eless nipd and nipdau opm: a low cost, high throughput ... · certified iso 9001: 2000 & iso ts...
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Eless NiPd and NiPdAu OPM: A Low Cost, High
Throughput Solution for Enhanced Gold and
Copper Wire Bond Reliability
Dr. Thorsten Teutsch; Dr. Elke Zakel; Thomas Oppert;
Richard McKee; and Ghassem Azdasht
Pac Tech – Packaging Technologies
Pd Au
e-Ni
Cu
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• Overview of the Electroless Ni/Au and Ni/Pd/Au Process
• Electroless Ni/Au and Ni/Pd/Au for Wirebonding
• Summary
Outline:
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High Temperature/Power Electronics
Business Sectors:
Defense & Aerospace
Automotive
Oil Well & Geothermal
Solid State Lighting
Motor Control
Interconnect Technologies:
Wirebonding
Solder Bumping
Clip Attach
Interface:
e-NiAu
e-NiPdAu
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Electroless Nickel Process
Wet Chemical Process
Sequential Steps
Robotic Control
Chemistry Control
>50 wafers/hour
e-Ni/Au Process on Aluminum:
1) Passivation Clean
2) Al Etch
3) Zincate
4) Zn stripper
5) Zincate
6) Electroless Ni
7) Elecgtroless Pd
7) Immersion Au
e-Ni/Au Process on Copper:
1) Passivation Clean
2) Copper Clean
3) Catalysis
4) Electroless Nickel
5) Electroless Pd
5) Immersion Gold
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4) Zn Strip
Ni PNi
Ni/P Autocatalytic Reaction
Au/Ni replacement reaction
Incoming
1) Pass Clean2) Al Etch
6) Ni Plate Cont.
5) Zincate II
7) Gold (Pd) Plate
Silicon,
Organics
Ni – Zn Replacement
Zn
6) Ni Plate
Au or Pd
3) Zincate
6) Ni Plate Cont.
Zn - Al Replacement
Electroless Nickel and Immersion Gold (or Pd) Process on Aluminum
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Ni PNi
Ni/P Autocatalytic Reaction
Au/Ni replacement reaction
Incoming
1) Pass Clean2) Cu Etch
6) Ni Plate Cont.
7) Gold (Pd) Plate
Silicon,
Organics
Ni – Initiation
Pd
6) Ni Plate
Au or Pd
3) Pd Catalyst
6) Ni Plate Cont.
Electroless Nickel and Immersion Gold (or Pd) Process on Copper
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Advantages of Electroless Nickel
• Low Capital Investment CostSputtering or ElectroPlating:Electroless UBM + Solder Print/Ball:
• High Throughput (single plating line)600,000 wafers per year 8“ or 312,000 wafers 12“ per year
• Maskless ProcessNo tooling, No high vacuum, No lithograophy
• Suitable for Al and Cu pad metallization
• Compatible for wafers from 4“ to 12“no additional invest for different wafer sizes
• Proven Reliability and Production History
• NiAu and NiPdAu for Optimized IMC Growth
• Compatibility with all FC and WLCSP-Assembly processesSolder (lead, lead free, AuSn,…..)ACFNCP
• Compatible with Clip Attach
• Compatibility with Au and Cu Wire Bonding
10-20 Mio US$3-5 Mio US$
Lowest
Process Cost
Performance
Applications
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Wirebonding
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Certified ISO 9001: 2000 & ISO TS 16949 Confidential
Example 1: Engine Control Module
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Certified ISO 9001: 2000 & ISO TS 16949 Confidential
Example 1: Engine Control Module
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Certified ISO 9001: 2000 & ISO TS 16949 Confidential
Al Interface
NiPdAu Interface
Pad alloy AlCu(0.5%)
Pad Thickness 0.905 μm
E'less Ni: 3 ± 0.3 μm
E'less Pd: 0.3 ± 0.1 μm
Immr Au: 0.03 ~ 0.05 μm
Example 1: Engine Control Module
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Wirebond pull test [cN] Wirebond pull test [cN]
MIN MAX AVG STD CPK MIN MAX AVG STD CPK
11.6 14.2 12.87 0.54 6.08 0.0 6.4 3.38 1.72 0.07
break mode: broken at neck break mode: lifted ball, broken at neck
4000h/150°C HTOL
Al/Ni/Au Bond Pad Al Bond Pad
voids
• Increased void generation on Al-Au interface is weakening the bond adhesion
• Al/Ni/Au-Au interface does not show any signs of aging!
Example 2: Reliability
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Al vs Ni/Au vs NiPdAu
Pad Metallization vs Bond Shear Strength
0
5
10
15
20
25
30
35
40
45
Pad Metallization
Shea
r S
trength
[g]
AlNi/AuNi/Pd/Au
Ref. (Al) EL-Ni/Au EL-Ni/Pd/Au
Ave. 23.84g
STD. 1.51Ave. 20.24g
STD. 2.61 Ave. 37.68g
STD. 2.39
N=15pcs/type
25um, 99% Au wire
Example 3:
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Solder Bumping
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Clip Attach
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Wafer Level Clip Attach MOSFET
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Certified ISO 9001: 2000 & ISO TS 16949 Confidential
Summary• Pac Tech has developed and implemented an automotive standard process for Ni/Pd and
Ni/Pd/Au OPM.
• Au- and Cu-Wire bonding is qualified at different automotive and consumer customers.
A new improved chemistry for smooth Ni/Pd Plating has been qualified and
implemented.
• Pac Tech offers subcontractor service from its facilities in Santa Clara (USA), Penang
(Malaysia) and Berlin (Germany). We offer equipment solutions and turnkey solutions
for customers, who want to implement process and technology for inhouse
manufacturing.