都城工業高等専門学校table. i sputtering condition ofti02 films sample dc power argas rf...

11

Upload: others

Post on 11-Aug-2020

0 views

Category:

Documents


0 download

TRANSCRIPT

Page 1: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 2: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 3: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 4: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 5: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 6: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 7: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 8: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 9: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 10: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal
Page 11: 都城工業高等専門学校Table. I Sputtering condition ofTi02 films Sample DC Power ArGas RF Power 02 Gas W Pressure Pa W Pressure 3 ifiTfiETbZ. RF Power , I.opa Ti pressure [Pal