heater jacketfeature: heater surrounding temperature is about250 ~ 400 , so it is available to...
TRANSCRIPT
Technical Solution Company
HEATER JACKET
TPOH - Series
ECO friendly
Light weight
15. Business Market Expansion (US) & UL Certification
14. Business Market Expansion (China, ASIA,JAPAN)
13. Contract of Industrial-Educational Collaboration
12. Transferred to Incorporated Company
11. Office Building Expansion and Move-in (Hwaseong)
11. Vendor List from Samsung Semiconductor, Co. Ltd
09. Established new manufacturing lines for heater jacket
08. Venture Capital Company Certification
07 Innobiz Certification / Vendor List from SK Hynix
06. Venture Capital Company Registration / ISO9001 Certification
06. Patent Acquisition for CMP PAD CONDITIONER
05.04 Start Repair Service Business (System Built & Overhaul)
05.04 Company Move-in (Suwon)
04.10 Established TSC (Technical Solution Company)
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CEO Os. Kim
Our executives and staff members have been making steady progress toward our
goal, which is to achieve the world best component business based on creative,
challenge and cooperation.
We promise to provide the best product that is founded on accumulated technology.
Also, we will do our best in order to develop new products as well as create
customer value.
Company VisionThe world best part maker
Business philosophyChallenge constantly andSet a goal
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SERIES TPOH TPH TPCH TSH
MATERIAL POLY-IMIDE
PTFESHEET
PTFEFABRIC
SILICONCOATED
PTFECOATED
SILICONRUBBER
App
licab
le s
erie
s pe
r pip
e si
ze
1/4" О О О О О О
3/8” О О О О О О
1/2" О О О О О О
NW16 О О О О О О
NW25 О О О О О О
NW40 О О О О О О
NW50 О О О О О О
NW63 О О О О О О
NW80 О О О О О О
NW100 О О О О О О
NW125 О О О О О О
OVERNW150 О О О О О О
Max
imum
serv
ice
tem
pera
ture 150 ℃ - - - О - -
200 ℃ - - - - О -
220 ℃ - - - - - О
250 ℃ О О О - -
Pro
cess
equi
pmen
t su
gges
tion
serie
s
CVD О О О О - -
DIFF О О О О - -
METAL О О О О - О
ETCH О О О О - О
SU
BFA
Bsu
gges
tion
serie
s
VACUUMLINE О - - О О -
SCRU-BBER О - - О О -
GAS LINE TTH Series : TAPE HEATER (reference 11 page )
SPECIFICFEATURE
* light* eco-friendly* pricecompetitiveness
* Strong chemicalresistance
* Excellent thermaluniformity
-
* Chemicalresistance
* Pricecompetitiveness
* Excellentthermaluniformity
MATERIAL POLY-IMIDE
PTFESHEET
PTFEFABRIC
SILICONCOATED
PTFECOATED
SILICONRUBBER
SERIES TPOH TPH TPCH TSH
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INSULATORCOMPARISION TSC Conventional Type
Material Polyimide Foam Fiber Glass
Power Consumption 0.9 (reduce 10%) 1
External Temp 46 ℃ (reduce 7 ℃) 53 ℃
Photo
Particle No Particle
Body/Skin Problem Harmless
PARTICLE
Price Competitiveness
100% Polyimide Material : Harmless
No particle elements such as harmful substances,
powder and fragments from materials.
Ultra-light (existing H/J contrast 40%) & Easy Installation
Wide Use Temperature Range (40 ℃ ~ 250 ℃)
Application : Fore-lines, Scrubber Lines
Semiconductor, LCD, Solar Equipment
Location : Sub Clean Fab Lines
Main Fab Lines
[ Insulator Comparison Table ]
Application & Location
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COMPARISION TSC Conventional Type
Temperature
Uniformity
Electromagnetic
Waves Breaking
(Optional)
0 mG 50 mG
100% PTFE Material : Strong chemical resistance
Wide Use Temperature Range (40 ℃ ~ 250 ℃)
The Best Temperature Uniformity
Options
- ECO Friendly Material : harmless
- Electromagnetic Waves Breaking
Application & Location
Application
Semiconductor, LCD, Solar Equipments
Location : Main Fabrication Lines
[ Comparison Table ]
6
100% PTFE Material : Strong chemical resistance
Wide Use Temperature Range (40 ℃ ~ 250 ℃)
The Best Temperature Uniformity
Options
- ECO Friendly Material : harmless
- Electromagnetic Waves Breaking (Refer to the pge5.)
Application & Location
Application
Semiconductor, LCD, Solar Equipments
Location : Main Fabrication Lines
[ For Semiconductor DIFF-process ]
7
Silicon Coated Material : Strong chemicalresistance
Use Temperature Range (40 ℃ ~ 150 ℃)
Low Price
Options
- ECO Friendly Material : harmless
- Electromagnetic Waves Breaking (Refer to the pge5.)
Application & Location
Application : Fore-lines, Scrubber Lines
Location : Sub Clean Fabrication Lines
[ For SCRUBBER LINE HEATER JACKET ]
[ PUMP VACUUM LINE ]
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PTFE Coated Material : Chemical resistance
Wide Use Temperature Range (40 ℃ ~ 200 ℃)
The Best Temperature Uniformity
Price Competitiveness
Options
- ECO Friendly Material : harmless
- Electromagnetic Waves Breaking (Refer to the pge5.)
Application : Fore-lines, Scrubber Lines
Location : Sub Clean Fabrication Lines
Application & Location
[ For Semiconductor DIFF-process Fore-lines ]
9
Jelly Type Rubber
Chipping 0% (Good Durability)
STS Film Patten Element
Good Thermal conductivity & Efficiency
The Best Temperature Uniformity & Thermal Conductivity
Use Temperature Range (40 ℃ ~ 220 ℃)
- Ultra High Temperature : 180 ℃ ~ 220 ℃
Application & Location
Application
Semiconductor, LCD, Solar Equipments
Location : Main Fabrication Lines
TECHNOLOGYCOMPARISION
TSC(Exclusive 3 Layers)
Conventional Type(4 Layers)
Different Structure
[ Technology Comparison Table ]
- High Temperature (Under 150 ℃)
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Basic Function RemarkT/C OFF T/C disconnection check
• Fuse by channel
• Leakage Breaker
• Excess Current
• Over Voltage
• EMO S/W
Note) Spec is different depend on product
Low Limit Monitor low temperature (Alarm sound when it’s lower than set temperature)
High Limit Monitor low temperature (Alarm sound when it’s higher than set temperature)
Alarm Logging Record all data (date, time, alarm)
Power Display (%)
Administration Access control by level
Communication Monitor & Control through RS232/RS485 communication protocol
11[ VACUUM GATE VALVE HEATER JACKET ] [ BSGS HEATER JACKET ]
Use : GAS LINE HEATING
Material : PTFE FABRIC
Maximum service temperature : 200 ℃
Feature : 1” wide, available to produce various length
as customers requested (MAX. 150”)
Use : DIFF CHAMBER MANIFOLD HEATING
Material : MICA & STS SHEET
Maximum service temperature : 250 ℃
Feature : HEATER surrounding temperature
is about 250℃ ~ 400 ℃, so it is available to install
where general HEATER JACKET cannot be used.
VACUUM GATE VALVE HEATER JACKET : TPOH, TPH, TPCH, TSH All of themcan be produced
- Use : VALVE HEATING that is installed in vacuum line
BSGS HEATER JACKET : TPH-SILICON COATED
- Use : BULK GAS (Y-CYLINDER ) BOTTLE HEATING
ADDR : 362-17 Toseong-Ro, Hyangnam-Eup, Hwaseong-Si Gyeonggi-Do, Korea
TEL : +82-31-213-8962, FAX : +82-31-213-8964
Email : [email protected], Homepage : www.newtsc.com