Download - mems ppt
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MEMS TECHNOLOGYMEMS TECHNOLOGY
BYS.APPA RAO
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MEMS: micro-electro-mechanical systems
Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.
INTRODUCTION
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Same as the process steps used for making conventional electronic circuits
MEMS PROCESSPowerPoint
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FABRICATION PROCESS: FABRICATION PROCESS:
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CHEMICAL DEPOSITION Chemical vapour deposition
PHYSICAL DEPOSITION Sputtering
DEPOSITION:
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Application of photo resist Optical exposure to print an image of the mask
onto the resist Immersion in an aqueous developer solution to
dissolve the exposed resist
LITHIOGRAPHY:
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ETCHING:ETCHING:
•DRY ETCHING
•WET ETCHING
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Materials are the basic things required to develop micro sensors
Metals Polymers Ceramic materials Semiconductors Composite materials
MATERIALS FOR MEMS:
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Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices
MICRO MACHINING TECHNOLOGY:
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BULK micromachining:
SURFACE micromachining:
LIGA process:
TYPES OF MICROMACHINING:
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MEMS ACCELEROMETRER: MEMS ACCELEROMETRER:
CONVENTIONAL ACCELEROMETER SENSOR
• Made of bulky and heavy metal parts• Require high operating voltage/current• Needs careful maintenance • Highly expensive not throwaway type
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PIEZO-RESISTIVE ACCELEROMETER:
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LAYOUT OF THE RESISTOR:
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MASKS that are used 4 ACCELEROMETER:
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FABRICATION PROCESS:
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Contd….
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INTERFACE ELECTRONIC CKT
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MEMS ACCELEROMETER
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ADVANTAGES:
Significantly lower manufacturing costs
Small inertial mass
Particularly realized in the area of: – sensors – signal switching
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TECHNICAL LIMITATIONS:
Imprecise fabrication methods
Expensive and complex packaging
CAD Design tool inaccuracies
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APPLICATIONS:
Accelerometers in consumer electronics devices such as game controllers
Communications
biotechnology
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FUTURE:
As with all emerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives.
It has the potential to change our daily life as much as computer
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THANK YOU!!!
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QUIRIES???
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