formation of titanium nitride layers on titanium metal
TRANSCRIPT
KfK 4449 September 1988
Formation of Titanium Nitride Layers on Titanium Metal:
l , . . i i
Results of XPS and AES I nvestigations
,.
H. Moers, G. Pfennig, H. Klewe-Nebenius, R.-0. Penzhorn, M. Sirch, E. Willin
Institut für Radiochemie
Kernforschungszentrum Karlsruhe
KERNFORSCHUNGSZENTRUM KARLSRUHE
I n s t i t u t f ü r R a d i o c h e m i e
KfK 4449
Formation of Titanium Nitride Layers on Titanium Metal: Results of XPS and AES Investigations
H. Moers*, G. Pfennig, H. Klewe-Nebenius, R.-D. Penzhorn, M. Sirch, E. Willin
* Present address: Hoechst AG Werk Kalle Postfach 35 40 D-6200 Wiesbaden
KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH, KARLSRUHE
Als Manuskript vervielfältigt Für diesen Bericht behalten wir uns alle Rechte vor
Kernforschungszentrum Karlsruhe GmbH Postfach 3640, 7500 Karlsruhe 1
ISSN 0303-4003
Formation of Titanium Nitride Layers an Titanium Metal: Results of XPS and AES
Investigations
Abstract
The reaction of titanium metal with gaseaus nitrogen and ammonia at
temperatures of 890 °C Ieads to the formation of nitridic overlayers an the
metallic substrate. The thicknesses of the overlayers increase with increasing
reaction time. Under comparable conditions ammonia reacts much slower than
nitrogen.
XPS and AES depth profile analyses show continuous changes of the in-depth
compositions of the overlayers. This can be interpreted in terms of a very irregular
thickness of the overlayers, an assumption which is substantiated by local AES
analyses and by the observation of a pronounced crystalline structure of the
substrate after annealing pretreatment, which can give rise to locally different
reaction rates. The depth profile is also influenced by the broad ranges of stability
of the titanium nitride phases formed during the reaction.
The quantitative analysis of the titanium/nitrogen overlayers by AES is difficult
because of the overlap of titanium and nitrogen Auger peaks. In quantitative XPS
analysis problems arise due to difficulties in defininq Ti 2p peak areas. This work
presents practical procedures for the quantitative evaluation by XPS and AES of
nitridic overlayers with sufficient accuracy.
Bildung von Titannitrid-Schichten auf Titanmetall: Ergebnisse von XPS- und AES
Untersuchungen
Zusammenfassung
Die Reaktion von Titanmetall mit gasförmigem Stickstoff und gasförmigem
Ammoniak bei 890 °C führt zur Bildung von nitridischen Deckschichten auf dem
metallischen Substrat. Die Dicken der Deckschichten nehmen mit steigender
Reaktionszeit zu. Unter vergleichbaren Bedingungen ist die Reaktion mit
Ammoniak bedeutend langsamer als die mit Stickstoff.
XPS und AES Tiefenprofil-Messungen zeigen kontinuierliche Veränderungen der
Tiefenverteilungen der Elemente Titan und Stickstoff innerhalb der Deckschichten.
Dies beruht vermutlich auf der sehr unregelmäßigen Dicke jeder einzelnen
Deckschicht. Diese Vermutung wird unterstützt durch die Ergebnisse von AES
Punktanalysen und durch die Beobachtung einer ausgeprägten kristallinen Struktur
des Substrats nach der thermischen Vorbehandlung, was zu lokal unterschiedlichen
Reaktionsraten Anlaß geben kann.
Die quantitative Analyse von Proben, die neben Titan Stickstoff enthalten, wird in
der AES durch die Oberlagerung von Titan- und Stickstoff-Augerübergängen
erschwert. In der XPS treten Schwierigkeiten bei der Festlegung der Ti 2p
Peakflächen auf. In dieser Veröffentlichung werden Verfahren vorgestellt, die die
quantitative Auswertung sowohl von XPS- als auch von AES-Spektren erlauben und
Daten hinreichender Genauigkeit liefern.
I. Introduction
Titanium metal has several properties of interest for its application in the fuel
cycle of a fusion reactor. For instance, its capability of reversibly forming
titanium hydrides (1-3) can be employed for the storage and handling of gaseaus
tritium. In addition, its excellent gettering characteristics may be used to remove
impurities from the burned fuel of a fusion reactor (4). In both applications detailed
kinetic information on the reaction of metallic titanium with gaseaus impurities
such as Nz, NH3, CO, COz, CH4 etc., which play a role during the fusion fuel
cycle, is of major importance. While for gettering purposes the occurrence of
irreversible reactions with these gases is desired to achieve an optimal cleaning
effect, in the case of tritium storage the formation of surface titanium compounds
(nitrides, oxides, carbides) is likely to influence significantly the rate and capacity
of tritium uptake. Another area of interest involves coating of titanium by
nitridation, which is known to produce a corrosion resistant surface.
The present investigation of the reaction of nitrogen compounds with titanium is
part of a program, which aims at the determination of the kinetic parameters and
the identification of the reaction products of potential candidate metal and alloy
getters with impurity gases of the fusion fuel cycle. The examination of titanium
nitrides and nitrided titanium surfaces by modern instrumental analysis such as
X-ray photoelectron spectrometry (XPS) and Auger electron spectrometry (AES)
has received considerable attention in the recent Iiterature (5-15). Other fields of
application of these two and of other surface sensitive techniques in fusion
technology can be found in refs. (16-18). This work concentrates on XPS and AES
investigations of the reaction of titanium metal with nitrogen and ammonia and
describes the composition and depth distribution of the reaction products. Both
techniques are extremely surface sensitive for the detection of surface species and
thus very weil suited to characterize the interactions at the interface between a
solid and a gas phase. Particularly tagether with X-ray diffraction XPS and AES
provide quantitative chemical information on the surface products. ln combination
with ion bombardment induced sputtering they give access to several micrometer
thickness of the surface layer of a solid.
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II. Experimental
The titanium samples investigated in this work were either small cuttings (size
~ 2 x 6 mm 2 , sample 1) or squares (size 10 x 10 mm 2 ) of 0.25 mm thick foils, which
were supplied by Vakuumschmelze Hanau (samples 2 and 3) or by Goodfellow
Metals, Cambridge (samples 4-8), respectively. The purity of the foils from the
latter manufacturer was stated to be 99.6 % Ti.
Prior to exposure to nitrogen or ammonia the Ti samples were annealed in a quartz
vessel under vacuum at 890 °C for several hours. In experiments 1-2 the metallic
samples were first allowed to cool down to room temperature. Then the reacting
gas was introduced into the quartz vessel and the sample heated up to the reaction
temperature under isochoric conditions (V = 0.668 1). With progressing reaction a
small pressure drop due to nitrogen consumption was observed. An analogaus
procedure was employed in experiment 3 except that in this case, due to the
formation of Hz and Nz by cracking of NH3, the gases were circulated over the
metallic sample with the help of a Metal Bellows pump. In runs 4-8 the reacting gas
was admitted to the hat sample immediately after completion of the annealing
treatment. The kinetic study itself was carried out under isobaric conditions
employing a Baizers RME-010 pressure reducing valve, which permitted a
regulation of the pressure to :r 5 mbar. The gas consumption was followed
volumetrically employing calibrated vessels and an MKS-Baratron 170 M
capacitance manometer.
At the end of each experiment the gas was pumped off and the quartz reaction
vessel cooled down to room temperature. The samples were then stored under a dry
inert gas inside a glove box until needed for surface analysis. Further details
concerning the annealing and reaction conditions employed during experiments 1-8
are given in Table 1.
For XPS and AES measurements the specimens were mechanically mounted on
appropriate specimen stubs under Iabaratory atmosphere and then introduced into
the spectrometer. Due to the Iack of an adequate sample introduction systern
which operates under an inert gas atmosphere, the specimens were briefly exposed
to the atmosphere during this step. As a consequence the XPS spectra of the
specimens showed partial oxidation of the outermost atomic layers.
The XPS and AES measurements were performed in a Vacuum Generators (VG)
ESCALAB 5 electron spectrometer already described elsewhere (19). The system is
equipped with a hemispherical sector field analyzer. Most measurements were
- 3 -
carried out at a base pressure of 1o--9 mbar. Details of the instrumental parameters
and measurement conditions employed for the recording of XPS and AES spectra as
well as of depth profiles are summarized in Table 2 and Table 3. Data acquisition,
storage, handling, and evaluation was carried out with a POP 11/03 computer
(Digital Equipment Corporation) ernploying software supplied by the manufacturer
of the electron spectrometer. This software package includes the possibility of
removing X-ray satellites and the background of inelastically scattered electrons.
The latter is performed according to a mathematical treatment given by Shirley
(21).
III. Results and Discussion
l. Microscopic examination
All samples were routinely inspected with a light microscope for possible effects of
the various treatments on the appearance of the sample surfaces. This examination
revealed that already during the annealing procedure structural transformations of
the metal took place. For instance, Figs. 1 and 2 show microscopic photographs of
the original titanium foil (representative of specimens 2 and 3) as received from
the manufacturer and before annealing. Besides some black dots, which represent
impurities on top of the surface, the appearance of the surface is governed by
traces resulting from the mechanical treatment of the material rluring
manufacture (probably rolling). After annealing for about 4 h the surface structure
has changed markedly as can be seen in Figs. 3 and 4. Even though the working
traces are still visible the surface appearance is now governed by the crystalline
structure of the metal foil. This indicates that the foil itself and the heavily
disturbed surface layer of the metal foil, resulting from the mechanical treatment
during manufacture, have recrystallized during annealing. The X-ray diffraction
spectrum of the annealed titanium foil (4 h at 890 °C) shows no siqnificant
difference from that obtained with the untreated foil. Only heating up to higher
temperatures ( > 920 °C) causes permanent changes of the crystallographic
structure.
Exposure of the Ti foil to nitrogen at 890 °C does not significantly alter the
appearance of the surface. This is apparent from a comparison between
photographs of specimen 2 before (Figs. 3 and 4) and after reaction with nitrogen
(Figs. 5 and 6).
The appearance of the surface is not affected by ion bombardment applied during
the measurements of the AES depth profiles. Figs. 7, 8 and 9 show photographs of
that part of the surface, which has been hit by the ion beam. The approximately
- 4 -
reetangular slightly brighter area in the center of Fig. 7 corresponds to the ion
bombarded part of the surface. Figs. 8 and 9 show sections of this area at higher
magnifications.
A comparison of the light microscopic photographs with those obtained with a
scanning electron microscope (SEM) employing a rastered electron beam for the
excitation of secondary electrons gives additional information. The resolution
achieved with the SEM was of the order of one micrometer. Figs. 10 and 11 show
SEM micrographs of sample Nr. 2. The shown area is close to the sputter crater.
When compared to Figs. 5 and 6 it is seen that whereas the light microscopic
photographs predominantly show the typical features of the crystalline structure,
the SEM micrographs are dominated by the working traces from the manufacture
of the metal foil, the crystalline structure being only barely recognizable (see
Fig. 11). Due to their low kinetic energy secondary electrons can only be emitted
from a surface layer of a few nanometers thickness. Furthermore, the cantrast in
SEM pictures is .governed by gross differences in chemical composition and/or the
topography of the sample surface. Therefore, the absence of significant differences
between different crystallites in the SEM pictures indicates a fairly homogeneaus
composition of the upper sample surface layer, which is not apparent from the light
microscopic examination.
Within the ion bombarded area, on the contrary, the SEM micrographs show a
surface with a distinct crystalline structure. The SEM micrograph in Fig. 12 shows
approximately the same section of the foil as the light microscopic photograph in
Fig. 7. The SEM micrograph in Fig. 13, which was obtained with a higher
magnification than that in Fig. 12, depicts an area close to the center of the
sputter crater. Approximately the same zone is also shown in the light microscopic
photograph of Fig. 9. The shadowing effects along the grain boundaries indicate
significant topographical height differences. * These height differences appear only
after extended ion bombardment of the sample suggesting that the sputtering rates
depend upon crystallite orientation.
2. AES: Depth profiles
The major Auger transitions of titanium are observed at kinetic electron energies
of about 385 eV (L 3M23M23) and 420 eV (L3M23V), the most prominent one of
nitrogen occurs at about 385 eV CKL23L23). Therefore an almost complete overlap
* The light microscopic photographs of the titanium foils obtained from other manufacturers (samples 4-8) showed essentially the same features as the ones already described. They are, therefore, not discussed separately in this section.
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of the Ti (L 3M23M23) and NCKL23L23) transitions is expected in the Auger spectra
of samples containing both titanium and nitrogen. This is illustrated in Fig. 14, in
which the AES spectra of titanium and titanium mononitride are compared. The
latter spectrum shows the surface composition of a pellet, which was pressed from
commercial TiN powder and which was sputtered in the electron spectrometer until
a constant surface composition was achieved.
The considerable amount of oxygen present in the sample results from partial
oxidation of the surfaces of the individual grains when the powder qets in contact
with air during manufacture of the pellets. Sputtering can only remove oxygen
from the outer surface of the pellet but not that incorporated into the pellet during
compactation of the powder.
One approach to separate the contributions of titanium and nitrogen to the
cornplex peak at 385 eV has been described by Dawson and Stazyk (9). The authors
determined the intensity ratio of the two major Auger transitions of titanium
metal with their instrumental parameters and assumed that any deviation from this
ratio occuring after nitridation of the sample surface is due to the overlapping of
the NCKL23L23) I Ti (L 3M23M23) peaks. The titanium contribution to the complex
peak at 385 eV is calculated from the Ti (L }M23V) I Ti (L 3M23M23) metal ratio and
the height of the peak at 420 eV. The difference between the total height of the
peak at 385 eV and the height attributed to the Ti contribution is assigned to the
intensity of the NCKL23L23) Auger peak. The various phases formed during the
gas/rnetal reaction were identified by X-ray diffraction. Uncertain with this
rnethod is the dependency of the intensity ratio (ratio of excitation probabilities) of
the titanium peaks on the chemical environment of the sample. For example it is
known from experiments with titanium oxides that the Auger peak Ti (L 3M23M23)
/Ti CL3M23V) intensity ratio varies significantly with the state of oxidation of
titaniurn (22,23).
In this work another evaluation procedure based an the use of two appropriate
reference materials is discussed. In addition to the assumption that the ratios of
the excitation probabilities remain coristant, the approach requires a knowledge of
the relation of the absolute intensities of the Auger peaks of the two reference
materials.
In the case of TiNx the intensity ratios of the two Auger transitions of titanium
and of a titanium nitride of known composition can be employed. The stoichiometry
of the unknown sample can be derived frorn the experimentally observed intensity
ratios of these two reference materials as well as the one from the titanium nitride
- 6 -
phase under investigation. Under the assumption that the intensity increase of the
Auger transition at 385 eV is proportional to the nitrogen uptake of the sample a
straight forward evaluation is possible, i.e. the nitrogen concentration of the
sample under investigation is obtained from the measured intensity ratio of the
peaks at 420 and 385 eV. Any sample with a nitrogen concentration lower than that
of the mononitride will exhibit an Auger spectrum with an intensity ratio value
Iying between that of the mononitride and that of the pure meta!. As apparent
from Fig. 14 the intensity ratios of the meta! and of the mononitride differ
significantly. Therefore, a sensitive determination of the composition of the
nitrided samples is possible.
Starting from the assumption that the spectrum of an unknown compound TiNx
results from the overlap of the spectra of Ti meta! and TiN, the following
expression for the peak intensity ratio S (peak at 420 eV to peak at 385 eV) of the
sample under investigation can be derived
s =
1 (-- 1) + c X
1 1 c (-- 1)- +-x T N
(1)
In this expression T and N are the intensity ratios (420 eV /385 eV) of the titanium
meta! (T = 1.24) and of the mononitride (N = 0.52), respectively. C is a constant
which accounts for the different absolute intensities of the Auger transitions of the
reference materials. C, which was simply equated to the ratio of the atomic
concentrations of titanium in the mononitride and in the meta!, was calculated to
be 0.9. Implicit in this calculation is the assumption that the Auger transition
intensity is proportional to the atomic concentration of the species under
investigation. Equation (1) is based an purely stoichiometric considerations:
TiNx -• Ti 1/xi'~ = (~ - 1) Ti + TiN
By simple rearrangement of eq. (1) an expression can be obtained, which permits
the calculation of the average composition of a sample from a knowledge of the
intensity ratios S, T, and N as obtained from the corresponding Auger spectra:
S/T- 1 (2) X=
S/T + C (1 - S/N) - 1
- 7 -
Fig. 15 illustrates the evaluation of the average stoichiometry of the analyzed
Volume as a function of the 420 eV peak I 385 eV peak ratio S employing eq. (2).
Several possible sources of error need to be kept in mind when using eq. (2) or
Fig. 15:
uncertainty in the intensity ratios of the reference materials, in particular TiN
(oxygen contribution)
uncertainty in the absolute intensities of the Auger peaks of the reference
materials (no experimental data available yet, the effect of chanqinq C is
illustrated in Fig. 15)
uncertainty concerning chemical effects influencing the experimentally
determined intensity ratios
neglection of the fine structure of the Auger peaks for the evaluation of
intensity ratios (see Fig. 14 and the peak heights defined therein).
Figs. 16 - 23 show the depth profiles recorded for each sample along with
representative Auger spectra obtained at selected depths. The peak heiqhts have
been used as defined in Fig. 14 without consideration of possihle contributions from
the fine structure of the spectra. A conversion of the peak heights into TiNx
compositions can be done by using Fig. 15 or eq. (2). The depth scale has been
estimated from the actual ion current densities and the measured sputtering rates
of titanium meta! and titanium dioxide (see Table 3).
The Auger spectra as well as the depth profiles of the various samples show that
their surfaces are partly oxidized. In addition, the surfaces show adsorbed
hydrocarbons. Both surface contaminants (oxygen and carbon), which result from
the contact of the samples with atmosphere, are easily removed after short
sputtering. As a rule, both elements practically disappear from the AES spectra
after removing a 10 - 20 nm surface layer, leaving titanium and nitrogen as the
only detectable elements and suggesting the formation of one (or several) titanium
ni tride(s). In fact, the AES spectra recorded just after the removal of carbon and
oxygen closely resemble that of TiN (see Fig. 14 b). The presence of nitrides is, in
addition, substantiated by the characteristic XPS chemical shifts of nitrogen and
t i tanium (see section 3).
The intensities of the Auger transitions at 420 eV and 385 eV kinetic energy, which
correspond, an one hand, to a titanium transition alone and, an the other hand, to
the overlapping of a titanium and a nitrogen transition, show in each of the
examined depth profiles continuous variations over the whole depth range
- 8 -
investigated, indicating that the nitrogen contribution to the spectra continuously
decreases with progressing depth. Several explanations can account for these
observat ions:
The overlayer formed during the reaction between titanium and nitrogen
actually shows the observed compositional gradient over the depth range. In
principle, this is possible because titanium nitride phases are stable within a
very broad range of concentrations (24).
The overlayer thickness is strongly dependent upon the location at the surface
at which it was formed. Since AES spectra only yield the integral composition
of a certain surface area, large thickness differences within the analyzed area
can also give rise to the observed depth profiles.
A combination of the former two explanations.
Additional distortion of the depth profiles can be caused by lateral variations in the
sputtering yields and thus of the sputtering rates. However, this is considered to be
a secondary effect, which will only play a role when significant variations in lateral
composition occur.
No conclusive interpretation of the reaction mechanism is possible an the basis of
the experimental data available. Probably, both effects discussed above contribute
to some extent to the experimental observations. Because of the pronounced
crystalline structure shown by the surface of the foils after annealing (cf. Chapt.
III.l.), the possibility of different reaction behaviour at the various crystal faces,
leading to Variations in the product layer thickness and perhaps to several product
nitrides, need to be considered. For instance, local AES analyses of sample No. 7
at a depth of approx. 4 11m indicate large variations in lateral composition.
However, these observations da not exclude a possible contribution from in-depth
gradients to the depth profiles.
While the absolute depth ranges of the examined samples showed significant
Variation with reaction time and type of reacting gas, no fundamental differences
between the shapes of the various depth profiles could be observed. This is
apparent from a comparison of samples No. 2, 3 and 5. The only difference between
samples No. 2 and 5, which reacted with nitrogen, and sample No. 3, which reacted
with ammonia, is that in the latter case the amount of nitride formed is smaller
(see Figs. 17, 18 and 20).
- 9 -
The average composition of the overlayer as a function of depth can be derived
using Fig. 15 or eq. (2). Table 4 summarizes the estimated compositions of the
overlayer of all investigated samples at progressing depths. In addition, the position
of the point of intersect on the depth scale, i.e. the depth at which the Auger
transitions at 420 and 385 eV are equally intense, is included. This intersect, which
corresponds to a composition of TiNo.19, has been arbitrarily defined as the
thickness of the nitridic overlayer. The intersects for samples 2, 3 and 5 were
observed to occur at 880, 200 and 790 nm, respectively, indicating that under
comparable conditions nitrogen penetrates deeper into the titanium metal than
ammonia. Generally, an increase in reaction time is accompanied by a shift of the
position of the intersect towards greater depths and, in consequence, by an
increase of the thickness of the reaction product layer.
The initial part of the depth profile of sample No. 4 (and to a lesser extent of
sample No. 5) differs from those of the other samples in that the intensity of the
Auger peak at 385 eV passes through a maximum very close to the surface. This
points to a relatively high nitrogen concentration in the surface layer of these
samples. It is not clear why only these samples show such an effect. Presumably
this is related to the particularly short reaction time selected for these experiments.
Since all samples were first heated up to 890 °C before admitting nitrogen into the
reaction vessel, they cooled down when brought in contact with the non-preheated
gas. In the case of experiments of short duration this retardation in heating
manifests itself rather strongly on the total reaction time. In consequence, runs
like that with sample No. 4 do not reflect constant temperature conditions for the
reaction and diffusion process over the stated period of time (in experiments of
Ionger duration the initial departure from steady state conditions can be
neglected). A more detailed investigation is necessary for a complete elucidation
of this effect.
Depth regions of constant composition were observed only in the profiles of
samples No. 7 and 8. The ranges extend approx. from 300 - 1200 nm (sample No. 7)
and from 300 - 1700 nm (sample No. 8), respectively (cf. Table 4). The extension of
the profile region with constant composition is, however, small compared to the
total depth of the overlayer where nitrogen can be detected. Sampie No. 7 has also
been investigated by XPS. The depth profile resulting from these measurements is
displayed in Chapt. III.3 (cf. Fig. 29) and compares well with the results from the
AES depth profile.
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3. Surface analysis and depth profiles by XPS
In addition to the AES depth profile measurements several samples were
investigated by XPS with the aim of characterizing the surface and speciating the
overlayer constituents. The method also permits a determination of depth
distributions. Due to the difficulties encountered during the quantitative evaluation
of the AES spectra (see Chapt. III.2) useful complementary information was
expected from this surface analysis technique.
Fig. 24 shows an XPS spectrum of sample No. 7. The surface shows contributions of
titanium, nitrogen, oxygen and carbon. While the overwhelming fraction of the
carbon can be attributed to a contamination of the sample surface by hydrocarbon
adsorption during contact of the specimens with air, a small additional peak at the
binding energy position corresponding to titanium carbide can also be observed. It
is very likely that this compound has been formed durinq the thermal treatment of
the sample (annealing and/or reaction step). Possible rc:H~tion partners are carbon
containing impurities (hydrocarbons or carbon oxides) · the qas phase or adsorbed
at the metallic substrate prior to the thermal treatment.
The titanium 2p photopeaks clearly show the presence of two titanium species,
which we attribute to titanium nitride (not necessarily stoichiometric) and to some
titanium oxinitride of unknown composition. On the basis of the observed binding
energy shifts the presence of pure titanium dioxide can be excluded.
Table 5 summarizes the binding energies determined experimentally for the surface
compositions of several titanium specimens as well as of the standard materials
employed in this work. The N ls photopeak appears at a binding energy of 396.9 eV.
This binding energy, which is indicative of a nitride, compares weil with the values
from our own standard and with those reported in the Iiterature (a compilation of
Iiterature values is given in Table 6).
The XPS measurements were also employed for the determination of depth
profiles. For this purpose a quantitative evaluation of the (relative) concentrations
of titanium in the titanium containing materials is required. The major difficulty is
to find a reliable way to determine the peak area of the titanium 2p photopeaks.
The prob!em is caused by the presence of intense lass features in the Ti 2p
spectrum of titanium and titanium compounds, which originate from the excitation
of surface and volume plasmons and/or from shake-up processes (15). Shake-up
processes are the result of the excitation of valence electrons into unfilled Ievels.
- 11 -
They occur simultaneously with photoemission processes of the excited atom (28).
The shake-up satellites represent photoelectrons which have lost energy during
their emission by a secondary excitation of the atom. Therefore the intensity of
the satellites should be added to the total photoemission intensity. Plasmon
excitations, on the contrary, are associated with loss processes, takinq place when
electrons pass through a solid (29). They are comparable to inelastic energy lasses
of electrons (the latter giving rise to the background). Plasmon excitations are not
associated with the primary excitation processes within the atom and should, for
this reason, not be considered as part of the photoelectron emission intensity (30).
The overlap of lass structures from plasmon and shake-up excitations in the XPS
spectra of titanium nitride, titanium metal (15) and presumably titanium
oxinitrides, the latter being of relevance only for surface-near atomic layers,
makes it impossible to define accurately the part of the total photopeak structure
necessary for the determination of the peak area (or photoemission intensity,
respectively). In view of this, a practical but somewhat arbitrary procedure for the
determination of the peak area was developed.
A typical evaluation of a depth profile is illustrated utilizing the Ti 2p XPS spectra
of sample No. 3 measured at various depths (see Fig. 25). As apparent from the
spectra the surface oxidation product has already disappeared after a very short
sputtering period e.g. after removing a few nanometers of surface material. At
50 nm the spectrum closely resembles that of titanium metal except for the fact
that the peak positions are slightly shifted and that the intensity of the N ls
Photopeak indicates the presence of a considerable amount of titanium nitride.
The peak area determination is carried out in several consecutive steps as
illustrated in Figs. 26 and 27 for the case of two Ti 2p spectra from Fig. 25 (depth
0 and 0.4 nm, respectively). In a first step the background attributed to the
inelastic scattering of the electrons is subtracted. This contribution is calculated
from equations as proposed by Shirley (21). Figs. 26 a and 27 a show the raw data as
well as the calculated background. In Fig. 26 a the intensities of the raw spectrum
and of the background spectrum coincide at a binding energy which corresponds to
the intensity minimum at the high binding energy side of the photopeak multiplet.
This is where one would approximately expect the upper limit of the energy ranqe
of the multiplet. Fig. 26 b shows the spectrum after subtraction of the background
and, in addition, after subtraction of the X-ray satellites (spacings and relative
intensities taken from Ref. (31)). The hatched part of the resulting spectrum gives
the peak area ascribed to the intensity of the phototransition. The broad peak on
- 12 -
the right part of Fig. 26 b is assigned to plasmon Iosses not contributing to the
photoemission intensity.
In the case of the XPS spectrum shown in Fig. 27 the situation is more
complicated. Fig. 27 b shows the multiplet resulting after subtraction of the
background and the satellite. For the determination of the peak area there is
clearly no minimum at the right binding energy side of the multiplet which might
serve as a Iimit to distinguish between the photopeak multiplet and the plasmon
structure contribution. Consequently, it was assumed that the spectrum results
from an overlap of both contributions as represented by the dashed lines in Fig. 27
b. The intersect was assumed to occur at the same binding energy position as the
minimum in Fig. 26 b. Postulating a symmetrical overlap, a peak area as indicated
by the hatched area in Fig. 27 c can be derived.
With the procedure described above reproducible and consistent peak areas from Ti
2p XPS spectra can be determined. The evaluation method neglects any shake-up
satellites which might occur in the energy range of the plasmon structure and
which actually are present for instance in the XPS spectra of titanium dioxide in
the relevant energy range (15,20,25,32). Also neglected is that fraction of the
plasmon structure which might appear below the photopeak multiplet. It is
expected that both errors cancel out to some extent. In absence of a more accurate
evaluation method of the peak areas from the Ti 2p XPS spectra the chosen
procedure provides reasonably good data for the determination of the composition
because the comparison of consistently evaluated data is possible with better
precision.
The depth profiles of sample No. 3 and No. 7, which were evaluated according to
the procedure described above, have been plotted in Figs. 28 and 29, respectively.
Fig. 28 shows the intensities of the Ti 2p, N ls, 0 ls, and C ls phototransitions
Oeft ordinate) and the Ti/N atomic ratios (right ordinate, calculated from the
absolute intensities after correction for the photoionization cross sections as given
by Scofield (33)) as a function of depth. While the dash-pointed curve has been
determined from the total intensity of the Ti 2p transition, the pointed curve
includes a correction for the fraction of titanium bound to oxygen. Because oxygen
is rapidly removed, the two curves diverge only over the first ten nanometers in
depth. Fig. 29 gives the Ti/N atomic ratio over a depth range of approx. 2 11m of
sample No. 7. In this case the contribution of oxygen can be neglecterl except for
the first 30 nm.
- 13 -
The results plotted in Figs. 28 and 29 point to an approximate stoichiometry of
Ti2N. Only very close to the surface the stoichiometric coefficient approaches
unity suggesting a composition of the surface nitride close to TiN. None of the
samples shows constant composition over the analyzed depth range. In some
samples, for instance sample No. 7, only a small concentration gradient at depths
between 200 and 1500 nm was observed. This range of approximately constant
composition was also observed by an AES characterization of sample No. 7 (cf.
Table 4 and discussion in Chapt. III.2).
During the measurements of the depth profiles a continuous binding energy shift of
the Ti 2P3/2 photopeak towards the value of titanium metal became apparent,
which correlates with the composition of the analyzed volume (see Fig. 30). The
curve in Fig. 30, which is based an the depth profiles shown in Figs. 28 and 29,
reflects a dependence of the binding energy upon composition. Also included in Fig.
30 are three data points from the titanium mononitride reference sample (before
and after sputtering) as well as data found in the literature. Particularly, the latter
show a considerable scatter in binding energies. As opposed to this the values
obtained in this work show a smooth variation with composition.
In principle, the observed binding energy shift can be ascribed to changes in the
chemical environment of a homogeneously composed phase or to changes in the
average composition of a mixture of phases (titanium metal and titanium nitride).
In the latter case the position of the binding energy scale of the Ti 2p peak maxima
would be the result of the overlap of the Ti 2p spectra of different species and the
value of the binding energy would depend an the relative intensities of the
overlapping spectra. The results from the AES measurements (cf. Chapt. III.2)
favour the second explanation, i.e. differently composed phases. In this case a
dependence of the binding energy shifts an the composition of the titanium
ni tride is expected, particularl y in the low ni trogen concentration rang es.
Unfortunately, the large scatter of the literature values (cf. Fig. 30 and Tab. 6)
does not allow an unequivocal conclusion. In addition, binding energies for nitrogen
concentrations below 40 at.% are not available. Possibly, the dependence displayed
in Fig. 30 is the result of both effects described above.
4. Camparisan of the surface analysis results with kinetic measurements
Tab. 7 summarizes the nitridic overlayer compositions, which have been derived
from AES and XPS measurements of the various samples; the fourth column shows
phases detected by X-ray diffraction. As evident from the results, the XPS and the
AES measurements are in reasonably good agreement. Especially in the depth range
of approximately constant composition (see for example the range between 300 and
- 14 -
1200 nm of sample No. 7) both techniques point to a composition of about TiNo.5·
A composition approaching that of TiN appears to occur only at the surface of each
sample but with increasing depths the nitrogen concentration shows a continuous
decrease (cf. Tab. 4).
Ta understand the apparent compositional discrepancies observed when nitrided
titanium specimens are characterized by XPS, AES and X-ray diffraction, it is
necessary to take into account that, whereas XPS and AES provide only the
average composition of the analysed volume, X-ray diffraction is capab!e of
identifying single phases (see Tab. 7). Accordingly, it was observed that after a
short exposure to nitrogen the reflections of the specimens can be assigned to aTi
and TizN and that after a prolongued exposure additional reflections characteristic
to TiN appear. This is certainly not in disagreement with the depth profiles
determined by AES. As a whole, the results point to a layered structure of TiN over
TizN and aTi.
The depth profiles show that the thickness of the overlayer is not too weil defined.
The overlayer thickness was assumed tobe given by the position an the depth scale
of the intersect at equal intensity of the two predominant Auger lines. The
positions of the intersects are given by the fifth column in Tab. 7 and are displayerl
as a function of reaction time in Fig. 31.
The data in Tab. 7 suggest that under comparable conditions the rate of the
reaction of ammonia is much slower than that of nitrogen. This result, which is in
disagreement with the observations of other authors (34), may be explained by the
occurrence of significant cracking of ammonia, i.e.
an the surface of the titanium sheets. Such a reaction has been observed to occur
at 625 °C with a rate constant of k = (3.1 :r 1.9) • 1013 molecules/cm 2 ·sec (35).
Since the gas I meta! reaction was followed under static conditions, it is expected
that the products of the reaction, i.e. Hz and Nz, will cumulate in the vicinity of
the meta! surface and retard the reaction.
The nitrogen uptake observed when titanium foils react with nitrogen at 890 °C
was measured volumetrically and is shown graphically in Fig. 32. In general, an
induction period of a few minutes was observed, which is due to a decrease in
temperature of the metallic sample when brought in contact with the non
preheated gas. The reaction rate can be described by a parabolic law of the type
- 15 -
where
w = weight gain/area
K = temperature dependent proportionality constant
t = time
and the constant K has a value of (10.1 ± 0.3) llg2/cm4 • sec at 890 °C. The curve
showing the time dependency of the depth profiles as determined by AES is similar
to the one obtained from the weight gain experiments (see Table 8 and Figs. 31 and
32). A comparison between the overlayer thickness as estimated from AES
measurements and that calculated with the data in Table 8 and crystallographic
considerations, assuming a layer of either the composition Ti"-1 or TizN is given in
Table 7. Considering that the overlayer thickness determined by AES is based on
estimated sputtering rates and was arbitrarily assumed to end at the depth at
which the main Auger transitions are of equal height and that the thickness
estimated from weight gain runs was obtained under the assumption of a
homogeneaus single phase (TiN or TizN) overlayer, the agreement can be
considered satisfactory.
One result of the XPS measurements was the observation of a direct dependence of
the binding energy shift of the Ti 2p photopeaks upon the nitrogen concentration of
the nitrided surface. lt is at present not clear whether this effect arises from the
compositional change of a homogeneaus phase or is caused by the overlappinq of
Ti 2p spectra of several species of varying concentrations. More work is needed to
shed light on this question.
Acknowledgements
We are grateful to U. Berndt for taking the X-ray diffraction spectra.
Table 1: Annealing and reaction conditions employed in experiments on the interaction of titanium meta! with nitrogen
and ammonia
annealing step reaction step experiment/ duration pressure temperature reactant starting temperature sample No. (h) (mbar) (oc) pressure heat-up phase holding phase holding
(mbar) (min) (h) phase (°C)
1a) - - 890 N2 130 - 24 890
2 4 3 7 ·1o-5 ' 890 N2 135.5 100 0.50 890
3 4 3·10-5 890 NH3 135 40 0.62 890
4 4 1·10-5 890 N2 l35:r2b) - 0.25 890
5 4 1·1o-5 890 N2 135:r2b) - 0.50 890
6 4 1·10-5 890 N2 135:r2b) - 2.00 890
7 4 1·10-5 890 N2 135:t-1b) - 6.17 890
8 4 1·1o-5 890 N2 135:t-1b) - 7.00 890
a) Sampie No. 1 represents a test run. Same parameters are not known with certainty and are, therefore, not given.
b) Pressure held constant during the experiment; nitrogen was admitted after the reaction temperature had been reached.
()')
- 17 -
Table 2: Instrumental parameters and experimental conditions employed for the
XPS measurements
Excitation:
Excitation power:
Analyzed surface area:
Analyzer mode:
CAE-settings:
Resolution:
Energy reference:
Depth profiling:
Ion gun type:
Primary ion energy:
Al K , not monochromatized
10 kV • 10 mA
~ 50 mm 2
constant analyzer pass energy (CAE)
50 eV (overview spectra)
20 eV (element spectra)
1.3 eV FWHMa) for the Au 4f photopeak at CAE = 20 eV
Au 4f7 /2 = 84.0 eV binding energy
penning ion source (Leybold-Heraeus IQP 10/63);
operated with argon.
~ 5 keV
Sputtered area of constant
ion current density:
Ion current densities:
Sputtering rate:
~ 80 mm 2
~ 150 - 200 nA • mm-2 (valid for area of constant ion
current densi t y)
1 nm • min-1 at ion current density of 100 nA · mm-2 b)
a) FWHM: full width at half maximum
b) Estimated from sputtering rates of titanium metal and titanium dioxide, taken
from Ref. (20).
- 18 -
Table 3: Instrumental parameters and experimental conditions employed for the
AES measurements
Excitation source:
Excitation energy:
Excitation current:
rastereble electron gun (VG LEG 100)
3 or 5 keV
2.0 jlÄ
Electron current density: ~ 80 nA • mm-2
Analyzer mode:
CRR-setting:
Modulation valtage a):
Depth profiling:
Ion gun type:
Primary ion energy:
Ion current:
Ion current density:
Sputtering rate:
constant retard ratio (CRR)
10
2.0 eV
rastereble ion gun (VG AG 61) operated with argon
5 keV
200- 600 nA
200 - 600 nA • mm-2
1 nm • min-1 at an ion current density of
100 nA • mm-2 b)
a) Spectra recorded directly in the derivative mode using the lock-in-amplifier
technique.
b) Estimated from sputtering rates of titanium meta! and titanium dioxide, taken
from F~ef. (20).
Table 4: Composition of the investigated samples expressed as x of TiNx as a function of depth8)
sample position of depth (nm) number intersect b)
(nm) 50 100 200 400 600 800 1000 1500 2000 2500
1 » 3600 0.73 0.77 0.77 0.73 0.65 0.65 0.62 0.58 0.54 0.53
2 880 0.68 0.57 0.57 0.33 0.26 0.21 0.16 0.11 0.08
3 200 0.62 0.36 0.19 0.08 0.06 0.03 0.03
4 460 0.57 0.46 0.32 0.20 0.16 0.14 0.14
5 790 0.57 0.56 0.43 0.30 0.23 0.19 0.16 0.12
6 2170 0.58 - 0.53 0.50 0.45 0.42 0.38 0.29 0.20 0.16
7 4480 0.74 0.70 0.59 0.51 0.51 0.49 0.51 0.47 0.41 0.36
8 4780 0.82 0.60 0.57 0.52 - - 0.52 0.51 0.46 0.39
a) Determined from the intensities of the Auger transitions displayed in the depth profiles by using Fig. 15
b) Intersect corresponds to equal intensities of the Ti (L 3M23V) Auger transiti an and the sum of the Ti (L 3M23M23)
and N CKL23L23) Auger transitions.
3000
0.50
- CD
0.15
0.31
0.32
Table 5
sample
Ti 0
no2
TiN pelletb)
Nr. 3
Nr. 7e)
Nr. 78 )
- 20 -
Binding energies of the photopeaks of elements detected at the
surfaces of various samples and commercial reference materials
(values accurate to ± 0.2 eV)
Binding energy (eV) Ref
Ti 2p3/2 N ls 0 ls C ls
454.0 25
459.0 530.3a) 25
458.3 53o.2c) 288.4d)
455.2 396.9 284.8
457.9 529.8c) 288.1 d)
454.9 396.9 284.4
458.4 53o.oc) 284.4
454.9 396.9 281.7
458.0 529.8 284.0
455.0 396.8 281.4
a) Not given in Ref. 25; private communication.
b) For details on sample preparation and characterization see section III.2.
c) Energy position of maximum; shoulder on high binding energy side indicates
the presence of hydroxide.
d) In addition to hydrocarbons a component at the position corresponding to the
binding energy of carbonate was detected.
e) Two independent measurements performed.
- 2i -
Table 6: XPS parameters of titanium nitrides (literature values)
compound binding energy calibration
bulk assignment Ti 2p312
N 1s 0 1s Ti 2p312
line (binding Ref.
camp. - N 1s energy e V)
TiNo.95 TiNxOy 458.8.t0.1 n.g. C 1s (285.0) 68)
TiNo.95 456.0.t0.1 397.1.t0.1 58.9
TiNo.8o TiNxOy 458.6.t0.1 n.g.
TiNo.8o 456.1±0.1 397.3±0.1 58.8
TiNo.6o TiNxOy 458.5±0.1 n.g.
TiNo.6o 456.2±0.1 397.4±0.1 58.8
TiNx(x ~ 1) Ti(oxidized) n.g. n.g. Ti 2P3/2 from 58)
TiNx (x ~ 1) 455.3±0.2 n.g. metal (453.8)
TiNo.9b) Tio2 458.8 530.0 C 1s (284.6) 12a)
TiNo. 9 454.8c) n.g.
TiN1 d) TiN1 455.0±0.2 397.2±0.2 57.8 Au 4f7/2 (83.8) 15
Cu 2P3/2 (932.4)
TiNx (x ~l)e) 455.2±0.2 397.1±0.2 58.1
TiN0.99f) TiNo.99 455.1 397.4 57.7 Ti 2P3/2 from 11
TiNo.8o TiNo.8o 455.1 397.4 57.7 metal (453.6)
n.g.Q) Ti02 457.9 530.0 C 1s (284.6) 26
TiNxOy 456.7 399.9 56.8
398.4 58.3
TiN1 454.7 396.3 58.4
TiNx(x f= 1) 395.4 59.3
TiNh) TiNh) 455.5 n.g. Au 4f7/2 (83.8) 27
n.g.n Tio2 458.8 530.2 C 1s (285.0) 7
TiNx (x >1) 457.3 395.8 61.5
TiN1 455.5 397.2 58.3
TiNk) TiNxOy 458.3 530.2 Au 4f7/2 (84.0) this
TiN1 455.2 396.9 58.3 work
TiN I) TiNxOy - m) 530.9 this
TiNo.9n) 454.8 396.9 57.9 work
- 22 -
a) Results obtained from the surface analysis of nitrides
b) Composition determined from an XPS depth profile
c) Binding energy value of N ls remains unchanged after sputter cleaning
d) Commercial TiN powder used
e) Surface composition after N2+ ion bombardment of titanium meta!
f) Sampie surfaces abr<3'ded with a diamond file prior to measurements
g) Sampie prepared by reactive sputter ion plating; speciations are the result
of surface analysis and depth profiling by XPS
h) No details about sample composition given
i) Surface of titanium metal has been nitrided
k) TiN powder; details on preparation and characterization of the sample are
given in Chapt III.2
I) TiN powder (see k) after sputtering until equilibrium composition was
reached
m) No separate oxinitride peak of Ti 2P3/2 observable
n) For the evaluation of the stoichiometry see discussion
n.g. == not given
Table 7:
sample
No.
1
2
3
4
5
6
7
8
- 23 -
Composition and approximate thickness of the TiNx overlayer
formed during the reaction of titanium metal with nitrogen or
ammonia
overlayer composition overlayer thickness (nm)
AEsa) xpsb) X-rayc) AEsd) weight gaine)
< TiNo.7 » 3600
<Ti No. 7 Ti 2N,a.Ti 880
<TiN0•6 TiNo. 5 200
<TiNo.6 Ti 2N,a.Ti 460 560 -1150
<TiNo.6 Ti 2N, a.Ti 790 220 - 460
<TiNo.6 Ti 2N, a.Ti 2170 1720- 3570
<TiNo.7f) TiNo. 5 TiN, Ti 2N, a. Ti 4480 3700 - 7660
<TiNo.8f) TiN, Ti2N, a.Ti 4780
a) Compositions given correspond to upper nitrogen concentration as measured at
a depth of 50 nm. For further details on the decrease of nitrogen
concentration with progressing depth see Figs. 16 - 23 and Table 4.
b) Approximate composition over the depth range investigated by XPS (see Figs.
28 and 29).
c) Species as identified by X-ray diffraction.
d) Values correspond to the depth at which the Auger transitions Ti (!_3M23V) and
Ti (L 3M23M23) + N CKL23L23) are of equal intensities (intersect of the AES
depth profiles). Values were taken from Table 4 and represent a composition of
TiNo.19·
e) Overl.ayer thickness calculated from the weight gain of the sample assuming a
stoichiometry of the reaction product between TiN and Ti2N.
f) Constant composition corresponding to TiNo.5 observed approx. from 300 to
1200 nm (sample No. 7) and from 300 to 1700 nm (sample No. 8), respectively.
Table 8:
Reaction time
(min)
15
30
120
370
- 24 -
Reaction of nitrogen with titanium at 890 °C
Ti: 10 x 10 mm plates pretreated at 890 °C for 4 h under a
vacuum of 1o-5 mbar
N2 pressure
(mbar)
135 :±- 2
135 :±- 2
135 :±- 2
135 :±- 1
N2 consumption
(mbar·l)
0.52
0.21
1.62
3.46
Ti weight
(g)
0.492
0.491
0.490
0.480
N2 uptake
(g N2/g Ti)
1.22·10-3
4.91·10-4
3.80·10-3
8.33•10-3
- 25 -
Fig. 1 Light microscopic photographs of a titanium metal foil before annealing
(magnification x 50); the sample is representative of experiments 2 and 3.
Fig. 2 Light microscopic photograph of a titanium metal foil before annealing
(magnification x 200); the sample is representative of experiments 2
and 3.
- 26 ~
Fig. 3 Light microscopic photograph of a titanium meta! foil after annealing for
4 h at 890 °C and 3 • lo-5 mbar; magnification x 50.
Fig. 4 Light microscopic photograph of a titanium meta! foil after annealing for
4 h at 870 °C and 3 • I0-5 mbar; magnification x 200.
- 27 -
Fig. 5 Light microscopic photograph of sample No. 2 after reaction with
nitrogen, magnification x 50.
Fig. 6 Light microscopic photograph of sample No. 2 after reaction with
nitrogen, magnification x 200.
Fig. 7
rig. 8
- 28 -
Light microscopic photograph of the ion bombarded area of sample No. 2
after measurement of the AES depth profile. The slightly brighter square
in the center of the photograph represents the sputtered part of the
surface. The dark spot in the upper left of the photograph corresponds to
a mechanical damage of the surface which occurred after the depth profile
measurement (magnification x 50).
Same as Fig. 7, but showing the center of the sputtered area;
magnification x 100.
Fig. 9
- 29 -
Light microscopic photograph of the ion bombarded area of sample No. 2
after measurement of the AES depth profile, magnification x 200. The
photögraph may be compared with Fig. 13.
Fig. 10
Fig. 11
- 30 -
SEM micrograph of sample No. 2 after reaction with nitrogen;
magnification x 100.
SEM micrograph of sample No. 2 after reaction with nitrogen;
magnification x 400.
Fig. 12
Fig. 13
- 31 -
SEM micrograph of sample No. 2 after reaction with nitrogen showing
the surface area which has been ion bombarded during depth profiling;
magnification x 100.
SEM micrograph of sample No. 2 after reaction with nitrogen showing
the surface area which has been ion bombarded during depth profiling;
magnification x 400. The figure can be compared to Fig. 9.
Fig. 14
a)
b) .....
600
- 32 -
TiN
[ Ti(l3~23M23)
N(KL23L23)
500 400 300 200
kinetic energy [ eV]
AES spectra of titanium meta! (a) and titanium mononitride (b). Details
of the preparation and treatment of the TiN sample are given in the
text. Peak heights as shown in the figure have been employed for the
evaluation of depth profiles.
.2 ..... 0 '-
>. ..... tl) c CU ..... c
~ ~ 0 0 CU CU
0.. I I
> > QJ CU
0 L{)
N CX> -..:t (Y')
Fig. 15
- 33 -
1.5
.1.0
0.5
0 0.5 1 TiNx; X=
Evaluation of the composition of titanium nitrides as a function of the
intensity ratio of the Auger peaks at 420 eV and 385 eV kinetic energy.
The plot neglects possible errors in the determination of the intensity
ratios of the reference materials (x = 0 and x = 1, respectively). The
continuous curve has been calculated from eq. (2) (T = 1.24; N = 0.52
and C = 0.9). The dashed lines were obtained with C values of 1.35 and
0.45, respectively, representing a 50% deviation from the assumed true
value of C of 0.9.
- 34 -
r--1 Ti!L3M23Mz3) + N!Klz3l23) ll) ......
c ::::J
>. '-0 Ti ( L3 M23 V) '-......
..c '-0
L_J
>. ...... ll)
c (J) ...... c
0 0 1000 2000 3000
depth [nm J
Fig. 16 a Depth profile of sample No. 1.
- 35 -
r---'1
VI ...... 3nm c.: :J
>. .... 0 .... ...... ..c .... 1.1 i!m 0
L-.J
>. ...... Ul c.: ClJ ...... c.:
3. 6 i!m
600 500 400 300 200
kinetic energy [eV]
Fig. 16 b Auger spectra of sample No. 1 corresponding to selected depths of the
data shown in Fig. 16 a.
.0 ._ 0
l__j
>. ...... tl)
c Q) ...... c
- 36 -
o~----~----~----~----~----~----~----~~ 0 1000 2000 3000
depth [ n m J
Fig. 17 a Depth profile of sample No. 2.
- 37 -
Onm
...., 3nm U'l ..... c :J
>. ..... 0 ..... ..... 1.51J.m
..c ..... c
L._j
>. ..... U'l c QJ ..... c ·- 3. 7 J.Lm
600 500 400 300 200
kinetic energy [ e V]
Fig. 17 b Auger spectra of sample No. 2 corresponding to selected depths of the
data shown in Fig. 17 a.
-._ 0 ._ --V)
c <IJ -c
- 38 -
0~------~------~~------~--------~------~
0 500 1000 depth [ nm]
Fig. 18 a Depth profile of sample No. 3.
,----, Ul ..... c :::J
>. """' 0 """' .....
..c """' 0
L___j
>. ..... Ul c (!) ..... c
600
- 39 -
500 400
kinetic energy
Onm
3nm
0. 3 !Jm
1. 31J.m
300
[ eV]
200
Fig. 18 b Auger spectra of sample No. 3 corresponding to selected depths of the
data shown in Fig. 18 a.
- 40 -
~ I I I
r---"1 V) ...... c Ti ( L3 M23 M23) + N ( KL23 l23) ::J
>. '- r Ti(L3M23V) 0 I... ......
..0 '-0 1- -
L_j
>. ...... V)
c (I) ...... c
0 I I I
0 250 500 750 1000
depth [nm]
Fig. 19 a Depth profile of sample No. 4.
,........, Ul ...... c :J
~ .... es .... ......
..0 .... es
L-1
~ ...... Ul c Q) ...... c
600
- 41 -
500 400
kinetic energy
13 nm
0. 41Jm
l.O!Jm
300
[ev]
200
Fig. 19 b Auger spectra of sample No. 4 corresponding to selected depths of the
data shown in Fiq. 19 a.
..c
tl)
c Q) ...... c
- 42 -
o~----~----~----~----L-----~----~----~
0 500 1000 1500
depth [nm]
Fig. 20 a Depth profile of sample No. 5.
,..-, Cl) ...... c ::J
~ ..... c ..... ...... .c ..... c
L__j
~ ...... Cl) c CIJ ...... c
- 43 -
600 500 ~00
kinetic energy
12 nm
0.8 J.Lm
1.7J.Lm
300
[ev] 200
Fig. 20 b Auger spectra of sample No. 5 corresponding to selected depths of the
data shown in Fig. 20 a.
..c ..... 0
L__j
-Vl c Cl) -c
- 44 -
0 ~----~----~----~----~----~----~----~--~ 0 1000 2000 3000
depth [nm]
Fig. 21 a Depth profile of sample No. 6.
- 45 -
Onm
,----, 10 nm Cl) ..... c :J
~ '-a '-.....
..0 2.0 !Jm '-a
'---!
~ ..... Cl)
c QJ ..... c
3. 9 iJm
600 500 400 300 200
kinetic energy [ e V]
Fig. 21 b Auger spectra of sample No. 6 corresponding to selected depths of the
data shown in Fig. 21 a.
- 46 -
,--, IJl ..... c: :::J
>. .... 0 .... .....
..c .... 0
L__j
>. ..... IJl c: Q) ..... c:
0 0 2000 4000 6000 8000
depth [nm]
Fig. 22 a Depth profile of sample No. 7.
- 47 -
Onm
,---, 18 nm CJl .......,
c :::::J
>. .... 0 .... .......,
.c t.. 5 JJ.m .... 0
L........J
>. .......,
CJl c CIJ ......., c
8. 5 tJ.m
600 500 400 300 200
kinetic energy [ eV]
Fig. 22 b Auger spectra of sample No. 7 corresponding to selected depths of the
data shown in Fig. 22 a.
- 48 -
r-1 V) ...... c: :;:)
>-1-
d ..... ...... .c 1-
d L_j
>.. ...... V)
c: <U ...... c:
0 0 2000 4000 6000 8000
depth [nm]
Fig. 23 a Depth profile of sample No. 8.
.--, Ul ....... c :J
>. ..... es .... .......
..0 .... 0
L__j
>. ....... Ul c Cl)
....... c
600
- 49 -
500 ~00
kinetic energy
Onm
18 nm
5.1 J.tm
8. 4 tJm
300
[ev]
200
Fig. 23 b Auger spectra of sample No. 8 corresponding to selected depths of the
data shown in Fig. 23 a.
r---1 IJl ...... c :::J
~ .... 0 .... ...... .0 .... 0
l__j
~ ...... IJl c Q.l ...... c
Fig. 24
- 50 -
Ols
Ti2p
Cls
0 200 400 600 800 1000 1200
binding energy [ev]
XPS spectrum of sample No. 7 showing the major photoelectron
transitions obtained with Al Ka radiation.
Fig. 25
- 51 -
Ti 2p
Onm
50 nm
450 460 470 480
binding energy [ eV]
Ti 2p XPS spectra of sample No. 3 at various depths using the Al
K a radiation. Depth values were calculated from the employed ion
current density. Particularly in the zone close to the surface they are
very uncertain due to the unavailability of reliable sputtering rates.
Fig. 26
- 52 -
a} Ti2p
r--1 Ul ~
c :::J
~ ..... 0 ..... ~
..c b} ..... 0
l___j
~ ~
Ul c Cl) ~
c
450 460 470 480
bind in g energy [ e V J
Ti 2p XPS spectrum of sample No. 3 (surface composition): a) raw
spectrum and background caused by inelastically scattered electrons;
b) spectrum after subtraction of background and X-ray satellites. The
hatched peak area corresponds to the intensity of the photoemission.
,....--, Ul ....., c :::J
>-.... 0 .... .....,
..c .... es
L__j
>-....., Ul c Q) ....., c
Fig. 27
- 53 -
a) Ti2p
b)
\ ' ........ ..... -'1', ..,.. I ..... _
I I I
c ) I I I I I
450 460 470 480
binding energy [eV]
Ti 2p XPS spectrum of sample No. 3 (nominal depth 0.4 nm): a) raw
spectrum and background caused by inelastically scattered electrons;
b) spectrum after subtraction of background and X-ray satellites. The
dashed lines indicate the expected courses of the photopeak multiplet
and the plasmon distribution, respectively. The position of the intersect
corresponds to the binding energy at the minimum in Fig. 26 b; c) equi
valent to b, the hatched peak area corresponds to the intensity of the
photoemission.
Fig. 28
>. ..... II) c C1J ...... c
- 54 -
·-·-· -·-·--·-·
Ti2p
·-·-·-·-·-X -·-·-·-N1s
-· -x ·-·-·-·X-· Ti (total) IN ............. Ti (bound to N)/N
o~~----L--~~~~--~---~~---~--J----~~~
0 10 20 30 40 so 60 depth [nm]
3
0 ...... (.j
2 ..... u
E 0 ..... (.j
z -1-
0
Depth profile of sample No. 3 evaluated from XPS measurements. The
intensities of the photopeaks are displayed an the left ordinate
(continuous curves) and the atomic Ti/N ratios are shown an the right
ordinate. - ·- x - ·- gives the total amount of titanium to nitroqen and
·•••• gives the atomic titanium/nitrogen ratio after correction for the
titanium fraction bound to oxygen. This fraction was calculated from
the oxygen signal intensity under the assumption of an average
stoichiometry of Ti01.5·
- 55 -
3
0 ..... c::l ..... u 2 E 0 ..... c::l
z -1-
0 ~--~~~~~~--~--~--~--~--~--~--~--~~ 0
Fig. 29
1000 2000 depth [nm]
Depth profile of the titanium to nitrogen atomic ratio of sample 1'\lo. 7
evaluated from XPS measurements.
,_.., > <IJ
- 56 -
4 57.0 ,.-------..-------.,,...-------,------.---;
0
L._j 456.0 >.
0 0
01 ..... <IJ c <IJ
01 c
0
0 0
-g 455.0 11111 11111
0 --x-x-x-
.0
N ........ ,...,
0.. N
• • . X 0
1- 454.0
• ... /x'" .... ~ ..... ~ _______ ._.__ ...• -.
Fig. 30
0 0.5 1.0 TiNx;X=
Correlation between the Ti 2P3/2 binding energy and the composition of
the titanium nitride TiNx (e frorh XPS depth profile measurements with
sample No. 7; x from XPS depth profile measurements with sample
No. 3; 0 from TiN1 powder before sputtering; + from TiN1 powder
after sputtering; c Iiterature values evaluated from samples having a
partially oxidized surface, and 111 Iiterature values evaluated from
samples having a clean or a cleaned surface (for Iiterature values see
Table 6). Values of x ~ 1 are acceptable because the TiNx phase has
been observed to exist up to x-values of 1.16 (9).
r-1
E c
L--l
...... u Cl> Cl) .... Cl> ...... c
"'-0
c 0
...... Cl)
0 0..
Fig. 31
- 57 -
5000
4000
3000 reaction with N 2
2000
1000
0 2 4 6 8
reaction time [h]
Position of the point of intersect as a function of reaction time at
890 °C (e samples 4-8; A. sample 2, x sample 3).
,.....-, .._ C"'
' "' ::z C"''
~ c
.2 -ro c..... -c QJ '-I c 0 '-I
c QJ C"' 0 c..... -c
8
6
4
2
0
Fig. 32
- 58 -
100 200 300
time [min]
Volumetrie determination of the nitrogen uptake by titanium foils at
890 °C as a function of time (see Table 8).
400
- 59 -
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