Download - Nano/Micro Fabrication Research Methods
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Nano/Micro Fabrication Research Methods
B. K. Paul
Archetypal Papers
• These papers provide a model for your research– Structure– Methods– Presentation of results
• Answers these questions– What results are needed to convince the peer
audience of conclusions?– What methods are appropriate for what research
objectives?
NMF Reseach
• Micro/nanosystems Development– New Platforms/Architectures– New Microsystem Components
• Fabrication Research– New Processes/Methods– Identifying failure modes