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Remote plasma deposition of textured zinc oxide with focus ... · pulsed laser deposition,41-43 atomic layer deposition,44 (magnetron) sputtering,45,46 chemical vapour deposition46,47
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Atomic Layer Deposition in Food Packaging and Barrier …fi/pirjo_heikkila.pdf · Atomic Layer Deposition in Food Packaging ... magnetron sputtering and a sol–gel methods ... Cost
Overview of Magnetron Sputtering System (DaON 1000S)€¦ · – Increased deposition rate ... •Too much reactive gas, sputter-yield falls, gas build-up uncontrollably and deposited
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Coating Deposition Deposition of Oxides and Oxinitrid … · Block-diagram of installation It includes vacuum chamber with magnetron, high-vacuum system on basis of the turbomolecular
II. Plasma Wall Interaction · plasma sources: a magnetron for metal deposition and a Plasma Enhanced Chemical Vapor Deposition (PECVD) source for hydrogenated amorphous carbon (a-CH)