exhaust system
DESCRIPTION
Exhaust system. TERY CHEN 927260. Exhaust System. General Exhaust System (GEX) Acid Exhaust System(SEX) CVD Exhaust System(CVD EX.) AMX Exhaust System (AMX) Solvent Exhaust System(SOX):. Component of Exhaust System. 1. General Exhaust System(GEX): - PowerPoint PPT PresentationTRANSCRIPT
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Presentation Title
Exhaust system TERY CHEN 927260
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Acer Display Technology
Presentation Title
Exhaust SystemExhaust System
General Exhaust System (GEX)
Acid Exhaust System(SEX)
CVD Exhaust System(CVD EX.)
AMX Exhaust System (AMX)
Solvent Exhaust System(SOX):
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Presentation TitleComponent of Exhaust SystemComponent of Exhaust System
1.General Exhaust System(GEX):Inert Gas, N2, Air, Hot Air, CO2 , N2O etc will be included
2.Acid Exhaust System(SEX) The corrosive gas, toxic gas , acid etc will be includedHF, HCl, SF6, BCl3, Cl2, CH3COOH, H3PO4, NHO3, NF3
3.CVD Exhaust System(CVD EX.)Flammable gas etc. will be included
NH3, PH3/H2, SiH4, NF3, NO2.
4.AMX Exhaust System (AMX) a.Stripper Exhaust System: Stripper
b.Alkalize Exhaust System: NaOH , NH3, Developer
5.Solvent Exhaust System(SOX): IPA, NBA
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Presentation Title
Item Number Capacity RemarkGeneral Exhaust 5+1 275,000 m3/h
Acid Exhaust 3+1 150,000 m3/h
Ammonia Exhaust 1+1 50,000 m3/h
Solvent Exhaust 1+1 58,000 m3/hCVD Exhaust 2+1 36,000 m3/h
Exhaust Air Volume
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Presentation Title
General ExhaustDry Exhaust : (<50C) (GS:Galvanize Steel)Wet Exhaust : Moisture Exhaust (PPS:Polypropylene)High Temperature Exhaust: (>50C) (GS+Insulation)
Acid ExhaustAcid Exhaust System(SEX) (PPS+Sprinkler)
CVD Exhaust System(CVD EX.) (SUS Spiral DUCT)
Amonia Exhaust.Stripper Exhaust System (SUS Pipe + Insulation)
Alkalize Exhaust System (PPS+Sprinkler)
Solvent ExhaustSUS Pipe
Duct MaterialDuct Material
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Presentation Title
GE
X F
low C
hart
一般排氣風車
一般排氣風車
一般排氣風車
惰性氣體房
(ANNEAL)退火機
(photo)-黃光 熱排氣
(SUPTTER)濺鍍機
(TEST)測試機
製程真空排氣
-去光阻機 熱排氣
-乾蝕刻機 熱排氣
玻璃更換機
一次拋光機
玻璃加卸載機
大氣
清洗機
塗佈機
ARRAY層
Rubbing
液晶間隔塗佈機
液晶密封機
鑽模壓製機
液晶密封烤箱機
二次拋光機
面板退火機
偏光板機
液晶密封烤箱機
雷射切割機
液晶充填烤箱機
液晶密封烤箱機Cell層
清潔真空排氣 一般排氣風車
大氣
大氣
大氣一般排氣風車
一般排氣風車
大氣
大氣
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Presentation TitleGeneral Exhaust SystemGeneral Exhaust System
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Presentation TitleSEX & CVD EX. Flow Chart
毒性及易燃性氣體房
乾蝕刻機
SIN蝕刻機
化學氣相沉積機
ITO蝕刻機
AL /M o蝕刻機
SiO蝕刻機大氣
清洗機
酸洗槽
CVD廢 氣 排 氣
化學酸房及酸儲藏室
毒性氣體房
化學氣相沉積機
濾袋式粉塵收集器
洗滌塔
化學吸附室
風車
風車
風車
濾袋式粉塵收集器酸 廢 氣 排 氣
ARRAY層 洗滌塔
洗滌塔
風車
風車
風車
大氣
大氣
燃燒室
洗滌塔 風車大氣
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Presentation TitleAcid Exhaust SystemAcid Exhaust System
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Presentation TitleCVD Exhaust SystemCVD Exhaust System
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Presentation Title
NH3氣體房
化學鹼房及儲藏室
去光阻機台
顯影機台
大氣鹼廢氣排氣
洗滌塔
洗滌塔
風車
風車
大氣
冷凝器
AMX Exhaust System Flow Chart
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Presentation TitleAmmonia Exhaust SystemAmmonia Exhaust System
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Presentation Title
Solvent Exhaust System
有機清洗槽
有機清洗槽
黃光鍍膜機
去光阻機台
有機廢氣處理設備
大氣
有 機 廢 氣 排 氣
ARRAY層
CELL層
化學有機房及儲藏室
去光阻液儲藏室
風車
風車
大氣
(SUS Spiral Duct + Sprinkler)
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Presentation TitleSolvent Exhaust SystemSolvent Exhaust System
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Presentation Title
Thank youThank you
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Presentation TitleVOC Abatement SystemVOC Abatement System
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Presentation Title
Scrubber 之結構圖
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Presentation Title
SCRUBBER( 主體結構圖 --1)
Exhaust Air
隔柵網
****** *********** ****** ***********
循環水箱 (Re-circulation Tank)
****** ********* ****** ********** ***** ***********
******* ********** ****** *********** ************************ ********* *****
************ ***** ***********
****** ********** ***************** ******************
****** *********** ****** ************ ***** ******************* ***********
****** ************
隔柵網
FAN
Demister( 除霧層 )
******************
填充層 ( Scrubber Package ) 噴嘴管路及噴嘴
(Spiral nozzles)
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Presentation TitleSCRUBBER( 主體結構圖— 2)
循環水泵 (Re-circulating Pump)
循環水壓力計
(Nozzle Manometer)
1 2
洗滌塔壓差計
(Scrubber Manometer)
FAN
Exhaust Air酸鹼度檢測計
(PH Sensor) 導電度檢測計
(Conductivity Sensor)
Dosing Tank
加藥管注入口
(Ball valve for Chemical Inlet)
Pump
(Spiral nozzles)
液位檢測計
(Level Sensor)
ab
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Presentation Title補水閥
排水閥
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Presentation Title
Scrubber 之控制圖
a
b
BA
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Presentation Title1. 為氣體行進之方向;經風管所吸取之氣體 (酸 OR 鹼 ) 會先經由隔柵網進入填充層,在填充層中經由
拉西環表面積所附著的水與其通過之氣體做附著效應,使其化學物質能夠在此層做一沉澱沖洗之效果,而
通過填充層後之氣體隨之進入除霧層顧名思義該層主要是將氣體中之水分稀釋出來,同樣得也是藉由與拉
西環間的附著關係將其水分稀釋出來 ( 如果含水量過則所排出之氣體會呈白色煙霧狀 ) ,最後再經由 FAN 的
運轉將氣體排入大氣之中。 2. 為水循環流動之方向;水經由內循環 pump 抽打至洒水頭,再經散射的方式 ( 約 150 度 ) 平均的噴灑在
拉
西環上面
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Presentation Title
Acid Design Basis Data
1.Scrubber Type : Acid, Horizontal
2.Airflow : 50,000 CMH
3.Intake Air Speed Max : 2.5 m/s
4.Inlet Temperature : 23℃
5.Inlet concentration : 20ppmv of HCl
6.Removal Efficiency : 99% HCl
7.Dosing Chemical : NaOH
Scrubber Performance Calculation
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Presentation Title
洗滌塔尺寸設計
填充材寬度與高度氣體流量= 50,000 CMH = 13.89 m3/s
氣體流速= 2.5 m/s
有效交錯截面積= 13.89/2.5 = 5.56 m2
取寬度為 3 m ,則高度= 5.56/3 = 1.85
實際設計取高度為 2.3 m
則實際氣體流速= = 2.01 m/s
Scrubber Performance Calculation
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Presentation Title
填充深度計算氣體質量流率 (G )
23℃ 下之氣體流量= 50,000×(273/(273+23))
= 46,114.86 CMH
在 1atm 、 23℃下,空氣的密度= 0.0744 lb/ft3
= 1.2 kg/m3
則氣體質量流率= 46,114.86×1.2/(3×2.3)
= 8,020 kg/m2 . hr
= 1,643 lb/ft2 . hr
Scrubber Performance Calculation
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Presentation Title
液體質量流率 (L )
選擇標準液體質量流率為 3,000 lb/hr . ft2
( 6 gpm/ft2 )則 HTU (for HCl/NaOH) = 3× L -0.48× G 0.33
(每轉換單元的高度)= 3×3,000 -0.48×1,643 0.33
= 0.74 ft
而 NTU ( 數換單元的數目 ) = ln (20/0.2)
= 4.6
則填充深度= 0.74×4.6 = 3.4 ft = 1 m (< 1.2 m)
( HTU for H2SO4 = 0.85 ,最小填充深度 3.91 ft )
Scrubber Performance Calculation
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Presentation Title
最小循環水量
液體質量流率= 3,000 lb/hr . ft2
= 6 gpm/ft2
灑水面積= 3×1.2 = 3.6 m2
最小循環水量= 6×3.6×10.764 gpm
= 232.5 gpm = 880 l/min
循環泵流量= 80m3/hr = 1,333 l/min ( > 880 l/min)
Scrubber Performance Calculation
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Presentation Title
加藥量計算
HCl+NaOHNaCl+H2ONominal flow rate :50,000×(273/(273+23))= 46,115 CMH
HCl的摩爾流率 46,115m3/hr×20/106(ppm)×36.5(kg/kg-mole)/22.4(m3/kg-
mole)
= 1.5 kg/hr=0.041 kg-mol/hr
NaOH 消耗量 1 mol HCl 須要 1 mol NaOH 來反應 0.041×1×40 = 1.64 kg/hr(100%NaOH) = 8.2
kg/hr(20%NaOH)
= 6.8 L/hr (20% NaOH 的比重 =1.21)
Scrubber Performance Calculation
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加藥量計算
Nominal flow rate :50,000×(273/(273+23))= 46,115 CMH
NH3的摩爾流率 46,115m3/hr×20/106(ppm)×17(kg/kg-mole)/22.4(m3/kg-mole)
= 0.7 kg/hr=0.041 kg-mol/hr
H2SO4 消耗量 2 mol NH3 須要 1 mol H2SO4 來反應 0.041×1/2×98 = 2.0 kg/hr(100%H2SO4) = 10
kg/hr(20%H2SO4)
= 8.5 L/hr (20%H2SO4 的比重 =1.18)
Scrubber Performance Calculation
2NH3+2H2O→2NH4OH+H2SO4→(NH4)2SO4+2H2O
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Presentation Title
潤溼因子 (Humidity factor)
潤濕因子:洗滌循環水量/(填充物比表面積 × 洗滌塔填充段水平截面積),單位為 m2/hr
Hf = 80 / (108 × (3 × 1.2 )) = 0.21 m2/hr ( >0.1 m2/hr)
循環水箱之 pH值酸排循環水箱之 pH 值設定為 8 (範圍 7
~ 9 )鹼排循環水箱之 pH 值設定為 6 (範圍 5
~ 7 )