ensuring high water yields in the semiconductor fab piping to convenient local service. table 1...

Water Technologies & Solutions case study Find a contact near you by visiting www.suezwatertechnologies.com and clicking on “Contact Us.” *Trademark of SUEZ; may be registered in one or more countries. ©2017 SUEZ. All rights reserved. CS1123EN.docx Mar-10 ensuring high water yields in the semiconductor fab Figure 1: SUEZ EDI challenge Water is at the very heart of semiconductor manufacturing. This wafer manufacturer in Texas needed assurance of an extremely consistent ultrapure water product with 18 megohm-cm resistivity. They needed to know they would have reliable 24-hour per day, uninterrupted ultrapure water performance to ensure the high wafer yields required to remain competitive in today’s semiconductor industry. solution Eliminate Chemical Regenerants with SUEZ EDI The SUEZ EDI (Figure 1) is the key building block for producing ultrapure water for wafer fabrication in this 700 gpm facility, designed, built and maintained by SUEZ. Reliable 24-hour per day, uninterrupted performance is what the customer gets—no excuses, no concerns for lost productivity. Because the SUEZ EDI process regenerates electrically, it requires no acid or caustic regenerants. SUEZ EDI removes 99%+ of the mineral load of RO-pretreated water, including silica boron and CO 2 , and delivers treated water of exceptional purity. Demineralizing with electricity, not chemicals is a real benefit for this end-user, as the process produces no regenerant waste and it doesn’t have the associated waste disposal hassle. The system also takes up only 20% of the floor space required for a conventional deionized (DI) system. The SUEZ Brand means quality you can depend upon. SUEZ pays attention to all the details from PVDF piping to convenient local service. Table 1 summarizes the project. Table 1: Project Summary Location Central Texas Commissioned February 1997 Application Ultrapure water for water fabrication FVeedwater type City of Sherman municipal water treated with SUEZ EDR Feedwater quality 10-15 μS/cm Product quality 18 megohm-cm resistivity Capacity 700 gpm (2.7 m 3 /h) Technologies Reverse osmosis (RO) and electrodeionization (EDI)

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Page 1: ensuring high water yields in the semiconductor fab piping to convenient local service. Table 1 summarizes the project. Table 1: Project Summary Location Central Texas Commissioned

Water Technologies & Solutions case study

CS1123EN.docx Mar-10

ensuring high water yields in the semiconductor fab

Figure 1: SUEZ EDI

challenge

Water is at the very heart of semiconductor manufacturing. This wafer manufacturer in Texas needed assurance of an extremely consistent ultrapure water product with 18 megohm-cm resistivity. They needed to know they would have reliable 24-hour per day, uninterrupted ultrapure water performance to ensure the high wafer yields required to remain competitive in today’s semiconductor industry.

solution

Eliminate Chemical Regenerants with SUEZ EDI

The SUEZ EDI (Figure 1) is the key building block for producing ultrapure water for wafer fabrication in this 700 gpm facility, designed, built and maintained by SUEZ. Reliable 24-hour per day, uninterrupted performance is what the customer gets—no excuses, no concerns for lost productivity. Because the SUEZ EDI process regenerates electrically, it requires no acid or caustic regenerants. SUEZ EDI removes 99%+ of the mineral load of RO-pretreated water, including silica boron and CO2, and delivers treated water of exceptional purity.

Demineralizing with electricity, not chemicals is a real benefit for this end-user, as the process produces no

regenerant waste and it doesn’t have the associated waste disposal hassle. The system also takes up only 20% of the floor space required for a conventional deionized (DI) system.

The SUEZ Brand means quality you can depend upon. SUEZ pays attention to all the details from PVDF piping to convenient local service. Table 1 summarizes the project.

Table 1: Project Summary

Location Central Texas

Commissioned February 1997

Application Ultrapure water for water fabrication

FVeedwater type

City of Sherman municipal water treated with SUEZ EDR

Feedwater quality

10-15 µS/cm

Product quality 18 megohm-cm resistivity

Capacity 700 gpm (2.7 m3/h)

Technologies Reverse osmosis (RO) and electrodeionization (EDI)

Fab Assassination