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G-Series MFC DeviceNet Digital Interface

Supplement

2 Tech Drive Suite 201 Andover, MA 01810 Main: 978.284.5500 1046412-001 Fax: 978.284.4999 Rev. A, 4/13 www.mksinst.com Supplement

G-Series DeviceNet Rev. A– April 2013

Supplement

G-Series MFC

DeviceNet Digital Interface

Supplement

Copyright © 2013 by MKS Instruments, Inc. All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc/ Specifications subject to change without notice. Contact MKS for latest specifications. Printed in the United States of America. Mass-Flo® is a registered trademark of MKS Instruments, Inc., Andover, MA SEMI® is a registered trademark of Semiconductor Equipment and Materials International, Mountain View, CA Swagelok®, VCR®, and VCO® are registered trademarks of Swagelok Marketing Co,Solon, OH NUPRO® is a registered trademark of NUPRO Company, Willoughby, OH Kalrez® and Viton® are registered trademarks of DuPont Dow Elastomers., Elkton, MD This manual is for firmware/software version: 1.0x

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Table of Contents

DEVICENET INFORMATION .................................................................................................. 1

DEVICENET MESSAGE TYPES ....................................................................................................... 1 DEVICENET OBJECT CLASSES ...................................................................................................... 1

IDENTITY OBJECT CLASS CODE: 01 (0X01) ................................................................... 2

CLASS ATTRIBUTES ...................................................................................................................... 2 INSTANCE 1 ATTRIBUTES .............................................................................................................. 2 COMMON SERVICES ...................................................................................................................... 2

Revision – Attribute 4 ............................................................................................................... 2 Device Status – Attribute 5 ....................................................................................................... 3 Serial Number – Attribute 6 ..................................................................................................... 3 State – Attribute 8 ..................................................................................................................... 3

ROUTER OBJECT CLASS CODE: 02 (0X02) ...................................................................... 4


DEVICENET OBJECT CLASS CODE: 03 (0X03) ............................................................... 5


MACID – Attribute 1 ................................................................................................................ 5 Baud Rate – Attribute 2 ............................................................................................................ 5 Bus Off Interrupt – Attribute 3 ................................................................................................. 6 Bus Off Counter – Attribute 4 .................................................................................................. 6 Allocation Information – Attribute 5 ........................................................................................ 6

ASSEMBLY OBJECT CLASS CODE: 04 (0X04) ................................................................. 7

CLASS ATTRIBUTES ...................................................................................................................... 7 INSTANCE 1 ATTRIBUTES .............................................................................................................. 7 INSTANCE 2 ATTRIBUTES .............................................................................................................. 7 INSTANCE 3 ATTRIBUTES .............................................................................................................. 7 INSTANCE 4 ATTRIBUTES .............................................................................................................. 8 INSTANCE 5 ATTRIBUTES .............................................................................................................. 9 INSTANCE 6 ATTRIBUTES .............................................................................................................. 9 INSTANCE 7 ATTRIBUTES .............................................................................................................. 9 INSTANCE 8 ATTRIBUTES .............................................................................................................. 9 INSTANCE 13 ATTRIBUTES .......................................................................................................... 10 INSTANCE 14 ATTRIBUTES .......................................................................................................... 10

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INSTANCE 15 ATTRIBUTES .......................................................................................................... 10 INSTANCE 16 ATTRIBUTES .......................................................................................................... 10 INSTANCE 17 ATTRIBUTES .......................................................................................................... 11 INSTANCE 18 ATTRIBUTES .......................................................................................................... 11 INSTANCE 19 ATTRIBUTES .......................................................................................................... 12 INSTANCE 20 ATTRIBUTES .......................................................................................................... 12 COMMON SERVICES .................................................................................................................... 12

CONNECTION OBJECT CLASS CODE: 05 (0X05) .......................................................... 13

CLASS ATTRIBUTES .................................................................................................................... 13 INSTANCE 1 ATTRIBUTES (EXPLICIT CONNECTION) .................................................................... 13 INSTANCE 2 ATTRIBUTES (POLL CONNECTION) ......................................................................... 15 COMMON SERVICES .................................................................................................................... 15

State – Attribute 1 ................................................................................................................... 16 Connection ID’s – Attributes 4 and 5 .................................................................................... 16 Production and Consumed Sizes – Attributes 7 and 8 ........................................................... 16 Watch Dog Timeout Activity – Attribute 12 ........................................................................... 17

S-DEVICE SUPERVISOR OBJECT CLASS CODE: 48 (0X30) ....................................... 18

CLASS ATTRIBUTES .................................................................................................................... 18 INSTANCE 1 ATTRIBUTES ............................................................................................................ 18 COMMON SERVICES .................................................................................................................... 20 OBJECT-SPECIFIC SERVICES ....................................................................................................... 20 MANUFACTURER-SPECIFIC SERVICES ......................................................................................... 20

Change Mode Request ............................................................................................................ 21 Software Revision Level – Attribute 7 .................................................................................... 21 Hardware Revision Level – Attribute 8 .................................................................................. 22 Device Status – Attribute 11 ................................................................................................... 22 Exception Status – Attribute 12 .............................................................................................. 22 Common Exception Detail – Attribute 13 and 14 .................................................................. 22 MFC Exception Detail – Attributes 13 and 14 ....................................................................... 23 Manufacturer Exception Detail – Attributes 13 and 14 ......................................................... 23

S-ANALOG SENSOR OBJECT CLASS CODE: 49 (0X31) ............................................... 24

CLASS ATTRIBUTES .................................................................................................................... 24 INSTANCE 1 ATTRIBUTES, FLOW ................................................................................................ 24 COMMON SERVICES .................................................................................................................... 26 OBJECT-SPECIFIC SERVICES ....................................................................................................... 26

Value – Attribute 6 ................................................................................................................. 26 Status – Attribute 7 ................................................................................................................. 26 Full Scale – Attribute 10 ........................................................................................................ 26 Alarm Trip Point High Attribute 17 ....................................................................................... 26 Alarm Trip Point Low – Attribute 18 ..................................................................................... 27 Alarm Settling Time – Attribute 20 ........................................................................................ 27

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Warning Trip Point High – Attribute 21 ................................................................................ 27 Warning Trip Point Low – Attribute 22 ................................................................................. 27 Warning Settling Time – Attribute 24 .................................................................................... 27 Auto Zero Status – Attribute 28 .............................................................................................. 27 Gas Calibration Object Instance – Attribute 35 .................................................................... 27 Flow Totalizer – Attribute 95 (Instance 1 ONLY) .................................................................. 27 Flow Hours – Attribute 96(Instance 1 ONLY) ....................................................................... 27

S - TEMPERATURE SENSOR OBJECT CLASS CODE: 100 (0X64) ............................. 28

CLASS ATTRIBUTES .................................................................................................................... 28 INSTANCE 1 ATTRIBUTES, TEMPERATURE .................................................................................. 28 COMMON SERVICES .................................................................................................................... 29

Value – Attribute 6 ................................................................................................................. 29 Status – Attribute 7 ................................................................................................................. 29 Full Scale – Attribute 10 ........................................................................................................ 29 Alarm Trip Point High Attribute 17 ....................................................................................... 30 Alarm Trip Point Low – Attribute 18 ..................................................................................... 30 Alarm Settling Time – Attribute 20 ........................................................................................ 30 Warning Trip Point High – Attribute 21 ................................................................................ 30 Warning Trip Point Low – Attribute 22 ................................................................................. 30 Warning Settling Time – Attribute 24 .................................................................................... 30

S-ANALOG ACTUATOR OBJECT CLASS CODE: 50 (0X32) ........................................ 31

CLASS ATTRIBUTES .................................................................................................................... 31 INSTANCE 1 ATTRIBUTES ............................................................................................................ 31 COMMON SERVICES .................................................................................................................... 31

Override – Attribute 5 ............................................................................................................ 32 Value – Attribute 6 ................................................................................................................. 32 Status – Attribute 7 ................................................................................................................. 32 Safe State – Attribute 21 ......................................................................................................... 32 Safe Value – Attribute 22 ....................................................................................................... 32

S-SINGLE STAGE CONTROLLER OBJECT CLASS CODE: 51 (0X33) ...................... 33

CLASS ATTRIBUTES .................................................................................................................... 33 INSTANCE 1 ATTRIBUTES ............................................................................................................ 33 COMMON SERVICES .................................................................................................................... 34

Setpoint – Attribute 6 ............................................................................................................. 34 Status – Attribute 10 ............................................................................................................... 34 Ramp Rate – Attribute 19 ....................................................................................................... 34 Operating Pressure – Attribute 101 ....................................................................................... 35 Ramp Rate NV/V storage – Attribute 104 .............................................................................. 35

S-GAS CALIBRATION OBJECT CLASS CODE: 52 (0X34) ............................................ 36

CLASS ATTRIBUTES .................................................................................................................... 36

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INSTANCE 1…32 ATTRIBUTES .................................................................................................... 36 COMMON SERVICES .................................................................................................................... 36 OBJECT-SPECIFIC SERVICES ....................................................................................................... 37

Get All Instances Response: ................................................................................................... 37 VENDOR-SPECIFIC SERVICES ...................................................................................................... 37

Configuration Request: .......................................................................................................... 37 Bin ID – Class Attribute 170 .................................................................................................. 38 Gas Table Revision – Class Attribute 171 ............................................................................. 38 Gas Standard Number – Attribute 3 ....................................................................................... 38 Gas Symbol – Attribute 5 ....................................................................................................... 38 Full Scale – Attribute 6 .......................................................................................................... 38 Additional Scaler – Attribute 7 .............................................................................................. 39 Calibration Date – Attribute 8 ............................................................................................... 39 Calibration Gas Number – Attribute 9 ................................................................................... 39 Calibration Pressure – Attribute 95 ....................................................................................... 39 Calibration Temperature – Attribute 96 ................................................................................ 39 Min Full Scale – Attribute 102 ............................................................................................... 39 Max Full Scale – Attribute 103 .............................................................................................. 39

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DeviceNet Information The G Series device operates as a slave on the DeviceNet network. The unit supports

Explicit Messages and Polled I/O Messages of the predefined master/slave connection set. It does not support the Unconnected Message Manager (UCMM).

DeviceNet Message Types As a group 2 slave device the G Series supports the following message types. CAN IDENTIFIER GROUP 2 Message Type 10xxxxxx111 Duplicate MACID Check Message 10xxxxxx110 Unconnected Explicit Request Message 10xxxxxx101 Master I/O Poll Command Message 10xxxxxx100 Master Explicit Request Message xxxxxx = Node Address DeviceNet Object Classes The G Series device supports the following DeviceNet object classes. CLASS CODE OBJECT TYPE 01 (0x01) Identity 02 (0x02) Router 03 (0x03) DeviceNet 04 (0x04) Assembly 05 (0x05) Connection 48 (0x30) S-Device Supervisor 49 (0x31) S-Analog Sensor 50 (0x32) S-Analog Actuator * 51 (0x33) S-Single Stage Controller * 52 (0x34) S-Gas Calibration * If the device is enabled as an MFM, these objects are not supported. All attributes return “Object does not exist”

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Identity Object Class Code: 01 (0x01) The Identity Object is required on all devices and provides identification of and general

information about the device. Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 1 2 Get Max Instance UINT 1 6 Get Max Class Attribute ID UINT 7 7 Get Max Instance Attribute ID UINT 8 Instance 1 Attributes Attr Access Name Type Value 1 Get Vendor UINT 36 2 Get Product Type UINT 26 3 Get Product Code UINT 345 for MFC and 346 for

MFM 4 Get Revision STRUCT OF Major Revision USINT See Below Minor Revision USINT 5 Get Device Status UINT See Below 6 Get Serial Number UDINT See Below 7 Get Product Name STRUCT OF Length USINT 3 Name STRING [16] “MFC” ( is “MFM” when

enabled as an MFM )8 Get State USINT See Below Common Services Service Code Class Instance Service Name 05 (0x05) No Yes Reset 14 (0x0E) Yes Yes Get_Attribute_Single Revision – Attribute 4

3

MKS/DIP maintains strict revision control. The major revision number will increment as functional enhancements are implemented. The minor revision will increment if minor changes are incorporated.

Device Status – Attribute 5 bit 0 owned 0=not owned 1=owned (allocated) bit 1 reserved 0 bit 2 configured 0 bit 3 reserved 0 bit 4-7 vendor specific 0 bit 8 minor cfg fault 0=no fault 1=minor fault bit 9 minor dev.fault 0=no fault 1=minor device fault bit 10 major cfg.fault 0=no fault 1=major cfg. Fault bit 11 major dev.fault 0=no fault 1=major device fault bit 12-15 reserved 0 Serial Number – Attribute 6

The serial number is encoded in the product during the manufacturing cycle and is guaranteed to be unique across all product lines produced by MKS/DIP.

State – Attribute 8 The Device State reflects whether any errors have occurred and the severity. The following states are supported. The only exit from a Major Unrecoverable fault condition is power cycling the device.

State Interpretation Causes 0 Non-existent 1 Self Test 2 Standby 3 Operating Normal operating mode 4 Major Recoverable fault See S_Device_Supervisor Alarm Detail 5 Major Unrecoverable fault See S_Device_Supervisor Alarm Detail

4

Router Object Class Code: 02 (0x02) The Message Router Object provides a messaging connection point through which a Client

may address a service to any object class or instance residing in the physical device. Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 1 6 Get Max Class Attribute ID UINT 7 7 Get Max Instance Attribute ID UINT 2 Instance 1 Attributes Attribute Access Name Type Value 2 Get Number of Connections UINT 2 Common Services Service Code Class Instance Service Name 14 (0x0E) Yes Yes Get_Attribute_Single

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DeviceNet Object Class Code: 03 (0x03) Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 2 Instance 1 Attributes Attribute Access Name Type Value 1 Get MACID USINT See Below 2 Get Baud Rate USINT See Below 3 Get/Set Bus Off Interrupt BOOL See Below 4 Get/Set Bus Off Counter USINT See Below 5 Get Allocation Information STRUCT of See Below Choice Byte BYTE Master Node Addr. USINT 6 Get Mac Switch Changed BOOLEAN 7 Get Baud Switch Changed BOOLEAN 8 Get Current Mac Switch USINT 9 Get Current Baud Switch USINT Common Services Service Code Class Instance Service Name 14 (0x0E) Yes Yes Get_Attribute_Single 16 (0x10) No Yes Set_Attribute_Single 75 (0x4B) No Yes Allocate Master/Slave 76 (0x4C) No Yes Release Master/Slave MACID – Attribute 1

The MACID is set using two BCD rotary switches located on the front panel. Valid MACID addresses are 0 to 63 (0 to 3F Hex). Setting the switch address to a value greater than 63 will disable the switch and allow software setting of the MACID. The software setting defaults to the last hardware setting. The switch is only read during power up.

Baud Rate – Attribute 2

Settable only if the Baud Rate switch is set to a value greater than 2. Value returned will be switch value if less than 4 or the last value set.

6

Switch/Value Speed

0 125 kbits 1 250 kbits 2 500 kbits 3 Software settable

Bus Off Interrupt – Attribute 3 Bus Off Interrupt (BOI) determines the action if a Bus Off state is encountered.

BOI Action

0 Hold chip in OFF state (default) 1 If possible reset CAN chip

Bus Off Counter – Attribute 4 Bus Off Counter will be forced to 0 whenever set regardless of the data value provided. Allocation Information – Attribute 5 Allocation_byte bit 0 explicit set to 1 to allocate bit 1 polled set to 1 to allocate bit 2 strobed (not supported) bit 3-7 reserved (always 0)

7

Assembly Object Class Code: 04 (0x04) The Assembly Objects bind attributes of multiple objects to allow data to or from each object

to be sent or received over a single connection. Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 2 2 Get Max Instance UINT 20 Instance 1 Attributes Attribute Access Name Type Value 3 Get Data STRUCT of Flow INT See S-Analog Sensor,

Attribute 6

Instance 2 Attributes Attribute Access Name Type Value 3 Get Data STRUCT of Status BYTE See S-Device

Supervisor, Attribute 12

Flow INT See S-Analog Sensor, Attribute 6

Instance 3 Attributes

8

Attribute Access Name Type Value 3 Get Data STRUCT of Status BYTE See S-Device



Valve INT See S-Analog Actuator, Attribute 6




Setpoint INT See S-Single Stage Controller, Attribute 6

9










Override USINT See S-Analog Actuator, Attribute 5


Instance 7 Attributes Attribute Access Name Type Value 3 Get/Set Setpoint INT See S-Single Stage

Controller, Attribute 6 Instance 8 Attributes

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Attribute Access Name Type Value 3 Get/Set Data STRUCT of Override USINT See S-Analog Actuator,

Attribute 5 Setpoint INT See S-Single Stage

Controller, Attribute 6

Instance 13 Attributes Attribute Access Name Type Value 3 Get Data STRUCT of Flow REAL See S-Analog Sensor,

Attribute 6



Flow REAL See S-Analog Sensor, Attribute 6




Valve REAL See S-Analog Actuator, Attribute 6

Instance 16 Attributes

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Attribute Access Name Type Value 3 Get Data STRUCT of Status BYTE See S-Device



Setpoint REAL See S-Single Stage Controller, Attribute 6






Instance 18 Attributes Attribute Access Name Type Value 3 Get Data STRUCT of

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Attribute Access Name Type Value Status BYTE See S-Device




Override USINT See S-Analog Actuator, Attribute 5


Instance 19 Attributes Attribute Access Name Type Value 3 Get/Set Setpoint REAL See S-Single Stage

Controller, Attribute 6 Instance 20 Attributes Attribute Access Name Type Value 3 Get/Set Data STRUCT of Override USINT See S-Analog Actuator,

Attribute 5 Setpoint REAL See S-Single Stage

Controller, Attribute 6 Common Services Service Code Class Instance Service Name 14 (0x0E) Yes Yes Get_Attribute_Single 16 (0x10) No Yes Set_Attribute_Single

(1) Assembly instance 1,2,3,4,5,6,13,14,15,16,17 and 18 are used to generate the POLL response packet and consists of the data described in the table below.

(2) Assembly instance 7, 8, 19, and 20 are used to consume the POLL request packet and

consists of the data described in the table below.

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Connection Object Class Code: 05 (0x05) The Connection Objects manage the characteristics of each communication connection. As a

Group II Only Slave device the unit supports one explicit message connection and a POLL message connection.

Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 1 Instance 1 Attributes (Explicit Connection) Attribute Access Name Type Value 1 Get State USINT See Below 2 Get Instance Type USINT 0 = Explicit Message 3 Get Transport Class Trigger USINT 0x83 4 Get Production Connection UINT See Below 5 Get Consumed Connection UINT See Below 6 Get Initial Comm. Char. USINT 0x21 7 Get Production Size UINT TBD 8 Get Consumed Size UINT TBD 9 Get/Set Expected Packet Rate UINT default 2500 msec 12 Get/Set Timeout Action USINT See Below 13 Get Prod. Path Length USINT 0 14 Get Production Path (null)

14

15 Get Cons. Path Length USINT 0 16 Get Consumed Path (null)

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Instance 2 Attributes (POLL connection) Attribute Access Name Type Value 1 Get State USINT See Below 2 Get Instance Type USINT 1 = I/O Message 3 Get Transport Class Trigger USINT 0x83 4 Get Production Connection UINT See Below 5 Get Consumed Connection UINT See Below 6 Get Initial Comm. Char. USINT 0x01 7 Get Production Size UINT See Below 8 Get Consumed Size UINT See Below 9 Get/Set Expected Packet Rate UINT default 2500 msec 12 Get/Set Timeout Action USINT See Below 13 Get Prod. Path Length USINT See Below 14 Get/Set Production Path STRUCT of Log. Seg., Class USINT 0x20 Class Number USINT 0x04 Log.Seg., Instance USINT 0x24 Instance Number USINT 0x02 (default) Log.Seg., Attribute USINT 0x30 Attribute Number USINT 0x03 15 (1) Get Cons. Path Length USINT 6 16 (1) Get/Set Consume Path STRUCT of Log. Seg., Class USINT 0x20 Class Number USINT 0x04 Log.Seg., Instance USINT 0x24 Instance Number USINT 0x07 (default) Log.Seg., Attribute USINT 0x30 Attribute Number USINT 0x03 (1) For Units enabled as “MFM” type Consumed Path Length = 0, and the Path returns 0 data Common Services Service Code Class Instance Service Name 05 (0x05) Yes Yes Reset

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Service Code Class Instance Service Name 14 (0x0E) Yes Yes Get_Attribute_Single 16 (0x10) No Yes Set_Attribute_Single State – Attribute 1 Connection States: 0 = non-existent 1 = configuring 3 = established 4 = timed out Connection ID’s – Attributes 4 and 5 Connection 1 Produced Connection ID: 10xxxxxx011 Connection 1 Consumed Connection ID: 10xxxxxx100 Connection 2 Produced Connection ID: 01111xxxxxx Connection 2 Consumed Connection ID: 10xxxxxx101 xxxxxx = Node Address. Production and Consumed Sizes – Attributes 7 and 8

* The Production and Consumed sizes will change based on what Assembly Instance is chosen for the POLL request and POLL response. The Table below will define the Production and Consumed sizes will their respective Assembly. Assembly Production Size Consumed Size 1 2 2 3 3 5 4 5 5 7 6 8 7 2 8 3 13 4 14 5 15 9 16 9

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Assembly Production Size Consumed Size 17 13 18 14 19 4 20 5 * If the device is enabled as an MFM, then only Instances 1, 2, 13, and 14 are valid

Watch Dog Timeout Activity – Attribute 12 0 = Timeout (I/O Messaging default) 1 = Auto Delete (Explicit Messaging, fixed value) 2 = Auto Reset

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S-Device Supervisor Object Class Code: 48 (0x30) Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 2 2 Get Max Instance UINT 1 6 Get Max Class Attribute ID UINT 7 7 Get Max Instance Attribute ID UINT 106 Instance 1 Attributes Attr Access NV Name Type Value User 3 Get NV Device Type SHORT

STRING MFC ( Will be “MFM” if device is configured as an MFM )

4 Get NV SEMI Standard Revision Level

SHORT STRING

E54-0997

5 Get NV Manufacturer’s Name

SHORT STRING

MKS Instruments

6 Get NV Manufacturer’s Model Number

SHORT STRING

MFC Model Number

7 Get NV Software Revision Level

SHORT STRING

See Below

8 Get NV Hardware Revision Level

SHORT STRING

See Below

9 Get NV Manufacturer’s Serial Number

SHORT STRING

MFC Serial Number

11 Get V Device Status USINT See Below 12 Get V Exception Byte BYTE See Below 13 Get V Exception Detail

Alarm STRUCT of

Common Exception Detail

STRUCT of

Size USINT 2 Detail ARRAY of Detail[0] BYTE See Below Detail[1] BYTE See Below

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Attr Access NV Name Type Value User Device

Exception Detail

STRUCT of

Size USINT 1 Detail ARRAY of Detail[0] BYTE See Below Manufacturer

Exception Detail

STRUCT of

Size USINT 1 Detail ARRAY of Detail[0] BYTE See Below 14 Get V Exception Detail

Warning STRUCT of

Common Exception Detail

STRUCT of

Size USINT 2 Detail ARRAY of Detail[0] BYTE See Below Detail[1] BYTE See Below Device

Exception Detail

STRUCT of

Size USINT 1 Detail ARRAY of Detail[0] BYTE See Below Manufacturer

Exception Detail

STRUCT of

Size USINT 1 Detail ARRAY of Detail[0] BYTE See Below 15 Get/Set NV Alarm Enable BOOL 0=Disable, 1=Enable 16 Get/Set NV Warning Enable BOOL 0=Disable, 1=Enable 101 Get/Set NV Default Display USINT 0 = Banner

3 = Flow 4 = Temperature 5 = Push Button

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Attr Access NV Name Type Value User 103 Get NV IP Address ARRAY of

USINT[4] xxx.xxx.xxx.xxx ( xxx = 0 – 255 )

104 Get NV Subnet Mask ARRAY of USINT[4]

255.255.0.0

105 Get NV Default Gateway ARRAY of USINT[4]

192.168.2.1

106 Get NV Ethernet MAC Address

ARRAY of USINT[6]

XX:XX:XX:XX:XX:XX (xx = mac address 00-FF)

Common Services Service Code Class Instance Service Name 05 (0x05) No Yes Reset 06 (0x06) No Yes Start 07 (0x07) No Yes Stop 14 (0x0E) Yes Yes Get_Attribute_Single 16 (0x10) No Yes Set_Attribute_Single

Object-Specific Services Service Code Class Instance Service Name 75 (0x4B) No Yes Abort 76 (0x4C) No Yes Recover 78 (0x4E) No Yes Perform_Diagnostics Parameter Form Description TestID USINT Type of diagnostic test to be

performed Test ID Parameter Type of diagnostics to be performed 0 Standard Manufacturer-Specific Services Service Code Class Instance Service Name

21

Change Mode Request Parameter Form Description Software Revision Level – Attribute 7

The Software Revision will be a text string of the Major and Minor revision information of the Identity object. It will have the format X.YYY, where X is the major revision and YYY is the Minor revision. The revision code will match that provided by the Identity object.

22

Hardware Revision Level – Attribute 8 The Hardware Revision will be a text string reflecting the current revision of the hardware. It will have the format X.YYY, where X is the major revision and YYY is the Minor revision.

Device Status – Attribute 11 0 = Undefined 1 = Self Testing 2 = Idle 3 = Self-Test Exception 4 = Executing 5 = Abort 6 = Critical Fault

Exception Status – Attribute 12 Bit Function 0 ALARM/ device-common 1 ALARM/ device-specific 2 ALARM/ manufacturer-specific 3 Reserved – set to 0 4 WARNING/ device-common 5 WARNING/ device-specific 6 WARNING/ manufacturer-specific 7 1 == Expanded Method

Common Exception Detail – Attribute 13 and 14

Bit Common Exception Detail[0] Bit Common Exception Detail[1] 0 Internal diagnostic exception 0 Power supply over current 1 Microprocessor exception 1 reserved power supply 2 ROM/FLASH exception 2 Power supply output voltage 3 EEPROM exception 3 Power supply input voltage 4 RAM exception 4 Scheduled maintenance dure 5 0 – Reserved by DeviceNet 5 Notify manufacturer 6 Internal real-time exception 6 Reset exception 7 0 – Reserved by DeviceNet 7 0 = Reserved by DeviceNet

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MFC Exception Detail – Attributes 13 and 14

Byte 0 Bit MFC Device Exception Detail 0 Reading Valid S-Analog Sensor * 1 Flow Low S-Analog Sensor 2 Flow High S-Analog Sensor 3 Flow Control S-Single Stage Controller 4 Valve Low S-Analog Actuator 5 Valve High S-Analog Actuator 6 Reserved = 0 7 Reserved = 0

*Only used in Warning Detail. This bit is always 0 in Alarm Detail.

Manufacturer Exception Detail – Attributes 13 and 14

Bit Manufacturer Exception Detail 0 Over Temp 1 Sensor Resistance 2 TBD 3 TBD 4 TBD 5 TBD 6 TBD 7 TBD

24

S-Analog Sensor Object Class Code: 49 (0x31) Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 1 2 Get Max Instance UINT 1 6 Get Max Class Attribute ID UINT 7 7 Get Max Instance Attribute ID UINT 110 Instance 1 Attributes, Flow Attr Access NV Name Type Value 3 Get/Set NV Data Type USINT 0xC3 = INT

0xCA = REAL 4 Get/Set NV Data Units ENGUNITS 0x1001 = counts

0x1007 = %FS 0x1400 = sccm 0x1401 = slm

5 Get V Reading Valid BOOL 0 = invalid 1 = valid

6 Get V Value (See Data Type)

See Below

7 Get V Status BYTE See Below 8 Get/Set NV Alarm Enable BOOL 0 = disabled

1 = enabled 9 Get/Set NV Warning Enable BOOL 0 = disabled

1 = enabled 10 Get NV Full Scale (See Data

Type) See Below

17 Get/Set NV Alarm Trip Point High (See Data Type)

See Below

18 Get/Set NV Alarm Trip Point Low (See Data Type)

See Below

20 Get/Set NV Alarm Settling Time UINT See Below 21 Get/Set NV Warning Trip Point

High (See Data Type)

See Below

22 Get/Set NV Warning Trip Point Low

(See Data Type)

See Below

24 Get/Set NV Warning Settling Time UINT See Below

25

Attr Access NV Name Type Value 28 Get V Auto Zero Status BOOL 0 = inactive

1 = active 35 Get/Set NV Gas Calibration Object

Instance UINT See Below

95 Get/Set NV Flow Totalizer ULINT See Below 96 Get/Set NV Flow Hours UDINT See Below 99 Get NV Subclass UINT 1 = Flow

Diagnostics 110 Get NV Full Scale STRUCT of

REAL UINT

REAL = Amount UINT = Units

26

Common Services Service Code Class Instance Service Name 14 (0x0E) Yes Yes Get_Attribute_Single 16 (0x10) No Yes Set_Attribute_Single Object-Specific Services Service Code Class Instance Service Name 75 (0x4B) No Yes Zero_Adjust – Flow ONLY Instance 1

Value – Attribute 6

The corrected, converted, calibrated final value of the sensor. Instance 1: 0 – 0x7FFF counts Instance 3: 0 – 0x7FFF counts

Status – Attribute 7

Bit Definition 0 High Alarm Exception: 0 = cleared; 1 = set 1 Low Alarm Exception: 0 = cleared; 1 = set 2 High Warning Exception: 0 = cleared; 1 = set 3 Low Warning Exception: 0 = cleared; 1 = set 4 0 – Reserved 5 0 – Reserved 6 0 – Reserved 7 0 – Reserved

Full Scale – Attribute 10

The value of attribute Value corresponding to the Full Scale calibrated measurement of the sensor. Instance 1: 100%FS = 24,576 counts (0x6000) Instance 2: 100%FS = 24,576 counts (0x6000)

Alarm Trip Point High Attribute 17

Determines the Value above which an Alarm condition will occur.

27

Alarm Trip Point Low – Attribute 18 Determines the Value below which an Alarm condition will occur.

Alarm Settling Time – Attribute 20

The time that Value must exceed the Trip Point before the exception condition is generated.

Warning Trip Point High – Attribute 21

Determines the Value above which an Warning condition will occur.

Warning Trip Point Low – Attribute 22 Determines the Value below which an Warning condition will occur.

Warning Settling Time – Attribute 24

The time that Value must exceed the Trip Point before the exception condition is generated. Auto Zero Status – Attribute 28

0 = Device is not in process of nulling. 1 = Device in process of nulling.

Gas Calibration Object Instance – Attribute 35

Indicated which S-Gas Calibration object instance is active for this object.

Flow Totalizer – Attribute 95 (Instance 1 ONLY) Total Gas flowed through the device since this value was last set to zero.

Flow Hours – Attribute 96(Instance 1 ONLY) Total time device has been powered and flowing gas since this value was last set to zero.

28

S - Temperature Sensor Object Class Code: 100 (0x64) Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 1 2 Get Max Instance UINT 3 6 Get Max Class Attribute ID UINT 7 7 Get Max Instance Attribute ID UINT 110 Instance 1 Attributes, Temperature Attr Access NV Name Type Value 3 Get/Set NV Data Type USINT 0xC3 = INT

0xCA = REAL 4 Get/Set NV Data Units ENGUNITS 0x1001 = counts

0x1200= degC 0x1201= deg F 0x1202= Kelvin

5 Get V Reading Valid BOOL 0 = invalid 1 = valid

6 Get V Value (See Data Type)

See Below

7 Get V Status BYTE See Below 8 Get/Set NV Alarm Enable BOOL 0 = disabled

1 = enabled 9 Get/Set NV Warning Enable BOOL 0 = disabled

1 = enabled 10 Get NV Full Scale (See Data

Type) See Below

17 Get/Set NV Alarm Trip Point High (See Data Type)

See Below

18 Get/Set NV Alarm Trip Point Low (See Data Type)

See Below

20 Get/Set NV Alarm Settling Time UINT See Below 21 Get/Set NV Warning Trip Point

High (See Data Type)

See Below


(See Data Type)

See Below

24 Get/Set NV Warning Settling Time UINT See Below

29

Attr Access NV Name Type Value 99 Get NV Subclass UINT 1 = Flow

Diagnostics 110 Get NV Full Scale STRUCT of

REAL UINT

REAL = Amount UINT = Units

Common Services Service Code Class Instance Service Name 14 (0x0E) Yes Yes Get_Attribute_Single 16 (0x10) No Yes Set_Attribute_Single Value – Attribute 6

The corrected, converted, calibrated final value of the sensor. Instance 1: 0 – 0x7FFF counts



Full Scale – Attribute 10 The value of attribute Value corresponding to the Full Scale calibrated measurement of the sensor. Instance 1: 100%FS = 24,576 counts (0x6000)

30

Alarm Trip Point High Attribute 17 Determines the Value above which an Alarm condition will occur.

Alarm Trip Point Low – Attribute 18 Determines the Value below which an Alarm condition will occur.

Alarm Settling Time – Attribute 20


Warning Trip Point High – Attribute 21

Determines the Value above which an Warning condition will occur.

Warning Trip Point Low – Attribute 22 Determines the Value below which an Warning condition will occur.

Warning Settling Time – Attribute 24


31

S-Analog Actuator Object Class Code: 50 (0x32) ( Note : For Devices configured as “MFM” type, this object does not exist ) Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 1 2 Get Max Instance UINT 1 6 Get Max Class Attribute ID UINT 7 7 Get Max Instance Attribute ID UINT 22 Instance 1 Attributes Attr Access NV Name Type Value 3 Get/Set NV Data Type USINT 0xC3=INT,

0xCA=REAL 4 Get/Set NV Data Units ENGUNITS 0x1001 = counts

0x1007 = % Full Scale 5 Get/Set V Override USINT See Below 6 Get/Set V Value (See Data Type) See Below 7 Get V Status BYTE See Below 8 Get/Set NV Alarm Enable BOOL 0 = disable

1 = enable 9 Get/Set NV Warning

Enable BOOL 0 = disable

1 = enable 15 Get/Set NV Alarm Trip

Point High (See Data Type) Determines the value

above which an alarm condition will occur.

16 Get/Set NV Alarm Trip Point Low

(See Data Type) Determines the value below which an alarm condition will occur.

18 Get/Set NV Warning Trip Point High

(See Data Type) Determines the value above which n warning condition will occur.


(See Data Type) Determines the value below which a warning condition will occur.

21 Get/Set NV Safe State USINT See Below 22 Get/Set NV Safe Value (See Data Type) See Below Common Services

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Service Code Class Instance Service Name 14 (0x0E) Yes Yes Get_Attribute_Single 16 (0x10) No Yes Set_Attribute_Single Override – Attribute 5

0 = Normal 1 = Off/Closed 2 = On/Open 3 = Hold 4 = Safe State

Value – Attribute 6

The uncorrected value sent to the analog output for the valve.



Safe State – Attribute 21

0 = Zero / Off / Closed 1 = Full Scale / On / Open 2 = Hold Last Value 3 = Use Safe Value

Safe Value – Attribute 22

The Value to be used for Safe State = Safe Value.

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S-Single Stage Controller Object Class Code: 51 (0x33) ( Note : For Devices configured as “MFM” type, this object does not exist ) Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 1 2 Get Max Instance UINT 1 6 Get Max Class Attribute ID UINT 7 7 Get Max Instance Attribute ID UINT 104 Instance 1 Attributes Attr Access NV Name Type Value 3 Get/Set NV Data Type USINT 0xC3=INT,

0xCA=REAL 4 Get/Set NV Data Units ENGUNITS 0x1001 = counts

0x1007 = %FS 0x1400 = sccm 0x1401 = slm

6 Get/Set V Setpoint (See Data Type) See Below 10 Get V Status BYTE See Below 11 Get/Set NV Alarm Enable BOOL 0 = disable

1 = enable 12 Get/Set NV Warning

Enable BOOL 0 = disable

1 = enable 13 Get/Set NV Alarm Settling

Time UINT Number of

Milliseconds allowed for the control-loop to settle to within the error band.

14 Get/Set NV Alarm Error Band

(See Data Type) The amount by which the Setpoint must equal the Process Variable.

15 Get/Set NV Warning Settling Time

UINT Number of Milliseconds allowed for the control-loop to settle to within the error band.

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Attr Access NV Name Type Value 16 Get/Set NV Warning Error

Band (See Data Type) The amount by which

the Setpoint must equal the Process Variable.

19 Get/Set NV Ramp Rate UDINT See Below 101 Get/Set NV Operating

Pressure REAL See Below

104 Get/Set NV Ramp Rate NV/V Storage

BOOL See Below

Common Services Service Code Class Instance Service Name 14 (0x0E) Yes Yes Get_Attribute_Single 16 (0x10) No Yes Set_Attribute_Single Setpoint – Attribute 6

The Setpoint to which the process variable will be controlled. 100 % full scale means 24,567 counts (0x6000). If the device receives a setpoint outside of the 0 to 0x7FFF range, the MFC should interpret this the same as receiving a zero setpoint. Read flow output above 100%, but settable only to 0-100%. Any setpoint over 100% will return error and hold last value. If the setpoint is <1.5% of full scale, the setpoint will be interpreted as 0.


Bit Definition 0 Alarm Exception: 0 = cleared; 1 = set 1 Warning Exception: 0 = cleared; 1 = set 2 0 – Reserved 3 0 – Reserved 4 0 – Reserved 5 0 – Reserved 6 0 – Reserved 7 0 – Reserved

Ramp Rate – Attribute 19

Time in msec to reach the set point. The range for this attribute is 1000 < x < 32767. 0 disables the ramp rate.

35

Operating Pressure – Attribute 101 The Upstream Pressure the MFC is running at.

Ramp Rate NV/V storage – Attribute 104 This will set the ramp rate storage settings to Non-Volatile or Volatile. 0 = Attribute 19 is Non-volatile 1 = Attribute 19 is Volatile

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S-Gas Calibration Object Class Code: 52 (0x34) Class Attributes Attribute Access Name Type Value 1 Get Revision UINT 1 2 Get Max Instance UINT 32 6 Get Max Class Attribute ID UINT 171 7 Get Max Instance Attribute ID UINT 103 102 Get MG/MR Configuration

Status USINT 0 = Inactive

(default) 1 = Active 2 = Fault

170 Get Bin ID INT See Below 171 Get Gas Table Revision UINT See Below Instance 1…32 Attributes Attr Access

NV Name Type Value

3 Get NV Gas Standard Number UINT See Below 4 Get NV Valid Sensor Instance UINT 1 5 Get NV Gas Symbol SHORT STRING See Below 6 Get NV Full Scale STRUCT of

Amount REAL See Below

Units UINT 0x1400 = sccm 0x1401 = slm

7 Get NV Additional Scaler REAL See Below 8 Get NV Calibration Date DATE See Below 9 Get NV Calibration Gas Number UINT See Below 95 Get NV Calibration Pressure REAL See Below 96 Get NV Calibration Temperature REAL See Below 99 Get NV Subclass UINT 1 = Standard T & P 101 Get NV Number of Cal Points USINT 0 to 64. 102 Get NV Min Full Scale REAL See Below 103 Get NV Max Full Scale REAL See Below Common Services

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Service Code Class Instance Service Name 14 (0x0E) Yes Yes Get_Attribute_Single Object-Specific Services Service Code Class Instance Service Name 75 (0x4B) Yes No Get_All_Instances Get All Instances Response: Parameter Data Type Description Size of List UINT Specifies the number of elements in the array. List of Gas Calibrations

ARRAY of Supported List

STRUCT of UINT S-Gas Calibration Object Instance ID UINT Gas Standard Number UINT Valid Sensor Instance

Vendor-Specific Services Service Code Class Instance Service Name 50 (0x32) Yes No Get Coefficient 51 (0x33) Yes No Set Coefficient 52 (0x34) Yes No Get Gas String 53 (0x35) Yes No Set Gas String 70 (0x46) No Yes Configuration 71 (0x47) No Yes Delete Gas 72 (0x48) No Yes Re-Range Configuration Request: Parameter Data Type Description Data Gas Std. Num MR FS Value (in sccm)

STRUCT of UINT UINT

Takes gas standard number and MR full scale value to create gas.

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The Configuration service is not allowed on Instance 32. Delete Gas Request:

The data portion of this service is NULL. Service not allowed on Instance 32 Re-Range Request: Parameter Data Type Description Full Scale Amount

UINT Re-Range device to new full scale in sccm.

Bin ID – Class Attribute 170

The bin ID shall identify the specific “bin” that defines the physical configuration of the MFC. The purpose of this attribute is to uniquely identify the physical configuration of the MFC and thus allow our software to determine the range for which the MFC can be configured. Although the number of bins to cover all needed ranges is dependent on the supplier, the following numbering convention should be used:

1 = smallest flow physical configuration 2= Next smallest flow physical configuration etc.

Gas Table Revision – Class Attribute 171

Starts at 1 and increases with later revisions in whole number increments. Gas Standard Number – Attribute 3 0 = No gas type specified Gas Symbol – Attribute 5 Character string representing gas name or symbol of gas name. 20 characters max. Full Scale – Attribute 6

Amount = The amount, Mass Flow, corresponding to the Full Scale of the associated S-Analog Sensor Object.

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Additional Scaler – Attribute 7

Correction for a gas other than the type identified for the object instance by attribute 3. Calibration Date – Attribute 8

The date this instance was last calibrated. This value is the number of days since 01/01/1972.

Calibration Gas Number – Attribute 9

The gas number used to calibrate the object instance.

Calibration Pressure – Attribute 95

The gas pressure in KiloPascal used during calibration.

Calibration Temperature – Attribute 96

The gas temperature in Degrees C used during calibration.

Min Full Scale – Attribute 102

This is the minimum value the Full Scale attribute can be set to. The data units of this attribute is always sccm.

Max Full Scale – Attribute 103

This is the maximum value the Full Scale attribute can be set to. The data units of this attribute is always sccm.

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