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SUGAR• Tool for system-level MEMS simulation
• Goal: Be SPICE to the MEMS world
• Analyzes static, dynamic, and linearized steady-state behavior
• Challenges:– Be fast enough for design and optimization (not just
verification)– Handle coupled physical effects (electrical,
mechanical, thermal, optical, …)
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SUGAR: Current work
• Broad set of component models
• Validation against optical measurements
• Deployment of Millennium-based web service (used in EE245 in Fall 2001)
• Analyze dependence on parameters (sensitivity analysis, bifurcation analysis)
• Design synthesis and optimization
• Integration of state-of-the-art solvers
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Architecture
System Assembly
Device Models
Solvers
Netlist
uses mumps.net
param ox=0, oy=0, oz=0
gap3dV2 p1 [b c D E]
[l=100u w1=5u w2=5u
gap=2u t1=0u t2=500u
V1=5 V2=12
ox=ox oy=oy oz=oz]
Analysis Results
transient analysis
steady-state analysis
static analysis
sensitivity analysis
User Interfaces
MATLAB™ Web Library
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Torsional micromirror. MEMS Design by: M. Last, K.S.J. Pister
• Complex system with ~1000 comb fingers and torsional springs
• Finite Element Analysis might use O(106) continuum elements
• Sugar: system reduces to 2,621 elements and 11,706 unknowns
• Device described using parameterized substructures
Cosine-shaped beams
Perforated beams
Mirror
Torsional hinge
Perforated comb drive array
Actuation direction
Moment arm
Recessedinner plate
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M&MEMS: SUGAR on the Web• Hosted on Berkeley Millennium cluster
• Requires only a web browser (with Java for graphics)
• Used in Berkeley’s Fall 2001 introductory MEMS course