TIA-NMEMS Facility Operation and
Green Sensor Network
Ryutaro Maeda Research Center of
Ubiquitous MEMS and Micro Engineering
(UMEMSME), AIST
Contents
TIA (Tsukuba Innovation Arena)
Introduction
Facility & Management Policy-MNOIC establishment
Power Management
Application of Wireless Networked Sensing for Green and Safety
National project of Green sensor network
15companies, AIST, TIT, U-Tokyo, U-Shinshu
UMEMSME 3
Basic
Japanese Company
In the past
University
Japanese Company University
At present
Japanese Company University
Facility for prototyping for
High volume production
Application
Government research institutes
Government research institutes
TIA Provides Services to Industry
Government research institutes
TIA (Tsukuba Innovation Arena) 500 M US$ investment in 2009-2010
6 Core Research Domains
Power Electronics
Integrated R&D frame from SiC wafer , d evice
to power system
Nano - Material Safety
Integrative data center and research frame for nano - material safety.
Carbon Nanotubes
R&D framework of CNT mass
production and CNT composites for
wide applications.
Nano - Green
R&D framework for green innovation
driven by nanotechnology
N - MEMS High - value - added
MEMS and mass production
integrated N - MEMS
Nanoelectronics
・ Nano CMOS
・ Sillicon - photonics
・ Carbon - electronics
・ Backend device
・ New material
・ Advanced lithography(EUVL)
3 Core Infra - structure
Nanodevice Research Foundry
・ Prototype device (45 - 65nm CMOS and N-MEMS, etc.) fabrication and evaluation (φ200-300mm)
・ SiC power device fabrication and evaluation
Nanotech Open User Facilities
Open user research facilities in AIST
and NIMS ( nanocharacterization ,
nanoprocessing etc)
Networking School of Nanotechnology
Graduate school function through
cooperation of University of Tsukuba
and partnering universities .
● Green and Safety Management
● Established MNOIC for HV prototyping and LV Production
● Invite SMEs of Polishing, Electroplating, etc.
2G Existing 4 inch Line
筑波研究学園都市
2A 3F
New Investment: 3D (351㎡)8inch MEMS and 12 inch Integration 3F(60㎡) Bonding and Testing, 2A(84㎡)Evaluation 3B(154㎡)Green Testing
3D 3B
TIA-SCR TIA-N-MEMS
Facility Feature Detail
National Institute of Advanced Industrial Science and Technology(AIST) 6
6
AIST after the earthquake
Many apparatuses (not anchored) moved.
4-in MEMS line, labo room
EB wtiter: moved.
partly damaged.
RIE gas line: bent. Racks: moved.
caster lock didn't work.
Mar. 14 Mar. 14 Mar. 14
National Institute of Advanced Industrial Science and Technology(AIST) 7
7
CO2 monitoring system for 4-in facility
Wireless
Sensor terminals
Data servers
EPC meters
Water flowmeters
Gas flowmeters
Particle counters
Analog meters
(temp, humid, pres,..)
4-in foundry cleanroom Wireless (400MHz, 10mW)
LAN
LAN
(66)
(7)
(4)
(12)
(5)
(2)
• Introduced in 2010 by
Takahashi san
• Manifacturer: Omron
National Institute of Advanced Industrial Science and Technology(AIST) 8
8
Analysis of records (Aug. - Feb.)
0
10000
20000
30000
40000
50000
60000
70000
80000
90000
100000
Aug-10 Sep-10 Oct-10 Nov-10 Dec-10 Jan-11 Feb-11
Ele
ctri
c P
ow
er C
on
sum
ptio
n (k
Wh
)
Apparatuses
Air conditioning
Total EPC by month
Apparatuses
Air conditioner (AC)
90 MWh
(avg. 125 kw)
• Apparatuses: 30 MWh/month, constant
• AC: 30-60 MWh/month
• Total: 60-90 MWh/month (5~10% of AIST east)
10 MWh/month
= avg. 14 kW
National Institute of Advanced Industrial Science and Technology(AIST) 9
9
Analysis of records (Aug. - Feb.)
0
10000
20000
30000
40000
50000
60000
70000
Aug-10 Sep-10 Oct-10 Nov-10 Dec-10 Jan-11 Feb-11
Ele
ctri
c P
ow
er C
on
sum
ptio
n (k
Wh
) Hot water pump
Boiler
Chiller 2
Chiller 1
AHU controllers
AHU-3 (wet process)
AHU-2 (dry process)
AHU-1 (litho)
Outlet AHU
AC EPC by month
• AHU fans: 20 MWh/month, constant
• Cooling: 6-35 MWh/month, temperature dependent
• Heating (gas boiler): 4 MWh/month, constant
AHU fans
Cooling
Heating, humidity
AHU: Air Handling Unit
10 MWh/month
= avg. 14 kW
National Institute of Advanced Industrial Science and Technology(AIST) 10
10
Analysis of records (Aug. - Feb.)
Chiller (1+2) EPC vs outside temperature
0
10
20
30
40
50
60
70
-10 -5 0 5 10 15 20 25 30 35 40
Outside temperature (C)
Ele
ctri
c P
ow
er C
on
sum
ptio
n (k
W)
8/17/10
9/9/10
10/23/10
2/2/11
3 kW/C
• Linear to outside temp. above 20C.
• Slope ~3 kW/C
National Institute of Advanced Industrial Science and Technology(AIST) 11
11
Analysis of records (Aug. - Feb.)
Apparatus EPC by month
0
5000
10000
15000
20000
25000
30000
35000
Aug-10 Sep-10 Oct-10 Nov-10 Dec-10 Jan-11 Feb-11
Ele
ctri
c P
ow
er C
on
sum
ptio
n (k
Wh
)
Draft (develop)
Draft (acid, organic)
Water purifier
Spray coater
PSA (CVD)
Plasma CVD
Sputter#2
Sputter#1
SEM
RIE
DRIE STS#2
DRIE STS#1
Oxidation
Aligner
Baking furnace
Stepper
EB writer
Room light, sockets
Vacuum pump
PFC abatement
Compressor
• Total: 25-30 MWh/month, constant
• Several apparatuses of 3-8 MWh/month provide most of EPC (avg. 4-11 kW)
5 MWh/month
= avg. 7 kW
National Institute of Advanced Industrial Science and Technology(AIST) 12
12
Trials from Apr. to May
Chiller power reduction: temperature setting up
0
10
20
30
40
50
60
70
-10 -5 0 5 10 15 20 25 30 35 40
Outside temperature (C)
Ele
ctri
c P
ow
er C
on
sum
ptio
n (k
W)
8/17/10
9/9/10
10/23/10
2/2/11
5/10/11
5/11/10
5/12/11
5/13/11
5/16/11
5/17/11
Room temp. 23.0C
Room temp. 27.0C
• EPC reduction ~10 kW
• Too warm for human with clean suit => 26.0C
National Institute of Advanced Industrial Science and Technology(AIST) 13
Prototype of Wireless Power Sensor
Specifications -Sensing
Power : 0~1000 W
Temperature: -10℃~+65℃
-Wireless Communication
Frequency: 2404 MHz ~ 2420 MHz
Transmission Power: 1 mW
Data Communication: Packet-type
-Powering
Battery: 1.5 V, Button-type
(LR44, SR44, SR48, etc)
Life-time: 60 days (LR44, 0.5 sec sampling)
Clamp-on Type AC
Current Sensor
CTL-6-S32-8F-CL [1]
- Dimensions (mm): 18W x 25H x 18t
- Windng (Turn): 800
- Current Range (Recommended): 10 mA – 15 A
MCU
C8051F930 [2]
- Supply Voltage: 0.9 – 1.8 V (One-cell mode
operation)
- Built-in dc-dc converter with 1.8 – 3.3 V output
(65 mW max)
- Typical sleep mode current < 0.1 mA- 10-Bit Analog to Digital Converter
Transceiver IC
nRF24L01 [3]
- 2.4-2.5 GHz ISM band
- Minimum supply voltage: 1.9 V
- Supply current in TX mode @ 0dBm output
power: 11.3 mA- Supply current in Power Down mode: 900 nA
RF-IC
MCU
Tmep. Sensor
Average Power Consumption: 10 mW (10 sec sampling)
ULP
CREST
Example of Sensor Installation
Wireless Sensor Nodes
Single-phase AC (200V) Three-phase AC (200V)
National Institute of Advanced Industrial Science and Technology(AIST) 15
611.3 607.8
(09年) (10年)
610.1 621.1
(09年) (10年)
539.9 604
(09年) (10年)
550.6 596.3
(09年) (10年)
505.2 535.7
(09年) (10年)
577.3 578.3
(09年) (10年)
EPC reduction at Tokyo area CVS
◆Without GSN ◆With GSN
▲8%差
111.9%
▲8.1%差
9月度
▲8%差
108.3%
7月度
8月度
7月度
▲5.8%差
9月度 103.8%
106.0% 100.2%
▲99.4% 8月度
▲8.7%差 507.1 524.9
(09年) (10年)
103.5% 10月度
560.9 531.7
(09年) (10年)
10月度 94.8%
▲7.1 %差 514.8 472.4
(09年) (10年)
474.9 469.9 (09年) (10年)
98.9% 91.8% 11月度 11月度
National Institute of Advanced Industrial Science and Technology(AIST) 16
Green sensor network
CVS
Energy saving by operation monitoring
likes to install a system of 10 sensor nodes +receiver less than 30 US$ (now 40 $) to 14,000 stores
Further cost reduction (Integration test, PKG)
Clean Room
On demand operation - Particle detection
Data Center
On demand operation – Thermal detection
National Institute of Advanced Industrial Science and Technology(AIST) 17
G-MEMS For Global
Monitoring of Environment and Management of
Society
Hetero Integrated MEMS
Power management
Particle control Health care
Bio sensing
Security
MEMS for Our Better Life
Internet Web
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