º . . . . . . . . . . . . . . . . . . . . 40Filament block, 270º . . . . . . . . . . . . . . . 40High voltage, HF, 270º . . . . . . . . . . . 40,41
45MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
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e-Vap®
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J
K
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MManual shutter, push-pull . . . . . . . . . . . . . 38Miniature evaporation systems . . . . . . . 10-14 Miniature sources
e-Vap® 100W . . . . . . . . . . . . . . . . . 10-11e-Vap® 3000W . . . . . . . . . . . . . . . . 12-13Mighty Source™ . . . . . . . . . . . . . . . . 14-15
Modular sources, by frame sizeFrame 1, 2 . . . . . . . . . . . . . . . . . . . . . . 19Frame 3,4 . . . . . . . . . . . . . . . . . . . . . . . 20Frame 5 . . . . . . . . . . . . . . . . . . . . . . . . 21Frame 6 . . . . . . . . . . . . . . . . . . . . . . . . 22
Modular sources, flangedHorizontal . . . . . . . . . . . . . . . . . . . . . . . 24Vertical . . . . . . . . . . . . . . . . . . . . . . . . . 25
Molybdenum crucible liners. . . . . . . . . . . . 39Mouse, XY sweep . . . . . . . . . . . . . . . . . . . 32
N
OOrdering information . . . . . . . . . . . . . . . . . 43
PPatterns, XY sweep . . . . . . . . . . . . . . . 30-31Pneumatic shutter
2 position, 2 on 1-1/3" . . . . . . . . . . . . . 372 position, 2 on 2-3/4" . . . . . . . . . . . . . 372 position, 3 on 1-1/3" . . . . . . . . . . . . . 372 position, 3 on 2-3/4" . . . . . . . . . . . . . 37
Power supplies, 208V input voltage100W, EV-100 . . . . . . . . . . . . . . . . . . . . 11
900W, Re-Vap™ . . . . . . . . . . . . . . . . . . . . 43000W, Re-Vap™ . . . . . . . . . . . . . . . . . . . 63kW . . . . . . . . . . . . . . . . . . . . . . . . . 13,156kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27
Power supplies 400V input voltage6kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27
Q
RRate controller, deposition . . . . . . . . . . 33,34Re-Vap™ . . . . . . . . . . . . . . . . . . . . . . . . . . 4,9Remote mount filament transformer . . . . . 28Resistive source, Re-Vap™ . . . . . . . . . . . . 4,9Rods, guide, horizontal flanged source . . . 38Roof, watercooled . . . . . . . . . . . . . . . . 23-26
SSafety accessories
Acrylic shield, fits 1" baseplate . . . . . . . 37Acrylic shield, fits 2-3/4". . . . . . . . . . . . 37Grounding hook, high voltage . . . . . . . . 37
Sensor packages, crystal. . . . . . . . . . . . . . 34XL-12 . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Shipping method . . . . . . . . . . . . . . . . . . . . 43Shutter, e-Vap®
Manual . . . . . . . . . . . . . . . . . . . . . . . . . 38Pneumatic. . . . . . . . . . . . . . . . . . . . . . . 37
Single-pocket sources, modular . . . . . . . . 19Source control filament transformer . . . . . 28Source control module . . . . . . . . . . . . . . . 28Sources,
Resistive, Re-Vap™ 900 . . . . . . . . . . . . . . 4Resistive, Re-Vap™ 3000 . . . . . . . . . . . 7-9
Sweep coil feedthroughs . . . . . . . . . . . . . . 29Sweep patterns . . . . . . . . . . . . . . . . . . 31-31Sweep programmable controller, XY. . . 29-32Switch, water flow
110 volt. . . . . . . . . . . . . . . . . . . . . . . . . 3824VDC volt . . . . . . . . . . . . . . . . . . . . . . 38
Systems, e-Vap®
Horizontal, flanged electron beam . . . . . 23Miniature, flanged electron
beam . . . . . . . . . . . . . . . . . . . . . . . . . 13Miniature, flanged resistive . . . . . . . . . . . 4Vertical, flanged electron beam . . . . . . . 25Re-Vap™ 3000. . . . . . . . . . . . . . . . . . . . . 6
Mighty sourceTM
. . . . . . . . . . . . . . . . . . . 14
TTantalum crucible liners . . . . . . . . . . . . . . 39Tungsten crucible liners. . . . . . . . . . . . . . . 39
U
VVCR® Gland 1/4 with .218" bore . . . . . . . 42VCR® Gland 1/4 to 5/16"
tube adapter . . . . . . . . . . . . . . . . . . . . . 42Vitreous carbon crucible liners . . . . . . . . . 39
WWarranty . . . . . . . . . . . . . . . . . . . . . . . . . . 43Water cooling, direct and indirect,
e-Vap®. . . . . . . . . . . . . . . . . . . . . . . . . 18Water feedthroughs, e-Vap®
Dual 5/16" tube on 1" baseplate. . . . . . 42Dual 5/16" tube on 2-3/4" . . . . . . . . . . 42
Water flow switch . . . . . . . . . . . . . . . . . . . 38Watercooled roof, horizontal and
vertical . . . . . . . . . . . . . . . . . . . . . . . 24,26Wire fed source-EV-1100
1mm wire . . . . . . . . . . . . . . . . . . . . . . . 112mm wire . . . . . . . . . . . . . . . . . . . . . . . 11
XXY sweep controller, programmable . . . 29-32
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Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
e-Vap®
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47MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-8817
Thin Film Deposition
e-Vap®
Notes
Visit www.mdcvacuum.comto order online and for all of the latest pricing, newproduct and sales representative contact information.
Access over 3300 parts online–thousands ofcomponents in-stock!
Mighty Source ™
e-Vap® Source
Fla
nge-mounted UHV Source
e-Vap® 3000Re-V
ap™ 900 System
Accessories
Single pocket • Multi pocket • UHV • Flange-m
ount
ed
Multi pocket
Single pocket
MDC Vacuum Products Corporation23842 Cabot Boulevard, Hayward, CA 94545-1651• Toll Free 800-443-8817• Phone 510-265-3500 • Fax 510-887-0626• e-mail [email protected] • www.mdcvacuum.com
VACUUM PRODUCTS CORPORATION
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