C O N F I D E N T I A L
T h e Y i e l d M a n a g e m e n t C o m p a n y
iPartner™ Support Offerings . . . Partnering for reduced cost and higher uptime
2 ·C O N F I D E N T I A L Rev. 14
iPartneriPartner
KLA-Tencor, the premier company in yield
management, introduces a breakthrough in
semiconductor customer support
3 ·C O N F I D E N T I A L Rev. 14
iPartneriPartner
iPartner …
. . . A unique relationship between customers and KLA-Tencor onsite and online resources.
. . . A partnership that allows our customers to tailor their support level to match their specific manufacturing requirements.
4 ·C O N F I D E N T I A L Rev. 14
iPartneriPartner
iPartnerNew service offerings from KLA-Tencor for
your iSupport-compatible systems
With KLA-Tencor as your support partner, you’ll cut your costs and improve tool uptime.
5 ·C O N F I D E N T I A L Rev. 14
iPartner: AdvantagesiPartner: Advantages
What’s in it for you?
Reduced cost, higher uptime A choice of online/onsite support solutions Pick the one that matches your requirements Go online 7x24 for fast response and rapid resolution Get faster onsite resolution for more complex issues Realize immediate savings
6 ·C O N F I D E N T I A L Rev. 14
iPartner Support Offerings iPartner Support Offerings
Balances Cost and Performance
Reduces Cost and Increases UptimeiPerformanceiPerformance
Optimizes Tool Performance
Les
s C
riti
cal
Ap
pli
cati
on
s
Co
mp
lex
To
ols
/Cri
tica
l A
pp
lica
tio
ns
7 x 24 Online Support
i724i724
iValueiValue
iShareiShare
Saves More through Shared Responsibility
Highest Performance Lowest Cost
7 ·C O N F I D E N T I A L Rev. 14
iPartner: How it WorksiPartner: How it Works
7x24 round-the-clock online service
iPartner offerings are based on a unique partnership among KLA-Tencor Online Support Center (OSC) engineers, K-T’s customer support engineers and your engineers
Increased coverage, faster response
Common issues are quickly resolved (e.g. lockups, alignment errors, calibrations, etc.), reducing the need for onsite dispatch
Complex issues are assisted via online diagnostics and parts ordering, reducing onsite MTTR
Fast resolution, shared savings
Reduced downtime
8 ·C O N F I D E N T I A L Rev. 14
Comparison to Conventional SupportComparison to Conventional Support
Feature Full i724Onsite Support Coverage 5x8 5x8
Off-shift Support Coverage Uplift 7x24 Online
< 2 hrs Online
4 covered hrs Onsite
Online Parts Diagnosis & Ordering No 7x24
Cost Savings No Yes
Remote Operation, Data Transfer,
E-10 ReportingNo Yes
Price StandardStandard Minus Saver
Awards
4 covered hrs OnsiteResponse Time
i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster
9 ·C O N F I D E N T I A L Rev. 14
iPartner: Cost Saving BenefitsiPartner: Cost Saving Benefits
Using 24x7 online support reduces onsite costs
We share the savings with you
Savings depends upon the following
Number of compatible tools
OSC utilization
Whether or not you have an iDM server
10 ·C O N F I D E N T I A L Rev. 14
iPartner Saver AwardsiPartner Saver Awards
For example, your fab with $XM service entitlement: KLA-Tencor will pay for installing, licensing and maintaining the iDM We will pay for the license fees of connected tools We will provide 7x24 online support We share savings after paying for the license and maintaining
the server if you meet the online usage target Expected annual saving up to $XXXXX
iPartner OfferingOSC Usage
Targets
Savings Apply Toward iPartner Offerings
85 to 89% Neutral
90 to 94% $YYYYY
95% or More $ZZZZZ
iPerformance
i724
iValue
11 ·C O N F I D E N T I A L Rev. 14
iPartner: Longer-term BenefitsiPartner: Longer-term Benefits
iPartner support offerings are extremely flexible
Support is scaled to match your specific requirements How complex are your KLA-Tencor tools? How critical are your applications? Where are you in the production cycle? What is your level of maintenance expertise?
Over time, your requirements may change
Transition to lower-cost iPartner offering
No more “one-cost fits all” support solution
12 ·C O N F I D E N T I A L Rev. 14
iPartner: Longer-term BenefitsiPartner: Longer-term Benefits
Tool health monitoring
System optimization service
Intra-fab remote tool operation
Future features will further reduce downtime and improve productivity
13 ·C O N F I D E N T I A L Rev. 14
iPartner Support Offerings at a GlanceiPartner Support Offerings at a Glance
Support Element i724 iValue iShare
Online Support CenterOnline Coverage 7x24 7x24 7x24
Online Response 2 hr. 4 hr. 4 hr.
Parts Diagnosis & Ordering 7x24 7x24 7x24
Case Tracking
Onsite SupportCoverage Period 5x8* 5x8* 5x8*
Repair Labor8 visits (includes
1 annual PM visit)
Tool Down Response (avg.after working on-line) 4 covered hr 8 covered hr 8 covered hr
On-site Response -varies by Product 4 or 8 covered hr16 or 24 covered
hr
16 to 24 covered
hr
Preventive Maintenance By Customer
Extended Onsite Coverage Optional Optional Optional
PartsRepair Parts
Consumables
Stocking Locations Local Local Local
* 7x8 at select hubsAll programs and options may not be available for all locations. Please consult your local service manager.
Jul-02
14 ·C O N F I D E N T I A L Rev. 14
iPartner - AvailabilityiPartner - Availability
iPartner™ Service Offerings Availability
iDM Compatible tools iPer
form
ance
i724
iVal
ue
iShar
e
2350
AIT2,3
ASET F5X
Archer 10
SP1
5XXX XP
Available Q3’CY02 Available Q4’CY02
213X NT
15 ·C O N F I D E N T I A L Rev. 14
iPartner: Current CustomersiPartner: Current Customers
Beta tested at major semiconductor manufacturers in North America
iSupport technology widely accepted …
20+ customer sites with iDM servers in US, Europe, Taiwan, Japan and Korea
More than 200 tools connected to online support
16 ·C O N F I D E N T I A L Rev. 14
iPartneriPartner
Make KLA-Tencor your support partner
Cut your costs and improve tool uptime
“It’s simply a better way of doing business”
17 ·C O N F I D E N T I A L Rev. 14
Back up
18 ·C O N F I D E N T I A L Rev. 14
iPartner: Beta ResultsiPartner: Beta Results
SP1_TBI Systems
Maintainability Metrics
6.0
0
2
4
6
8
10
12
14
Jul-01 Sep-01 Nov-01 Jan-02 Mar-02 May-02
Ho
urs
MTTR
BetaEngagement
97% Availability – Customer data
Demonstrated MTTR Reduction From 10 to 6 hoursIncreased Uptime and Reduced Onsite Repair
19 ·C O N F I D E N T I A L Rev. 14
Price Comparison Example (US)Price Comparison Example (US)
Tool Type # of Tools Basic iValue
2139 10 $111 $111
AIT II with ADC 10 $105 $105
SP1-TBI 2 $36 $36
Archer 10 2 $42 $42
iPartner Saver Awards Discount*
NA None -$40
Total Discounted Price 24 $1,985 $1,945
iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster
20 ·C O N F I D E N T I A L Rev. 14
iPartner Comprehensive OfferingsiPartner Comprehensive Offerings
7 x 8 onsite support 4 covered hour onsite response 7 x 24 online support
Remote support Parts diagnosis & ordering 1 hour priority online response
All parts and labor for PM and repair Priority escalation Hardware and software revisions Optional onsite off-shift support
iPerformance (Q4CY02) Optimizes Tool Performance
21 ·C O N F I D E N T I A L Rev. 14
iPartner Comprehensive OfferingsiPartner Comprehensive Offerings
5 x 8 onsite support (7 x 8 at select hubs) Onsite response (after working online)
4 covered hours on average for tool-down cases 4 or 8 covered hours for non-tool down cases
7 x 24 online support Remote support Parts diagnosis & ordering 2 hour online response
All parts and labor for PM and repair Hardware and software revisions Optional onsite off-shift support available
i724 Reduces Cost and Increases Uptime
22 ·C O N F I D E N T I A L Rev. 14
iPartner Value OfferingsiPartner Value Offerings
5 x 8 onsite coverage (7 x 8 at select hubs)
Onsite response (after working online) 4 covered hours on average for tool-down cases 4 or 8 covered hours for non-tool down cases
7 x 24 online support Remote support Parts diagnosis & ordering 4 hour online response
All parts and labor for PM and repair
Hardware and software revisions Optional onsite off-shift support available
iValue Balances Cost and Performance
23 ·C O N F I D E N T I A L Rev. 14
iPartner Value OfferingsiPartner Value Offerings
Your engineers perform PMs, calibrations and first level diagnostics 8 K-T onsite visits annually (including one PM visit) 5 x 8 onsite coverage (7 x 8 at select hubs) Onsite response (after working online)
4 or 4 covered hours on average for tool downcases8 covered hours for non-tool down cases
7 x 24 online support Remote support Parts diagnosis & ordering 4 hour online response
All parts for PM and repair; you order authorized parts through OSC On-going skill and PM verification Service bulletins & special purchasable tooling Hardware and software revisions
iShare Saves More Through Shared Responsibility
24 ·C O N F I D E N T I A L Rev. 14
iPartner Saver Awards Example iPartner Saver Awards Example
For example, a fab with $2M service entitlement: KLA-Tencor will pay for installing, licensing and maintaining the iDM We will pay for the license fees of connected tools We will provide 7x24 online support We share savings after paying for the license and maintaining the server Expected annual saving up to $40,000
iPartner OfferingOSC Utilization
TargetsSavings Apply Toward
iPartner Offerings
85 to 89% Neutral
90 to 94% $15,000
95% or More $40,000
iPerformance
i724
iValue
25 ·C O N F I D E N T I A L Rev. 14
Utilization Metric - iPartnerUtilization Metric - iPartner
Clarify Data Case History Summary Report Onsite CSE Date / Time minus
Case Open Date / Time Percentage Cases Opened prior
to CSE onsite plus remote resolution, over all cases
Chart Product Family Performance.
Chart Overall Performance Chart 3 month rolling average
Targets 3 month rolling average over
either: 85%, 90% or 95%
3 Mnth Rolling OSC Perf.
82.3%
0%
10%
20%
30%
40%
50%
60%
70%
80%
90%
100%
Oct Nov Dec Jan Feb Mar Apr May Jun
Utiliz Target
Product Family OSC Perf.
0%
10%
20%
30%
40%
50%
60%
70%
80%
90%
100%
Oct Nov Dec Jan Feb Mar Apr May Jun
2XXX 8XXX AIT
Optical SP1 UV
26 ·C O N F I D E N T I A L Rev. 14
Price Comparison Example (US)Price Comparison Example (US)
2139 10 $121 $121
AIT II with ADC 10 $116 $116
SP1-TBI 2 $39 $39
Archer 10 2 $47 $47
iPartner Saver Awards Discount*
NA None -$40
Total Discounted Price 24 $2,177 $2,137
i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster
Tool Type # of Tools Full i724
27 ·C O N F I D E N T I A L Rev. 14
Price Comparison Example (US)Price Comparison Example (US)
Tool Type # of Tools Basic iValue
2139 10 $111 $111
AIT II with ADC 10 $105 $105
SP1-TBI 2 $36 $36
Archer 10 2 $42 $42
iPartner Saver Awards Discount*
NA None -$40
Total Discounted Price 24 $1,985 $1,945
iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster
28 ·C O N F I D E N T I A L Rev. 14
iPartner RoadmapiPartner Roadmap
V 2.0 (July ’02) V 2.7 (2H’02) V 3.0 (Q2CY03)
Supported Tools
iPartnerOfferings andFeatures
iDM Features
2350 (V8.0.66) AIT III(V5.0.15SP4) SP1-TBI (V3.5.2304) ADC (2.0.17NT)** 8X00 (4.0P2 NT) F5x (V2.6) Archer 10 (V1.1*4) 5xxxXP (V14.6)
i724, iValue and iShare 7x24 Online Support 7x24 Parts Diagnosis
& Ordering
Worldwide VPN Service Request
from iDM Browser Remote Operation,
data transfer E-10 Reporting
Previous Tools Plus Next Generation: 2370 SP1-DLS & Next Generation AIT XPRemote Support Only 2401/Viper eS20XP TeraStar ADC Manager
iPerformance Tool Health Monitoring
and Reporting System Optimization Service Multi-Language Translation
Support
Unix OS Support Intra-fab Remote Operation
(on selected products) Data Table Viewer and export
** = Remote
Support Only
Previous Tools Plus: CRS 3000 Quantox Others TBD
Expanded architecture to connect 75 tools
Configurable reporting engine Simplified User Administration Improved Metric reporting
with SPC VoIP