epitaxy equipment for more-than-moore 2021
TRANSCRIPT
From Technologies to Markets
© 2021
From Technologies to Markets
Epitaxy Equipment for More-Than-Moore
2021
Market and Technology
Report
From Technologies to Markets
Sample
22
• Glossary and definition 2
• Table of contents 5
• Report objectives 8
• Report scope 9
• Report methodology 13
• About the author 14
• Companies cited in this report 15
• What we got right, what we got wrong 16
• Who should be interested by this report 18
• Yole Group’s related reports 19
• Three-Page Summary 21
• Executive summary 25
• Introduction and context 63
o Overview of Semiconductor Manufacturing
o Moore vs More-than-Moore approaches
o Introduction to epitaxy
• Epitaxy market trends 86
o Epitaxy drivers and requirements
o Epitaxy market trends by application
o Epitaxy market trend by substrate material type
• Epitaxy equipment market trends 120
o Overview of deposition technologies
o Introduction to epitaxy equipment types
o Epitaxy equipment trends by application
o Epitaxy equipment trends by material type
• Epitaxy equipment market forecast (2020 – 2026) 155
o Overall epitaxy equipment market in units and revenues
• By application
• By substrate type
• By epitaxy equipment type
• By epilayer
• Epitaxy equipment vendors – competitive landscape 186
• Epitaxy equipment vendor ranking and market share
• By equipment type
• By semiconductor applications
• By substrate type
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TABLE OF CONTENTS
Part 1/2
33
o Epitaxy industry news (by equipment type)
o Product portfolio
o Focus on China
• Chinese epitaxy equipment vendor positioning
• Brief look on epi-houses and supply chain 246
o By equipment type
o By application type
In-depth look on major applications for epitaxy equipment market
• Photonics 265
o Introduction to photonics devices
o Light Emitting Diodes (LEDs)
• Epitaxy driver, requirements, and challenges
• Focus on Epitaxy of MicroLEDs
o Laser Diodes (LDs)
• Epitaxy challenges
• Epitaxy equipment choice
o Epitaxy equipment forecast for photonics (in units & revenues)
• Split by equipment type
• Split by substrate type
• Power 320
o Introduction to Power devices
o Power GaN market
o Power SiC market
o Power Si market
o Epitaxy drivers, requirements and challenges
o Epitaxy equipment of choice
o Epitaxy equipment forecast for power (in units & revenues)
• Split by equipment type
• Radio-Frequency (RF) 375
o Introduction to RF components
o RF device trends
o RF epitaxy related news
o Epitaxy challenges
o Epitaxy equipment forecast for RF (in units & revenues)
• Split by equipment type
• Split by substrate type
• Conclusion and perspectives 394
• Appendix 402
• Corporate presentation 406
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TABLE OF CONTENTS
Part 2/2
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Biography and contact
ABOUT THE AUTHOR
Vishnu KUMARESAN, Market & Technology Analyst, Equipment and Materials for Semiconductor Manufacturing
Vishnu KUMARESAN, PhD., is a Technology & Market analyst in the Semiconductor Manufacturing Team of Yole Développement, France. He focuseson the semiconductor manufacturing domain, covering both equipment and material segments. His scope includes mainstream microelectronicapplications as well as More-than-Moore applications. Having lived and worked in four countries, he has more than 11 years of internationalexperience in the electronics industry, covering semiconductor, display, and software technologies. Prior to joining Yole, he worked as an Epitaxyengineer at Aledia, an advanced startup in the MicroLED display industry and has previously gained corporate experience at IMEC, CNRS, Saint-Gobain and Infosys.
Vishnu obtained his PhD in Epitaxy, Material Physics & Chemistry from Sorbonne University, France, and his Masters in Microelectronics from NationalUniversity of Singapore and Technical University of Munich, Germany.
Email: [email protected]
5
OBJECTIVE OF THIS REPORT
Epitaxy Equipment has huge market opportunities in More-than-Moore era
• With in the scope of More-than-Moore applications, Si along with non-classical substrates such as GaAs, GaN, SiC and InP aregrowing at important CAGRs.
• Choice of these materials come with stringent requirements in terms of the material quality and device performance. This directlytranslates to ultra-pure thin film and nanostructure growth using epitaxial systems like MOCVD, MBE and HTCVD.
• Choice of such equipment type and model not only depends on technical constraints, but also on the fab dynamics such as ROI,Equipment uptime,THP, etc.,
• The objective of this report is to provide a global picture of the Epitaxy equipment technology and market opportunities available inMore-than-Moore era.
Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
Present the current status of epitaxy equipment technologies (by equipment type, epi-material, and application)
Provide detailed information about different semiconductor applications addressed by epitaxy growth technology
Furnish an overview of the technological trends involving epitaxial layers
Provide market metrics for epitaxy equipment used in MtM semiconductor applications
A snapshot of the equipment vendors competitive landscape and explore supply-chain synergy by identifying key players in epitaxy field
66Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
A UNIQUE AND PROVEN METHODOLOGY
› Market segmentation
› Per application
› Per technical needs
› Per technology
adoption and behavior
of the supply chain
MARKET › Top to bottom
› Industry organizations
› Aggregate of market forecasts at
system and device levels up to the
wafer and equipment
› Bottom-up
› Ecosystem analysis
› Aggregate of all players’ revenue at
device, module and system levels
› In unit, dollar and wafer
BOTTOM-UP
& TOP-TO-BOTTOM
› Technology analysis
› Competitive landscape
› Technology comparison
› Reverse costing
› Reverse engineering
› Technology life cycle
› Development cycles
› Adoption by the supply chain
› HV manufacturing and evolutions
TECHNOLOGYThanks to its marketing approach, its
understanding of the industrial and
technical environment and information
collection, Yole Développement can assist
companies at every stage of their growth.
7About Yole Développement | www.yole.fr | ©2020
COMPANIES CITED IN THIS REPORT
Aixtron, Aledia, AMEC, Applied Materials, ASM International, CSD Epitaxy, DCA Instruments, Epiluvac, Epistar, II-VI, Infineon, IntelliEPI, IQE, LPE S.p.A, MBE Komponenten, Naura, Nexperia, NuFlare, Onsemi, Power Integrations, Riber, SOITEC, STMicroelectronics, Taiyo Nippon Sanso, Tokyo Electron
(TEL), TOPEC, TSMC, Veeco, VPEC, Wolfspeed, X-Fab and more.
Non-exhaustive list of companies
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88
• Compound semiconductors are widely used for photonics in laser diodes and in displays, RF and power electronics devices.
Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
SCOPE OF THIS REPORT
Types of equipment and substrates covered
Epitaxy equipment types
CVD-based
APCVD HTCVD LPCVD MOCVD PECVD
HVPE LPE MBE
Equipment type Substrate type
GaAs
X active layer
InP
X active layer
SiC
SiC active layer
SiC
GaN active layer
Si
Si active layer
Si
GaN active layer
Sapphire
GaN active layer
GaN
GaN active layer
99Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
SCOPE OF THIS REPORT
Application and equipment type segmentation used in this report
Applications
Photonics
LEDs
Lasers *
RF
Power
Si Power
SiC Power
GaN PowerMEMS
Equipment
MOCVD
MBE
HTCVD
Si HTCVD
SiC HTCVD
* Though Laser Diodes are emitting devices and Photodiodes are detecting/receiving devices, for simplicity purpose we have grouped Photodiodes under
laser diodes as equipment market size for PDs is relatively small.
1010
• Key investors who are interested in understanding the market position of epitaxy equipmentplayers and their growth prospects.
• Epitaxy equipment providers and Epitaxy equipment parts providers who are looking forinformation regarding the epitaxy equipment market sentiment and technology trends.
• Epi-houses, foundries and other companies involved in the epitaxy business who are looking toidentify equipment solutions available for their applications and material systems.
• Substrate manufacturers whose products would be immediately exposed to the epitaxy step by anepi-house or foundry.
• Device suppliers looking for opportunities to diversify their product portfolio in a related epitaxybusiness.
• R&D labs and start-up companies that have developed an innovative technology solution and wishto understand epitaxy equipment models available in the market.
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WHO SHOULD BE INTERESTED IN THIS REPORT?
1111
• 2020-2026 epitaxy growth equipment market forecast (by application, substrate type, equipment typeand epi-material)
• 2020 epitaxy equipment market share Competitive landscape for equipment vendors by epitaxyequipment type, epi-material type, and application type
• Focus on China: sales in China for major equipment vendors and a look at their counterparts fromChina
• Overview of major players and supply chain using epitaxy equipment (by application, by substrate typeand by epi-material)
What’s new:
• Epitaxy equipment portfolio for major epitaxy equipment vendors
• Focus on China: sales in China for major equipment vendors and a look at their counterparts fromChina
• Substrate diameter trend for each epitaxy equipment type (MOCVD, HTCVD and MBE)
• Competitive landscape based on equipment vendor positioning (by application and by epi-material type)
• Equipment forecast (2020 – 2026) breakdown by epi-material, substrate sizes and equipment type
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KEY FEATURES
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APPROACHES TO IMPROVE SEMICONDUCTOR DEVICES
Technology node (nm)
Moore
’s L
aw -
Min
iatu
riza
tion
14nm
7nm
22nm
32nm
45nm
65nm
90nm
130nm
RF devices Power devicesMEMS & Sensors LED Photonics
More-than-Moore: Technology and substrate diversification
In More-than-Moore approach (MtM approach), the PPAC factor is improved
not only by scaling but by using non-Si materials and by heterogeneously
integrating them with one another.
In this report, we focus only on MtM market
In such a race for Price-
Performance-Area-Cost
(PPAC) improvement, the
mainstream micro-
electronic application mainly
use scaling as the approach
to improve PPAC factor
following Moore’s law
Logic Memory
Functionality180nm
28 nm
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SUBSTRATES USED IN MORE THAN MOORE SPACE
Applications Substrates or supports that are useful in More-than-Moore space
MEMS
and
Sensors
CIS
POWER
RF
PHOTONICS
Sapphire
Si SOI
LED
Laser
Si SOI
Si
Si SOISiC
GaAs
GaAs
GlassSiGe Ceramic
SiC Sapphire
SiC Si
InP
GaN
In high volume production In volume production Under development/feasibility study
Ga2O3
SiC
GaAs InP
GaNInP AlN
GaN Sapphire SiCSi
1414Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
SUBSTRATES THAT NEED EPITAXIAL LAYER
By epitaxial material and corresponding applications
Applications
Si SiC GaAs Sapphire GaN InP Ga2O3 AlN GaSb
MEMS
Power
RF
Photonics
LED
Laser
VCSEL*
EEL
Main application for this material In production Under development/feasibility study
Si
Si active layer
Si
GaN active layer
SiC
SiC active layer
SiC
GaN active layer
GaAs
X active layer
Sapphire
GaN active layer
GaN
GaN active layer
InP
X active layer
GaSb
GaSb active layer
AlN
X active layer
Ga2O3
X active layer
GaAs
GaSb active layer
* GaSb and InP layers mentioned under VCSEL are mainly used for Photodiode applications
15
EPITAXY EQUIPMENT MARKET
By epi-material : 2020 - 2026
By 2026, GaN is forecasted to remain the epi-material type with highest revenue. However SiC is expected to grow the fastest with a CAGR of 10%, due to the strong demand in Automotive and Industrial market segments.
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InP
47 M$
Si
94 M$SiC
133 M$
GaAs
157 M$
GaN
259 M$
Others
7 M$
InP
75 M$
Si
154 M$SiC
239 M$
GaAs
214 M$
GaN
402 M$
2020692M$
20261.1B$
16
EPITAXY EQUIPMENT MARKET
Applications driving equipment demand : 2020 - 2026
Between 2020 and 2026, there are various applications that contribute to the growth of Epitaxy equipment demand. Notable ones among them would be Power and Opto-electronics.
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692
800852 875
905965
1091
2020 2021 2022 2023 2024 2025 2026
© Yole Développement 2021
MicroLED
VCSELs
GaN Power
SiC Power
GaN Power
MicroLED
Si PowerGaN Power
SiC Power
VCSELs
GaN Power
SiC Power
MicroLED
GaN Power
Epitaxy equipment market Forecast (in millions of U.S.Dollars)
17
TOTAL EPITAXY EQUIPMENT MARKET SIZE
2020 – 2026 Market size evolution by epitaxy equipment type
6.2 B$ cumulative sales expected from 2020 until 2026 for all epitaxy equipment type in More-than-Moore space.
Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
2020:
419 M$
2026:
630 M$
1.50 X
CAGR: 7.0 %
2020-2026 cumulative market size of 3.5 B$
MOCVD
2020:
45
M$
2026:
68 M$
1.51 X
CAGR: 7.1 %
392 M$
2020:
228 M$
2026:
393 M$
1.72 X
CAGR: 9.5 %
2.3 B$
HTCVD MBE
SiC epi reactors are included under HTCVD
1818Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
EPITAXY EQUIPMENT VENDORS Non-exhaustive list
19
39%
12%
11%
8%
5%
3%
3%
3%
3%
3%
2%
8%
Aixtron
Veeco
AMEC
TEL
AMAT
NuFlare
Riber
Taiyo Nippon
Naura
LPE
ASM International
Others
2020 Market Share (%) for Epitaxy Equipment Vendors
2020 EPITAXY EQUIPMENT MARKET SHARE
Market share for epitaxy equipment vendors
Revenue ranking of Epitaxy equipment players have not changed much, though Veeco seem to have lost considerable market share. Aixtron remains to be the market leader, followed by Veeco and AMEC.
Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
10%
-15%
-2%
2%
1%
-1%
0%
2%
2%
-3%
1%
3%
2018-2020 change in Market share (%)
NOTE: In case of HTCVD, the revenues are estimated only for applications and material systems that are in the scope of this report. HTCVD Epitaxy equipment revenues for total MtM space would be much higher.
© Yole Développement 2021
2020Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
2020 EPITAXY EQUIPMENT REVENUES
Split by equipment type and equipment vendor
$230,1 $61,0 $78,0$3,6 $21,7 $28,9
$43,3 $53,5 $20,6 $10,2 $4,4
$33,9 $19,9 $10,2 $11,9 $17,7
$20,7 $22,3 $4,3
MOCVD
HTCVD SiC
HTCVD Si
MBE
2020 Epitaxy equipment revenues (in million of US dollars) split by equipment type
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EPITAXY EQUIPMENT FORECAST SNAPSHOT (2020 - 2026)
By equipment type
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EPITAXY EQUIPMENT FORECAST (2020 - 2026)
By Equipment type, epi-material, substrate size, application and market segment
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2020 MARKET SHARE AND COMPETITIVE LANDSCAPE
By epitaxy vendor, equipment type, epi-material and application
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FOCUS ON CHINA
General equipment spending and epitaxy vendors positioning
25
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YOLE GROUP OF COMPANIES RELATED REPORTS
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YOLE GROUP OF COMPANIES RELATED REPORTS
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Email: [email protected]
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