GEC GmbHSilicon Solutions

for the Poly-Si Market

The most known Si-producers in the Year 2009

GEC can help YOU to become one of them!

Client

GEC‘s Experience

GEC is a consulting / engineering / vendor firm experienced in the fields of high-tech equipment and projects for poly-silicon manufacturing.

GEC has already been selected by national and international clients, for delivery of equipment and providing engineering and consultancy services for most advanced poly-silicon projects

Established and supplying equipment since 2001

More than 180 reactors already ordered by clients

More than 100 reactors delivered

More than 100 reactors in operation

Several thousands of MT PolySi already produced

Customers in Germany, USA, Japan, China, India

Tokuyama (Japan)

Sunways AG (Germany)

Shanghai Strong Energy (P.R. China)

PV Silicon AG (Germany)

China ENFI Nonferrous Engineering (P.R. China)

Schmid Silicon Technology (Germany)

DAQO New Materials (P.R. China)

HOKU Scientific (USA)

Lanco Solar (India)

Danyangshi Hairun Semiconductor (P.R. China)

Jiangxi Jingde Semiconductor (P.R. China)

Hubei Jingxing Science & Technology (P.R. China)

GEC‘s customers overview

GEC has experience in supporting customers in the fieldsof preliminiary activities for TCS and Monosilane Projects:

• feasibility analysis and studies

• determining a long-term prognosis

• Business plan evaluation

• Basic design, engineering, specifications

Beyond the told facts…

mg-Silicon Production

Wafer Production

Chip / Cells Production

IC/PV-ModulProduction

eg Si, sog Si Production

Value Chain

electronic Si, solar Si

Production

TCSGeneration

TCS Purification

TCS/STC Tankfarm

CVDPoly–Si

Deposition

Poly-SiFinal

Treatment

Vaporizer CON Reactor

MIX Gas Console

Thyro Power Supply

Transformer

Cooling Unit

DCS

Reactor Cleaning Unit

GEC’s Package

Bus Bar System

Vent GasR/R

GEC‘s Functional Package Approach

e.g. AEG

e.g. HTT

e.g. SIEMENS

e.g. SIEMENS

TCSGeneration

TCS Purificat.

TCS/STC Tankfarm

CVDPoly–Si

Deposition

Poly-SiFinal

Treatment

Vaporizer CON Reactor

MIX Gas Console

Thyro Power Supply

Transformer

Cooling Unit

DCS

Reactor Cleaning Unit

GEC

Bus Bar System

Shaw, EPC, Hualu

Vent GasR/R

CDI Alztec

GEC‘s Corporate Partner Approach

GEC – Coordination Responsibility

Choice of Client Choice of Client

Since 2001 GEC maintains a partnership network for design, manufacturing and testing of equipment for CVD and Converting processes

GEC is able to deliver a functional package equipment for CVD and Converting processes and takes responsibilities therefore, based on the experience of long term cooperation with world leading suppliers

GEC is able to deliver equipment which can be easy and fast installed, commissioned and ramped up

GEC‘s Partnership Experience

Why a new and bigger CVD-Reactor?

High volume production for decreasing investment and operating costs per kg Si

High efficiency in operating and maintenance of equipment

Minimizing of electrical power due to utilizing best possible radiation geometry

Advanced balanced mix-gas flow for symmetrical deposition

High temperature bell-jar cooling for energy recovery

Fast commissioning and Ramp-up

GEC‘s new CVD-Reactor 27 pairs

Three ring 54 electrodes design for symmetrical electrical phases (U, V, W) connection

Proven mix gas flow and distribution for optimized deposition rod geometry (150 – 170 mm)

High temperature cooling (130 – 150 °C) for energy recovery

Solar grade polysilicon manufacturing capacity 400 - 500 to/y

Low energy consumption < 48 KWh/kg Si

Delivery status: assembled, tested, cleaned, passivated, N2 sealed, ready for Plug & Play

Ramp up time from first silicon out to production capacity 3 months (Target)

GEC‘s new CVD-Reactor 27 pairs

CON-Reactor, Vaporizer

Three ring 48 electrodes design for optimized heating density

Two CON-Reactors one Vaporizer configuration for economical investment

TCS-Converting efficiency of 17 to 18 % (weight)

Graphite converting chamber and graphite heaters made of high purity quality (<5 ppm) for min. contamination and long lifetime. Heater temperature is pyrometer controlled

Quench pipe system for stabilizing the converting efficiency

Vent gas heat recovery for STC evaporation in vaporizer

Delivery status: assembled, tested, cleaned, passivated, N2 sealed, ready for Plug & Play

GEC‘s CON-Reactor and Vaporizer

Mix Gas Console

TCS, H2, N2, mixed-gas supply lines are assembled in one unit for better operating and controlling

Integrated mass flow meter (MFM) for supply of TCS, N2, H2

Manufactured under clean room conditions to ensure zero contamination

Junction box cabling to instruments, valves and instrument piping requires only one connection interface

Delivery status: rack assembled, tested, cleaned, passivated, Argon pressurized and sealed delivery (2 barG), ready for Plug & Play

GEC‘s Mix Gas Console

Cooling Unit

Designed for high temperature cooling water (130°-150°C) supply for reactor body to avoid deposition onto reactor inside walls

Designed for middle temperature cooling water (40°-60°C) supply for electrodes and show-glasses on DI-water quality

Designed for down cooling of CVD-reactor by using middle temperature cooling level. Saving an additional cooling loop

Operating of high temperature cooling water loop for significant energy recovery. (low pressure steam generation for distillation processes)

Junction box cabling to instruments, valves and instrument piping requires only one connection interface.

Delivery status: rack assembled, tested, cleaned, sealed delivery, ready for Plug & Play

GEC‘s Cooling Unit

Summary

Utilizing of proven equipments of GEC (core equipment) together with proven equipment of GEC’s world class Partners

Benefits of long term partnership working experience of GEC and its Partners

Benefit of GEC’s Plug & Play delivery modus, which reduces significant efforts and times for installation and commissioning and ensures absolutely equipment cleanliness and a well arranged construction site.

Providing of GEC’s special services by installation and commissioning team on construction side (if wished by client)

Benefit of GEC’s HT-cooling system leads to maximum energy re-using more than 50 % out of the electrical energy for the reactors

Client‘s Advantages by Appointing GEC

SPECIAL HIGHLIGHTS

Utilizing GEC’s silver-plated CVD-reactors reduces electrical energy consumption down to range of < 50 KWh/kg, that ensures a short return of investment (already realized in German polysilicon plants)

Application of the new advanced development: Thyristorpower supply system with integrated Middle Voltage Ignition device

Delivery of DCS (SIEMENS) within GEC’s package comprises assembly, engineering (including application software) and testing in Germany

Client‘s Advantages by Appointing GEC

SPECIAL HIGHLIGHTS

Application of the new advanced development: Thyristor power supply system with integrated Middle Voltage Ignition device

Delivery of DCS (SIEMENS) within GEC’s package comprises assembly, engineering (including application software) and testing in Germany

GEC ´s deposition equipment package has been evaluated and selected by TOKUYAMA

Client‘s Advantages by Appointing GEC

1. Reactor Building 12. Reactor Building 23. Support Building4. Office, DCS Building5. CDI Facility6. TCS Facility7. Tank Farm8. Utilities

2

14

3

76

5

8

General Plant Layout Sketch

CVD Deposition Reactors Reactor Gas Consoles Mixed Gas Heat Exchanger

(Liebig Pipes) Cooling Systems STC Converter Reactors Vaporizers Gas Consoles Reactor Thyristor Power Units Reactor Special Transformes Reactor Bus-bars Reactor Cylinder Cleaning

System Ingot Removable System

Filament Preparation Systems Storing Solid Silicon processing

machinery Crushing Sawing Packing Solid-Si chemical Cleaning

Equipment

CVD Deposition Reactors Reactor Gas Consoles Mixed Gas Heat Exchanger

(Liebig Pipes) Cooling Systems STC Converter Reactors Vaporizers Gas Consoles Reactor Thyristor Power Units Reactor Special Transformes Reactor Bus-bars Reactor Cylinder Cleaning

System Ingot Removable System

TCS Synthesis and Distillation

• Recommendation of the Best Partner for the TCS- EPC Contractor, based on GEC´s Experience during realization of multiple Silicon-Projects

• Specification and Technical requirements (quality, quantity) for the TCS-Delivery

• Delivery of the Testreactor for quality control

Vent Gas Recovery (VGR)

• Recommendation of CDI as the best partner for BSV-Project, based on GEC´s Experience during realization of all Silicon-Projects

• Specification and technical requirements (quality, quantity, compounds, pressure, temperature) for the ventgas of CVD- and CON-Reactors

• Integrated coordination between CDI and GEC for closed loop cycles (TCS, HCl, H2, STC ) between GEC Reactors process technology and CDI facility design

Coordination EPC Contractor Building Infrastructure

• Specifications and Basic design (Architecture and Engineering) according to GEC´s standards

• Requirements for utilities, process materials

• Requirements for the hazard and security

• Options for the general plant layout

Commisioning and Ramp-Up of the hole Si-Production

Thank youfor your kind attention!

your GEC-Team

GEC GmbH | Bajuwarenring 12a | 82041 Oberhaching Germany | Phone: +49 89 4503692 - 0 Fax: +49 89 125954139