gam laser, inc. 20091 the ex5 excimer laser a total metal ceramic excimer laser with many advantages...
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GAM LASER, INC. 2009GAM LASER, INC. 2009 11
The EX5 Excimer LaserThe EX5 Excimer Laser
A total metal ceramic excimer laser with many advantages
• Low cost Mini laser
• Long gas lifetime
• Low cost of operation
• Computer controlled
• Air cooled
• High power in a compact table top package
GAM LASER, INC. 2009GAM LASER, INC. 2009 22
TYPE II SUPERCHAMBERTYPE II SUPERCHAMBER Performance HighlightsPerformance Highlights
Total Metal/ceramic designTotal Metal/ceramic design Corona preionizationCorona preionization New chamber materialNew chamber material New direct drive blowerNew direct drive blower New electrode designNew electrode design Active optics filtering for longer optics lifetimeActive optics filtering for longer optics lifetime Improved optics materialImproved optics material Increased bearing lifetimeIncreased bearing lifetime Increased gas lifetimeIncreased gas lifetime Linear power with repetition rateLinear power with repetition rate Higher repetition rateHigher repetition rate 1% pulse to pulse stability1% pulse to pulse stability Reduced parts count gas handling systemReduced parts count gas handling system Solid state thyratronSolid state thyratron
GAM LASER, INC. 2009GAM LASER, INC. 2009 33
EX5-F2 157nm PERFORMANCEEX5-F2 157nm PERFORMANCE
Vacuum Ultraviolet at 157nmVacuum Ultraviolet at 157nm Single Fill gas lifetimeSingle Fill gas lifetime 10 million pulses10 million pulses Static gas lifetimeStatic gas lifetime 10 Days10 Days EnergyEnergy 2mJ2mJ Average powerAverage power .65 W.65 W StabilityStability <2% RMS<2% RMS KF/16 purge flange includedKF/16 purge flange included
GAM LASER, INC. 2009GAM LASER, INC. 2009 44
EX5 SpecificationsEX5 SpecificationsPARAMETER F2 ArF KrF XeCl XeF
Wavelength nm 157 193 248 308 351
Energy Max. mJ 1.5/2 12 20 8 6
Peak Power kW 250 1500 2500 1000 750
Average Power @ 250Hz 0.4 2.4 4.0 1.4 1.3
Average Power @ 500Hz 0.65 4.0 8.0 2.5 2.4
Repetition Rate Max. Hz2 250/500/750
Dynamic gas lifetime Pulses to 50% energy 10E6 12E6 18E6 20E6 15E6
Shelf life to 50% energy 10 days 20 days 30 days >3 Months 30 Days
Pulse Length nS 8
Stability <3% Standard Deviation
Tube Service 2 Billion Pulses
Beam Size, mm 3X 6
Divergence, mRad full angle 1 X 2
Cooling AIR
Timing Jitter 2nS Standard Deviation
Weight 15kg
GAM LASER, INC. 2009GAM LASER, INC. 2009 55
Dynamic Gas LifetimeDynamic Gas LifetimeEX5/500 Dynamic gas lifetime @248nm
0
5
10
15
20
25
0 2.25 4.5 6.75 9 11.25 13.5 15.75 18
MegaPulses
En
erg
y m
J
0
2.5
5
7.5
10
12.5
Po
wer
W
GAM LASER, INC. 2009GAM LASER, INC. 2009 66
Repetition Rate PerformanceRepetition Rate Performance
EX5/500 Average power Vs Repetition rate
0123456789
10
0 50 100 150 200 250 300 350 400 450 500
Repetition rate Hz
Po
wer
W
ArF 193nm KrF 248nm
GAM LASER, INC. 2009GAM LASER, INC. 2009 77
Pulse to Pulse StabilityPulse to Pulse Stability
0.77% rms Stability @ 200Hz, 13.5mJ KrF 248nm
GAM LASER, INC. 2009GAM LASER, INC. 2009 88
EX5 Running CostsEX5 Running Costs Running costs for 2 billion pulsesRunning costs for 2 billion pulses
ArFArF KrFKrF Refurbishment after 2 billion pulsesRefurbishment after 2 billion pulses $7500$7500 $7500$7500 Premix gas cylindersPremix gas cylinders $1500$1500 $1200$1200 Optics exchangesOptics exchanges $7000$7000 $1150$1150
TotalTotal costscosts $16000$16000 $9850$9850
Cost per Thousand pulsesCost per Thousand pulses $0.008$0.008 $0.0049$0.0049 Running cost per hour at 200HzRunning cost per hour at 200Hz $5.76$5.76 $3.53$3.53
Cost per pulseCost per pulse 0.80.8e-5 e-5 ¢¢ 0.490.49e-5e-5 ¢ ¢
GAM LASER, INC. 2009GAM LASER, INC. 2009 99
ORLANDO, FLORIDA