MEMS Based Reconfigurable RF Systems for Software
Radio, Wireless Sensors, and MMID Technology
(MOSART)
Jussi Varis
VTT Technical Research Centre of Finland
Sweden, FOI: R. Malmqvist, C. Samuelsson
Sweden, Uppsala University: A. Rydberg, X. Hu
Finland, VTT: J. Varis, P. Rantakari, J. Säily, M. Lahti, M. Kaunisto, J. Saijets, and T. Vähä-
Heikkilä
NORDITE Conference 2011
Quality Hotel 33, Oslo
June 14th, 2011
2 NORDITE Conference 2011, June 14th, 2011
Outline
1. Project overview
2. Motivation and applications
3. Produced devices and modules
• RF MEMS Devices
• Antennas on LTCC
• LTCC packaged RF MEMS devices
• Sub-system modules
4. Related on-going efforts
5. Benefits from MOSART
6. Summary
3 NORDITE Conference 2009, Nov. 4th, 2009
Project overview
• 36 month VINNOVA, Tekes, and VTT funded project.
• Main goal: Successful integration of MEMS components, active RF circuits, and sub-systems into a LTCC packaged re-configurable RF front-end demonstrators at 10-40 GHz.
• Research partners: FOI, Uppsala University (SWE), VTT (FIN)
• Industry partners: Nera Networks (NOR), Ericsson Research (SWE), Saab Microwave Systems (SWE), Silex Microsystems (SWE), Syncore Technologies (SWE), Elektrobit Wireless Communications (FIN), Selmic (FIN).
4 NORDITE Conference 2009, Nov. 4th, 2009
Motivation
• RF MEMS
wireless RF systems with better performance
(compared with a use of today’s of the shelf technologies)
• RF MEMS in point-to-point communication and RF sensing (5-40 GHz),
reconfigurable electronic multi-band (frequency-agile) front-ends
Lowers component count, reduces complexity and cost
• RF MEMS switch technology
High linearity
Low insertion loss and DC power consumption candidate for re-configurable front-
ends and beam steering
5 NORDITE Conference 2009, Nov. 4th, 2009
Applications
• 35 GHz low loss electrically steerable antennas (low power radars)
• 10-30 GHz re-configurable/tunable amplifiers (for Pt-to-Pt communications)
mm wave sensors
radio links
6 NORDITE Conference 2009, Nov. 4th, 2009
MOSART RF MEMS devices
VTT 30-40 GHz
wideband matching
network
(1.0 mm x 0.9 mm). FOI RF MEMS
switch (0.7 mm x
1.0 mm).
VTT 35 GHz analog phase
shifter.
FOI 20-30 GHz SPDT with
places for LNAs (4.5 mm x
3.0 mm).
VTT 20-30 GHz SPDT (5.0
mm x 3.0 mm).
FOI 35 GHz 3-bit switched delay
phase shifter (9.3 mm x 3.0 mm).
7 NORDITE Conference 2009, Nov. 4th, 2009
MOSART antennas on LTCC
Uppsala 35 GHz 4x1 slot-coupled
antenna array (21.0 mm x 12.5 mm).
Uppsala 20-30 GHz microstrip
bow tie antenna array
(8.0 mm x 18 mm).
VTT 20-30 GHz end-fire dipole antenna
(8.5 mm x 8.0 mm). VTT 20-30 GHz Vivaldi antenna
(5.7 mm x 17 mm).
VTT 35 GHz co-planar 4x1 antenna
array with EBG structure
(20 mm x 12 mm).
8 NORDITE Conference 2009, Nov. 4th, 2009
MOSART LTCC packaged RF MEMS devices
LTCC packaged wideband RF MEMS
impedance tuner (9.0 mm x 9.5 mm).
LTCC packaged 20-30 GHz RF MEMS SPDT
switch(12 mm x 9.0 mm).
9 NORDITE Conference 2009, Nov. 4th, 2009
MOSART sub-system modules
20-30 GHz switchable LNA/driver
module (16 mm x 15 mm).
25/35 GHz switchable LNA
module(20 mm x 11 mm).
35 GHz narrowband digital phased array
Rx module (45 mm x 29 mm).
35 GHz narrowband analog phased
array Rx module (71 mm x 25 mm).
10 NORDITE Conference 2009, Nov. 4th, 2009
Main remaining challenges
• RF MEMS reliability Process quality (residuals, layer thicknesses).
Design parameter stability (MEMS switch gap height, capacitance ratio, pull-in
voltage)
Environmental susceptibility (temperature, mechanical, charging, etc.)
• Integration Flip-chip bonding vs. ribbon bonding
Alignment accuracy on LTCC
MEMS temperature tolerance in various integration and post integration
phases.
11 NORDITE Conference 2009, Nov. 4th, 2009
Related on-going efforts
• Rx modules on Taclam.
• Tunable LNAs and drivers on quartz. wire bond
or
flip-chip
Quartz substrate with RF MEMS
impedance matching networks.
LNA/PA
MMIC
RX1
RX2 Rx modules on
Taclam substrates.
Antenna arrays.
RF MEMS
phase shifters.
MMIC
LNAs.
Benefits from MOSART
• Nordic countries and Europe have in place technologies to produce
packaged re-configurable radio modules.
RF MEMS
LTCC
MMICs
• Benefits to industry partners in MOSART
Saab: electrically steerable phased array front-ends for sensor applications
Nera, Ericsson, Elektrobit: re-configurable/tunable radio sub-systems for Pt-to-Pt
applications
Syncore: novel integated sub-systems
Selmic: micro and mm wave frequency LTCC module processing
Silex: micro and mm wave RF MEMS processing
12 NORDITE Conference 2009, Nov. 4th, 2009
Benefits from MOSART
• Expanding European frontiers in RF MEMS and LTCC related
development
MEMS-4-MMIC (EU FP7, 2008-2011, on-chip integration of MMIC and RF
MEMS): OMMIC and CNRS-IEMN (FRA), FOI and Saab (SWE), IMST (GER),
IMT (ROM), VTT (FIN)
SATURNE (EU FP7, 2010-2013, GaN and RF MEMS for space applications):
UU (SWE), Thales and CNRS-IEMN (FRA), EADS (GER), Thales Alenia
Space (ITA), TopGAN (POL)
MiniMEMS (EU FP7, 2010-2013, miniaturised RF MEMS for airport and
weather radar systems): ÅAC Microtec and UU (SWE), Thales and CNRS-
IEMN (FRA), Vaisala (FIN)
MEMSMOD (ESA and participants, 2010-2012, LTCC packaged RF MEMS
switch reliability and environmental testing and assessment): EADS (GER),
Selmic and VTT (FIN)
13 NORDITE Conference 2009, Nov. 4th, 2009
Towards commercial systems
• RF MEMS switches and sub-systems
(circuits & antennas) have been
demonstrated with state-of-the-art
performance from DC-100 GHz and beyond
• Enabling technology for miniaturized, low-
power high performance re-configurable RF
systems (e.g. for wireless comm., space,
security & defense)
• High reliability (switch cycles) and
fabrication yields needed for a higher market
penetration
• Today, just a few commercial vendors
offering RF MEMS as packaged (discrete)
components: RadantMEMS (US), OMRON
(JPN), DELFMEMS (FR)
• A few MMIC foundries developing RF-
MEMS: OMMIC (FR) – GaAs, IHP (GE) –
SiGe, Selex (IT) – GaN
• RF-MEMS technology in the US (e.g.
Radant) has demonstrated a much higher
TRL than what is currently available in
Europe.
14 NORDITE Conference 2009, Nov. 4th, 2009
15 NORDITE Conference 2009, Nov. 4th, 2009
Summary
• MOSART has demonstrated
RF MEMS matching networks, phase shifters and SPDT switches
Antenna arrays and wideband antennas on LTCC
Module concepts for electronically steerable or re-configurable radio systems
Processing technologies for manufacturing RF MEMS devices and LTCC modules.
• MOSART has
Brought together a large number of Nordic companies and research institutes.
Utilised synergy (for example MMIC design and manufacturing) from other related on-
going projects and networks.
Expanded RF MEMS and LTCC related development to include more Nordic and
European companies and institutes in Nordic, EU, and ESA related projects.
• Challenges remain
RF MEMS reliability and stability
Integration related issues.
16 NORDITE Conference 2009, Nov. 4th, 2009
Contact information
• Project manager and national contact in Finland:
Dr. Jussi Varis, VTT, [email protected], tel: +358-40-569 4089, fax: +358-20-722 7013
• National contact in Sweden:
Prof. Anders Rydberg, Uppsala University, [email protected], tel: +46-18-471 3228, fax: +46-18-555096
• Chairman of the Steering Group:
Dr. Robert Malmqvist, FOI Swedish Defense Research Agency, [email protected], tel: +46-13-378 353, fax: +46-13-378 519