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Research & TechnologyResearch & Technology Airborne Systems
www.project-nanoRF.com
NANO RFExploration of the potential of 45nm CMOS for
Analog/RF applications
Afshin ZIAEIThales Research & Technology
2 /2 / General information
Fact & Figures
� Nano-RF: Carbon Based Smart Sysytem For Wirelles Application
� FP7-ICT-2011-8
� Challenge 3 : Alternative Paths to Components and Systems
� ICT-2011.3.1: Very advanced nanoelectronic components : design, engineering, technology and manufacturability
� Industrial Priority: Beyond CMOS technology
� Grant Agreement n°318352
� Total cost: 6 249 k€
� FP7 funding: 4 345 k€
� 577 person-months
� 13 European partners
� 8 countries
� 2 majors, 2 SMEs, 9 academics
� Duration: 36 Months
� www.project-nanorf.com
3 /3 / General information
Consortium
4 /4 / General information
Context
� Nano-RF proposes manufacturable miniaturized devices and module based on CNTs and graphene with enhanced performance for application in communication
� Carbon Nanotube (CNT):
� CNT FET are attractive for PA and LNA in the 2-80 GHz range.
� CNT RF NEMS switches for SPDT : Low actuation voltage, few ns for switching time, high power handling
� CNT based antennas : excellent impedance matching circuit to go from free space to high-impedance devices.
� CNTs as vertical interconnects in 3D integrated systems : higher current carrying capacity, better high temperature stability, and better thermomechanical reliability
� Graphene :
� Graphene FET transistor having performances beyond the state of the art and to use it to fabricate a LNA
� To use the nonlinear electrical properties of graphene to design and fabricate a microwave mixer and a detector
� To use graphene as a substrate for antennas and to fabricate an integrated receiver on graphene at the wafer level
5 /5 / General information
Objectives
� Nano-RF Mission is to develop a new approach for futur generation of T/R modules by using CNT and graphene technlogies leading to a revolutionary new « nano T/R module » working at very high frequenies (up to 80GHZ)
� Objective 1: explore and evaluate Explore and evaluate CNT properties operating in arrays, as solid-state FETs and RF NEMS, in the 2 to 80 GHz frequency range
� Objective 2: Explore and evaluate graphene properties as solid-state FETs, mixers and detectors in the 2 to 80 GHz frequency range
� Objective 3: Develop, calibrate and validate CNT NEMS and CNT FET and graphene FET models for the design of microwave circuits
� Objective 4: Introduce a new class of antennas based on CNTs and graphene
� Objective 5: Demonstrate the concept of NEMS RF to introduce more versatility and increased performance within the future analog RF front-end
� Objective 6: Fabrication of capacitive CNT NEMS switches for power application
� Objective 7: Demonstration of CNT vertical interconnects in 3D integrated systems
� Objective 8: Demonstration of a graphene detector able to demodulated RF signals
� Objective 9: Demonstration of a LNA based on graphene
6 /6 / SoA & Goals
T/R module for active antenna
Core chip Asic
HPA
CirculatorLimiter-LNA
Driver
CORE CHIP
ϕ
ATT LNA
DR HPA
External LNA
1 or 2 Chips
Control ASIC
MEMS SPDT
Antenna
Multilayer Ceramic
We will replace circulator by RF-NEMS SPDTs
and also HPA and LNA by CNT/Graphrene transistor
7 /7 / SoA & Goals
1st demonstrator:Reflect array antennas for wake vortex detection radars and weather radars
The major demonstrators :
CNT FET
CNT RF switch
CNT Antenna
8 /8 / SoA & Goals
2nd demonstrator:Graphene based receiver module
Graphene FET based mixers (Chamers University)
graphene transistor
Graphene detectors
9 /9 / Highlights & Achievements
WP organisation
10 /10 / Highlights & Achievements
System architecture
� Review of potential application
� Identification of the potential application
� Specification of the operationg frequency, bandwidth have
been specified for each application
� Identification of T/R modules specifications
� Idendification of CNT interconnect specification
� Dimension, electrical conductivity, HF performances,
Reliability
� Demonstrator specifications
� Measurement method have been defined
� Definition of the test benches and meseaurement
techniques to fully characterise the demonstrators
CNTs bundles
11 /11 / Highlights & Achievements
Design activities
� Design of CNT FET (for LNA, PA and mixer)
� Design CNT RF switch
� First design and simulation of the CNT
� First design and simulation graphene antenna60GHz
CNT antenna
Graphene antenna
12 /12 /Highlights & Achievements
Fabrication activities
� Devellopement of various recipes for CNTs growth
� Optimization of the horizontally CNTs growth for CNT FET
� Synthesis of graphene by CVD, SiC decomposition and
exfoliated
� Raman Measurement for comparison between graphene
availaible on the project
� Graphene FET fabrication and first DC I-V measurements
Single-walled semiconductive
CNT growth for FET fabricationv
100 nm
[a]Exfloliated graphene
CVD graphene
Raman Measurement
Graphene FET
DC I-V characteristics
13 /13 /Conclusion
System architecture� Review of potential application
� Identification of T/R modules specifications
� Idendification of CNT interconnect specification
� Demonstrator specifications
Design activities� Design of CNT FET (for LNA, PA and mixer)
� Design CNT RF switch
� First design and simulation of the CNT
� First design and simulation graphene antenna
Fabrication activities� Developement of various recipes for CNTs growth
� Optimization of the horizontally CNTs growth for CNT FET
� Synthesis of graphene by CVD, SiC decomposition and
exfoliated
� Raman Measurement for comparison between graphene
availaible on the project
� Graphene FET fabrication and first DC I-V measurements