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High-Dielectric-Constant Capacitors for Power Electronic Systems* U. (Balu) Balachandran Argonne National Laboratory Team members at Argonne: B. Ma, M. Narayanan, S. Liu, S. Tong, T. H. Lee, S. E. Dorris This presentation does not contain any proprietary, confidential, or otherwise restricted information *Work supported by the U.S. Department of Energy, Vehicle Technologies Program. Project ID# APE-008

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Page 1: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

High-Dielectric-Constant Capacitors for Power Electronic Systems*

U. (Balu) Balachandran Argonne National Laboratory

Team members at Argonne: B. Ma, M. Narayanan, S. Liu, S. Tong, T. H. Lee, S. E. Dorris

This presentation does not contain any proprietary, confidential, or otherwise restricted information

*Work supported by the U.S. Department of Energy, Vehicle Technologies Program.

Project ID# APE-008

Page 2: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

2

Overview

Project start date: FY05 Project end date: FY13 Project continuation & direction

determined annually by DOE Percent complete: 75

A & C (Cost & Weight): Overall size and cost of inverters

Capacitors are a significant fraction of the inverter volume (≈35%), weight (≈23%), and cost (≈23%).

D (Performance & Lifetime): High-temperature operation

The performance and lifetime of presently available capacitors degrade rapidly with increasing temperature (ripple current capability decreases with temperature increase from 85Á

C to 105Á

C).

• Total project funding – DOE share: 100%

• Funding received in FY11: $2050K • Funding for FY12: $1950K

Timeline

Budget

Barriers addressed

• Penn State University • Delphi Electronics • Project Lead: Argonne National

Laboratory

Partners

Page 3: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

3

Relevance - Objectives Overall objective: Develop technology for fabricating high performance,

economical, ceramic dielectric capacitors for power electronic systems in electric drive vehicles. The purpose is to build and test a capacitor prototype capable of operating at 140°C at 450 V.

DC bus capacitors for inverters (DOE-APEEM Goals) – (450 V, 1000 µF, <3 mΩ ESR, < 5 nH ESL, 100 A ripple

current,140ÁC

, benign failure)

Specific objective for March ’11 – March ’12: Advance the proven laboratory scale technology to produce high-voltage capable dielectric films on Ni foils (“film-on-foils”) that will have the potential, upon scale-up, to meet DOE-APEEM goals.

The dielectric films will have: – An operational temperature range of -50°

C to +140°

C

– 450 V DC bus capability (peak transient 650 V) – High k (>100) under bias voltage of 450 V and breakdown strength

(≈200 V/μm, i.e., ≈2 MV/cm) to meet weight & volume target

Page 4: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

4

Relevance to Overall DOE Objectives of Petroleum Displacement

Future availability of advanced high-temperature (together with lower cost, weight, & volume) inverters will advance the marketplace application of highly fuel-efficient & environmentally beneficial electric drive vehicles.

Current polymer capacitors have temperature limitation. Capacitors have direct impact on overall size, cost, &

performance of inverters.

This project is developing dielectric films that, due to their increased capacitance density & better capability for high temperature operation, have potential to reduce the size, weight, and cost of capacitors in inverters (addressing barriers A, C, & D).

Page 5: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

5

Milestones Month/Year Milestones or Go/No-Go

Decision Progress Notes

Sept. 2011 Fabricate high-voltage-capable film-on-foils with high breakdown strength.

Fabricated ≈3-μm-thick dielectric film with k ≈110 & loss ≈ 0.004 (i.e., 0.4%) @ 300 V bias at room temperature (Slide 9).

Sept. 2012 Fabricate a high-voltage-capable, multilayer capacitor with end-termination.

Fabricated a 10 μF multilayer capacitor (unbiased) and ≈3.5 μF at 54 V bias with end termination by stacking film-on-foils with Cu end termination (Slide 10).

Dec. 2012 Identify fabrication methodology to improve dielectric properties and reduce capacitor cost.

Fabricated PLZT films with thin TiO2 insertion layers that doubled the breakdown voltage and decreased the loss by ≈50%. Process needs optimization (Slide 12). Effort to prepare sub-micron size PLZT powder is on-going. Sub-micron size powders are essential for the success of developing very fast film deposition processes.

Page 6: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

Technical Approach/Strategy • Our approach is to develop high-dielectric-constant, high-

temperature ceramic (Pb-La-Zr-Ti-O, PLZT) films on base-metal foils (“film-on-foil”) that are either stacked on or embedded directly into the PWBs. PLZT possess high dielectric constants, breakdown fields, and

insulation resistance. With their ability to withstand high temperatures, they can tolerate high ripple currents at under-the-hood conditions.

Integration of base-metal (Ni, Cu) electrodes provides a significant cost advantage over noble metal electrodes.

Stacked and/or embedded capacitors significantly reduce component footprint, improve device performance, provide greater design flexibility, achieve high degree of volumetric efficiency with less weight, and offer an economic advantage.

Argonne’s project addresses the technology gap in an innovative manner

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

6

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Uniqueness of Project and Impact (caps embedded directly into PWB – caps are “invisible”)

Basic Element Metal foil coated with thin

film Pb-La-Zr-Ti-Oxide (PLZT) dielectric

– PLZT/Ni Film-on-Foil – PLZT/Cu Film-on-Foil

Component Stack on or embed coated foils

directly into printed wire board for power electronics in EDVs

Advantages Reduces component footprint

Shortens interconnect lengths

Reduces parasitic inductive losses & electromagnetic interference

metal foil (bottom electrode)

top electrode

dielectric film

Film-on-foil capacitor (FoF)

PWB Embedded capacitor with

interconnections

Reliability is improved because the number & size of interconnections are reduced. Solder joints that are most susceptible to failure are no longer needed.

≈ 30 µm

3~4 mm

PWB

B (bottom electrode) T (top electrode)

Stack of 8 FoFs

Page 8: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

8

Technical Accomplishments & Progress • Measured k ≈110 & loss ≈0.004 (0.4%) at 300 V bias on a

≈3.0 μm-thick film (for comparison, k of polymer films are ≈5).

• Fabricated a 20-mm diameter film-on-foil (PLZT thickness ≈0.7 µm) with capacitance of ≈3 μF at 15 V/μm bias.

• Fabricated ≈10 μF capacitor (unbiased) by stacking 1” x 1” film-on-foils (capacitance density ≈4.3 μF/cm3). Measured ≈3.5 μF at 54 V bias.

• Measured factor of two increase in breakdown strength and ≈50% decrease in loss by inserting thin TiO2 layers within PLZT film.

• Dielectric properties under bias (300 V) show an increase in k and decrease in loss with temperature increasing from -50

C

to +150Á

C.

• Dielectric films are thermally cycled (about 1000 cycles) between -50Á

C and +150Á

C with no measurable degradation

in k.

• Over 50 publications and presentations have been made. One patent was issued & four patent applications were filed.

Argonne’s capacitor technology is recognized with a 2011 R&D 100 Award

Page 9: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

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Measured k ≈110 & loss ≈ 0.004 (i.e., 0.4%) @ 10 kHz & 300 V bias at room temperature on a 3 μm thick PLZT on Ni-foil

ESR = DF/2πfc (DF = loss factor; f = frequency; c = capacitance).

ANL’s film-on-foil has high dielectric constant at high voltages and high-temperature capability

Bias Voltage

(V)

ESR @ -64°C (mΩ)

ESR @ RT (mΩ)

ESR @ 150°C (mΩ)

200 0.11 0.08 0.10

300 0.08 0.06 0.10

Calculated ESR for 1000 µF cap. based on measured material properties

DOE-VT DC Bus Capacitor Goal ≤3 mΩ

Technical Accomplishments/Results (Contd.) Temperature dependent properties - PLZT/Ni

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0

0.02

0.04

0.2

0.3

0.4

0.5

0.6

0.7

-50 0 50 100 150

Cap

acita

nce

(µF)

Temperature (oC)

Loss

0

0.01

0.02

0.03

0.04

0.052

2.53

3.54

4.55

10 100 1000

Cap

acita

nce

(µF)

Frequency (Hz)

Loss

36V

45V

54V

40V

36V

45V 54V

40V

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

10

Technical Accomplishments/Results (Contd.) Fabricated a stacked capacitor with copper

termination, measured capacitance ≈10 µF (cap. density ≈4.3 µF/cm3, unbiased), and capacitance ≈3.5 μF at 54 V

Capacitor was tested at Delphi and confirmed our results

Argonne Data Delphi Data A single FOF measured at 40V

Prototype Multilayer Capacitor with Leads

Page 11: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

11

Technical Accomplishments/Results (Contd.) Prototype Multilayer Capacitor with Leads

Measured capacitance ≈3.5 µF @ 54 V bias (Cap. density ≈1.5 µF/cm3 using thick Ni & Cu ribbons and lots of gap between individual films)

Calculation of the Volume of 1000 μF/450 V Cap: Volume will be ≈0.55 L if ≈80 μm thick Ni foil &

½ oz. Cu ribbon (≈17 μm) is used.

DOE-VT DC Bus Capacitor Goal ≤0.6 L Volume and capacitance of current polymer film capacitor module/housing in Camry ≈2.6 L (2,098 μF), Lexus LS 600h ≈4.0 L (2,629 μF) & 2010 Prius ≈2.0 L (888 μF). Ref: ORNL/TM-2007/190, ORNL/TM-2008/185, & ORNL/TM-2010/253 reports.

For the fabrication we used: Nine film-on-foils that were coated

with 20-mm-dia. top electrodes Ni foil thickness ≈400 μm PLZT film thickness ≈3 μm Cu ribbons (thickness ≈80 μm)

ANL film-on-foils have potential to meet volumetric target

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0

200

400

600

800

0

0.1

0.2

0.3

50 100 150 200

9L PLZT with TiO2 insertion

9L PLZT without insertion layer

Die

lect

ric C

onst

ant D

ielectric LossDC Bias (V)

Technical Accomplishments/Results (Contd.) Enhancement of dielectric properties via superstructure film growth

Measured Improved dielectric properties with insertion of thin intermediate layers

− 2X improvement in breakdown strength − ≈50% decrease in loss

-4

-3

-2

-1

0

1

2

10 100 1000

ln(ln

(1/(1

-p)))

Breakdown Voltage (V)

Mean Vb=120V

Without insertion

-4

-3

-2

-1

0

1

2

10 100 1000

ln(ln

(1/(1

-p)))

Breakdown Voltage (V)

Mean Vb=230V

With TiO2 insertion

12

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

Page 13: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

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Collaboration and coordination with other institutions

Dielectric characterization, reliability testing, electrode design & deposition, defining capacitor specifications & test protocol for APEEM

Strain tolerance of film-on-foils

Industry partner/CRADA, inverter design engineering (direct customer for the technology), stacking & connecting multilayer film-on-foils (Delphi works closely with a PWB manufacturer)

Electrode deposition, defining capacitor specifications & test protocol for APEEM

Page 14: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

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Proposed Future Work The primary emphasis of our future work is on advancing the

proven laboratory scale film-on-foil technology and fabricating ≈10 μF, high-voltage-capable (operating voltage of 450 V) capacitors. Produce high-voltage (450 V) capable PLZT film-on-foils

- Optimize precursor solution chemistry [Polyvinylpyrrolidone (PVP)-modification] to adjust viscosity & increase critical per coating thickness due to structural relaxation

- Incorporate superstructure film growth process (insertion of thin TiO2, ZrO2, HfO2 layers) to improve dielectric properties

Develop fabrication methodology to reduce capacitor cost - Develop process for making sub-micron PLZT powders - Fabricate PLZT films by processes at rates much faster than

obtained from current spin coating method (colloidal spray & aerosol deposition, screen printing)

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2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

15

Proposed Future Work (Contd.)

Develop electrode architecture for carrying large currents and provide graceful failure in large-area PLZT films − Evaluate effects of electrode material, size, shape, and

thickness on capacitor performance − Adopt segmented electrode architecture to overcome

charge accumulation

Fabricate & test multilayer capacitors and provide samples to partners for testing/validation of results − In collaboration with partners, results will be analyzed and

course of action will be determined

Page 16: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

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Summary

Made PLZT films with k ≈ 110 & loss ≈0.004 (0.4%) under 300 V bias; breakdown field ≈ 270 V/µm.

Fabricated ≈10 µF capacitor (unbiased) with end-termination, cap. density ≈4.3 µF/cm3, and measured capacitance ≈3.5 µF at 54 V bias.

Based on measured properties, there is no decrease in ripple current capability up to ≈200ÁC

.

Improved dielectric properties are measured in PLZT films with thin TiO2 insertion layers.

Based on measured values at 300 V, the volume of a 1000 µF/450 V capacitor will be 0.55 L (DOE-OVT goal ≤0.6 L).

Collaborating with partners to overcome the barriers of this technology for inverter application and to commercialize the technology.

We are developing dielectric films with increased capacitance density & capability for high temperature operation that have potential to reduce the size, weight, and cost of capacitors in inverters in electric drive vehicles.

Page 17: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

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Technical Back-up Slides

Page 18: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

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HALT Analysis on PLZT/LNO/Ni Films

⋅=Tk

EVCtB

aN exp

• Lifetime estimated by measuring time to failure vs. applied voltage as function of temperature.

• Mean time-to-failure (MTF), voltage acceleration factor (N), and activation energy (Ea) are obtained from reliability measurement.

-5

-4

-3

-2

-1

0

1

2

3

10 100 1000 104 105

100V120V150V

Wei

bull

Para

met

er, l

n(ln

(1/(1

-p))

tB (sec)

@ 100

C

Page 19: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

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−⋅

⋅=

211

2

2

1 11expTTk

EAAC

EE

B

a

m

B

B1.2

1.4

1.6

1.8

2.0

2.2

2.42.62.83.0

10 100 1000 104

Bre

akdo

wn

Fie

ld (M

V/cm

)

Electrode diameter (µm)

expected for d = 20 mm caps

Breakdown Strength of PLZT/LNO/Ni Films

• Breakdown strength was measured on capacitors of various electrode sizes.

• Extrapolated the date for prediction of breakdown strength of lager size capacitors.

-4

-3

-2

-1

0

1

2

50 60 80 100 200 300 400

D = 100 µmD = 250 µmD = 750 µmD = 5000 µm

ln(ln

(1/(1

-p)))

Applied Voltage (V)

Page 20: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

20

Electrode segmentation for large area films (For improved breakdown strength, Eb)

Before clearing test

After clearing at 20V Mask for segmented electrodes

The sample with segmented electrode exhibited breakdown voltage of 45 V vs. 18 V for sample with 20-mm-dia electrode, a 150% improvement.

Page 21: High-Dielectric-Constant Capacitors for Power Electronic Systems* · 2014-03-11 · PLZT possess high dielectric constants, breakdown fields, and insulation resistance. With their

2011 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

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Effect of Electrode Material & Thickness

3

4

5

6

7

8

0 100 200 300 400 500 600

Cap

acita

nce,

µF

Thickness of Pt electrode, nm

Electrode Thickness (nm) Ω/

Pt 50 2.0

Pt 100 1.0

Pt 500 0.2

Al 50 0.5

Al 100 0.25

Al 500 0.05

1kHz

(Pt electrode diameter: 20 mm)

•Electrodes should carry large currents and, at the same time, provide benign failure mode in multilayer architecture.

•Electrode surface resistivity is consistent with commercial polymer film capacitors carrying large ripple currents.

ρ of Pt = 1.05 x 10-7 Ω-m ρ of Al = 2.82 x 10-8 Ω-m

2012 DOE Vehicle Technologies Program Annual Merit Review & Peer Evaluation Meeting

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0

0.2

0.4

0.6

0.8

1

10 100 1000 104

PSU DataArgonne DataDelphi Data

Diele

ctric

Loss

Frequency (Hz)

22

Stacked Capacitor Made Using Four Film-on-foils (Characterized at ANL, Penn State, & Delphi)

10-12

10-11

10-10

10-9

10-8

10-7

10-6

10-5

102 103 104 105 106

500 pF3.75 nF

144 nF1 µF

2.75 µFCapa

citan

ce, F

Frequency, Hz

Capacitance vs. frequency for a film

Measurements made at Penn State & Delphi confirmed Argonne result

0

2

4

6

8

10

12

10 100 1000 104

PSU DataArgonne DataDelphi Data

Capa

citan

ce (µ

F)

Frequency (Hz)