Furnaces and wet benches

Savitha P

Boron Diff-

off hrs

Boron- non offhrs

Dry-ox- off

hrs

dry ox- non

off hrs

M An-

neal- off hrs

MA- non

off hrs

pyro ox- of-

fice hrs

pyro- non

office hrs

Phos Diff- office hrs

Phos- non

office hrs

LP-CVD SiN

(tube 3)- of-fice hrs

LP-CVD SiN- non

office hrs

Used 24 0 NaN 40 0 NaN 28 0 NaN 64 0 NaN 40 0 NaN 16 0

Not Used 116 0 NaN 100 0 NaN 136 0 NaN 76 0 NaN 100 0 NaN 132 0

Downtime 0 0 NaN 0 0 NaN 0 0 NaN 0 0 NaN 0 0 NaN 0 0

Unavail-able

40 450 NaN 40 450 NaN 16 450 NaN 40 450 NaN 40 450 NaN 32 450

Total 180 450 NaN 180 450 NaN 180 450 NaN 180 450 NaN 180 450 NaN 180 450

25

75

125

175

225

275

325

375

425

475

Equipment Utilization Chart

Tota

l hrs

• Annealsys new RTP: facilities hook up over, waiting for gases hook up, what about the pump?

• K-space Ultra scan: Basic training over– Rough comparison with Dektak XTA , results similar– Need some software patches to be fixed

• Need to schedule annual maintenance for the furnace– One week each for LPCVD and atmospheric furnaces– Plan includes dismantling/cleaning of tubes, PCW lines gas

injectors and scrubbers• Problems with new material entry

– Protocol for bringing in substrates other than Si and glass?• No information on order status/delivery with MITO076

Furnaces & Wet benches - update

Thank you