graphite grades - mersen · 2017. 7. 13. · graphite grades grade density fs cte resistivity...
TRANSCRIPT
Exe_Plaquette_Marché_Production et transport d’énergie_210x297 mm
A WORLD EXPERTin materials and solutionsfor high temperature processes
Main production sites
Industrial or commercial branch
Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 [email protected]
Contact for EuropeMERSEN France Gennevilliers41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 14Fax: +33 (0)1 41 85 43 [email protected]
Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811
Contact for UKMERSEN ScotlandHollytown Ltd.11 woodside, Eurocentral, Holytown, ML1 4XL, UNITED KINGDOMTel.: +44 1698 838710Fax: +44 1698 [email protected]
A GLOBAL PLAYERGlobal expert in materials and solutions for extreme
environments as well as in the safety and reliability of electrical equipment Mersen designs innovative
solutions to address its clients specific
needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.
www.mersen.com
HT2
6 G
B 01
70
St-Marys, USA
Holytown, Scotland UK
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Chongqing, China
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MaterialsGraphite grades
Grade Density FS CTE Resistivity Thermal Permeability Standard (MPa) (10-6/°C) (µΩcm) conductivity (cm2/s) sizes (mm) (W/m°C)
2191 1.75 44 4.2 1,000 116 0.5 540x540x1,830 2020 1.77 45 4.3 1,550 85 0.4 530x635x1,830 1,030x1080x325 Ø 610 x1,830 Ø 915x760 Ø1,500onrequest 2123 1.84 58 5.5 1,140 112 0.3 305x620x915 2160 1.86 76 6.0 1,270 102 0.2 305x305x915 2450 1.86 45 4.5 1,550 85 0.04 Onrequest 6503 1.74 23 3.3 800 200 1 550x550x1,830
SiC coating
T Density Open RF CTE Coating Hardness Young Permeability max porosity (MPa) (10-6/°C) thickness modulus (cm2/s) (GPa)
1700°C 3.2 Impervious 350 4.8 50-250 22802950 63 <10-4
tomost µm Knoop gases(H2) andliquids
Temperature °CTemperature °C
Ther
mal
con
duct
ivity
(W/m
°C)
Ther
mal
con
duct
ivity
(W/m
°C)
1.60
1.40
1.20
1.00
0.80
0.60
0.40
0.20
0.000 200 400 600 800 1,000 1,200 1,400 1,600 1,800 2,000 2,200
Laser Flash1 Bar N2
Laser FlashLess than 1 mBar N2
1.60
1.40
1.20
1.00
0.80
0.60
0.40
0.20
0.000 200 400 600 800 1,000 1,200 1,400 1,600 1,800 2,000 2,200
Hot Plate 1 Bar N2
Hot plateless than 1 mBar N2
Rigid carbon insulation
Density Thermalconductivity Thermalconductivity Standard at400°C at2,200°C Dimensions(mm) (W/m°C) (W/m°C)
ISOLOR® S10 0.1 2.4 2.2 1,500x1000x40 CALCARB® Rounds & special CBCF 18-2000 0.18 0.1 1.0 sizes on request
Carbon / Carbon composite
Density FS (MPa) Flexuralmodulus Maxsizes(mm) (GPa)
AM252 1.70 100 10 RingØ2,200 Tubelength3,000
Unpurified Purified
290 ppm PT : < 20 ppm UHP : < 5 ppm
Purity
5
CALCARB® CBCF 18-2000Thermal Conductivity vs Temperature
Laser Flash Diffusivity ASTM E-1461 Hot Plate ASTM C-177
Isostatic graphite grade 2191 UHP5
The best combination with high thermal conductivity, high strength & high purity!
Mersenall along the photovoltaic production chain
Mersen all along the photovoltaic production chain
“Photovoltaic” is the combination of two words: “photo” from Greek origin, which means light, and “voltaic”, from “volt”, the unit used to measure electricity.
Among all renewable energies photovoltaic benefits from many environment and economic advantages:• Unlimited renewable source of energy• Increasingly cost competitive• Decentralized power source• Peak power at peak time of usage• Environment friendly
• Large size rounds up to dia. 1500 mm in isostatic graphite 2020.• Trays or tubes up to dia. 2200 mm in Carbon/Carbon composite AM252• Rigid carbon thermal insulation CALCARB® and ISOLOR®
• Machining capacity and purification capabilities for large dimensions• Dedicated solutions to reduce chemical reaction with molten silicon
The sun, an energy available for free...Photovoltaic systems use cells to convert sunlight directly into electricity.When sunlight strikes a PV cell, electrons are dislodged, creating an electrical current.The most common semiconductor material used in photovoltaic cell is silicon, an element most commonly found in sand.The crystalline silicon technology, which distinguishes monocrys-talline, multicrystalline and ribbon sheets processes, represents approx. 90% of the market today.
Benefits of Mersen materials:• Grade consistency (inert and non-wetting to most chemicals)• Large diameters available up to 1.5 m in graphite and 2.2 m in
Carbon/Carbon composites for the whole range of products• High purity (less than 5 ppm), which avoids contamination and
allows high quality products• Dedicated high performance solutions to increase lifetime and
efficiency• Mersen materials offer strong benefits...
Thanks to its outstanding properties graphite is the unique and only material to withstand high
temperature, corrosion and the severe conditions on the silicon production process.
Other photovoltaic processes are now available on the market such as the thin film technology
where modules are constructed by depositing extremely thin layers of photosensitive materials onto glass, plastic or stainless steel.
Mersen is a world leader in isostatic graphite production, and proposes proven solutions
to each step of the photovoltaic production chain, from polysilicon feedstock to cells antireflective coating via thin film process. Its range of materials covers graphite, Carbon/Carbon composite as well as insulation materials.
• 2020 graphite crucibles, holders, heaters• Rigid carbon thermal insulation CALCARB®
and ISOLOR®
• AM252 carbon/carbon bolts & nuts• Large sizes • Excellent price to performance
• 2020 graphite carriers• AM252 carbon/carbon carriers• Large sizes • Mechanical stability • Adapted CTE
• Isostatic graphite grades 2124 UHP5, 2450 UHP5
• Rigid carbon thermal insulation CALCARB® and ISOLOR®
• Ultra high precision machining to ensure process stability
• Non wetting to silicon
• Purified graphite grades 2123PT, 2450PT, 2020PT
• SiC coating• Rigid carbon thermal insulation
CALCARB® and ISOLOR®
• Heat shields AM252• Stable properties and excellent
wear performance vs. silicon environment
Data herein contained are provided for general information purpose only and are not binding. Mersen shall have no liability whatsoever with respect to information contained herein. Duplication, reproduction or translation of any information contained herein, in whole or in part, is strictly prohibited without prior written consent of Mersen.
Our materials are in conformity with the RoHS-Directive (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment). Besides Mersen guarantees the application of the European Community REACH-Regulation (Registration, Evaluation, Authorization and Restriction of Chemical substances) to all its plants located in Europe. We are constantly involved in engineering and development. Accordingly, Mersen reserves the rignt to modify, at any time, the technology and product specifications contained herein.
2 3 4
Anti-reflective coatingSi3 N4
TCS Siemens reactor
& converter
Si - Ribbons process
Silicon refining
Solar cellSilica
Wafer slicingMetallurgical silicon
Monocrystalline silicon pulling
Multicrystalline silicon melting
Polysilicon
Isostatic graphite grade 2191 UHP5
The best combination with high thermal conductivity, high strength & high purity!
Mersenall along the photovoltaic production chain
Mersen all along the photovoltaic production chain
“Photovoltaic” is the combination of two words: “photo” from Greek origin, which means light, and “voltaic”, from “volt”, the unit used to measure electricity.
Among all renewable energies photovoltaic benefits from many environment and economic advantages:• Unlimited renewable source of energy• Increasingly cost competitive• Decentralized power source• Peak power at peak time of usage• Environment friendly
• Large size rounds up to dia. 1500 mm in isostatic graphite 2020.• Trays or tubes up to dia. 2200 mm in Carbon/Carbon composite AM252• Rigid carbon thermal insulation CALCARB® and ISOLOR®
• Machining capacity and purification capabilities for large dimensions• Dedicated solutions to reduce chemical reaction with molten silicon
The sun, an energy available for free...Photovoltaic systems use cells to convert sunlight directly into electricity.When sunlight strikes a PV cell, electrons are dislodged, creating an electrical current.The most common semiconductor material used in photovoltaic cell is silicon, an element most commonly found in sand.The crystalline silicon technology, which distinguishes monocrys-talline, multicrystalline and ribbon sheets processes, represents approx. 90% of the market today.
Benefits of Mersen materials:• Grade consistency (inert and non-wetting to most chemicals)• Large diameters available up to 1.5 m in graphite and 2.2 m in
Carbon/Carbon composites for the whole range of products• High purity (less than 5 ppm), which avoids contamination and
allows high quality products• Dedicated high performance solutions to increase lifetime and
efficiency• Mersen materials offer strong benefits...
Thanks to its outstanding properties graphite is the unique and only material to withstand high
temperature, corrosion and the severe conditions on the silicon production process.
Other photovoltaic processes are now available on the market such as the thin film technology
where modules are constructed by depositing extremely thin layers of photosensitive materials onto glass, plastic or stainless steel.
Mersen is a world leader in isostatic graphite production, and proposes proven solutions
to each step of the photovoltaic production chain, from polysilicon feedstock to cells antireflective coating via thin film process. Its range of materials covers graphite, Carbon/Carbon composite as well as insulation materials.
• 2020 graphite crucibles, holders, heaters• Rigid carbon thermal insulation CALCARB®
and ISOLOR®
• AM252 carbon/carbon bolts & nuts• Large sizes • Excellent price to performance
• 2020 graphite carriers• AM252 carbon/carbon carriers• Large sizes • Mechanical stability • Adapted CTE
• Isostatic graphite grades 2124 UHP5, 2450 UHP5
• Rigid carbon thermal insulation CALCARB® and ISOLOR®
• Ultra high precision machining to ensure process stability
• Non wetting to silicon
• Purified graphite grades 2123PT, 2450PT, 2020PT
• SiC coating• Rigid carbon thermal insulation
CALCARB® and ISOLOR®
• Heat shields AM252• Stable properties and excellent
wear performance vs. silicon environment
Data herein contained are provided for general information purpose only and are not binding. Mersen shall have no liability whatsoever with respect to information contained herein. Duplication, reproduction or translation of any information contained herein, in whole or in part, is strictly prohibited without prior written consent of Mersen.
Our materials are in conformity with the RoHS-Directive (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment). Besides Mersen guarantees the application of the European Community REACH-Regulation (Registration, Evaluation, Authorization and Restriction of Chemical substances) to all its plants located in Europe. We are constantly involved in engineering and development. Accordingly, Mersen reserves the rignt to modify, at any time, the technology and product specifications contained herein.
2 3 4
Anti-reflective coatingSi3 N4
TCS Siemens reactor
& converter
Si - Ribbons process
Silicon refining
Solar cellSilica
Wafer slicingMetallurgical silicon
Monocrystalline silicon pulling
Multicrystalline silicon melting
Polysilicon
Isostatic graphite grade 2191 UHP5
The best combination with high thermal conductivity, high strength & high purity!
Mersenall along the photovoltaic production chain
Mersen all along the photovoltaic production chain
“Photovoltaic” is the combination of two words: “photo” from Greek origin, which means light, and “voltaic”, from “volt”, the unit used to measure electricity.
Among all renewable energies photovoltaic benefits from many environment and economic advantages:• Unlimited renewable source of energy• Increasingly cost competitive• Decentralized power source• Peak power at peak time of usage• Environment friendly
• Large size rounds up to dia. 1500 mm in isostatic graphite 2020.• Trays or tubes up to dia. 2200 mm in Carbon/Carbon composite AM252• Rigid carbon thermal insulation CALCARB® and ISOLOR®
• Machining capacity and purification capabilities for large dimensions• Dedicated solutions to reduce chemical reaction with molten silicon
The sun, an energy available for free...Photovoltaic systems use cells to convert sunlight directly into electricity.When sunlight strikes a PV cell, electrons are dislodged, creating an electrical current.The most common semiconductor material used in photovoltaic cell is silicon, an element most commonly found in sand.The crystalline silicon technology, which distinguishes monocrys-talline, multicrystalline and ribbon sheets processes, represents approx. 90% of the market today.
Benefits of Mersen materials:• Grade consistency (inert and non-wetting to most chemicals)• Large diameters available up to 1.5 m in graphite and 2.2 m in
Carbon/Carbon composites for the whole range of products• High purity (less than 5 ppm), which avoids contamination and
allows high quality products• Dedicated high performance solutions to increase lifetime and
efficiency• Mersen materials offer strong benefits...
Thanks to its outstanding properties graphite is the unique and only material to withstand high
temperature, corrosion and the severe conditions on the silicon production process.
Other photovoltaic processes are now available on the market such as the thin film technology
where modules are constructed by depositing extremely thin layers of photosensitive materials onto glass, plastic or stainless steel.
Mersen is a world leader in isostatic graphite production, and proposes proven solutions
to each step of the photovoltaic production chain, from polysilicon feedstock to cells antireflective coating via thin film process. Its range of materials covers graphite, Carbon/Carbon composite as well as insulation materials.
• 2020 graphite crucibles, holders, heaters• Rigid carbon thermal insulation CALCARB®
and ISOLOR®
• AM252 carbon/carbon bolts & nuts• Large sizes • Excellent price to performance
• 2020 graphite carriers• AM252 carbon/carbon carriers• Large sizes • Mechanical stability • Adapted CTE
• Isostatic graphite grades 2124 UHP5, 2450 UHP5
• Rigid carbon thermal insulation CALCARB® and ISOLOR®
• Ultra high precision machining to ensure process stability
• Non wetting to silicon
• Purified graphite grades 2123PT, 2450PT, 2020PT
• SiC coating• Rigid carbon thermal insulation
CALCARB® and ISOLOR®
• Heat shields AM252• Stable properties and excellent
wear performance vs. silicon environment
Data herein contained are provided for general information purpose only and are not binding. Mersen shall have no liability whatsoever with respect to information contained herein. Duplication, reproduction or translation of any information contained herein, in whole or in part, is strictly prohibited without prior written consent of Mersen.
Our materials are in conformity with the RoHS-Directive (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment). Besides Mersen guarantees the application of the European Community REACH-Regulation (Registration, Evaluation, Authorization and Restriction of Chemical substances) to all its plants located in Europe. We are constantly involved in engineering and development. Accordingly, Mersen reserves the rignt to modify, at any time, the technology and product specifications contained herein.
2 3 4
Anti-reflective coatingSi3 N4
TCS Siemens reactor
& converter
Si - Ribbons process
Silicon refining
Solar cellSilica
Wafer slicingMetallurgical silicon
Monocrystalline silicon pulling
Multicrystalline silicon melting
Polysilicon
Exe_Plaquette_Marché_Production et transport d’énergie_210x297 mm
A WORLD EXPERTin materials and solutionsfor high temperature processes
Main production sites
Industrial or commercial branch
Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 [email protected]
Contact for EuropeMERSEN France Gennevilliers41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 14Fax: +33 (0)1 41 85 43 [email protected]
Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811
Contact for UKMERSEN ScotlandHollytown Ltd.11 woodside, Eurocentral, Holytown, ML1 4XL, UNITED KINGDOMTel.: +44 1698 838710Fax: +44 1698 [email protected]
A GLOBAL PLAYERGlobal expert in materials and solutions for extreme
environments as well as in the safety and reliability of electrical equipment Mersen designs innovative
solutions to address its clients specific
needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.
www.mersen.com
HT2
6 G
B 01
70
St-Marys, USA
Holytown, Scotland UK
Gennevilliers, France
Chongqing, China
Exe_Plqt_Verso_A4.eps
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MaterialsGraphite grades
Grade Density FS CTE Resistivity Thermal Permeability Standard (MPa) (10-6/°C) (µΩcm) conductivity (cm2/s) sizes (mm) (W/m°C)
2191 1.75 44 4.2 1,000 116 0.5 540x540x1,830 2020 1.77 45 4.3 1,550 85 0.4 530x635x1,830 1,030x1080x325 Ø 610 x1,830 Ø 915x760 Ø1,500onrequest 2123 1.84 58 5.5 1,140 112 0.3 305x620x915 2160 1.86 76 6.0 1,270 102 0.2 305x305x915 2450 1.86 45 4.5 1,550 85 0.04 Onrequest 6503 1.74 23 3.3 800 200 1 550x550x1,830
SiC coating
T Density Open RF CTE Coating Hardness Young Permeability max porosity (MPa) (10-6/°C) thickness modulus (cm2/s) (GPa)
1700°C 3.2 Impervious 350 4.8 50-250 22802950 63 <10-4
tomost µm Knoop gases(H2) andliquids
Temperature °CTemperature °C
Ther
mal
con
duct
ivity
(W/m
°C)
Ther
mal
con
duct
ivity
(W/m
°C)
1.60
1.40
1.20
1.00
0.80
0.60
0.40
0.20
0.000 200 400 600 800 1,000 1,200 1,400 1,600 1,800 2,000 2,200
Laser Flash1 Bar N2
Laser FlashLess than 1 mBar N2
1.60
1.40
1.20
1.00
0.80
0.60
0.40
0.20
0.000 200 400 600 800 1,000 1,200 1,400 1,600 1,800 2,000 2,200
Hot Plate 1 Bar N2
Hot plateless than 1 mBar N2
Rigid carbon insulation
Density Thermalconductivity Thermalconductivity Standard at400°C at2,200°C Dimensions(mm) (W/m°C) (W/m°C)
ISOLOR® S10 0.1 2.4 2.2 1,500x1000x40 CALCARB® Rounds & special CBCF 18-2000 0.18 0.1 1.0 sizes on request
Carbon / Carbon composite
Density FS (MPa) Flexuralmodulus Maxsizes(mm) (GPa)
AM252 1.70 100 10 RingØ2,200 Tubelength3,000
Unpurified Purified
290 ppm PT : < 20 ppm UHP : < 5 ppm
Purity
5
CALCARB® CBCF 18-2000Thermal Conductivity vs Temperature
Laser Flash Diffusivity ASTM E-1461 Hot Plate ASTM C-177
Exe_Plaquette_Marché_Production et transport d’énergie_210x297 mm
A WORLD EXPERTin materials and solutionsfor high temperature processes
Main production sites
Industrial or commercial branch
Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 [email protected]
Contact for EuropeMERSEN France Gennevilliers41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 14Fax: +33 (0)1 41 85 43 [email protected]
Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811
Contact for UKMERSEN ScotlandHollytown Ltd.11 woodside, Eurocentral, Holytown, ML1 4XL, UNITED KINGDOMTel.: +44 1698 838710Fax: +44 1698 [email protected]
A GLOBAL PLAYERGlobal expert in materials and solutions for extreme
environments as well as in the safety and reliability of electrical equipment Mersen designs innovative
solutions to address its clients specific
needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.
www.mersen.com
HT2
6 G
B 01
70
St-Marys, USA
Holytown, Scotland UK
Gennevilliers, France
Chongqing, China
Exe_Plqt_Verso_A4.eps
Pict
ures
with
cou
rtes
y of
EPI
A, D
upon
t, RW
E, S
chot
t Sol
ar, S
hell
Sola
r B.V
., Ph
otow
att i
nter
natio
nal,
PV C
ryst
alox
, Iso
foto
n, A
NX
O S
.A.
MaterialsGraphite grades
Grade Density FS CTE Resistivity Thermal Permeability Standard (MPa) (10-6/°C) (µΩcm) conductivity (cm2/s) sizes (mm) (W/m°C)
2191 1.75 44 4.2 1,000 116 0.5 540x540x1,830 2020 1.77 45 4.3 1,550 85 0.4 530x635x1,830 1,030x1080x325 Ø 610 x1,830 Ø 915x760 Ø1,500onrequest 2123 1.84 58 5.5 1,140 112 0.3 305x620x915 2160 1.86 76 6.0 1,270 102 0.2 305x305x915 2450 1.86 45 4.5 1,550 85 0.04 Onrequest 6503 1.74 23 3.3 800 200 1 550x550x1,830
SiC coating
T Density Open RF CTE Coating Hardness Young Permeability max porosity (MPa) (10-6/°C) thickness modulus (cm2/s) (GPa)
1700°C 3.2 Impervious 350 4.8 50-250 22802950 63 <10-4
tomost µm Knoop gases(H2) andliquids
Temperature °CTemperature °C
Ther
mal
con
duct
ivity
(W/m
°C)
Ther
mal
con
duct
ivity
(W/m
°C)
1.60
1.40
1.20
1.00
0.80
0.60
0.40
0.20
0.000 200 400 600 800 1,000 1,200 1,400 1,600 1,800 2,000 2,200
Laser Flash1 Bar N2
Laser FlashLess than 1 mBar N2
1.60
1.40
1.20
1.00
0.80
0.60
0.40
0.20
0.000 200 400 600 800 1,000 1,200 1,400 1,600 1,800 2,000 2,200
Hot Plate 1 Bar N2
Hot plateless than 1 mBar N2
Rigid carbon insulation
Density Thermalconductivity Thermalconductivity Standard at400°C at2,200°C Dimensions(mm) (W/m°C) (W/m°C)
ISOLOR® S10 0.1 2.4 2.2 1,500x1000x40 CALCARB® Rounds & special CBCF 18-2000 0.18 0.1 1.0 sizes on request
Carbon / Carbon composite
Density FS (MPa) Flexuralmodulus Maxsizes(mm) (GPa)
AM252 1.70 100 10 RingØ2,200 Tubelength3,000
Unpurified Purified
290 ppm PT : < 20 ppm UHP : < 5 ppm
Purity
5
CALCARB® CBCF 18-2000Thermal Conductivity vs Temperature
Laser Flash Diffusivity ASTM E-1461 Hot Plate ASTM C-177
ELECTRONICS
Purified Graphite Silicon Carbide Graphite Enhancement
Innovative solutions for the Semiconductor Industry
Contact for EuropeMERSEN France Gennevilliers SAS41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 77Fax: +33 (0)1 41 85 45 11E-mail: [email protected] H
T25
GB
0111
Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811
A GLOBAL PLAYER
A WORLD EXPERTin materials and solutionsfor high temperature processes
Main production sites
Industrial or commercial branch
St-Marys, USA
Holytown, Scotland UK
Gennevilliers, France
Chongqing, China
www.mersen.com
Global expert in materials and solutions for extreme environments as well as in the safety and reliability of electrical equipment Mersen designs innovative
solutions to address its clients specific
needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.
Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 40
A wide range of high purity products
7 2
Grade Density Grainsize Porosity FS CTE, Resistivity Thermal micron % (MPa) 10-6°C-1 µΩcm conductivity StandardMax.Size*mm W/m°C
2191 1.75 15 12 44 4.2 1090 116 540x540x1830 2020 1.77 15 9 45 4.3 1550 85 530x635x1830 1030x1080x325 ø610x1830 ø915x760 ø1500onrequest 2910 1.74 30 17 30 4.1 1600 77 ø640x1830 2114 1.81 13 10 52 5.3 1240 104 308x620x915 2123 1.84 13 8 58 5.5 1140 112 308x620x915 2320 1.82 13 10 50 5.0 1060 122 308x620x915 2450 1.86 15 8 45 4.3 1550 85 onrequest 2120 1.84 8 7 65 6.0 1220 106 308x620x915 2318 1.86 5 6 76 5.7 1600 81 152x308x620 2340 1.88 4 13 90 7.2 1270 102 305x305x100
*askforspecificsize
Silicon Carbide coating
Pyrocoating and bulk pyrocarbon
Carbon / Carbon AEROLOR®
Rigid carbon insulation CALCARB®
Flexible graphite
Vitreous carbon impregnation
Glassy carbon
liquids
For your wafer quality get our Ultra High Purity
Gastight,tohermeticcoatings,arerenownedspecialitiesofMersentopreventundesiredwaferdoping.
Mersenisqualifiedasasupplierforsparepartsusedintheelectronicindustry,frompolysiliconproductionequipmenttosinglecrystalgrowingfurnaces,siliconepitaxy,MOCVDreactors,dryetchers,ionimplanters,glass to metal and metal to metal sealing furnaces, contaminantsanalysers…
Mersen offers toOEMand electronic componentmakers an innovative andwide rangeofsmartandcosteffectivehightemperaturegraphitebasedsolutions.Aboveall,Mersenprovidesthelowestlevelofelemental contaminationwithits99.9995%purifiedgradesandallowsitscustomerstomanufactureandtoprocessdefectfreematerialsandcomponents.
Mersen’scleanroompackagingallowsadirectuseincustomer’scleanrooms.
High density graphite grades with small grain size ensure that no particlecontaminationoccursinultrahighvacuum.
Mersen drastically reduces molecular contamination to a minimumwith appropriate additional treatments, from outgasing, to closinggraphite’snaturalporositybyimpregnation.
ND-Notdetected Theabovevaluesaretypicalandaresubjecttochange Brandname:PT(Europe)orCX(USA)for<20ppm.UHP5forpurityquality<5ppm.
Al B Fe CA Cu Mg Ni Ti V Si Pb Sn Mo W Zn Cr Total Unpurified 1 2 31 51 1 1 74 22 95 5 1 1 1 1 1 2 300 <20ppm 0,5 <2 <2 <2 0,5 <0,2 0,5 <0,2 0,5 <2 0,1 0,1 0,1 0,1 0,1 0,1 11 <5ppm <0,2 <0,8 <0,5 <0,5 ND ND <0,1 ND <0,1 <0,5 ND ND ND ND ND ND 2,7
Purity Ash content (ppm)
Purified graphite
Specialties
Reference Density Open Thermal porosity conductivity CARBOGRAF®400 2.05 ~0%
XYdirection PYCCoating 300-500 CARBOGRAF®430 Zdirection7 PYCBulk
Reference Density FS(MPa) Flexuralmodulus(GPa) MaximumSize A252 1.70 100 10 Tubelength3000mm Ringø2200mm
Reference Density Thermalconductivityat400°C(W/m°C) Thermalconductivityat2,000°C(W/m°C) Max.size CBCF18-2000 0.18 0.25(Vacuum) 1.00(Vacuum) 1,500x1,500x160mm
Reference Thicknessmm Width Density EmissivityCoefficient PAPYEX® 0.5to1.5 1000mm 1.0 0.74
Reference Tmax Depthofimpregnation
VCI 450°C(underO2atmosphere)-2800°C(inert) >6mm
Reference Density Openporosity CTE Size V25 1.45 0 2810-6 limitedto3mmwallthickness
Reference Tmax Density Open Rf(MPa) CTE Coatingthickness Hardness Young porosity 10-6°C-1 modulus GPa CARBOSIL 1700°C 3.2 imperviousto 350 4.8 50-250µm 2280 63 mostgasesand 2950Knoop
ELECTRONICS
Purified Graphite Silicon Carbide Graphite Enhancement
Innovative solutions for the Semiconductor Industry
Contact for EuropeMERSEN France Gennevilliers SAS41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 77Fax: +33 (0)1 41 85 45 11E-mail: [email protected] H
T25
GB
0111
Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811
A GLOBAL PLAYER
A WORLD EXPERTin materials and solutionsfor high temperature processes
Main production sites
Industrial or commercial branch
St-Marys, USA
Holytown, Scotland UK
Gennevilliers, France
Chongqing, China
www.mersen.com
Global expert in materials and solutions for extreme environments as well as in the safety and reliability of electrical equipment Mersen designs innovative
solutions to address its clients specific
needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.
Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 40
A wide range of high purity products
7 2
Grade Density Grainsize Porosity FS CTE, Resistivity Thermal micron % (MPa) 10-6°C-1 µΩcm conductivity StandardMax.Size*mm W/m°C
2191 1.75 15 12 44 4.2 1090 116 540x540x1830 2020 1.77 15 9 45 4.3 1550 85 530x635x1830 1030x1080x325 ø610x1830 ø915x760 ø1500onrequest 2910 1.74 30 17 30 4.1 1600 77 ø640x1830 2114 1.81 13 10 52 5.3 1240 104 308x620x915 2123 1.84 13 8 58 5.5 1140 112 308x620x915 2320 1.82 13 10 50 5.0 1060 122 308x620x915 2450 1.86 15 8 45 4.3 1550 85 onrequest 2120 1.84 8 7 65 6.0 1220 106 308x620x915 2318 1.86 5 6 76 5.7 1600 81 152x308x620 2340 1.88 4 13 90 7.2 1270 102 305x305x100
*askforspecificsize
Silicon Carbide coating
Pyrocoating and bulk pyrocarbon
Carbon / Carbon AEROLOR®
Rigid carbon insulation CALCARB®
Flexible graphite
Vitreous carbon impregnation
Glassy carbon
liquids
For your wafer quality get our Ultra High Purity
Gastight,tohermeticcoatings,arerenownedspecialitiesofMersentopreventundesiredwaferdoping.
Mersenisqualifiedasasupplierforsparepartsusedintheelectronicindustry,frompolysiliconproductionequipmenttosinglecrystalgrowingfurnaces,siliconepitaxy,MOCVDreactors,dryetchers,ionimplanters,glass to metal and metal to metal sealing furnaces, contaminantsanalysers…
Mersen offers toOEMand electronic componentmakers an innovative andwide rangeofsmartandcosteffectivehightemperaturegraphitebasedsolutions.Aboveall,Mersenprovidesthelowestlevelofelemental contaminationwithits99.9995%purifiedgradesandallowsitscustomerstomanufactureandtoprocessdefectfreematerialsandcomponents.
Mersen’scleanroompackagingallowsadirectuseincustomer’scleanrooms.
High density graphite grades with small grain size ensure that no particlecontaminationoccursinultrahighvacuum.
Mersen drastically reduces molecular contamination to a minimumwith appropriate additional treatments, from outgasing, to closinggraphite’snaturalporositybyimpregnation.
ND-Notdetected Theabovevaluesaretypicalandaresubjecttochange Brandname:PT(Europe)orCX(USA)for<20ppm.UHP5forpurityquality<5ppm.
Al B Fe CA Cu Mg Ni Ti V Si Pb Sn Mo W Zn Cr Total Unpurified 1 2 31 51 1 1 74 22 95 5 1 1 1 1 1 2 300 <20ppm 0,5 <2 <2 <2 0,5 <0,2 0,5 <0,2 0,5 <2 0,1 0,1 0,1 0,1 0,1 0,1 11 <5ppm <0,2 <0,8 <0,5 <0,5 ND ND <0,1 ND <0,1 <0,5 ND ND ND ND ND ND 2,7
Purity Ash content (ppm)
Purified graphite
Specialties
Reference Density Open Thermal porosity conductivity CARBOGRAF®400 2.05 ~0%
XYdirection PYCCoating 300-500 CARBOGRAF®430 Zdirection7 PYCBulk
Reference Density FS(MPa) Flexuralmodulus(GPa) MaximumSize A252 1.70 100 10 Tubelength3000mm Ringø2200mm
Reference Density Thermalconductivityat400°C(W/m°C) Thermalconductivityat2,000°C(W/m°C) Max.size CBCF18-2000 0.18 0.25(Vacuum) 1.00(Vacuum) 1,500x1,500x160mm
Reference Thicknessmm Width Density EmissivityCoefficient PAPYEX® 0.5to1.5 1000mm 1.0 0.74
Reference Tmax Depthofimpregnation
VCI 450°C(underO2atmosphere)-2800°C(inert) >6mm
Reference Density Openporosity CTE Size V25 1.45 0 2810-6 limitedto3mmwallthickness
Reference Tmax Density Open Rf(MPa) CTE Coatingthickness Hardness Young porosity 10-6°C-1 modulus GPa CARBOSIL 1700°C 3.2 imperviousto 350 4.8 50-250µm 2280 63 mostgasesand 2950Knoop
6
From semiconductor material making
Polysilicon reactors Crystal growing furnace equipment
Polysilicon Polysilicon Crucibleholderfor Resistors&spilltrays Heatshields Thermal Heatexchanger chucks SiSiGeAsGaInPCrystals, insulation CaF2andothers
Getthewidest Prevent Containhotmeltand Reducenumber Lowerthermal Substitutedusty rangeofproven arcingingaps guaranteesecurity ofmechanicalparts inertiaand felts,andgraphite solutionsonthefield ofoperationsfor havegood Grow 300mmingots Savespace supportsto Shapeinconic Increaselifetime homogeneous heavyloads andcylindricalform andresistance layersofpolysilicon Upgradegrowersand Radiateheatevenly tocorrosion increasepulledmass Increase Provideagood Lowercontact SlowSiCconversionand chemicalinertia thermalradiation resistance Lowerheatupand increaselifetime andlifetime andthermal cooldowntime conductionbarrier Getthe Avoidhotspots requiredresistivity Targetbelow1ppm Adapttoinductive ofpolycrystal impuritiescontent Lessenelectricalcontact furnaces resistanceandreduce malfunctions Stopdust
Atlowtemperature Softmaterial, HighFSandappropriate MediumFStoallowfor HighFS: PAPYEX®WPTX impregnated verylowCTE CTEtoresiststress flexibilityofassembly. C/CAEROLOR isarigidfelt, gradesare ofSiCconversion, 1longresistorinstead A252 beingformedto
highlyrecommended HighThermal Lightandstrongmaterial oftoomanysmallones: sizetomakeconic
conductivityalong C/Cmaterials C/CAEROLORA252 Medium orcylindricalshapes
Athightemperature, grainforcooling conductivity
imperviousSiCcoating Mediumtohigh Ultrasoniccontrol PAPYEX®prevents upto1,500°C Largegrains conductivitygraphite toensurehomogeneity CVDinert heatradiation increaseslifetime withlubricating C/Cmaterialsto ofmaterialandhence pyrographite whileRVG4000 properties reducewallthickness thermalperformance impregnation feltprevents onA252 heatconduction Highlypurified Diminishreactive SiCcoatingreduces material5ppm area,lowporesize, permeabilityofmaterial A252 PAPYEX®external lowporosity. composite layeringprevents Grade Optimizedby materialfeatures dusting 2191 Below5ppmfor computersimulation below2ppm standardgraphitegrades, ashcontent Purifiedunder below2ppmforCC Mediumtohigh halogengasflow AEROLORcomponents resistivitytolower A252C/C athightemperature thicknessembodied material achieveslowerthan Grades2123, currentcollectorinC/C 2020,2450 5ppmashcontent 2020,2450 SiCcoating AEROLOR2.5DC/C Below20ppmtypicalpurity FlexibleGraphite PAPYEX®
2020 Rigidcarbonthermal SiCcoating insulation 2mhighC/Ccylinders CALCARB®
andISOLOR®
... to wafer processing
Requiredfunctions
Products
SolutionsBestChoiceBestValue
Products
Applicationexamples
Requiredfunctions
SolutionsBestChoiceBestValue
Wafer processing Dry Ion Packaging Electronic Contaminant CVD & Epitaxy Etching Implanting Tubes analysis
Barrelsandpancakes Electrodes Beamline Tools:jigs,brazing Electrodes Gas Containers components orsealingassemblies anodeforXray analyzing andlab
Singlewafersusceptors forsemiconductors targets crucibles accessories
MOCVDequipment andconnectors Compoundgrowth Avoidpeelingoff Resistablation Resistthermalshock Adaptglassorother Withstand Contain Alternative andensurecoating materialthermalexpansion centrifugalforce, hotmelts toplatinum onallsurface Useunder Spreadoutenergy crucibles highvoltage ofbeamimpact Withstandwear Providegood No Achievethebest matchwith wetting Resist laminargas Ablationresistant Eventhermalgradients tungstenlayer from mostof flowpattern metals etchants Groundperfectly Increaselifetime Radiatestored andacids Guanranteeeveness heatinvacuum Effective ofthermalprofile Fasterpumpdown Provideareliable resistive No thermalresistance Beinert heating undesired Preventany Noparticlerelease UnderVacuum reactions contaminationor underbeamimpact Guaranteerequired Reliable impuritiesdiffusion electricalinsulation Toachieveand measure keepreliable Performradiative highvacuum orinductiveprocess
Lowercontamination
CTEmatchbetween Highdensity Shockresistantgrade AdaptedCTE: HighFS Largegrains Noopen graphiteandSIC grades,pyrocoat i.e.lowYoungmodulus, highdensitygrade porosity graphiteprecision orbulk lowCTE,high Highthermal Mediumto machining pyrographite conductivity,highFS Highthermalconductivity conductivity highresistivity Purificationto eradicate Coatingemissivity Medium Veryhighconductivity Purificationremoves Lowresistivity Highestpurity oxidation andgraphite conductivity oxidationcatalysts upto2ppm catalysts homogeneity Finegrain,high Lowerporosity Highthermal Finegrainand densitygrade. Mediumresistivityfor Outgasedgrade 2191 Glassy conductivityrequired lowporosity resistiveheating: asanoption carbon Verylowresistivity resistancetuned Below20ppm ImperviousSICcoating Lowtomedium byfineholedrilling resistivity Vitreousimpregnation 2123,2120, Tunedresistivity closeporosity Reducedustor 2320 Below20ppm totrapdust electricallyconductive Coatingandgraphite tracesonglass gradesmeet20ppm 2120,2123 2120,2340 criteria.Specificgrid pyrocoating Vitreousimpregnation 2120,2318,… patternsengineered bulkpyrographite toavoidcontamination Glassycarbon SiCcoating
Applicationexamples
HighTemperaturemechanicalinterfaceFlexuralStrength(FS),TensileStrength(TS)densityd,grainsize(µm)cœfficientofthermalexpansion(CTE)
ThermaltransferThermalConductivityλ
ChemicalinertiaCoatingthickness,Porediameter
Electricalconductor ResistivityρorconductivityσContaminantfreeAshcontent(ppmweight)
Bestchoicebestvalue
fundamental reasons for you to get the best value from the best solution:
OEMandelectroniccomponentmakershave6goodfundamentalreasonstoorderMersengraphitebasedproductsfortheirHighTemperatureapplications:
Whenmostofrefractorymetalscontaminateandcollapseathightemperatures,Mersen’squalitygraphite,asthemostrefractorynaturalelement,standsmechanicallyinhightemperatureprocesses.
Mersen graphite compounds, with their steady and reliable behavior versus temperature, interfaceideallytodimensionalrequirements.
Mersenknowshowtotunegraphiteperformancetotheheaviestthermalshocks,whilechoosingtheadequateblendofpowders,aswellas thesuitableprocesstocreatethemostadequatemicrostructure.
Toshortencustomer’sprocesstime,MersenfeaturesarangeofspeciallightandstronggraphiteandCarbon-Carbon(C/C)products,loweringmasstobeheatedandthencuttingheatupandcooldowntime.
10
5
1
10000
Refractory Alloy
Relativescale
SiCGraphite
CMg0
Mo
2000 3000 0
C
PyC
Al203
g/cm3
Ti
Steel
Mo
W
5 10 15 20
Copper
Iron
Kovar
Mo
Glass
W
Carbon
Graphite
0 2 4 6 8 10 12 14 16 18
10-6/C
+100%
+50%
0%
-50%
-100%0 500 1000
Thermal expansion
Thermal conductivity
1500 2000 2500 3000
Resistivity
Mechanicalstrength
12 MersenputschemicalreactionswithitsgraphiteandC/Cproductrangeundercontrol:
for any given environment at high temperature, with the most aggressive etchants,Mersenoffersthebestgradesandprovidesexceptionallifetimetoitscustomers,atthelowestcostofownership.
Resistancetooxidationcanbedrasticallyincreasedwithoptimaltreatmentsandcoatings,modifyingpermeabilityuptodesiredtightness.
Mastering thermal transfer is key to high temperature processing: Mersen’s highqualityandhomogeneousgraphitebasedproductsensurethemosteventhermalprofile.Fromthermaltransfertothermalinsulation,Mersenprovidesengineeringresourcestohelpcustomerssimulateanddesignthebestsolutiontoperformthedesiredfunction.
Theinformationcontainedinthisbrochureisgivenforinformationpurposesonly,anddoesnotcommitMerseninanywaywhatsoever.Thisdocumentshallnotbecopied,reproducedortranslatedinwholeorinpartwithoutMersen’swrittenpermission.Datahereincontainedareprovidedforgeneralinformationpurposeonlyandarenotbinding.Mersenshallhavenoliabilitywhatsoeverwithrespecttoinformationcontainedherein.Duplication,reproductionortranslationofanyinformationcontainedherein,inwholeorinpart,isstrictlyprohibitedwithoutpriorwrittenconsentofMersen.OurmaterialsareinconformitywiththeRoHS-Directive(RestrictionoftheuseofcertainHazardousSubstancesinelectricalandelectronicequipment).BesidesMersenguaranteestheapplicationoftheEuropeanCommunityREACH-Regulation(Registration,Evaluation,AuthorizationandRestrictionofChemicalsubstances)toallitsplantslocatedinEurope.
Graphite Impregnated Vitreous SiC Glassy Pyrocarbon Solid graphite impregnation coating Carbon coating PyrocarbonPermeabilitycm2/s 10-1 10-2 10-3 10-5 10-11 10-12 10-12
0 100 200 300 400
W/m/C
Copper
Ti
Al
Graphite
Iron
Al203
Steel
W/m/°C
Grades
0 20 40 60 80 100 120 140
2340 102
852450
1062120
1122123
1042114
1222320
852020
1162191
772910
2318 81
3
Mersenmaterialsconnectelectrically inyoursystems tosecure themostreliable grounding, to create the highest accelerating power or the mostefficientresistiveorinductiveheating.Selectionofpurifiediso-moldedgradeswiththecorrectmicrostructureguaranteesasafeelectricalcontact.
4MostofthefunctionsofferedbyMersengraphitebasedproductshaveahighservicetovalueratio.Theyareacost effectivesolutioncomparedtomostrefractorymetals.Easiertomachine,thesegraphitematerialsareproduced by the worldwide leaderMersen, in large quantities, througha lean organization at the lowest cost, according to the highest qualitystandards.
5
Mersen is a worldwide group, and is a local partner to every customer.Its affiliates provide close service and quick delivery to every customerthroughouttheworld.6
Graphite a strong materialSpecific flexural Strength(Mpa kg/m3 vs temperature)
Mersen wide range of thermal expansion coefficients meet most interface
requirements
Graphite a light refractory material
Comparison of thermal conductivities Thermal conductivity
Graphite materials typical main characteristics variation versus temperature to room
temperature properties
53 4
6
From semiconductor material making
Polysilicon reactors Crystal growing furnace equipment
Polysilicon Polysilicon Crucibleholderfor Resistors&spilltrays Heatshields Thermal Heatexchanger chucks SiSiGeAsGaInPCrystals, insulation CaF2andothers
Getthewidest Prevent Containhotmeltand Reducenumber Lowerthermal Substitutedusty rangeofproven arcingingaps guaranteesecurity ofmechanicalparts inertiaand felts,andgraphite solutionsonthefield ofoperationsfor havegood Grow 300mmingots Savespace supportsto Shapeinconic Increaselifetime homogeneous heavyloads andcylindricalform andresistance layersofpolysilicon Upgradegrowersand Radiateheatevenly tocorrosion increasepulledmass Increase Provideagood Lowercontact SlowSiCconversionand chemicalinertia thermalradiation resistance Lowerheatupand increaselifetime andlifetime andthermal cooldowntime conductionbarrier Getthe Avoidhotspots requiredresistivity Targetbelow1ppm Adapttoinductive ofpolycrystal impuritiescontent Lessenelectricalcontact furnaces resistanceandreduce malfunctions Stopdust
Atlowtemperature Softmaterial, HighFSandappropriate MediumFStoallowfor HighFS: PAPYEX®WPTX impregnated verylowCTE CTEtoresiststress flexibilityofassembly. C/CAEROLOR isarigidfelt, gradesare ofSiCconversion, 1longresistorinstead A252 beingformedto
highlyrecommended HighThermal Lightandstrongmaterial oftoomanysmallones: sizetomakeconic
conductivityalong C/Cmaterials C/CAEROLORA252 Medium orcylindricalshapes
Athightemperature, grainforcooling conductivity
imperviousSiCcoating Mediumtohigh Ultrasoniccontrol PAPYEX®prevents upto1,500°C Largegrains conductivitygraphite toensurehomogeneity CVDinert heatradiation increaseslifetime withlubricating C/Cmaterialsto ofmaterialandhence pyrographite whileRVG4000 properties reducewallthickness thermalperformance impregnation feltprevents onA252 heatconduction Highlypurified Diminishreactive SiCcoatingreduces material5ppm area,lowporesize, permeabilityofmaterial A252 PAPYEX®external lowporosity. composite layeringprevents Grade Optimizedby materialfeatures dusting 2191 Below5ppmfor computersimulation below2ppm standardgraphitegrades, ashcontent Purifiedunder below2ppmforCC Mediumtohigh halogengasflow AEROLORcomponents resistivitytolower A252C/C athightemperature thicknessembodied material achieveslowerthan Grades2123, currentcollectorinC/C 2020,2450 5ppmashcontent 2020,2450 SiCcoating AEROLOR2.5DC/C Below20ppmtypicalpurity FlexibleGraphite PAPYEX®
2020 Rigidcarbonthermal SiCcoating insulation 2mhighC/Ccylinders CALCARB®
andISOLOR®
... to wafer processing
Requiredfunctions
Products
SolutionsBestChoiceBestValue
Products
Applicationexamples
Requiredfunctions
SolutionsBestChoiceBestValue
Wafer processing Dry Ion Packaging Electronic Contaminant CVD & Epitaxy Etching Implanting Tubes analysis
Barrelsandpancakes Electrodes Beamline Tools:jigs,brazing Electrodes Gas Containers components orsealingassemblies anodeforXray analyzing andlab
Singlewafersusceptors forsemiconductors targets crucibles accessories
MOCVDequipment andconnectors Compoundgrowth Avoidpeelingoff Resistablation Resistthermalshock Adaptglassorother Withstand Contain Alternative andensurecoating materialthermalexpansion centrifugalforce, hotmelts toplatinum onallsurface Useunder Spreadoutenergy crucibles highvoltage ofbeamimpact Withstandwear Providegood No Achievethebest matchwith wetting Resist laminargas Ablationresistant Eventhermalgradients tungstenlayer from mostof flowpattern metals etchants Groundperfectly Increaselifetime Radiatestored andacids Guanranteeeveness heatinvacuum Effective ofthermalprofile Fasterpumpdown Provideareliable resistive No thermalresistance Beinert heating undesired Preventany Noparticlerelease UnderVacuum reactions contaminationor underbeamimpact Guaranteerequired Reliable impuritiesdiffusion electricalinsulation Toachieveand measure keepreliable Performradiative highvacuum orinductiveprocess
Lowercontamination
CTEmatchbetween Highdensity Shockresistantgrade AdaptedCTE: HighFS Largegrains Noopen graphiteandSIC grades,pyrocoat i.e.lowYoungmodulus, highdensitygrade porosity graphiteprecision orbulk lowCTE,high Highthermal Mediumto machining pyrographite conductivity,highFS Highthermalconductivity conductivity highresistivity Purificationto eradicate Coatingemissivity Medium Veryhighconductivity Purificationremoves Lowresistivity Highestpurity oxidation andgraphite conductivity oxidationcatalysts upto2ppm catalysts homogeneity Finegrain,high Lowerporosity Highthermal Finegrainand densitygrade. Mediumresistivityfor Outgasedgrade 2191 Glassy conductivityrequired lowporosity resistiveheating: asanoption carbon Verylowresistivity resistancetuned Below20ppm ImperviousSICcoating Lowtomedium byfineholedrilling resistivity Vitreousimpregnation 2123,2120, Tunedresistivity closeporosity Reducedustor 2320 Below20ppm totrapdust electricallyconductive Coatingandgraphite tracesonglass gradesmeet20ppm 2120,2123 2120,2340 criteria.Specificgrid pyrocoating Vitreousimpregnation 2120,2318,… patternsengineered bulkpyrographite toavoidcontamination Glassycarbon SiCcoating
Applicationexamples
HighTemperaturemechanicalinterfaceFlexuralStrength(FS),TensileStrength(TS)densityd,grainsize(µm)cœfficientofthermalexpansion(CTE)
ThermaltransferThermalConductivityλ
ChemicalinertiaCoatingthickness,Porediameter
Electricalconductor ResistivityρorconductivityσContaminantfreeAshcontent(ppmweight)
Bestchoicebestvalue
fundamental reasons for you to get the best value from the best solution:
OEMandelectroniccomponentmakershave6goodfundamentalreasonstoorderMersengraphitebasedproductsfortheirHighTemperatureapplications:
Whenmostofrefractorymetalscontaminateandcollapseathightemperatures,Mersen’squalitygraphite,asthemostrefractorynaturalelement,standsmechanicallyinhightemperatureprocesses.
Mersen graphite compounds, with their steady and reliable behavior versus temperature, interfaceideallytodimensionalrequirements.
Mersenknowshowtotunegraphiteperformancetotheheaviestthermalshocks,whilechoosingtheadequateblendofpowders,aswellas thesuitableprocesstocreatethemostadequatemicrostructure.
Toshortencustomer’sprocesstime,MersenfeaturesarangeofspeciallightandstronggraphiteandCarbon-Carbon(C/C)products,loweringmasstobeheatedandthencuttingheatupandcooldowntime.
10
5
1
10000
Refractory Alloy
Relativescale
SiCGraphite
CMg0
Mo
2000 3000 0
C
PyC
Al203
g/cm3
Ti
Steel
Mo
W
5 10 15 20
Copper
Iron
Kovar
Mo
Glass
W
Carbon
Graphite
0 2 4 6 8 10 12 14 16 18
10-6/C
+100%
+50%
0%
-50%
-100%0 500 1000
Thermal expansion
Thermal conductivity
1500 2000 2500 3000
Resistivity
Mechanicalstrength
12 MersenputschemicalreactionswithitsgraphiteandC/Cproductrangeundercontrol:
for any given environment at high temperature, with the most aggressive etchants,Mersenoffersthebestgradesandprovidesexceptionallifetimetoitscustomers,atthelowestcostofownership.
Resistancetooxidationcanbedrasticallyincreasedwithoptimaltreatmentsandcoatings,modifyingpermeabilityuptodesiredtightness.
Mastering thermal transfer is key to high temperature processing: Mersen’s highqualityandhomogeneousgraphitebasedproductsensurethemosteventhermalprofile.Fromthermaltransfertothermalinsulation,Mersenprovidesengineeringresourcestohelpcustomerssimulateanddesignthebestsolutiontoperformthedesiredfunction.
Theinformationcontainedinthisbrochureisgivenforinformationpurposesonly,anddoesnotcommitMerseninanywaywhatsoever.Thisdocumentshallnotbecopied,reproducedortranslatedinwholeorinpartwithoutMersen’swrittenpermission.Datahereincontainedareprovidedforgeneralinformationpurposeonlyandarenotbinding.Mersenshallhavenoliabilitywhatsoeverwithrespecttoinformationcontainedherein.Duplication,reproductionortranslationofanyinformationcontainedherein,inwholeorinpart,isstrictlyprohibitedwithoutpriorwrittenconsentofMersen.OurmaterialsareinconformitywiththeRoHS-Directive(RestrictionoftheuseofcertainHazardousSubstancesinelectricalandelectronicequipment).BesidesMersenguaranteestheapplicationoftheEuropeanCommunityREACH-Regulation(Registration,Evaluation,AuthorizationandRestrictionofChemicalsubstances)toallitsplantslocatedinEurope.
Graphite Impregnated Vitreous SiC Glassy Pyrocarbon Solid graphite impregnation coating Carbon coating PyrocarbonPermeabilitycm2/s 10-1 10-2 10-3 10-5 10-11 10-12 10-12
0 100 200 300 400
W/m/C
Copper
Ti
Al
Graphite
Iron
Al203
Steel
W/m/°C
Grades
0 20 40 60 80 100 120 140
2340 102
852450
1062120
1122123
1042114
1222320
852020
1162191
772910
2318 81
3
Mersenmaterialsconnectelectrically inyoursystems tosecure themostreliable grounding, to create the highest accelerating power or the mostefficientresistiveorinductiveheating.Selectionofpurifiediso-moldedgradeswiththecorrectmicrostructureguaranteesasafeelectricalcontact.
4MostofthefunctionsofferedbyMersengraphitebasedproductshaveahighservicetovalueratio.Theyareacost effectivesolutioncomparedtomostrefractorymetals.Easiertomachine,thesegraphitematerialsareproduced by the worldwide leaderMersen, in large quantities, througha lean organization at the lowest cost, according to the highest qualitystandards.
5
Mersen is a worldwide group, and is a local partner to every customer.Its affiliates provide close service and quick delivery to every customerthroughouttheworld.6
Graphite a strong materialSpecific flexural Strength(Mpa kg/m3 vs temperature)
Mersen wide range of thermal expansion coefficients meet most interface
requirements
Graphite a light refractory material
Comparison of thermal conductivities Thermal conductivity
Graphite materials typical main characteristics variation versus temperature to room
temperature properties
53 4
6
From semiconductor material making
Polysilicon reactors Crystal growing furnace equipment
Polysilicon Polysilicon Crucibleholderfor Resistors&spilltrays Heatshields Thermal Heatexchanger chucks SiSiGeAsGaInPCrystals, insulation CaF2andothers
Getthewidest Prevent Containhotmeltand Reducenumber Lowerthermal Substitutedusty rangeofproven arcingingaps guaranteesecurity ofmechanicalparts inertiaand felts,andgraphite solutionsonthefield ofoperationsfor havegood Grow 300mmingots Savespace supportsto Shapeinconic Increaselifetime homogeneous heavyloads andcylindricalform andresistance layersofpolysilicon Upgradegrowersand Radiateheatevenly tocorrosion increasepulledmass Increase Provideagood Lowercontact SlowSiCconversionand chemicalinertia thermalradiation resistance Lowerheatupand increaselifetime andlifetime andthermal cooldowntime conductionbarrier Getthe Avoidhotspots requiredresistivity Targetbelow1ppm Adapttoinductive ofpolycrystal impuritiescontent Lessenelectricalcontact furnaces resistanceandreduce malfunctions Stopdust
Atlowtemperature Softmaterial, HighFSandappropriate MediumFStoallowfor HighFS: PAPYEX®WPTX impregnated verylowCTE CTEtoresiststress flexibilityofassembly. C/CAEROLOR isarigidfelt, gradesare ofSiCconversion, 1longresistorinstead A252 beingformedto
highlyrecommended HighThermal Lightandstrongmaterial oftoomanysmallones: sizetomakeconic
conductivityalong C/Cmaterials C/CAEROLORA252 Medium orcylindricalshapes
Athightemperature, grainforcooling conductivity
imperviousSiCcoating Mediumtohigh Ultrasoniccontrol PAPYEX®prevents upto1,500°C Largegrains conductivitygraphite toensurehomogeneity CVDinert heatradiation increaseslifetime withlubricating C/Cmaterialsto ofmaterialandhence pyrographite whileRVG4000 properties reducewallthickness thermalperformance impregnation feltprevents onA252 heatconduction Highlypurified Diminishreactive SiCcoatingreduces material5ppm area,lowporesize, permeabilityofmaterial A252 PAPYEX®external lowporosity. composite layeringprevents Grade Optimizedby materialfeatures dusting 2191 Below5ppmfor computersimulation below2ppm standardgraphitegrades, ashcontent Purifiedunder below2ppmforCC Mediumtohigh halogengasflow AEROLORcomponents resistivitytolower A252C/C athightemperature thicknessembodied material achieveslowerthan Grades2123, currentcollectorinC/C 2020,2450 5ppmashcontent 2020,2450 SiCcoating AEROLOR2.5DC/C Below20ppmtypicalpurity FlexibleGraphite PAPYEX®
2020 Rigidcarbonthermal SiCcoating insulation 2mhighC/Ccylinders CALCARB®
andISOLOR®
... to wafer processing
Requiredfunctions
Products
SolutionsBestChoiceBestValue
Products
Applicationexamples
Requiredfunctions
SolutionsBestChoiceBestValue
Wafer processing Dry Ion Packaging Electronic Contaminant CVD & Epitaxy Etching Implanting Tubes analysis
Barrelsandpancakes Electrodes Beamline Tools:jigs,brazing Electrodes Gas Containers components orsealingassemblies anodeforXray analyzing andlab
Singlewafersusceptors forsemiconductors targets crucibles accessories
MOCVDequipment andconnectors Compoundgrowth Avoidpeelingoff Resistablation Resistthermalshock Adaptglassorother Withstand Contain Alternative andensurecoating materialthermalexpansion centrifugalforce, hotmelts toplatinum onallsurface Useunder Spreadoutenergy crucibles highvoltage ofbeamimpact Withstandwear Providegood No Achievethebest matchwith wetting Resist laminargas Ablationresistant Eventhermalgradients tungstenlayer from mostof flowpattern metals etchants Groundperfectly Increaselifetime Radiatestored andacids Guanranteeeveness heatinvacuum Effective ofthermalprofile Fasterpumpdown Provideareliable resistive No thermalresistance Beinert heating undesired Preventany Noparticlerelease UnderVacuum reactions contaminationor underbeamimpact Guaranteerequired Reliable impuritiesdiffusion electricalinsulation Toachieveand measure keepreliable Performradiative highvacuum orinductiveprocess
Lowercontamination
CTEmatchbetween Highdensity Shockresistantgrade AdaptedCTE: HighFS Largegrains Noopen graphiteandSIC grades,pyrocoat i.e.lowYoungmodulus, highdensitygrade porosity graphiteprecision orbulk lowCTE,high Highthermal Mediumto machining pyrographite conductivity,highFS Highthermalconductivity conductivity highresistivity Purificationto eradicate Coatingemissivity Medium Veryhighconductivity Purificationremoves Lowresistivity Highestpurity oxidation andgraphite conductivity oxidationcatalysts upto2ppm catalysts homogeneity Finegrain,high Lowerporosity Highthermal Finegrainand densitygrade. Mediumresistivityfor Outgasedgrade 2191 Glassy conductivityrequired lowporosity resistiveheating: asanoption carbon Verylowresistivity resistancetuned Below20ppm ImperviousSICcoating Lowtomedium byfineholedrilling resistivity Vitreousimpregnation 2123,2120, Tunedresistivity closeporosity Reducedustor 2320 Below20ppm totrapdust electricallyconductive Coatingandgraphite tracesonglass gradesmeet20ppm 2120,2123 2120,2340 criteria.Specificgrid pyrocoating Vitreousimpregnation 2120,2318,… patternsengineered bulkpyrographite toavoidcontamination Glassycarbon SiCcoating
Applicationexamples
HighTemperaturemechanicalinterfaceFlexuralStrength(FS),TensileStrength(TS)densityd,grainsize(µm)cœfficientofthermalexpansion(CTE)
ThermaltransferThermalConductivityλ
ChemicalinertiaCoatingthickness,Porediameter
Electricalconductor ResistivityρorconductivityσContaminantfreeAshcontent(ppmweight)
Bestchoicebestvalue
fundamental reasons for you to get the best value from the best solution:
OEMandelectroniccomponentmakershave6goodfundamentalreasonstoorderMersengraphitebasedproductsfortheirHighTemperatureapplications:
Whenmostofrefractorymetalscontaminateandcollapseathightemperatures,Mersen’squalitygraphite,asthemostrefractorynaturalelement,standsmechanicallyinhightemperatureprocesses.
Mersen graphite compounds, with their steady and reliable behavior versus temperature, interfaceideallytodimensionalrequirements.
Mersenknowshowtotunegraphiteperformancetotheheaviestthermalshocks,whilechoosingtheadequateblendofpowders,aswellas thesuitableprocesstocreatethemostadequatemicrostructure.
Toshortencustomer’sprocesstime,MersenfeaturesarangeofspeciallightandstronggraphiteandCarbon-Carbon(C/C)products,loweringmasstobeheatedandthencuttingheatupandcooldowntime.
10
5
1
10000
Refractory Alloy
Relativescale
SiCGraphite
CMg0
Mo
2000 3000 0
C
PyC
Al203
g/cm3
Ti
Steel
Mo
W
5 10 15 20
Copper
Iron
Kovar
Mo
Glass
W
Carbon
Graphite
0 2 4 6 8 10 12 14 16 18
10-6/C
+100%
+50%
0%
-50%
-100%0 500 1000
Thermal expansion
Thermal conductivity
1500 2000 2500 3000
Resistivity
Mechanicalstrength
12 MersenputschemicalreactionswithitsgraphiteandC/Cproductrangeundercontrol:
for any given environment at high temperature, with the most aggressive etchants,Mersenoffersthebestgradesandprovidesexceptionallifetimetoitscustomers,atthelowestcostofownership.
Resistancetooxidationcanbedrasticallyincreasedwithoptimaltreatmentsandcoatings,modifyingpermeabilityuptodesiredtightness.
Mastering thermal transfer is key to high temperature processing: Mersen’s highqualityandhomogeneousgraphitebasedproductsensurethemosteventhermalprofile.Fromthermaltransfertothermalinsulation,Mersenprovidesengineeringresourcestohelpcustomerssimulateanddesignthebestsolutiontoperformthedesiredfunction.
Theinformationcontainedinthisbrochureisgivenforinformationpurposesonly,anddoesnotcommitMerseninanywaywhatsoever.Thisdocumentshallnotbecopied,reproducedortranslatedinwholeorinpartwithoutMersen’swrittenpermission.Datahereincontainedareprovidedforgeneralinformationpurposeonlyandarenotbinding.Mersenshallhavenoliabilitywhatsoeverwithrespecttoinformationcontainedherein.Duplication,reproductionortranslationofanyinformationcontainedherein,inwholeorinpart,isstrictlyprohibitedwithoutpriorwrittenconsentofMersen.OurmaterialsareinconformitywiththeRoHS-Directive(RestrictionoftheuseofcertainHazardousSubstancesinelectricalandelectronicequipment).BesidesMersenguaranteestheapplicationoftheEuropeanCommunityREACH-Regulation(Registration,Evaluation,AuthorizationandRestrictionofChemicalsubstances)toallitsplantslocatedinEurope.
Graphite Impregnated Vitreous SiC Glassy Pyrocarbon Solid graphite impregnation coating Carbon coating PyrocarbonPermeabilitycm2/s 10-1 10-2 10-3 10-5 10-11 10-12 10-12
0 100 200 300 400
W/m/C
Copper
Ti
Al
Graphite
Iron
Al203
Steel
W/m/°C
Grades
0 20 40 60 80 100 120 140
2340 102
852450
1062120
1122123
1042114
1222320
852020
1162191
772910
2318 81
3
Mersenmaterialsconnectelectrically inyoursystems tosecure themostreliable grounding, to create the highest accelerating power or the mostefficientresistiveorinductiveheating.Selectionofpurifiediso-moldedgradeswiththecorrectmicrostructureguaranteesasafeelectricalcontact.
4MostofthefunctionsofferedbyMersengraphitebasedproductshaveahighservicetovalueratio.Theyareacost effectivesolutioncomparedtomostrefractorymetals.Easiertomachine,thesegraphitematerialsareproduced by the worldwide leaderMersen, in large quantities, througha lean organization at the lowest cost, according to the highest qualitystandards.
5
Mersen is a worldwide group, and is a local partner to every customer.Its affiliates provide close service and quick delivery to every customerthroughouttheworld.6
Graphite a strong materialSpecific flexural Strength(Mpa kg/m3 vs temperature)
Mersen wide range of thermal expansion coefficients meet most interface
requirements
Graphite a light refractory material
Comparison of thermal conductivities Thermal conductivity
Graphite materials typical main characteristics variation versus temperature to room
temperature properties
53 4
6
From semiconductor material making
Polysilicon reactors Crystal growing furnace equipment
Polysilicon Polysilicon Crucibleholderfor Resistors&spilltrays Heatshields Thermal Heatexchanger chucks SiSiGeAsGaInPCrystals, insulation CaF2andothers
Getthewidest Prevent Containhotmeltand Reducenumber Lowerthermal Substitutedusty rangeofproven arcingingaps guaranteesecurity ofmechanicalparts inertiaand felts,andgraphite solutionsonthefield ofoperationsfor havegood Grow 300mmingots Savespace supportsto Shapeinconic Increaselifetime homogeneous heavyloads andcylindricalform andresistance layersofpolysilicon Upgradegrowersand Radiateheatevenly tocorrosion increasepulledmass Increase Provideagood Lowercontact SlowSiCconversionand chemicalinertia thermalradiation resistance Lowerheatupand increaselifetime andlifetime andthermal cooldowntime conductionbarrier Getthe Avoidhotspots requiredresistivity Targetbelow1ppm Adapttoinductive ofpolycrystal impuritiescontent Lessenelectricalcontact furnaces resistanceandreduce malfunctions Stopdust
Atlowtemperature Softmaterial, HighFSandappropriate MediumFStoallowfor HighFS: PAPYEX®WPTX impregnated verylowCTE CTEtoresiststress flexibilityofassembly. C/CAEROLOR isarigidfelt, gradesare ofSiCconversion, 1longresistorinstead A252 beingformedto
highlyrecommended HighThermal Lightandstrongmaterial oftoomanysmallones: sizetomakeconic
conductivityalong C/Cmaterials C/CAEROLORA252 Medium orcylindricalshapes
Athightemperature, grainforcooling conductivity
imperviousSiCcoating Mediumtohigh Ultrasoniccontrol PAPYEX®prevents upto1,500°C Largegrains conductivitygraphite toensurehomogeneity CVDinert heatradiation increaseslifetime withlubricating C/Cmaterialsto ofmaterialandhence pyrographite whileRVG4000 properties reducewallthickness thermalperformance impregnation feltprevents onA252 heatconduction Highlypurified Diminishreactive SiCcoatingreduces material5ppm area,lowporesize, permeabilityofmaterial A252 PAPYEX®external lowporosity. composite layeringprevents Grade Optimizedby materialfeatures dusting 2191 Below5ppmfor computersimulation below2ppm standardgraphitegrades, ashcontent Purifiedunder below2ppmforCC Mediumtohigh halogengasflow AEROLORcomponents resistivitytolower A252C/C athightemperature thicknessembodied material achieveslowerthan Grades2123, currentcollectorinC/C 2020,2450 5ppmashcontent 2020,2450 SiCcoating AEROLOR2.5DC/C Below20ppmtypicalpurity FlexibleGraphite PAPYEX®
2020 Rigidcarbonthermal SiCcoating insulation 2mhighC/Ccylinders CALCARB®
andISOLOR®
... to wafer processing
Requiredfunctions
Products
SolutionsBestChoiceBestValue
Products
Applicationexamples
Requiredfunctions
SolutionsBestChoiceBestValue
Wafer processing Dry Ion Packaging Electronic Contaminant CVD & Epitaxy Etching Implanting Tubes analysis
Barrelsandpancakes Electrodes Beamline Tools:jigs,brazing Electrodes Gas Containers components orsealingassemblies anodeforXray analyzing andlab
Singlewafersusceptors forsemiconductors targets crucibles accessories
MOCVDequipment andconnectors Compoundgrowth Avoidpeelingoff Resistablation Resistthermalshock Adaptglassorother Withstand Contain Alternative andensurecoating materialthermalexpansion centrifugalforce, hotmelts toplatinum onallsurface Useunder Spreadoutenergy crucibles highvoltage ofbeamimpact Withstandwear Providegood No Achievethebest matchwith wetting Resist laminargas Ablationresistant Eventhermalgradients tungstenlayer from mostof flowpattern metals etchants Groundperfectly Increaselifetime Radiatestored andacids Guanranteeeveness heatinvacuum Effective ofthermalprofile Fasterpumpdown Provideareliable resistive No thermalresistance Beinert heating undesired Preventany Noparticlerelease UnderVacuum reactions contaminationor underbeamimpact Guaranteerequired Reliable impuritiesdiffusion electricalinsulation Toachieveand measure keepreliable Performradiative highvacuum orinductiveprocess
Lowercontamination
CTEmatchbetween Highdensity Shockresistantgrade AdaptedCTE: HighFS Largegrains Noopen graphiteandSIC grades,pyrocoat i.e.lowYoungmodulus, highdensitygrade porosity graphiteprecision orbulk lowCTE,high Highthermal Mediumto machining pyrographite conductivity,highFS Highthermalconductivity conductivity highresistivity Purificationto eradicate Coatingemissivity Medium Veryhighconductivity Purificationremoves Lowresistivity Highestpurity oxidation andgraphite conductivity oxidationcatalysts upto2ppm catalysts homogeneity Finegrain,high Lowerporosity Highthermal Finegrainand densitygrade. Mediumresistivityfor Outgasedgrade 2191 Glassy conductivityrequired lowporosity resistiveheating: asanoption carbon Verylowresistivity resistancetuned Below20ppm ImperviousSICcoating Lowtomedium byfineholedrilling resistivity Vitreousimpregnation 2123,2120, Tunedresistivity closeporosity Reducedustor 2320 Below20ppm totrapdust electricallyconductive Coatingandgraphite tracesonglass gradesmeet20ppm 2120,2123 2120,2340 criteria.Specificgrid pyrocoating Vitreousimpregnation 2120,2318,… patternsengineered bulkpyrographite toavoidcontamination Glassycarbon SiCcoating
Applicationexamples
HighTemperaturemechanicalinterfaceFlexuralStrength(FS),TensileStrength(TS)densityd,grainsize(µm)cœfficientofthermalexpansion(CTE)
ThermaltransferThermalConductivityλ
ChemicalinertiaCoatingthickness,Porediameter
Electricalconductor ResistivityρorconductivityσContaminantfreeAshcontent(ppmweight)
Bestchoicebestvalue
fundamental reasons for you to get the best value from the best solution:
OEMandelectroniccomponentmakershave6goodfundamentalreasonstoorderMersengraphitebasedproductsfortheirHighTemperatureapplications:
Whenmostofrefractorymetalscontaminateandcollapseathightemperatures,Mersen’squalitygraphite,asthemostrefractorynaturalelement,standsmechanicallyinhightemperatureprocesses.
Mersen graphite compounds, with their steady and reliable behavior versus temperature, interfaceideallytodimensionalrequirements.
Mersenknowshowtotunegraphiteperformancetotheheaviestthermalshocks,whilechoosingtheadequateblendofpowders,aswellas thesuitableprocesstocreatethemostadequatemicrostructure.
Toshortencustomer’sprocesstime,MersenfeaturesarangeofspeciallightandstronggraphiteandCarbon-Carbon(C/C)products,loweringmasstobeheatedandthencuttingheatupandcooldowntime.
10
5
1
10000
Refractory Alloy
Relativescale
SiCGraphite
CMg0
Mo
2000 3000 0
C
PyC
Al203
g/cm3
Ti
Steel
Mo
W
5 10 15 20
Copper
Iron
Kovar
Mo
Glass
W
Carbon
Graphite
0 2 4 6 8 10 12 14 16 18
10-6/C
+100%
+50%
0%
-50%
-100%0 500 1000
Thermal expansion
Thermal conductivity
1500 2000 2500 3000
Resistivity
Mechanicalstrength
12 MersenputschemicalreactionswithitsgraphiteandC/Cproductrangeundercontrol:
for any given environment at high temperature, with the most aggressive etchants,Mersenoffersthebestgradesandprovidesexceptionallifetimetoitscustomers,atthelowestcostofownership.
Resistancetooxidationcanbedrasticallyincreasedwithoptimaltreatmentsandcoatings,modifyingpermeabilityuptodesiredtightness.
Mastering thermal transfer is key to high temperature processing: Mersen’s highqualityandhomogeneousgraphitebasedproductsensurethemosteventhermalprofile.Fromthermaltransfertothermalinsulation,Mersenprovidesengineeringresourcestohelpcustomerssimulateanddesignthebestsolutiontoperformthedesiredfunction.
Theinformationcontainedinthisbrochureisgivenforinformationpurposesonly,anddoesnotcommitMerseninanywaywhatsoever.Thisdocumentshallnotbecopied,reproducedortranslatedinwholeorinpartwithoutMersen’swrittenpermission.Datahereincontainedareprovidedforgeneralinformationpurposeonlyandarenotbinding.Mersenshallhavenoliabilitywhatsoeverwithrespecttoinformationcontainedherein.Duplication,reproductionortranslationofanyinformationcontainedherein,inwholeorinpart,isstrictlyprohibitedwithoutpriorwrittenconsentofMersen.OurmaterialsareinconformitywiththeRoHS-Directive(RestrictionoftheuseofcertainHazardousSubstancesinelectricalandelectronicequipment).BesidesMersenguaranteestheapplicationoftheEuropeanCommunityREACH-Regulation(Registration,Evaluation,AuthorizationandRestrictionofChemicalsubstances)toallitsplantslocatedinEurope.
Graphite Impregnated Vitreous SiC Glassy Pyrocarbon Solid graphite impregnation coating Carbon coating PyrocarbonPermeabilitycm2/s 10-1 10-2 10-3 10-5 10-11 10-12 10-12
0 100 200 300 400
W/m/C
Copper
Ti
Al
Graphite
Iron
Al203
Steel
W/m/°C
Grades
0 20 40 60 80 100 120 140
2340 102
852450
1062120
1122123
1042114
1222320
852020
1162191
772910
2318 81
3
Mersenmaterialsconnectelectrically inyoursystems tosecure themostreliable grounding, to create the highest accelerating power or the mostefficientresistiveorinductiveheating.Selectionofpurifiediso-moldedgradeswiththecorrectmicrostructureguaranteesasafeelectricalcontact.
4MostofthefunctionsofferedbyMersengraphitebasedproductshaveahighservicetovalueratio.Theyareacost effectivesolutioncomparedtomostrefractorymetals.Easiertomachine,thesegraphitematerialsareproduced by the worldwide leaderMersen, in large quantities, througha lean organization at the lowest cost, according to the highest qualitystandards.
5
Mersen is a worldwide group, and is a local partner to every customer.Its affiliates provide close service and quick delivery to every customerthroughouttheworld.6
Graphite a strong materialSpecific flexural Strength(Mpa kg/m3 vs temperature)
Mersen wide range of thermal expansion coefficients meet most interface
requirements
Graphite a light refractory material
Comparison of thermal conductivities Thermal conductivity
Graphite materials typical main characteristics variation versus temperature to room
temperature properties
53 4
ELECTRONICS
Purified Graphite Silicon Carbide Graphite Enhancement
Innovative solutions for the Semiconductor Industry
Contact for EuropeMERSEN France Gennevilliers SAS41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 77Fax: +33 (0)1 41 85 45 11E-mail: [email protected] H
T25
GB
0111
Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811
A GLOBAL PLAYER
A WORLD EXPERTin materials and solutionsfor high temperature processes
Main production sites
Industrial or commercial branch
St-Marys, USA
Holytown, Scotland UK
Gennevilliers, France
Chongqing, China
www.mersen.com
Global expert in materials and solutions for extreme environments as well as in the safety and reliability of electrical equipment Mersen designs innovative
solutions to address its clients specific
needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.
Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 40
A wide range of high purity products
7 2
Grade Density Grainsize Porosity FS CTE, Resistivity Thermal micron % (MPa) 10-6°C-1 µΩcm conductivity StandardMax.Size*mm W/m°C
2191 1.75 15 12 44 4.2 1090 116 540x540x1830 2020 1.77 15 9 45 4.3 1550 85 530x635x1830 1030x1080x325 ø610x1830 ø915x760 ø1500onrequest 2910 1.74 30 17 30 4.1 1600 77 ø640x1830 2114 1.81 13 10 52 5.3 1240 104 308x620x915 2123 1.84 13 8 58 5.5 1140 112 308x620x915 2320 1.82 13 10 50 5.0 1060 122 308x620x915 2450 1.86 15 8 45 4.3 1550 85 onrequest 2120 1.84 8 7 65 6.0 1220 106 308x620x915 2318 1.86 5 6 76 5.7 1600 81 152x308x620 2340 1.88 4 13 90 7.2 1270 102 305x305x100
*askforspecificsize
Silicon Carbide coating
Pyrocoating and bulk pyrocarbon
Carbon / Carbon AEROLOR®
Rigid carbon insulation CALCARB®
Flexible graphite
Vitreous carbon impregnation
Glassy carbon
liquids
For your wafer quality get our Ultra High Purity
Gastight,tohermeticcoatings,arerenownedspecialitiesofMersentopreventundesiredwaferdoping.
Mersenisqualifiedasasupplierforsparepartsusedintheelectronicindustry,frompolysiliconproductionequipmenttosinglecrystalgrowingfurnaces,siliconepitaxy,MOCVDreactors,dryetchers,ionimplanters,glass to metal and metal to metal sealing furnaces, contaminantsanalysers…
Mersen offers toOEMand electronic componentmakers an innovative andwide rangeofsmartandcosteffectivehightemperaturegraphitebasedsolutions.Aboveall,Mersenprovidesthelowestlevelofelemental contaminationwithits99.9995%purifiedgradesandallowsitscustomerstomanufactureandtoprocessdefectfreematerialsandcomponents.
Mersen’scleanroompackagingallowsadirectuseincustomer’scleanrooms.
High density graphite grades with small grain size ensure that no particlecontaminationoccursinultrahighvacuum.
Mersen drastically reduces molecular contamination to a minimumwith appropriate additional treatments, from outgasing, to closinggraphite’snaturalporositybyimpregnation.
ND-Notdetected Theabovevaluesaretypicalandaresubjecttochange Brandname:PT(Europe)orCX(USA)for<20ppm.UHP5forpurityquality<5ppm.
Al B Fe CA Cu Mg Ni Ti V Si Pb Sn Mo W Zn Cr Total Unpurified 1 2 31 51 1 1 74 22 95 5 1 1 1 1 1 2 300 <20ppm 0,5 <2 <2 <2 0,5 <0,2 0,5 <0,2 0,5 <2 0,1 0,1 0,1 0,1 0,1 0,1 11 <5ppm <0,2 <0,8 <0,5 <0,5 ND ND <0,1 ND <0,1 <0,5 ND ND ND ND ND ND 2,7
Purity Ash content (ppm)
Purified graphite
Specialties
Reference Density Open Thermal porosity conductivity CARBOGRAF®400 2.05 ~0%
XYdirection PYCCoating 300-500 CARBOGRAF®430 Zdirection7 PYCBulk
Reference Density FS(MPa) Flexuralmodulus(GPa) MaximumSize A252 1.70 100 10 Tubelength3000mm Ringø2200mm
Reference Density Thermalconductivityat400°C(W/m°C) Thermalconductivityat2,000°C(W/m°C) Max.size CBCF18-2000 0.18 0.25(Vacuum) 1.00(Vacuum) 1,500x1,500x160mm
Reference Thicknessmm Width Density EmissivityCoefficient PAPYEX® 0.5to1.5 1000mm 1.0 0.74
Reference Tmax Depthofimpregnation
VCI 450°C(underO2atmosphere)-2800°C(inert) >6mm
Reference Density Openporosity CTE Size V25 1.45 0 2810-6 limitedto3mmwallthickness
Reference Tmax Density Open Rf(MPa) CTE Coatingthickness Hardness Young porosity 10-6°C-1 modulus GPa CARBOSIL 1700°C 3.2 imperviousto 350 4.8 50-250µm 2280 63 mostgasesand 2950Knoop
ELECTRONICS
Purified Graphite Silicon Carbide Graphite Enhancement
Innovative solutions for the Semiconductor Industry
Contact for EuropeMERSEN France Gennevilliers SAS41 rue Jean Jaurès - BP 148F-92231 GENNEVILLIERS CEDEXFRANCETel.: +33 (0)1 41 85 45 77Fax: +33 (0)1 41 85 45 11E-mail: [email protected] H
T25
GB
0111
Contact for AsiaMERSEN Kunshan Co. Ltd.#29 South Taihu Road,Kunshan Development Zone,Kunshan, Jiangsu Province,215334, PR CHINATel.: +86 512 5763 9808Fax: +86 512 5763 9811
A GLOBAL PLAYER
A WORLD EXPERTin materials and solutionsfor high temperature processes
Main production sites
Industrial or commercial branch
St-Marys, USA
Holytown, Scotland UK
Gennevilliers, France
Chongqing, China
www.mersen.com
Global expert in materials and solutions for extreme environments as well as in the safety and reliability of electrical equipment Mersen designs innovative
solutions to address its clients specific
needs to enable them to optimize their manufacturing process in sectors such as energy, transportation, electronics, chemical, pharmaceutical and process industries.
Contact in North AmericaMERSEN USA BN Corp.Bay City Branch,900 Harrison StreetBay City, MI 48708, USATel.: +1 989 894 29 11Fax: +1 989 895 77 40
A wide range of high purity products
7 2
Grade Density Grainsize Porosity FS CTE, Resistivity Thermal micron % (MPa) 10-6°C-1 µΩcm conductivity StandardMax.Size*mm W/m°C
2191 1.75 15 12 44 4.2 1090 116 540x540x1830 2020 1.77 15 9 45 4.3 1550 85 530x635x1830 1030x1080x325 ø610x1830 ø915x760 ø1500onrequest 2910 1.74 30 17 30 4.1 1600 77 ø640x1830 2114 1.81 13 10 52 5.3 1240 104 308x620x915 2123 1.84 13 8 58 5.5 1140 112 308x620x915 2320 1.82 13 10 50 5.0 1060 122 308x620x915 2450 1.86 15 8 45 4.3 1550 85 onrequest 2120 1.84 8 7 65 6.0 1220 106 308x620x915 2318 1.86 5 6 76 5.7 1600 81 152x308x620 2340 1.88 4 13 90 7.2 1270 102 305x305x100
*askforspecificsize
Silicon Carbide coating
Pyrocoating and bulk pyrocarbon
Carbon / Carbon AEROLOR®
Rigid carbon insulation CALCARB®
Flexible graphite
Vitreous carbon impregnation
Glassy carbon
liquids
For your wafer quality get our Ultra High Purity
Gastight,tohermeticcoatings,arerenownedspecialitiesofMersentopreventundesiredwaferdoping.
Mersenisqualifiedasasupplierforsparepartsusedintheelectronicindustry,frompolysiliconproductionequipmenttosinglecrystalgrowingfurnaces,siliconepitaxy,MOCVDreactors,dryetchers,ionimplanters,glass to metal and metal to metal sealing furnaces, contaminantsanalysers…
Mersen offers toOEMand electronic componentmakers an innovative andwide rangeofsmartandcosteffectivehightemperaturegraphitebasedsolutions.Aboveall,Mersenprovidesthelowestlevelofelemental contaminationwithits99.9995%purifiedgradesandallowsitscustomerstomanufactureandtoprocessdefectfreematerialsandcomponents.
Mersen’scleanroompackagingallowsadirectuseincustomer’scleanrooms.
High density graphite grades with small grain size ensure that no particlecontaminationoccursinultrahighvacuum.
Mersen drastically reduces molecular contamination to a minimumwith appropriate additional treatments, from outgasing, to closinggraphite’snaturalporositybyimpregnation.
ND-Notdetected Theabovevaluesaretypicalandaresubjecttochange Brandname:PT(Europe)orCX(USA)for<20ppm.UHP5forpurityquality<5ppm.
Al B Fe CA Cu Mg Ni Ti V Si Pb Sn Mo W Zn Cr Total Unpurified 1 2 31 51 1 1 74 22 95 5 1 1 1 1 1 2 300 <20ppm 0,5 <2 <2 <2 0,5 <0,2 0,5 <0,2 0,5 <2 0,1 0,1 0,1 0,1 0,1 0,1 11 <5ppm <0,2 <0,8 <0,5 <0,5 ND ND <0,1 ND <0,1 <0,5 ND ND ND ND ND ND 2,7
Purity Ash content (ppm)
Purified graphite
Specialties
Reference Density Open Thermal porosity conductivity CARBOGRAF®400 2.05 ~0%
XYdirection PYCCoating 300-500 CARBOGRAF®430 Zdirection7 PYCBulk
Reference Density FS(MPa) Flexuralmodulus(GPa) MaximumSize A252 1.70 100 10 Tubelength3000mm Ringø2200mm
Reference Density Thermalconductivityat400°C(W/m°C) Thermalconductivityat2,000°C(W/m°C) Max.size CBCF18-2000 0.18 0.25(Vacuum) 1.00(Vacuum) 1,500x1,500x160mm
Reference Thicknessmm Width Density EmissivityCoefficient PAPYEX® 0.5to1.5 1000mm 1.0 0.74
Reference Tmax Depthofimpregnation
VCI 450°C(underO2atmosphere)-2800°C(inert) >6mm
Reference Density Openporosity CTE Size V25 1.45 0 2810-6 limitedto3mmwallthickness
Reference Tmax Density Open Rf(MPa) CTE Coatingthickness Hardness Young porosity 10-6°C-1 modulus GPa CARBOSIL 1700°C 3.2 imperviousto 350 4.8 50-250µm 2280 63 mostgasesand 2950Knoop