SENTECH equipmentfor thin film measurement

•Research&development•Qualitycontrolinproduction•Photovoltaics•LEDs&OLEDs

SpectroscopicellipsometersLaserellipsometersAutomatedmeasurementsystemsReflectometers

Spectroscopicellipsometers

DUV-VIS-NIRspectroscopicellipsometerSENresearch4.0LargevarietyofoptionsforR&DandroutineapplicationsfromDUVtoNIR

• Widestspectralrange 190nm(deepUV)–3,500nm(NIR)• NomovingpartswithSSAprinciple• FullMuellermatrixbyinnovative2Cdesign

• Comprehensiveellipsometrysoftware SpectraRay/4

Cost-effectiveellipsometer

SENproFocusedonspeedandaccuracyforthemeasurementofthinfilms(1nmto15μm)

• Spectralrange370–1,050nm• Goniometerwithpresetanglesofincidence

• StepScanAnalyzerprincipleforhighestmeasurementaccuracy

• Comprehensiveellipsometrysoftware SpectraRay/4

Infraredspectroscopicellipsometer

SENDIRAVibrationalspectroscopicanalysisofthinlayers(dielectriclayers,TCOs,semiconductors,organiclayers)

• IRspectralrange1,700–25,000nm• FullyapplicableFTIRspectrometer• Comprehensiveellipsometrysoftware

SpectraRay/4

SpectroscopicellipsometersoftwareSpectraRay/4User-friendlysoftwarewithrecipeorientedmodeforoperatorsandadvancedmodeforinteractivemeasurementandmodeling

• Supportsvariableangle,multi-experiment,andcombinedphotometricmeasurements

• Ellipsometric,reflection,andtransmissiondata

• Hugelibraryofmaterials‘data,largenumberofdispersionmodels

• Sampleeffects:depolarization,non-uniformity,scattering(Mueller-matrix),backsidereflection

AutomatedellipsometerforR&DSENDUROFast,highlyprecise,andrepeatablemeasurementsinproduction,processmonitoring,andR&D

• Spectralrange290–850nm• Patentedautomaticalignmentsensors• StepScanAnalyzerprincipleforhighestmeasurementaccuracy

• Smallfootprint• Routineapplications• Comprehensiveellipsometrysoftware SpectraRay/4

Laserellipsometers

Multipleanglelaserellipsometer

SE400adv

Characterizationofsinglefilmsandsubstratesinmicroelectronic,photovoltaic,datastorage,displaytechnology,lifescience,metalprocessing,etc.

• Applicationspecificanglesofincidence• HeNelaserof632.8nmwavelength• Measurementprecisionof0.1Å• Highmeasurementspeedallowsforfilmgrowthmonitoringandendpointdetection

CombinedEllipsometryReflectometrySE500advMaximumflexibilityfortheanalysisofthickdielectric,organic,photoresist,silicon,orpolysiliconfilms

• Fastandunambiguousdeterminationofthethicknessoftransparentfilmsupto25µm

• Multipleanglemanualgoniometerforthecharacterizationofsinglefilmsandlayerstacks

Automatedmeasurementtools

EllipsometerforroutineapplicationsSENDURO®MEMSMetrologyplatformforMEMSapplications

• Measurementoffilmthicknessandrefractiveindex

• Cassetteloadingupto8”wafers• Edgegripwaferhandling• Patternrecognition• SECS/GEMinterface

Summary

SENTECH Instruments GmbHSchwarzschildstr. 212489 Berlin, GermanyTel: +49 30 6392 5520Fax: +49 30 6392 5522E-mail: marketing@sentech.dewww.sentech.com

SENTECH Gesellschaft für Sensortechnik mbHKonrad-Zuse-Bogen 1382152 Krailling / KIM, GermanyTel: +49 89 897 9607 0Fax: +49 89 897 9607 22E-mail: sales@sentech.dewww.sentech-sales.de

Reflectometers

FilmThicknessProbeFTPadvFastandeasymeasurementoffilmthicknessinproduction,processmonitoring,andR&D

• Thicknessrange30nm–25µm• Recipeorientedsoftware• Adaptationtoamicroscopeformeasurementsinsmallareas

• Smallspotsize• UVtoNIRspectralrange• Mostaccuratemeasurementbyheightandtiltadjustmentofsamples

• Optionalhighresolutionmapping• Comprehensive,recipe-orientedreflectometersoftwareFTPadv EXPERT

Spectroscopicreflectometer

RM1000/2000 Accuratemeasurementsof reflectance,filmthickness, andopticalconstantsoffilms between5nmand50µm

Thic

knes

s of

si

ngle

film

Thic

knes

s of

fil

ms

< 5 n

m

Thic

knes

s of

fil

ms

> 20

µm

Anal

ysis

of

laye

r sta

ck

n, k

Dis

pers

ion

of

n, k

Band

gap

Com

posi

tion

Uni

form

ity

Con

duct

ivity

Cry

stal

linity

(o

rder

)

Rou

ghne

ss

Impu

ritie

s

Epila

yers

Anis

otro

py

Mat

eria

l gr

adie

nts

SE 400adv ( )SE 500adv ( ) ( )SENpro

SENresearch 4.0

SENDIRA ( ) ( )SENDURO

RM 1000 / RM 2000 ( ) ( ) ( )FTPadv ( )

( )onlyinspecialapplicationsPlease consult also our brochures about thin film metrologyfor crystalline silicon and thin film solar cells.