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Hexin Wang, China Innovation and R&D Center, Carl Zeiss Shanghai Shenzhen, 9/5/2013 China International Optoelectronic Conference 2013 CIOEC China International Advanced Optical Manufacturing & Precision Engineering Forum 2013 Optical Testing Technology Session Slide 2 2 Agenda 1 2 3 Examples Interferometer - Extremely persistent engineering Light Sheet Success of knowledge transfer OCT Diversity of applications Discussions Introduction Slide 3 3 Light a testing all-rounder demonstrated with advanced application examples May 2013 Slide 4 4 Light a testing all-rounder demonstrated with advanced application examples May 2013 20 July 1969 The most advanced interferometer in the production could be used to measure the profile depth of about 0,5 nm (rms) of a shoe sole! In other words, if we enlarge a shoe to a length which is equal to the distance between the earth and moon (about 384,403 km), a profile depth of about 0,50 m of such a shoe sole could be measured! Slide 5 5 Agenda 1 2 3 Examples Interferometer - Extremely persistent engineering Light Sheet Success of knowledge transfer OCT Diversity of applications Discussions Introduction Slide 6 6 Interferometry is the central tool of optical metrology Slide 7 7 Basic principle of interferometry One Newton fringe is equivalent to a distance change of /2 Slide 8 8 Basic principle of interferometry Nature of Newton fringes for different surfaces with reference to a standard flat Slide 9 9 Basic task of digital fringe analysis Fringe analysis: Development of algorithms to calculate surface deviations from interferograms Slide 10 10 Basic principle of Fizeau Interferometers Fizeau Interferometers are the workhorse in optical metrology Slide 11 11 Fizeau interferometers Laser Beam expander Beamsplitter Fizeau lens Test piece CCD camera Cavity Slide 12 12 Carl Zeiss interferometer DIRECT 100 Fizeau plate Transmission sphere APLANAR Cavity More flexibility Enabling of multi-fringe technique Slide 13 13 Carl Zeiss interferometer DIRECT 100 /4 plate Polarizing beamsplitter Better light efficiency Suppression of residual reflections Slide 14 14 Carl Zeiss interferometer DIRECT 100 Rotating wedge Reduction of coherent noise Slide 15 15 Carl Zeiss interferometer DIRECT 100 Look-up table Arctan Reference store Minus Accumulation store Frame store 3x3 convolution Sine 3x3 convolution Cosine DMI : Direct Measuring Interferometry Video pipeline processing Slide 16 16 Carl Zeiss interferometer DIRECT 100 Vertical test tower arrangements Transmission spheres APLANAR Slide 17 17 Carl Zeiss interferometer DIRECT 100 Control software Slide 18 18 Carl Zeiss interferometer DIRECT 100 Repeatability RMS of wavefront repeatability as function of cavity length for 2 different temperature fluctuations and 2 different air pressures Slide 19 19 Carl Zeiss interferometer DIRECT 100 Repeatability in production environment Repeatibility 0.2... 0.6 nm RMS Slide 20 20 Carl Zeiss interferometer DIRECT 100 Reproducibility in production environment Reproducibility 0.5... 1.0 nm RMS Slide 21 21 Carl Zeiss interferometer DIRECT 100 Calibration process Measured wavefront of total setup - Wavefront error of calibration surface Actual calibration wavefront - FE wavefront of calibration surface Slide 22 22 Carl Zeiss interferometer DIRECT 100 Accuracy in production environment Accuracy 0.7... 1.5 nm RMS Slide 23 23 Carl Zeiss interferometer DIRECT 100 Conclusions Visual interferometry : Resolution /10 Digital interferometry : Resolution /1000... /10000 Repeatability : Main limitations by temperature fluctuations coherent noise Reproducibility : Main limitations by handling Accuracy : Main limitations by calibration process Slide 24 24 Agenda 1 2 3 Examples Interferometer - Extremely persistent engineering Leading/enabling technology in the production environment Light Sheet Success of knowledge transfer OCT Diversity of applications Discussions Introduction Slide 25 25 Light sheet Application demonstrated in the movie http://www.youtube.com/watch?v=mr834Cs9ncs Slide 26 26 Light sheet Mature technology used in the metrology Slide 27 27 Light sheet Light Sheet Microscopy for Multiview Imaging of Large Specimens Optical sectioning while minimizing photodamage Very sensitive fluorescence detection Image acquisition rate as fast as possible Imaging large volumes with high resolution and contrast http://www.cell.com/cell_picture_show-lightsheet Slide 28 28 Light sheet Light Sheet Microscopy for Multiview Imaging of Large Specimens C. Staber, J. Zeitlinger, Stowers Institute for Medical Research, Kansas City, USA Applications Embryogenesis of Drosophila, Zebrafish and other model organisms Cellular dynamics in embryos and small organisms Structural imaging of larger (m-mm) organisms Slide 29 29 Light sheet Z.1 by Carl Zeiss - Innovation More Images. Gentle. Fast. Slide 30 30 Light sheet Z.1 by Carl Zeiss - Innovation http://www.cell.com/cell_picture_show-lightsheet2#iit= Slide 31 31 Light sheet (LS) Examples of imaging done with LS Microscopy based systems Gutirrez-Heredia Luis et al, Light Sheet Fluorescence Microscopy: beyond the flatlands Current Microscopy Contributions to Advances in Science and Technology (A. Mndez-Vilas, Ed.), 2012 Slide 32 32 Agenda 1 2Examples Introduction 3 Interferometer - Extremely persistent engineering Leading/enabling technology in the production environment Light Sheet Success of knowledge transfer - Innovation OCT Diversity of applications Discussions Slide 33 What is OCT? Optical equivalent Ultrasound OCT imaging is performed by measuring the echo time delay of light back reflected/scattered in tissue Near infrared light (800-1300nm) micrometer resolution millimeter penetration depth Non-contact and high speed Slide 34 OCT How does it work? 34 Retina Optic Nerve Head SLD XY Scanner Detector Processing & Analysis Display & Report generation Ophthalmic Lens Macular B-scan (Temporal Nasal) OCT is a non-invasive, sub-surface imaging technique capable of providing high resolution cross sectional images of biological tissues such as retina. Ref Mirror OCT empowers you with the details of What lies beneath the fundus image? Slide 35 Time Domain OCT & Spectral Domain OCT 35 Stratus OCT Eye Light Source Reference Mirror Single Detector Stratus(1 st generation) Time-Domain OCT Eye Light Source Reference Mirror Spectrometer Cirrus (3 rd generation) Spectral-Domain OCT Faster speed Higher definition Slide 36 OCT Diverse applications in clinical practice Ophthalmology Standard clinical tool in eye imaging guided surgery and diagnose from anterior corneal segment to posterior eye disease, such as AMD\Glaucoma\Diabetic Retinopathy Cardiology Ongoing development as an intravascular imaging tool for coronary plaques and stent, visualization for lesion assessment, treatment and follow-up strategies Oncology Great potential as an optical biopsy tool for detection of many cancer tissues such as skin, esophagus etc. Slide 37 37 Agenda 1 2Examples Introduction 3 Interferometer - Extremely persistent engineering Leading/enabling technology in the production environment Light Sheet Success of knowledge transfer -Innovation OCT Diversity of applications - More innovation Discussions Slide 38 38 Discussions Interferometer - Extremely persistent engineering => Leading/enabling technology in the production environment Light Sheet Success of knowledge transfer => Innovation OCT Diversity of applications => More innovation, even disruptive! Thanks to my colleagues: Mr. Bernd Drband, Mr. Bu Peng, Mr. Jrg Mtze for sharing slides! Slide 39 Slide 40 40 Medical Technology 984 million in revenue3,450 employees Industrial Metrology 495 million in revenue2,239 employees Microscopy 650 million in revenue2,801 employees Semiconductor Manufacturing Technology 967 million in revenue2,636 employees Camera Lenses, Sports Optics, Planetariums 178 million in revenue767 employees Vision Care 860 million in revenue9,586 employees Financial Highlights for FY 2011/12 Carl Zeiss Group: Our portfolio is focused on high-tech The overarching ZEISS brand stands for customer focus, innovation and reliability May 2013 Strategic Business Units