feanor lp30 laser interferometer

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1 Laser measurement system LP Compact The most compact interferometer on the market. www.feanor.com

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Feanor LP30 Double Frequency Laser Interferometer for Calibration of CMM and Machine Tools

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Page 1: Feanor LP30 Laser Interferometer

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Laser measurement system LP Compact The most compact interferometer on the market.

www.feanor.com

Page 2: Feanor LP30 Laser Interferometer

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Features Applications - small size and low weight - positioning of CNC and CMM - easy transportable - machine geometry inspection - simple operation, easy beam alignment - flatness measurement (also reference) - high resolution - angular positioning - high precision - ball screw drives inspection - low price - maintenaince of machine tools

TECHNICAL DATA

Laser head

- laser type Zeeman HeNe laser with frequency stabilization

- preheating time approx. 20 min - wavelength (vacuum) 632,991354 nm - wavelength accuracy ±±±± 0,02 ppm - short time stability ± 0,002 ppm (1 hour) - output power 400 µW - beam diameter 8 mm - distance between out- and ingoing beam 12,7 mm - laser head dimensions 60x60x245 mm - net weight 1500 g - safety class Class 2 Laser product according to PN-91/T-06700 System work conditions - temperature range 10 – 35 °C - humidity range 10 – 90 % Power supply - voltage 230 VAC, 50 Hz 35 W (during preheating) 10 W (working) PC interface - type RS 232C, USB - data rate 9600 bps (RS 232) Environment compensation Wavelength compensation - manual Environment parameters entered from

keyboard - automatic Through environmental measurement

station.

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Parameters of the environment compensation - air temperature Range 0 – 40 °C, accuracy 0,1 °C - pressure Range 940 – 1060 hPa, accuracy 1 hPa - humidity Range 10 – 90 %, accuracy 5 % - time constants Temperature 3s, pressure 2s, humidity 5s - net weight 100 g Material temperature compensation - manual Temperature of material entered from

keyboard - automatic 3 temperature sensors, calibrated Pt-1000 class 1/3 B, in oil resistant case. - time constant 6 s - net weight 50 g

Laser measurement system LP 30 Compact

SPECIFICATIONS

Measurement Range Resolution Accuracy Distance 0 – 30 m 0,01 µm (0,001 µm)* 0,41 µm/m Velocity 0 – 0,3 m/s (0,1 m/s)* 0.25 µm/s 0,1 % Angular 0 – 3600 arcsec 0,04 arcsec ± 0,2 %

Straightness measurement (with angular optics)

0 – 12 m 0,02 µm (for 100 mm base) ± 1 %

Flatness** 0 – 12 m (±3 mm flatness

measurement range)

0,02 µm (for 100 mm base)

± 0,5 %

Straightness measurement (with Wollastone prism)

0 – 3 m 0.01 µm ± 1 %

Squareness ± 1000 arcsec 0,03 arcsec ± 1 % ± (1,5 arcsec)

Rotary measurements ± 5 ° 0,04 arcsec ± 0,2 % • * max. travel speed for 0.001 µm resolution is 0,1 m/s • ** 0 –15 m range on request, moody method and grid method

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Set up for straightness and squareness measurement

Specifications Straightness measurement

Axial range Resolution Straightness measurement

range

Accuracy

short range 0.1 – 3 m 0.01 µm ±2 mm 1% long range* 0.5 – 15 m 0.05 µm ±0.2 mm 2%

*On request

Squareness measurements

Angle range

Resolution

Accuracy

short range ± 1000 arcsec 0,03 arcsec ± 1 % + (1,5 arcsec)

long range* ± 1000 arcsec 0,03 arcsec ±2% ± (1.5 arcsec)

On request: straightness kit with retroreflector non-overlapping output and return laser beam.

For furter information please visit www.feanor.com

Wollastone prism

Retroreflector Straightness mirror

Pentaprism

Mirror

Laser head interface

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LP30 DOPPLER LASER INTERFEROMETER

Laser interferometer LP30 – 3D in basic configuration for linear displacement, vibrations and velocity measurements, positioning measurement, and with the system for vertical and horizontal straightness measurement. 激光干涉仪LP30 -三维,在基本配置上有直线位移测量,振动,速度测量和定位测量,并提供系统的纵向和横向的直线度测量。 System consists of following 15 components:

1. LH 01 - laser head

2. PS 01 - power supply

3. Optics for linear measurements

(LI 01 – linear interferometer,

LR 01 - linear retro reflector)

4. MM 01 and MM 02 - Two magnetic mounting bases for

reflector and interferometer/reference

5. EC 01 - environmental compensation (total 6

sensors: for temperature, pressure, humidity of

air and 3 material temperature sensors)

6. Software for linear positioning according to standard: ISO 230-2, PN-93/M-55580/81,

NMTBA, VDI/DGO 3441, BSI BS 4656 P16.

7. Software for electronic adjustment of optical axes

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8. Software for two dimensional straightness measurement

9. Software for automatic cosine error compensation

10. Software for linear displacement measurement, slow linear displacement registration,

FFT analysis, measurement of speed.

11. TP 01 - tripod support and positioning system with ball

joint and two axes stage

12. Set of cables:

i. 0.8 m cable connecting laser head with power

supply

ii. 5 m RS cable, 10 m remote control

iii. 3 x 5m temperature sensor cable

13. Case for transport (solid case) containing all components

14. Certificate of laser frequency stability and environmental

sensor calibration, issued by Technical University in EU.

15. User manual in English

The laser interferometer communicates to PC Pentium computer or notebook (no less than 1.5 Ghz, Windows XP/2000), via USB interface. OPTIONAL ACCESSORIES 1. Angular measurement kit and software for pitch and yaw errors measurement and for the strigthness of the base up to 12 meter measurement kit (consists of angular measurement kit : – angular interferometer IK 1, angular retroreflector RK1, 100 mm base 2. Flatness measurement of all types of surface plate - kit and software (beam benders and mirrors, software for flatness measurements) 3. Straightness/parallelism measurement kit of the axes (3 m Wollastone prism and mirrors + software) 4. Straightness/parallelism measurement kit of the axes (10 m Wollastone prism and mirrors + software)* 5. Squareness measurement 3 m kit + software (consists of optical square and additional accessories) - for measurements setup 3 is required.

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6. Angular positioning (rotary measurements) kit – on request , the time of delivery and the price will be the subject of negotiation. (2” angular positioning accuracy) LP30 系统包括以下15个组成部分: 1 。 LH01 -激光头 2 。 PS01 -电力供应 3 。线性光学测量(L/01 -线性干涉,LR0 1-线性反向反射) 4 。 MM01和MM02-磁安装基地 5 。EC 01 -环境补偿(共计6个传感器:温度,压力,湿度,空气和3个材料温度传感器) 6 。线性软件定位标准(中文):ISO230-2,PN-93/M-55580/81,NMTBA,VDI /DGQ 3441,BSI BS 4656 p16 7 。电子调整光学轴线软件(中文) 8 。两维直线度测量软件(中文) 9 。自动余弦误差补偿软件(中文) 10 。线性位移测量软件, 慢速线性位移登记, FFT的分析,速度测量(中文) 11 。TP01 -三脚架支持和定位系统附带球窝接头和两条轴线平台 12 。一套电缆: 一 。0.8米电缆,连接激光头与电力供应 二。 5米的RS电缆, 10米遥控 三。 3 × 5米温度传感器电缆 13 。案件运输(实例) 14 。激光频率稳定度和环境传感器校定证书,由波兰,德国或意大利的高等技术院校颁发, 或者是中国计量研究所(北京)颁发。 15 。英语用户手册 该激光干涉仪能连接到PC Pentium电脑或笔记本电脑(不低于1.5 GHz兆赫/分钟,Windows XP/2000)与RS232或USB串行接口兼容。 可选配件可选配件可选配件可选配件 1 。角测量工具包和音调及偏航错误测量软件,用于该基座(高达十二米测量工具包)的测量,(包括 角度测量包, -角干涉IK1 ,角逆向反射rk1,1 00毫米基座) 2 。所有类型表面板的平面度测量-测量包和软件(梁弯管机和后照镜,平面度测量软件) 3 。直线/平行测量试剂盒的轴线( 3米wollastone棱镜和反射镜+软件) 4 。直线/平行测量试剂盒的轴线( 10米wollastone棱镜和反射镜+软件) 5 。矩形测量3米包+软件(包括光学平方和额外的配件) -测量一个需要3次安装 6 。角定位(旋转测量)试剂盒-根据要求,送货的时间和价格将由谈判决定。 ( 2 “角的定位精度)

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保修期:上述价格包括保修的费用,保修期是12个月 付款方式:装运前全额付款。 交货:订单日期4 -5周后(标准配置+选项1+2 ) 。 可选项目4和5 :六周后交货。 * 特殊要求 感谢您对我们产品的兴趣。技术信息可在我们的网站上查询。网址是: www.feanor.com/laser_uk.htm 如需更多信息,请联系: 卢卡G. Bochese, 意大利电话:00393484121280 意大利传真:003902700532664 中国电话:13717978084 E-mail: [email protected], MSN: [email protected], Skype: feanorou, QQ: 873993643

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Laser measurement system LP 30 Compact

The most compact interferometer on the market

www.feanor.com 激激激激激激LP30 -三三三三三

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产产产产品品品品特特特特产产产产 产产产产品品品品应应应应用用用用 规规规规规规规 定定定三定规CMM 易易易易 机机机机机机 操操操操,容易容容容容容 平平平激激 高高高高规容高高 角定定 三三激激 滚滚滚滚机机 规低低 应应应应规三应 技技技技术术术术技技技技据据据据 激激激激光光光光头头头头 激激激激 Zeeman HeNe 塞塞塞塞激激塞高塞定 预预预预 20高分 波波(真真) 632,991354纳纳 波波波平 ±±±± 0.02 ppm 短预塞定高 ± 0.002 ppm(1规预) 易输输高 400µ瓦瓦 激容光光 8毫纳 易输易输激容输输 12.7毫纳 激激激激激 60x60x245毫纳 净规激 1500克 安安安安 2安激激级级 (三PN-91/t-06700) 系系系系统统统统工工工工系系系系条条条条件件件件 温平温温 10 - 35 °C 湿平温温 10 - 90 %

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电电电电力力力力供供供供应应应应 容电 230 VAC,50赫赫 35瓦瓦(预预预) 10瓦瓦(工操预)

界界界界面面面面PC 类激 RS 232 c,USB(按按按按) 三三数易高 9600bps(RS 232) 环环环环境境境境测测测测试试试试 波波波波波波波波测测测测试试试试 手工操操 从从从易输从从从三 自自 易应从从运运 参参参参技技技技的的的的环环环环境境境境测测测测试试试试 真空温平温温 0 - 40 °C,容高平0, 1°C 电压温温 940 - 1060hPa,容高平1hPa 湿平温温: 10- 90 %,容高平5% 预预时三 温平3秒, 电压2秒,湿平5秒 三平 φ 50x 55毫纳 净规激 100克 材材材材料料料料温温温温度度度度测测测测试试试试 手工 从从从易输定从从定温平 自自 容高平-3个温平数个个,校容1000Pt, 类类1/3B,温温0 -40 °C,防防 预预时三 3秒 净规激 50克 规规规规格格格格 Measurement 测测测测量量量量类类类类型型型型

Range 范范范范范范范范

Resolution 分分分分分分分分率率率率

Accuracy 准准准准准准准准度度度度

Distance 输输

0 – 30 m 0,01 µm (0,001 µm)* 0,41 µm/m in air(真空空) 1,5µm/m for steel(钢钢空)

Velocity 速平

0 – 0,3 m/s (0,1 m/s)* 0.25 µm/s 0,1 %

Angular 角平

0 – 3600 arcsec 0,04 arcsec ± 0,2 %

Straightness measurement (with angular optics) 光平激激(易应角平激运运个)

0 – 12 m 0,02 µm (for 100 mm base)

± 1 %

Straightness measurement (with 3D measurement) 光平激激(易应三三激激)

0-10 m 0.1 µm ±5 µm x L** L in m

Flatness(平平激激) 0 – 12 m (±3 mm flatness measurement

range) 平平激激温温

0,02 µm (for 100 mm base)

± 0,5 %

Straightness measurement (with Wollastone prism)

0,1 – 3 m 0,8-10 m

0.01 µm 0.1 µm

± 1 % 2,5 %

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光平激激 (易应Wollastone棱棱) Squareness (Wollastone prism) 矩矩激激(易应Wollastone棱棱

± 1000 arcsec 0,03 arcsec ± 1 % ± (1,5 arcsec)

Squareness (3D measurements) 矩矩激激(易应三三激激)

0-6 m 0.1 acsec 2”

Rotary measurements(旋旋平激激)

± 5 ° 0,04 arcsec ± 0,2 %

对对对对(*) 0.001µµµµ 测测测测量量量量分分分分分分分分率率率率测测测测高高高高速速速速度度度度是是是是m 0.1m/s 在在在在(**) 0 - 范范范范范范范范范范范范可可可可行行行行,,,,对对对对角角角角线线线线方方方方对对对对和和和和网网网网格格格格对对对对对对对对可可可可行行行行 15m

Set up for straightness and squareness measurement (Wollastone) 设设光平规矩矩激激(沃沃沃沃) Specification 规规规规格格格格

Straightness measurement

直直直直度度度度测测测测量量量量

Axial range 距距距距距距距距范范范范范范范范

Resolution 分分分分分分分分率率率率

Straightness measurement

range 光平激激温温

Accuracy 准准准准准准准准度度度度

short range 短短短短短短短短

0.1 – 3 m 0.01 µm ±2 mm 1%

long range* 远远远远短短短短 *

0.5 – 10 m 0.05 µm ±0.2 mm 2%

*On request *额额额额外外外外项项项项目目目目

Squareness

measurements矩矩矩矩形形形形测测测测

量量量量

Angle range 角角角角度度度度范范范范范范范范

Resolution 分分分分分分分分率率率率

Accuracy 准准准准准准准准度度度度

short range 短短短短短短短短

± 1000 arcsec 0,03 arcsec ± 1 % + (1,5 arcsec)

long range* 远远远远短短短短

± 1000 arcsec 0,03 arcsec ±2% ± (1.5 arcsec)

On request: straightness kit with retroreflector non-overlapping output and return laser beam.

额额额额:带带带带带带定带规带定易输规易输定激激容定光平激激带带

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On request: straightness kit with retroreflector non-overlapping output and return laser beam.

For furter information please visit www.feanor.com

Wollastone prism

Retroreflector Straightness mirror

Pentaprism

Mirror

Laser head interface