EduMEMS - Polish-Ukrainian-French

partnership for developing multidomain MEMS models for educational purposes

Rafał Walczak Dean of the Faculty of Microsystem Electronics and Photonics

Wrocław University of Science and Technology

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Idea and Motivation

Design of MEMS devices demands an interdisciplinary knowledge in the following domains: mechanical, electrical, thermal and others. That is why, the cooperation between various researchers is required. Complex CAD/CAE/EDA tools are needed for simulations and testing one and multidomain models of MEMS sensors or actuators.

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FP7 Programme

People - Marie Curie International Research Staff Exchange Scheme (IRSES) Call Identifier: FP7-PEOPLE-2010-IRSES Publication Date: 25-11-2009 OJ Reference: OJ C284 of 25 November 2009 Budget: € 30,000,000 Deadline Date: 25-03-2010 at 17:00:00 (Brussels local time) Specific Program(s): People Theme(s): Marie-Curie Actions

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List of Partners

Partner name Partner short name Country POLITECHNIKA LODZKA TUL POLAND

POLITECHNIKA WROCLAWSKA WUT POLAND

UNIVERSITEIT GENT UG BELGIUM

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS FRANCE

L’VIV POLYTECHNIC NATIONAL UNIVERSITY LPNU UKRAINE

NACIONALNIY TEHNICHNIY UNIVERSITET UKRAINI

KIIVSKIY POLITEHNICHNIY INSTITUT

NUKPI UKRAINE

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EduMEMS

Starting Date: 01-07-2011 End Date: 30-06-2016 Duration: 5 years Budget: € 279,300 The financial contribution of the Union consists of a flat rate per researcher-month according to the reference rates established in the Work Programme and set out in Annex I - in our case: € 1,900 per person-month. Secondment period: means the period(s) spent by a researcher at a host organisation under the project.

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Objectives

Appointment of a team of researchers from Poland, Ukraine and France dealing with modelling and design of MEMS: 1. Developing of a MEMS design

workflow. 2. Modelling and design of sample

structures. 3. Preparing and publishing scientific

papers and manuals for students about MEMS modelling and design. More information available at:

http://edumems.dmcs.pl

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MEMS Process Design in the Project

1. Analysis of three MEMS devices: a) Microbolometer (TUL, DMCS – Task leader) b) Microfluidic structure (WUT, DMP – Task leader) c) RF temperature sensor (CNRS, LAAS – Task leader)

2. Modelling and simulations of above mentioned structures with a dedicated software

3. Preparing layouts of devices for future tests and analysis

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Lectures and Research at LPNU

DMCS researchers during Modelling

Lecture for Ukrainian students

Subjects: • Uncooled Microbolometer • Radiation falls on active material • Active material heats up and changes its resistance • Resistance change can be measured using read-out

circuit • Lab-on-a-chip technology • Optical detection in LOC • MEMS technology review • Silicon-glass miroreactors • On-chip gel electrophoresis

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TUL and LPNU activities Uncooled Microbolometer

Microbolometer array Used for thermal imaging Measures the infrared radiation from a heated body

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CNRS and LPNU activities RF Temperature Sensor

α1, α2 - thermal expansion coefficients of the two layers, t1, t2 - thicknesses of the two layers, ∆T - temperature change.

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WUT and LPNU activities Measurement Set-up for Spectrophotometric Lab-on-chip Analysis

The set-up contains: • Silicon-glass chips with optical detection cell • Miniature spectrophotometer • Miniature light source • Optical fibres • Software for spectral measurements

Halogen lamp

Spectrometer

Fibre 2 Fibre 1

Lab-on-chip

Fluid flow direction

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WUT and LPNU activities Educational MEMS Laboratory

Five education platforms (stands) have been developed: • education platform to research absorption spectra in

visible light, • education platform to the tests using fluorescence

dyes photoluminescent, • education platform to the tests with accelerometer

sensor and MEMS gyroscope, • education platform to research barometric pressure

sensor, • education platform - a model of mechatronics

sensors for temperature, pressure, angular position, movement and control modules.

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Platforms form together the educational MEMS laboratory, first in Ukraine.

The laboratory is installed in a didactic room at LPNU.

Each of the platform has its own manual in Ukrainian and English.

WUT and LPNU activities Educational MEMS Laboratory

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Dissemination Results

Papers published during the project:

a) Compel International Journal – 1

b) Machine Dynamics Research, Polish Scientific Journal – 2

c) VISNIK L’viv Polytechnic Journal – 1

d) CADSM International Conference – 3

e) CSIT International Conference – 1

f) EUROSIME International Conference – 3

g) MEMSTECH International Conference – 29

h) MIXDES International Conference – 7

TOTAL: 47 papers

6 Manuals are ready to be published (Exercises in ANSYS)

http://www.mixdes.org http://memstech.lp.edu.ua

Special Sessions at:

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Summary and Future Plans

Two structures were modelled and designed, Some additional MEMS were also analysed.

Educational MEMS laboratory at LPNU CAD Department was installed – first in Ukraine.

Secondments realized: 137 (93%) Secondments remaining: 10 (7%) TOTAL: 147

1. Publish manuals for students as a book (Springer, Wiley, etc.) 2. Preparation of a new proposal as a continuation of EduMEMS project 3. Design of the test ASIC

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Thank you for your attention.