Fringe 2009

Wolfgang Osten · Malgorzata KujawinskaEditors

Fringe 2009

6th International Workshop on AdvancedOptical Metrology

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EditorsProfessor Dr. Wolfgang OstenInstitut fur Technische OptikUniversitat StuttgartPfaffenwaldring 9D - 70569 Stuttgartosten@ito.uni-stuttgart.de

ISBN 978-3-642-03050-5 e-ISBN 978-3-642-03051-2DOI 10.1007/978-3-642-03051-2Springer Heidelberg Dordrecht London New York

Library of Congress Control Number: 2009935339

c© Springer-Verlag Berlin Heidelberg 2009This work is subject to copyright. All rights are reserved, whether the whole or part of the material isconcerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting,reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publicationor parts thereof is permitted only under the provisions of the German Copyright Law of September 9,1965, in its current version, and permission for use must always be obtained from Springer. Violationsare liable to prosecution under the German Copyright Law.The use of general descriptive names, registered names, trademarks, etc. in this publication does notimply, even in the absence of a specific statement, that such names are exempt from the relevant protectivelaws and regulations and therefore free for general use.

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Professor Dr. Malgorzata KujawinskaInstitute of Micromechanics and PhotonicsFaculty of MechatronicsWarsaw University of TechnologySw. Andrzeja Boboji St. 802-525 WarsawPolandm.kujawinska@mchtr.pw.edu.pl

In Memory of Dr.-Ing. Hans Rottenkolber

(* 12.05.1937 - † 07.03.2008)

Conference Committee

Organizers and Conference Chairs:

Wolfgang Osten (Germany) Malgorzata Kujawinska (Poland)

Program Committee:

Armando Albertazzi (Brazil) Oleg Angelsky (Ukraine) Anand Asundi (Singapore) Klaus Beckstette (Germany) Harald Bosse (Germany) Bernd Dörband (Germany) Pietro Ferraro (Italy) Kay Gastinger (Norway) Marc Georges (Belgium) Christophe Gorecki (France) Ulf Griesmann (USA) Peter J. de Groot (USA) Igor Gurov (Russia) Xiaoyuan He (China) John Huntley (UK) Gerd Jäger (Germany) Leszek Jaroszewicz (Poland) Bahram Javidi (USA) Ricarda Kafka (Germany) Guillermo Kaufmann (Argentina) Richard Kowarschik (Germany) Peter Lehmann (Germany) Fernando Mendoza (Mexico) Andrew Moore (UK) Yoshiharu Morimoto (Japan) Thomas J. Naughton (Ireland) Xiang Peng (China)

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Ryszard J. Pryputniewicz (USA) Eduard Reithmeier (Germany) Joanna Schmit (USA) Robert Schmitt (Germany) Jörg Seewig (Germany) Chandra Shakher (India) Mitsuo Takeda (Japan) Ralph P. Tatam (UK) Hugo Thienpont (Belgium) Vivi Tornari (Greece) Michael Totzeck (Germany) Satoru Toyooka (Japan) James D. Trolinger (USA) Rainer Tutsch (Germany) Elmar E. Wagner (Germany) Albert Weckenmann (Germany) Jacob Woisetschläger (Austria) James C. Wyant (USA) Ichirou Yamaguchi (Japan)

Honorary Chairs: Werner Jüptner and Hans Tiziani

Session Chairs:

Session 1: M. Kujawinska (Poland) P. de Groot (USA) E. Reithmeier (Germany) M. Georges (Belgium) Session 2: J. Huntley (GB) Th. Kreis (Germany) C. Koliopoulos (USA) Session 3: C. Gorecki (France) A. Asundi (Singapore) Session 4: P. Ferraro (Italy) Session 5: W. Jüptner (Germany) H. Tiziani (Germany)

Conference Committee

Preface

21 years ago it was a joint idea with Hans Rottenkolber to organize a workshop dedicated to the discussion of the latest results in the automatic processing of fringe patterns. This idea was promoted by the insight that automatic and high precision phase measurement techniques will play a key role in all future industrial and scientific applications of optical metrology. A couple of months later more than 50 specialists from East and West met in East Berlin, the capital of the former GDR, to spend 3 days with the discussion of new principles of fringe processing. In the stimulating atmoshere the idea was born to repeat the workshop and to organize the meeting in an olympic schedule. And thus meanwhile 20 years have been passed and we have today Fringe number six. However, such a workshop takes place in a dynamic environment. Therefore the main topics of the previous events were always adapted to the most interesting subjects of the new period. In 1993 the workshop took place in Bremen and was dedicated to new principles of optical shape measurement, setup calibration, phase unwrapping and nondestructive testing, while in 1997 new approaches in multi-sensor metrology, active measurement strategies and hybrid processing technologies played a central role. 2001, the first meeting in the 21st century, was focused to optical methods for micromeasurements, hybrid measurement technologies and new sensor solutions for industrial inspection. In 2005 the fifth workshop was organized in Stuttgart, the capital of the state of Baden-Würthemberg and the centre of a region with a long and remarkable tradition in machine construction, vehicle manufacturing and optics. Thus after Berlin 1989, Bremen 1993, 1997 and 2001, Stuttgart was the third Fringe city where international experts met each other to share new ideas and concepts in optical metrology. And this will be continued in 2009.

This volume contains the papers presented during FRINGE 2009. The

focus of this meeting is especially directed to digital wavefront engineering, resolution enhanced technologies, 4D methods addressing applications from macro to nano considering dynamic changes, sensor fusion and new advances in the unification of modeling, simulation and experiment. Since optical metrology becomes more and more important for industrial inspection, sophisticated sensor systems and their applications for the solution of challenging measurement problems are chosen again as one of the central topics of the workshop. This extended scope was honored by a great response on our call for papers. Scientists from all

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around the world offered more than 150 papers. This enormous response demanded a strong revision of the papers to select the best out of the overwhelming number of excellent papers. The strong limitation of the number of papers which can be presented orally and discussed effectively during a workshop without holding parallel sessions was again an impotant orientation.

The papers presented in this workshop are summarized under 5 topics: 1. New Methods and Tools for Data Acquisition and Processing 2. Application Enhanced Technologies 3. 4D Optical Metrology over a Large Scale Range 4. Hybrid Measurement Techniques 5. New Optical Sensors and Measurement Systems

As in the former workshops, each topic is introduced by an acknowledged expert who gives an extensive overview and a report of the state of the art. The classification of all submitted papers into these topics was again a difficult job which often required compromises. We hope that our decisions will be accepted by the audience. On this occasion we would like to express our deep thanks to the international program committee for helping us to find a good solution in every situation.

The editors would like to express their thanks to all the authors who

spent a lot of time and effort in the preparation of their papers. Our appreciation also goes to Eva Hestermann-Beyerle and Birgit Kollmar-Thoni from Springer Heidelberg for providing excellent conditions for the publication. Our deep thanks is directed to the members of the ITO staff. The continuous help given by Katharina Bosse-Mettler, Katja Costantino, Gabriele Grosshans, Heiko Bieger, Valeriano Ferreras Paz, Erich Steinbeißer and Michael Warber was the basis for making a successful FRINGE 2009. Finally, our special thanks and appreciation goes to all friends and colleagues for sharing with us again the spirit of the Fringe workshops.

Looking forward to FRINGE 2013.

Stuttgart and Warsaw, September 2009

Wolfgang Osten and Malgorzata Kujawinska

Preface

Table of Contents

Conference Committee ..........................................................................VII

Preface .................................................................................................... IX

Key Note

Holography in the '60s and '70s – A View from the Fringes..................2 C. M. Vest

Topic 1: New Methods and Tools for Data Acquisition and Processing

Coherence Holography: A Thought on Synthesis and Analysis of Optical Coherence Fields (invited paper) ..............................................14 M. Takeda, W. Wang, D. N. Naik

The Polarization Approach in Measuring Correlation Properties of Optical Fields ...........................................................................................22 O. V. Angelsky, C. Y. Zenkova, N. V. Gorodyns’ka

Real-time Coherence Holography ..........................................................28 D. N. Naik, T. Ezawa, Y. Miyamoto, M. Takeda

Coherence and Correlation in Digital Holography...............................34 I. Yamaguchi

Analysis of fringe formation and localization in optical interferometry using optical coherence............................................................................41 C. S. Narayanamurthy

Quantitative Phase Imaging in Microscopy (invited paper) ................50 C. JR. Sheppard, S. S. Kou, S. Mehta

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Comparison and unification of speckle-based phase retrieval and holography with applications in phasefront alignment and recognition ................................................................................................ 57 P. F. Almoro, G. Pedrini, F. Zhang, A. M. S. Maallo, A. Anand,

High Precision Object Phase Reconstruction with Modified Phase Retrieval.................................................................................................... 63 S. Förster, H. Gross

Phase retrieval with an LCoS display: characterization and application ................................................................................................ 72 C. Kohler, F. Zhang, W. Osten

Digital dynamic-fringe pattern processing without frequency carrier, using wideband phase-shifting algorithms. ........................................... 78 J. C. Estrada, F. Mendoza-Santoyo, M. de la Torre, T. Saucedo

Error-compensating phase-shifting Fizeau interferometry with a wavelength-tunable laser diode .............................................................. 87 Y. Ishii, S. Idoi, H. Fujita, H. Funamizu

Lateral Shearing Interferometer based on a Spatial Light Modulator in the Fourier Plane ................................................................................. 93 C. Falldorf, R. Klattenhoff, A. Gesierich, C. v. Kopylow, R. Bergmann

Digital phase shifting holography and holographic interferometry.... 99 M. Kujawińska, N. Kumar, A. Michalkiewicz

Fourier-transform method with high accuracy by use of iterative technique narrowing the spectra of a fringe pattern.......................... 106 S. Nakayama, H. Toba, N. Fujiwara, T. Gemma, M. Takeda

Fringe pattern processing using a new adaptive and steereable asynchronous algorithm........................................................................ 112 J.A. Quiroga, J.A. Gómez-Pedrero, M. Servín

Synthetic Aperture Digital Holography (invited paper) .................... 118 J. Rosen, B. Katz

P. N. Gundu, W. Wang, A. Asundi, W. Osten, S. G. Hanson

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A new application of the Delaunay triangulation: The processing of speckle interferometry signals ..............................................................123 S. Equis, P. Jacquot

Phase analysis of interference signal with optical Hilbert transform based on orthogonal linear polarization phase shifting......................132 V. D. Madjarova, H. Kadono, N. Kurita

Digital Fourier-transform processing for analysis of speckle photographs............................................................................................138 K. A. Stetson

Wavefront evaluation in phase shifting interferometry based on recurrence fringe processing with 3D prediction................................142 I. Gurov, A. Karpets, E. Vorobeva

White-light fringe analysis with low-cost CCD camera .....................149 Z. Buchta, P. Jedlička, M. Matějka, V. Kolařík, B. Mikel, J. Lazar, O. íp

Design and assessment of Differential Phase-Shifting Algorithms by means of their Fourier representation .................................................153 M. Miranda, B. V. Dorrío

tic Twin-Image and Zero-Order Term Suppression in Digital Holographic Microscopy......................160 N. Pavillon, C. S. Seelamantula, M. Unser, C. Depeursinge

Modified two-step phase-shifting algorithm: analysis, demonstration, and application.......................................................................................164 X.-F. Meng, X. Peng, L.-Z. Cai, A-M. Li, J.-P. Guo, Y.-R. Wang

The Used of Reference Wave for Diagnostics of Phase Singularities............................................................................................170 O. V. Angelsky, A. P. Maksimyak, P. P. Maksimyak

New convolution algorithms for reconstructing extended objects encoded in digitally recorded holograms.............................................174 P. Picart, P. Tankam, D. Mounier, Z. Peng, J.-C. Li

Reconstruction of noisy measured sharp edges at thin sheet metal components .............................................................................................180 J. Weickmann, A. Liedl, P.-F. Brenner, A. Weckenmann

A Nonlinear Technique for Automa

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Reduction of speckles in digital holographic interferometry............. 184 S. Hertwig, H. Babovsky, A. Kiessling, R. Kowarschik

Normalization and denoising in a multi-source and multi-camera profilometric system .............................................................................. 189 E. Stoykova, A. Gotchev, V. Sainov

Automated Phase Map Referencing Against Historic Phase Map Data ......................................................................................................... 193 R. M. Groves, D. Derauw, C. Thizy, I. Alexeenko, W. Osten, M. Georges, V. Tornari

Numerical multiplexing and de-multiplexing techniques for efficient storage and transmission of digital holographic information............ 197 M. Paturzo, P. Memmolo, A. Tulino, A. Finizio, L. Miccio, P. Ferraro

Fringe Pattern Normalization Using Bidimensional Empirical Mode Decomposition and the Hilbert Transform ......................................... 201 M. B. Bernini, A. Federico, G. H. Kaufmann

Complementary Filtering Approach to Enhance the Optical Reconstruction of Holograms from a Spatial Light Modulator ........ 205 M. Agour, C. Falldorf, C. von Kopylow

Combination of Phase Stepping and Fringe Tracking to Evaluate Strain from Noisy DSPI Data ............................................................... 211 E. Hack

Influence of filter operators on 3D coordinate calculation in fringe projection systems.................................................................................. 215 C. Bräuer-Burchardt, M. Heinze, C. Munkelt, P. Kühmstedt, G. Notni

Polarization interferometry of singular structure of organic crystal polarization properties. ......................................................................... 221 S.B. Yermolenko, M.P. Gorsky, Y. A. Ushenko, A.G. Pridiy

Zero order interferometry technique for measuring the Lyapunov’s maximal index in optical fields ............................................................. 225 M. S. Gavrylyak, A. P. Maksimyak, P. P. Maksimyak

Orientation-selective spiral-phase contrast microscopy..................... 230 G. Situ, M. Warber, G. Pedrini, W. Osten

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Topic 2: Application Enhanced Technologies

Model-based white light interference microscopy for metrology of transparent film stacks and optically-unresolved structures (invited paper) ......................................................................................................236 P. de Groot, X. Colonna de Lega, J. Liesener

Limitations and Optimization of Low-coherence Interferometry for High Precision Microscopic Form Measurement ...............................244 P. Lehmann, J. Niehues

Instantaneous Wavelength Detection by a Whole-Field k-space Method ....................................................................................................250 A. Davila, J. M. Huntley, P. D. Ruiz, J. M. Coupland

Limiting aspects in length measurements by interferometry ............256 R. Schödel

Aspects of design and the characterization of a high resolution heterodyne displacement interferometer.............................................263 C. Weichert, J. Flügge, R. Köning, H. Bosse, R. Tutsch

The femtosecond optical synthesizer as a tool for determination of the refractive index of air in ultra-precise measurement of lengths........269 O. Cip, R. Smid, B. Mikel, M. Cizek, B. Ruzicka, J. Lazar

Digital holographic microscopy with a simultaneous phase-shifting interferometer for measuring the angular spectrum generated by micro-optical structures (invited paper)..............................................275 B. Lee, J. Hahn, Y. Lim, H. Kim, E.-H. Kim

Resolution enhancement in digital holography by a two-dimensional electro-optically tunable phase grating................................................283 M. Paturzo, A. Finizio, S. De Nicola, P. Ferraro

Resolution improvement in lensless digital holographic interferometry ........................................................................................289 D. Claus, M. Fritzsche, B. Timmerman, P. Bryanston-Cross

Digital holography catching up with analogue holography both in resolution and in field of view with a bottom-line camera .................298 F. Gyímesi, V. Borbély, Z. Füzessy, B. Ráczkevi

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Fresnel and Fourier digital holography architectures: a comparison. ......................................................................................... 304 D. P. Kelly, D. S. Monaghan, N. Pandey, B. M. Hennelly

The last Word on Three-Flat Calibration – are we there yet? ......... 309 J. Burke, B. Oreb

A New Flatness Reference Measurement System Based on Deflectometry and Difference Deflectometry...................................... 318 G. Ehret, M. Schulz, M. Stavridis, C. Elster

Quasi absolute Test for Aspherics via dual Wavefront Holograms and a radial Shear Position .......................................................................... 324 K. Mantel, I. Harder, E. Geist, N. Lindlein

Rapid and flexible measurement of precision aspheres ..................... 330 E. Garbusi, G. Baer, C. Pruss, W. Osten

Measurement of the shape of objects by the interferometry with two wavelengths ............................................................................................ 339 P. Pavlicek, G. Häusler

Recording-plane division multiplexing (RDM) in pulsed digital holography for optical metrology......................................................... 345 X. Wang, C. Yuan, H. Zhai

Identification of deformation components in TV holography and digital holography.................................................................................. 350 J. Kornis, R. Séfel

Extending the capabilities of the sphere interferometer of PTB by a stitching procedure ................................................................................ 354 G. Bartl, A. Nicolaus

Fringe contrast improving in low coherence interferometry by white light emitting diodes spectrum shaping ............................................... 358 A. Pakula, L. Salbut

Absolute testing of aspherics in transmitted light using an amplitude DOE......................................................................................................... 364 A. Berger, K. Mantel, I. Harder, N. Lindlein

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MEMS Calibration Standards for the Optical Measurement of Displacements.........................................................................................369 J. Gaspar, M. E. Schmidt, G. Pedrini, W. Osten, O. Paul

About the feasibility of nearfield-farfield transformers based on optical metamaterials ............................................................................375 S. Maisch, P. Schau, K. Frenner, W. Osten

Analogy of white-light interferometry and pulse shaping..................384 R. Berger, W. Osten

Topic 3: 4D Optical Metrology over a Large Scale Range

Nanomeasuring and Nanopositioning Engineering (invited paper)..390 G. Jäger, E. Manske, T. Hausotte, H.-J. Büchner

Reconstruction of Shape using Gradient Measuring Optical Systems....................................................................................................398 J. Seewig, T. Damm, J. Frasch, D. Kauven, S. Rau, J. Schnebele

Metrological SPM with positioning controlled by green light interferometry ........................................................................................405 J. Lazar, P. Klapetek, O. Číp, M. Čížek, J. Hrabina, M. Šerý

Measuring Shape and Surfaces down to the Nanometer and Nanosecond scales by Digital Holographic Microscopy .....................411 C. Depeursinge, I. Bergoënd, N. Pavillon, J. Kühn, T. Colomb,

Deflectometry: 3D-Metrology from Nanometer to Meter..................416 G. Häusler, M. C. Knauer, C. Faber, C. Richter, S. Peterhänsel,

3-D Sensing for Microstructures Using Dynamic DOEs ....................422 S. Dong, X. Peng, Y. Guan, A. Li, Y. Yin, J. Tian

Doppler phase-shift fringe analysis and digital holography using

T. Yatagai, D. Barada

F. Montfort, E. Cuche, Y. Emery

C. Kranitzky, K. Veit

high-speed digital camera .....................................................................428

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Shape and Deformation Measurement of Moving Object by Sampling Moiré Method......................................................................................... 433 Y. Morimoto, M. Fujigaki, A. Masaya, K. Shimo

New Interferometry Tools for AeroOptics .......................................... 439 J. Trolinger, V. Markov

Dynamic Fizeau Interferometers.......................................................... 445 B. Kimbrough, B. Medower, J. Millerd

Surface contouring of vibrating objects using quadrature transform................................................................................................ 455 R. Legarda-Saenz, R. Rodriguez-Vera, J. A. Rayas

Development and Application of a 10 Hz Nd:YAG Double Pulse Laser for Vibration Measurements with Double Pulse ESPI....................... 461 E. H. Nösekabel, W. Honsberg, R. Kelnberger

Combining novel fringe analysis and photogrammetry for industrial shape measurement ............................................................................... 467 Y. R. Huddart, J. D. R. Valera, A. J. Moore

Digital holographic interferometry for deformation measurement by means of an acoustical device ............................................................... 472 H. Fischer, R. Tutsch

Pump-probe interference microscope observation for femtosecond-laser induced phenomena...................................................................... 477 Y. Hayasaki, A. Takita, M. Isaka

Three-dimensional shape measurement of dynamic objects with spatially isolated surfaces...................................................................... 481 Q. Zhang, X. Su, L. Xiang

Optical design of a DOE-based laser interferometer for inspection of MEMS/MOEMS .................................................................................... 485 M. Józwik, M. Kujawińska, U. D. Zeitner, K.H. Haugholt

Time Resolved High Resolution Shape and Colour Measurement

Z. Zhang, D. P. Towers, C. E. Towers using Fringe Projection ........................................................................ 489

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Dynamic 3-D shape measurement techniques with marked fringes tracking...................................................................................................493 X. Su, Q. Zhang, Y. Xiao, L. Xiang

Optical measurement and color map projection system to highlight geometrical features on free form surfaces .........................................497 T. L. Pinto, A. V. Fantin, C. A. Carvalho, A. Albertazzi

Digital holographic recording of large scale objects for metrology and display .....................................................................................................501 T. Meeser, S. Huferath-von Lüpke, T. Kreis

Multiwavelength laser interferometry .................................................505 B. Mikel, M. Cizek, Z. Buchta, J. Lazar, O. Cip

Accurate and fast three-dimensional imaging with use of fringe projection profilometry .........................................................................509 A. Li, X. Peng, Y. Yin, Y. Guan, X. Liu

3D vibration analysis of granular materials with two-color digital Fresnel holography ................................................................................513 P. Tankam, P. Picart, D. Mounier, J.-P. Boileau, V. Tournat, V. Gusev

System for transient spatio-temporal (4D) vibration imaging and

J. M. Kilpatrick, A. Apostol, V. Markov

Microelements vibration measurement using quasi-heterodyning method and smart-pixel camera..........................................................523 A. Styk, M. Kujawińska, P. Lambelet, A. Røyset, S. Beer

Dynamic multipoint vibrometry using spatial light modulators .......528 F. Schaal, M. Warber, C. Rembe, T. Haist, W. Osten

Topic 4: Hybrid Measurement Techniques

Optoelectronic method for device characterization and experimental validation of operational performance (invited paper) ......................534 R. J. Pryputniewicz

non-destructive inspection ....................................................................519

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Computational inverse holographic imaging: toward perfect reconstruction of wavefield distributions ............................................ 542 V. Katkovnik, A. Migukin, J. Astola

Cooperative Sensor Approach for holistic geometrical Measurement Tasks on Cutting Tools.......................................................................... 550 A. Weckenmann, L. Shaw

View Planning for 3D Reconstruction using Time-of-Flight Camera Data as a-priori Information ................................................................ 556 C. Munkelt, M. Trummer, P. Kuehmstedt, J. Denzler, G. Notni

Stereo vision based approach for extracting features from digital holograms ............................................................................................... 562 T. Pitkäaho, T. J. Naughton

Flexible Combination of Optical Metrology Strategies for the Automated Assembly of Solid State Lasers ......................................... 568 R. Schmitt, A. Pavim

A Numerical Simulation Benchmark of Tilt Scanning Interferometry for 3D Metrology.................................................................................... 572 G. E. Galizzi, P. D. Ruiz, G. H. Kaufmann

A virtual telecentric fringe projection system..................................... 576 K. Haskamp, M. Kästner, E. Reithmeier

Inspection of an extended surface by an active 3D multiresolution technique................................................................................................. 580 J. Vargas, R. Restrepo, J. A. Quiroga, T. Belenguer

Automated Multiscale Measurement System for micro optical elements .................................................................................................. 584 W. Lyda, A. Burla, T. Haist, J. Zimmermann, W. Osten, O. Sawodny

Simulation based sensitivity analysis and optimization of Scatterometry measurements for future semiconductor technology nodes ....................................................................................................... 592 V. Ferreras Paz, T. Schuster, K. Frenner, W. Osten, L. Sziksai, M. Mört, C. Hohle, H. Bloess

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Electronic Speckle Pattern Interferometry at Long Infrared Wavelengths. Scattering Requirements ...............................................596 J.-F. Vandenrijt, C. Thizy, I. Alexeenko, I. Jorge, I. López, I. S. de Ocáriz, G. Pedrini, W. Osten, M. Georges

Topic 5: New Optical Sensors and Measurement Systems

Novel interferometric measurement systems for the characterization of micro-optics (invited paper) .............................................................602 H. Ottevaere, H. Thienpont

Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS............................................611 K. Gastinger, K. H. Haugholt, A. Røyset, J. Albero, U. Zeitner, C. Gorecki

Looking for a new generation of MEMS-type confocal microscopes ............................................................................................618 C. Gorecki, S. Bargiel, K. Laszczyk, J. Albero, J. Krezel, M. Kujawinska

Radial in-plane achromatic digital speckle pattern interferometer using an axis-symmetrical diffractive optical element........................622 A. Albertazzi, M. R. Viotti, W. A. Kapp

Wavefront Sensor Design based on a Micro-Mirror Array for a High Dynamic Range Measurement at a High Lateral Resolution ............628 R. Schmitt, I. Jakobs, K. Vielhaber

Intellectual property in industry and academia: where interests merge? (invited paper) ..........................................................................634 N. Reingand, W. Osten

Moiré interferometer for surface mapping with liquid crystal grids.........................................................................................................648 J. A.N. Buytaert, J. J.J. Dirckx

High resolution tilt scanning interferometry system for full sensitivity depth-resolved displacement measurements in weakly scattering materials .................................................................................................656 B. S. H. Burlison, P. D. Ruiz, J. M. Huntley

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Multifunctional phase-stepping interferometer for measurement in real time .................................................................................................. 662 V. Sainov, E. Stoykova

A Wonderful World of Holography, Interferometry, and Optical Testing (honorary lecture) .................................................................... 670 J. C. Wyant

Multifunctional Encoding System for Assessment of Movable

V. Tornari, E. Bernikola, K. Hatziyannakis, W. Osten, R. M, Grooves,

Investigation of electronic PCB component with two-color digital holographic interferometry................................................................... 688 P. Tankam, D. Mounier, E. Moisson, P. Picart

Integrated Microinterferometric Sensor ............................................. 693 J. Krężel, M. Kujawińska

High Precision Measurement of plane-parallel Parts......................... 697 M. Fleischer, T. Gnausch, D. Supp, J. Becker

Lateral Shearing Interferometry with Simultaneous Detection of both Gradient Fields on a Common Detector Grid..................................... 701 V. Nercissian, N. Lindlein

Near infrared large aperture (24 inches) interferometer system development............................................................................................ 705 R. Zhu, L. Chen, Z. Gao, Y. He, Q. Wang, R. Guo, J. Li, S. Deng, J. Ma

Interior Geometry Inspection Using Rerouted Fringe Projection .... 709 O. Abo-Namous, M. Kästner, E. Reithmeier

A Cellular Force Microscopic System for Cell Mechanics Investigation ........................................................................................... 713 J. Fang, J. Y. Huang, C. Y. Xiong

Cultural Heritage .................................................................................. 680

M. Georges, T. Cedric, G. M. Hustinx, J. Rochet, E. Kouloumpi, M. Doulgeridis, T. Green, S. Hackney

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Candle flame analysis by digital three-wavelength holographic interferometry ........................................................................................717 J.-M. Desse, P. Picart, P. Tankam

Moiré fringe generation and phase shifting using a consumer product LCD projector........................................................................................721 J. J.J. Dirckx, J. A.N. Buytaert, S. A.M. Van der Jeught

Speckle velocimetry for high accuracy and multi-dimensional odometry.................................................................................................726 T. Charrett, R. P. Tatam

Determination of Refractive Index Changes in Biconical

K. A. Stasiewicz, R. Krajewski, M. Kujawińska, L. R. Jaroszewicz

Prosthodontic crown mechanical integrity study using Speckle Interferometry........................................................................................734 P. Slangen, S. Corn, M. Fages, F. J.G. Cuisinier

Monitoring of Drying Process of Paints using Lensless Fourier Transform Digital Holography.............................................................738 C. Shakher, G. Sheoran

On the Digital Holographic Interferometry of Fibrous Materials: Opto-Mechanical Properties of Fibres.................................................743 K. Yassien, M. Agour, C. von Kopylow

Geometrical camera calibration using lasers and diffractive optical elements ..................................................................................................747 M. Bauer, D. Grießbach, A. Hermerschmidt, S. Krüger, M. Scheele,

Measurement of the local displacement field produced by a microindentation using speckle interferometry. Its application to analyse coating adhesion .......................................................................751 A. E. Dolinko, G. H. Kaufmann

Space-Time Multiplexing in a Stereo-photogrammetry Setup ..........755 M. Große, R. Kowarschik

Optical Fiber Taper...............................................................................730

A. Schischmanow

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Interference Investigation of Concrete Structure and Dynamics During Hydration. ................................................................................. 760 M. P. Gorsky, P. P. Maksimyak, A. P. Maksimyak

Off-axis Reconstruction Method for Displacement and Strain Distribution Measurement with Phase-Shifting Digital Holography............................................................................................. 764 M. Fujigaki, K. Shiotani, R. Nishitani, A. Masaya, Y. Morimoto

“Flying Triangulation”: A motion-robust optical 3D sensor principle .................................................................................................. 768 S. Ettl, O. Arold, P. Vogt, O. Hybl, Z. Yang, W. Xie, G. Häusler

Laser direct writing of high resolution structures on curved substrates: evaluation of the writing precision ................................... 772 M. Häfner, R. Reichle, C. Pruss, W. Osten

Tutorial

Scanning Holography – A tutorial ....................................................... 778 T.-C. Poon

Appendix: New Products........................................................... 787

Table of Contents

KEY NOTE

Holography in the '60s and '70s –

A View from the Fringes

Given by

Charles M. Vest Washington DC

(USA)

Holography in the '60s and '70s – A View from the Fringes

Charles M. Vest National Academy of Engineering 500 Fifth Street, NW, Washington DC 20001 USA

1 Introduction

It is my hope that the following somewhat random walk through holography in the 1960s and 1970s as I experienced it will give you some sense of the early days of the field and some of the people who invented, discovered, and extended it.

My view of the early days of optical holography is literally and figuratively from the fringes. I came to Willow Run's Radar and Optics Lab to learn to unlock the quantitative information encoded in the fringes of holographic interferometry. My work was not at the heart of the fundamental field of holography, but it followed closely enough after the seminal work on off-axis holography that I was privileged to work with many of the pioneers and appreciate the environment that developed in their laboratory.

I believe I first learned about holography in the 1960s when Robert Powell presented a seminar in the University of Michigan's Department of Mechanical Engineering. At that time I was a graduate student in that department focusing on the thermal sciences, i.e. thermodynamics, heat transfer, and fluid mechanics. Powell described work going on in the Radar and Optics Laboratory. The Radar and Optics Lab was a largely defense-oriented laboratory that had been operated by the University of Michigan on the grounds of Detroit's Willow Run airport, which had been a major facility for producing bombers during World War II. After the war, Michigan leased space there for a nominal amount and established a laboratory focused primarily on missile technology and novel radar systems.

While I was a graduate student, the Radar and Optics Laboratory component of Willow Run was moved to the North Campus of the university in Ann Arbor. This enabled it to draw closer to the academic enterprise and engage more faculty and graduate students in its work. This

W. Osten, M. Kujawinska (eds.), Fringe 2009, DOI 10.1007/978-3-642-03051-2_1, © Springer-Verlag Berlin Heidelberg 2009

Key Note 3

was a very satisfactory arrangement, although it became a center of considerable controversy during the Viet Nam War because it was engaged in classified research for the military. It was the target of student protests, and protests were serious business on that campus. In fact, the key national anti-war movement, Students for a Democratic Society, or SDS, was founded at Michigan. I recall with a chuckle the consternation among administrators when a student employee of the Radar and Optics Laboratory who held a security clearance was discovered to be an active member of the SDS. But some things were more serious. The lab was bombed late one night. It was a huge explosion that ripped a gaping hole in a giant metal door in the delivery area. Investigators determined that a very large quantity of explosives had been used, but that those who planted the bomb were rather inept in its placement. This is fortunate because there was one student working very late in his office. Fortunately, he was uninjured.

Be that as it may, the seminar presented by Bob Powell reviewed the fundamental concept of formation of holograms and dramatically showed that interference fringes could be formed by juxtaposing light emanating from the actual light source with holographically reconstructed waves apparently emanating from an image of the same source. Presumably this work was largely that reported in the seminal Optical Society of America paper by Karl Stetson and Robert Powell.

I also attended a major press and public briefing on the new field of three-dimensional holographic images presented by Emmett Leith and Juris Upatnieks in Michigan's Rackham Graduate School Building. The impact on the audience was very strong. Not only was the three-dimensional imagery amazing, but lasers were sufficiently new that many attendees had never seen one before. After the briefing, several now-famous holograms, such as that of the model train, were on display. This was an amazing event, and several of the images subsequently became famous in large part due to the outstanding images of them that the great scientific photographer Fritz Goro published in Life magazine.

Later, in 1968, I was in the final stages of my Ph.D. dissertation work on a problem in hydrodynamic stability of natural convection flows when I decided to accept an offer to become an assistant professor of mechanical engineering at the University of Michigan. This work, which was mostly theoretical, was done under the supervision of an excellent mentor, Professor Vedat Arpaci. Because I would be joining the faculty of the same department in which I had studied, I felt it would be important to move into new intellectual territory rather than continue in the same directions that my thesis supervisor was pursuing. Thinking about Powell's seminar, the general excitement of lasers and holography, and the

4 Key Note

now somewhat more prevalent work on holographic interferometry, I sought to work half time in the Radar and Optics Laboratory to determine if this new technique could become an important experimental tool for mechanical engineering research, especially in the thermal sciences. Bill Brown, the director of the Willow Run Labs, and Emmett Leith readily agreed and made this possible.

It was in this way that I came close to the early developments of holography, close in both space and time, but certainly not at its center nor at its actual inception.

2 Intersections

The pioneering work in holography at the University of Michigan's Willow Run Laboratories was made possible by intersections: intersections of ideas, intersections of technologies, and, above all, intersections of remarkable people, together with a good dose of serendipity.

Most lay people, and indeed scientific and engineering professionals, learned about holography just as I did, i.e. they read or heard about an amazing new technique for producing realistic three-dimensional images of everyday objects using laser light. The reality is that those who developed holography did not intend to make images of everyday objects, and they did their initial work before lasers were available.

The physicist Dennis Gabor first worked out the concept of wavefront reconstruction, or holography, in an attempt to make improved images by electron microscopy. He developed the theory, but did not have a sufficiently coherent source of electrons to actually realize it experimentally. As an analog to electron imaging, he formed a holographic image of a point source of light from a mercury vapor lamp using photographic film. His original papers are remarkably complete and detailed, including details of the appropriate characteristics and processing of the photographic film on which the hologram is recorded.

Today we would refer to Gabor's technique as in-line holography and recognize that as an optical imaging technique, it suffered from the fact that the reference wave and the reconstructed object wave propagate along collinear paths. Because of this juxtaposition, holography remained mostly a curiosity; however, the concept and experiment were sufficiently original and potentially important that Gabor received the Nobel Prize in Physics in 1971.

It remained for Emmett Leith and his colleague Juris Upatnieks at Willow Run to separate the reference wave from the reconstructed wave

Key Note 5

by placing a substantial angle between the reference wave and the reconstructed wave propagating from the object being imaged. This idea, like many important scientific ideas, seems simple in retrospect, but it was actually quite remarkable.

Like Gabor, Leith and Upatnieks did not set out to do three-dimensional optical imaging. They were radar engineers and were familiar with communication theory. They worked to develop coherent radars capable of high-precision imaging. To develop the necessary concepts, they explored the use of optical analogs to coherent radars. This led them to think about Gabor's technique of optical holography. If they could separate the reference waves from the object waves, they could build a laboratory-scale optical experiment to model coherent radars. This in turn led them to the intersection of optics and communication theory.

Leith and Upatnieks were familiar with the basic techniques of frequency separation in communication theory. They realized that if they thought in terms of angular separation, and therefore used spatial frequencies rather than temporal frequencies, the reconstructed wave could be easily separated from the reference wave, and off-axis holography was born. Soon they successfully formed holographic images. They used a point source of light from a mercury vapor lamp to make their pioneering off-axis holograms.

So the development of off-axis holographic interferometry came from the intersection of optics and communication theory. But if it were not for the serendipitous development and commercialization of He-Ne lasers at just about this time, the limited coherence of mercury vapor light sources would have restricted off-axis holography to being a minor laboratory curiosity. The intersection of lasers and off-axis holography gave us a new tool for science, engineering, and art. It turns out that it also led to a major delay in the availability of holography. Here is why: During this same time period, Leith and others at the Willow Run Laboratory were engaged in developing techniques for optical processing of radar images. This too was truly seminal work that dramatically improved the ability of aircraft-born radars to image objects, e.g. by synthetic aperture techniques. But extracting the image from the raw data was a monumental problem in those days of only minor computing power. Optical data processing techniques, especially after the availability of lasers, was a huge advance, and presumably a major advantage to the U.S. vis a vis the Soviet Union. This was at the height of the Cold War, and because of national security concerns, the fact that radar engineers were working with laser optics was highly classified. For this reason, there was a very substantial time lag between the Leith and Upatnieks work in off-axis holography and its publication in the open literature.

6 Key Note

In the late 1960s and early 1970s there were many remarkable people working in the Radar and Optics Lab. I was fortunate to get to know several of them. In addition to Emmet Leith and Juris Upatnieks, I particularly want to note Bill Brown, Adam Kozma, Ken Haines, Al Friesem, Jack Walker, Percy Hildebrand, John Latta, and Ed Champaign, as people from whom I learned many things that one would not expect a mechanical engineer to know. We also had remarkable graduate students in the Lab in the early 1970s such as Rod Alferness, who today is chief scientist of Bell Labs, Don Winter who recently served as the U.S. Secretary of the Navy, and my own student, Don Sweeney, who has had a very productive career at Purdue University and Lawrence Livermore Laboratory and is known especially for his work in ultraviolet lithography.

The holography pioneer who most influenced and enabled my own work is Karl Stetson. Karl had left the Radar and Optics Laboratory prior to my arriving there to work in the settings of industrial labs, most notably the Ford Scientific Laboratory and United Technologies Research Center. His was the most seminal and comprehensive work in the field of holographic interferometry.

3 The View from the Fringes

It was primarily holographic interferometry that brought me to the Radar and Optics Laboratory. Once laser-based off-axis holography was readily accessible as an experimental technique, many people independently discovered that when an object moved slightly, or was strained between exposures of a two-exposure hologram, an image of the object superimposed with dark and bright interference fringes could be seen.

This phenomenon was discovered independently by several investigators including Tony Ennos and Jim Burch at the National Physical Laboratory at Teddington in the UK, Ralph Wuerker at TRW, and, of course, Stetson and Powell at Michigan. Usually, interferometry based on holography was discovered by accident, when the object or optical table was accidentally bumped during an experiment and fringes appeared in the reconstructed image.

These fringes were clearly associated with the slight displacement, rotation, or strain that had occurred, and they had remarkable dynamic properties in that they shifted and changed as one looked at the object from various directions. They often appeared to be detached from the surface of the object. Many scientists and engineers in several countries began to analyze the formation of these fringes and then to solve the important

Key Note 7

inverse problem, i.e. given observations of the fringes from several perspectives, estimate the translation, rotation, and strain the object had undergone. This problem was straightforward in several special cases, but a truly general analysis, especially one that explains the apparent localization of fringes in space, requires a sophisticated understanding of the optical physics involved. The deepest and most comprehensive analysis was due to Karl Stetson and formed the basis of the work that earned his doctoral degree at the Royal Institute of Technology in Stockholm.

Nils Abrahmson, also at the Royal institute of Technology in Stockholm, developed a very clever and accessible way of understanding the relation between motion and fringes called the holodiagram. Industrial scientists such as Gordon Brown at Ford also pushed forward the state of the art for the practical application of this technique.

Much of this work had been done before I became involved, but these and many other investigators carried the field of holographic interferometry forward, and I was privileged to learn from them and occasionally work with them and many others who followed. Indeed, one of the great pleasures of my life was to participate in sessions of the SPIE and Optical Society of America focused on holographic interferometry, and especially to participate in the occasional informal sessions organized by Werner Juptner, Rich Pryputniewicz, and others in Worpswede, near Bremen, Germany.

When I began doing some of my research at the Radar and Optics Laboratory, my primary interest was not in the motion of solid, opaque objects, but in the measurement of three-dimensional temperature and density fields in transparent fluids. This was not of much interest to the mission of the Laboratory, but the open-minded people who ran the lab enabled me to start this work. To earn my keep, I was assigned to be the principal investigator on a rather large project sponsored by DARPA on the use of optical holographic interferometry for the nondestructive testing of solid objects, especially the detection of subsurface cracks and voids. In 1971, I was sent to a DARPA contractors meeting at the Watertown Arsenal outside Boston, MA. As I was driving along Storrow Drive just across the river from MIT, a local news program I was listening to on my car radio opened with the announcement that Jerome Wiesner, formerly President Kennedy's science advisor, had just been elected the 13th president of MIT. In my wildest dreams I could not have imagined that nineteen years later I would become MIT's 15th president. Karl Stetson, paraphrasing General MacArthur, used to say, “Old holographers never die; they just become incoherent.” As a dedicated teacher and researcher

8 Key Note

in 1971, I would have considered such a descent into academic administration to be incoherent indeed. But such is life.

Coincidently, Emmett Leith once took a plunge into administration. Because he was the guiding light of the lab, he was once asked to become its head. He accepted, and in his sole administrative act, cleaned his desk and kept it neat for one or two days. He then decided he was not really an administrator, and, thank goodness for the field of optics, became the chief scientist and continued his long and always productive career as a researcher. He also became a remarkably able and endlessly dedicated teacher and mentor. He developed a unique but very effective lecturing style and always worked side-by-side with his students at all levels as colleagues.

In 1979, Emmett Leith received the National Medal of Science from President Jimmy Carter at the White House. Being an extremely conscientious professor, he arranged for one of his graduate students to teach his undergraduate class that afternoon. But soon after the class started, Emmett walked into the classroom with his presidential medal in his coat pocket. He had been so concerned about missing his class that he had skipped the social events following the ceremony in Washington and flown back to Ann Arbor to teach his class.

Just a few years ago I had the privilege of speaking at a symposium at an Optical Society of America meeting in Baltimore celebrating Emmett's career. He, Don Sweeney, and I had dinner together at a restaurant afterwards. Two things transpired that were pure Emmett. First, as he was nearing completion of a full and excellent meal with us, he noted that in fact he had already eaten dinner, but couldn't pass up the opportunity to visit with Don and me, and since we were in a restaurant, he thought the only decent thing to do was order another dinner. Second, I mentioned to Emmett that a year or two before this, while browsing in a bookstore, I had seen a copy of Advances in Optics that included a history of the Radar and Optics Laboratory he had written and wondered if a reprint might be available. He said “Sure,” stood up, reached into his pants pocket, and produced a copy for me. I'm still mulling that over.

I last saw Emmett at a celebration that Nicholas Negroponte and I hosted in honor of Steve Benton at the Media Lab at MIT. Steve, who developed the rainbow hologram, was another remarkably creative pioneer. He also was a teacher's teacher and built important bridges between the holography community and the arts community. The holography/art connection also played a role in the early days of holography, and gave rise to incredible things that could only have happened in the strange era of the 1960s and 1970s. I think especially of Lloyd Cross, who had worked on lasers and masers at the Willow Run