h ardware setup
DESCRIPTION
H ardware setup. Probestation 1: 6“ (200mm * 300mm + 360° rotation + 15mm Z) QTC Instruments : HP4274A (LCR), K6517 (electrometer) , HP6614C (voltage supply), K595 (quasistatic CVmeter) Status: Operational (used to measure Hamamatsu) - PowerPoint PPT PresentationTRANSCRIPT
Probestation 1: 6“ (200mm * 300mm + 360° rotation + 15mm Z) QTC
Instruments: HP4274A (LCR), K6517 (electrometer) , HP6614C (voltage supply), K595 (quasistatic CVmeter)
Status: Operational (used to measure Hamamatsu)
Software (user friendly and some error protections)
Probestation 2: 6“ (200mm * 100mm + 15mm Z) IQC
Instruments: LCR, electrometer, voltage supply
Status: Operational
Misc: Homemade relay system (17 channels each)
Optical Inspction: Zeiss CMM (500*500*500) Res.: 1m (Z~5m)
Hardware setup
Chuck
Probestation
Error estimation1000 measurement runs on one strip (ST teststructure)
Parameter Mean Min Max
Rpoly (M) 1,064 0,00137 1.0605 1.0687
Leakage current (pA)
62,1 2,2 59,0 64,0
Coupling capacitance (pF)
108,3 0,78 106,13 108,57
Software – Front panel
Testing
time ~ 2h
Probing marks
Hamamatsu
Karlsruhe
Pick up tool
Packaging (Hamamatsu)
Sensor Teststructures
Sandwich packaging in
envelope
• Bad to handle
• Optical inspection HANDLING
against specification
• Takes time
• Air cusion effect while placing gliding
Packaging 2 (ST)
• Optical inspection very good
• Easy to take out
• All 4 TS available
Optical survey and dimensional measurements
optical inspection
D1 D2 D3 D4 D5 D6 D7 D8 average stand dev scratch pad comments
CMS-W6B-SSSD-49191 28 20 25 28 28 18 30 26 25,2 4 ok seveal 20m deep notches at cut-line ,4
CMS-W6B-SSD 49185 38 26 30 30 22 13 28 18 25,6 7,3 ok cut-line variations bout 5-10m6 34 27 29 31 24 15 30 10 25 7,8 ok cut-line variations bout 5-10m7 34 26 28 30 24 15 32 9 24,8 8,1 ok cut-line variations bout 5-10m
Thickness at corners: 414,3+-2.2mThickness at center: 463,8+-2.2m
Length nominal (mm) actual (mm) (mm)L 2 97,5 97,208+-0,007 0,292L 1 86,1 86,197+-0,007 -0,097L side 99,164 99,195+-0007 0,031
Check Sheet:
QTC-KA Optical inspection sheet Date: 11.4.2001 Sensor Type: CMS W6B SSD 4919 Tester……..: Blüm Sensor ID…: 00001 Thickness (opt.): Flatness…(opt.):
Short Long
28
26
20
25
28 30
18 28
Cutline..............S1) ok ......S2) ok quality ......S3) some 20m deep chips ......S4) some 20m deep chips
Corner ...........E1) ok ...........E2) ok quality...........E3) ok ...........E4) ok
E2 E1
11
E3 E4
S2 S4
S1
S3
Broken: Broken cutline:
OK:
Pictures
25m
More picturesScratchpad used
Rpoly
Add DC pad
3 AC pads
Electrical characterization of sensors
Rpoly with 10V Rpoly with 2V
Changes in measurement with respect to specs
Electrical characterization of sensors Summary
sensor I@300V (nA) I@450V V_break>550 V_depletion C_TOT <Rpoly> mean CC <Ileakage> #faults Rpoly faults4919-1 168,49 210,79 ok 2125 1,7 521,9 0,03 0 554919-2 121,19 136,69 ok 2125 1,71 522,51 0,02 0 144818-4 164,88 171,06 ok 2174 1,45 532,48 0,02 0 295 Rpoly at 10V4918-5 166,06 171,94 ok 2171 1,76 535,1 0,02 0 1044918-7 121,08 132,66 ok 2175 1,75 534,02 0,03 0 113
Electrical characterization of sensors CV & IV
Electrical characterization of sensors Rpoly
Electrical characterization of sensors coupling capacitance
Electrical characterization of sensors leakage current
Comparison of our test results with industry results (based on 5 sensor of 8 )
• IV even lower than company measurement
• CV perfect agreement
• Some Rpoly higher than company measurement (but company only measured 1 per batch or even TS only)
• No single strip fault (agreement) (neglect Rpoly)
Relevant problems• Nothing Serious• Vdepletion not calculated
Improvements:• Automatic web publishing
(ready 50%)
• Implement Pattern recognition
Optical survey of ST prototype
Pinhole or
bad coupling capacity
No strange electrical behavior
Optical survey of ST prototype 2
Z (m)
Bowl shape!
Asymmetric cut!Global size OK!
QTC-KA Optical inspection sheet Date: 3.4.2001 Sensor Type: CMS ST OB2 Tester……..: Hartmann Sensor ID…: Thickness (opt.): Flatness…(opt.):
Short Long
51
82
51
74
80 83
120 118
E2 E1
11
E3 E4
S2 S4
S1
S3
720 677 670 683 720678 685668 640 640 667
615672 633 636 667689 679716 679 667 680 717
Tisch 232
Pads
Electrical Survey
• Very high total leakage current
• Depletion voltage fine
• One region (7 strip) with a very high leakage current
• Some coupling capacitors out of specs