high barrier multi-layer parylene coating...comelec sa, rue de la paix 129, 2301 la chaux de fonds,...

Comelec SA, rue de la Paix 129, 2301 La Chaux de Fonds, Switzerland

High Barrier Multi-Layer Parylene Coating

Technology overview

Surface Technolgy 2018


▪ Swiss company founded in 1979

▪ Experts in Parylene coating technology

▪ Parylene Equipment

▪ Export rate 60%

▪ Part of the Incabloc group

Company Profile


Our services

▪ Pre-treatment and activation of the substrate

▪ Masking and unmasking

▪ Parylene Coating

▪ Parylene etching and Plasma technologies

▪ Post-treatment for modification of the Parylene surface

(hydrophil, hydrophob)

▪ High Barrier Multi-Layer Parylene Coating

▪ Parylene equipment

▪ Sale of raw material


▪ Transparent coating 0,05 to 100 µm▪ Technical polymer free of additives▪ physically and chemically inert

▪ Biocompatible USP Class VI, biostable, ▪ FDA and Food compliant

▪ Diffusion barrier against chemicals, solvents and moisture

▪ Compatible with most sterilization techniques: Steam, EtO, H2O2, irradiation

Parylene Key Properties

▪ Solid lubricant with excellent dry film lubricity - friction coefficients 0.15-0.30

▪ Dielectric barrier (~ 200 V / µm)

▪ High thermal stability up to 350°C

▪ High power of penetration▪ Completely uniform without

pinholes


Parylene Technology


Parylene Static Process


Parylene Tumble Process


Parylene Equipment

C30-S: semi-industrial scale equipment

C22-T: Tumble process C50-S: Industrial scale equipment

C20-S: Laboratory equipment


Our Certifications


Parylene Applications

MEDICAL: Protection layer (eg: Biocompatible)

for medical devices systems

SPACE: Dielectric for sensor and

electronics modules used in space

mission

CHEMICAL INDUSTRY: protection layer against chemical

attack of sensors

MICROTECHNICS: Lubricant, electrical insulation

and corrosion resistant layer

FOOD PROCESSING: Protection layer according to

FDA and ISO 10/2011

MILITARY: Dielectric layer for electronic

module or sensors according

to IPC-CC-830


Why combining Parylene with oxide material? The synergetic effect…

Parylene C 25µm :

WVTR => ~ 4 g/m2/day

O2TR=> ~ 120 cm3/m2/day

Targeted performance for long term AIMD



Polymer (Parylene-C) layers can be grown pin-hole

free and conformal. However they are not tight at

molecular level.

Oxide materials layers are tight at molecular level,

however they grow under high stress creating

pinholes and cracks.

Improved thickness/permeability ratio up to factor 100



Why there is no universal multilayer solution?

For the oxide material deposition, PECVD or ALD has been privileged due to the quality

of the obtained layer. Both have benefit or drawbacks and depend on the business case

Barrier

properties

Access to 3D

shape?

Production

scale

Room

temperature

deposition

Cost

Parylene Good Excellente Very good Room + +

ALD multilayer Excellente Excellente Good 80°C mini ++++

PECVD

multilayer

Very good Bad Very good Room +++



Quantitative result : OTR, WTR

0,001

0,01

0,1

1

10

100

1000

Parylene 10 µm Parylene multilayer ALD 1 repeted unit Parylene multilayer PECVD 3 reapetedunit

Permeability to O2 and Water vapor

OTR in cc.mm/m2/day/bar WTR g/m2/day



500µm

WN 100nm WN 100nm

SiO2 400nm

Si

Encapsulation coating

PBS solution, 67°C

Qualitative result on standard PBS solution : Testing protocol

SiO2 400nm

Si

WN 100nm WN 100nm

SiO2 400nm

Si

1 2 3

▪ Production of structured silicon wafer with a passivation layer of SiO2

and pads made of tungsten nitride WN

▪ This structure is representative of an typical miniaturized implant

▪ The WN is used for the testing needs due its extreme sensitivity to

water

▪ The structure is encapsulated with wether Parylene C, Parylene AF4

or Multilayer PECVD Parylene/SiOx

▪ The structure is then soaked in PBS solution at 67°C for 4 months

▪ The interface are then observed by Scanning electron microscopy



Par. AF4 – 15 µm

Par. C – 15 µm SiOx/ParC Multilayer– 15 µm

✓ WN not dissolved

✓ Adhesion to substrate NOK :

initial failure mode due to water ingress

✓ WN not dissolved

✓ Adhesion between layers and with substrate OK :

midterm reliability confirmed

Qualitative result on standard PBS solution : After 4 months soaking



On going actions

• Multi-Layer Biocompatibility evaluation (made of biocompatible materials)

• Integrated equipment for Parylene / inorganic layers

• Simulation studies: mechanical stresses, effects of statistics of defects

• Integration in any kind of product: your application is welcome !

• A European project focused on thin layers based packaging of a new

active implantable device. Starts in 2018.



Contact Information

Helena Schneider

B.A. Communication Studies

Business Development Assistant

Büro Deutschland

Tel +49 7147 2700889

[email protected]

Patrick Schneider

Dipl. Wirtsch.- Ing.

Business Development Manager

DE, AUT, GS-CH,

Büro Deutschland

Tel. +49 7147 2700886

[email protected]

Tina Heim

B.Eng.

Business Development Assistant

Büro Deutschland

Tel +49 7147 2700889

[email protected]

mailto:[email protected]



high barrier multi-layer parylene coating...comelec sa, rue de la paix 129, 2301 la chaux de fonds,...

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