Mechanical Engineering
Bachelor Focus in Microsystems and Nanoscale EngineeringMikrosysteme und NanotechnologieApril 12st, 2016
Focus-Coordinator:Prof. Christofer HieroldMicro and Nanosystems
Microsystems and Nanoscale Engineering at D-MAVT
ProfessorsChiara DaraioJürg DualChristofer HieroldBrad NelsonDavid NorrisDimos PoulikakosSotiris PratsinisAndreas Stemmer
[Source: www.apple.com]
http://idw-online.de/de/image?id=64000&display_lang=de_DEhttp://www.tms.org/pubs/journals/JOM/0311/Byko-0311.html
[Source: Sensimed]
http://www.memsindustrygroup.org/files/public/April2010.htm
Microsystems and Nanoscale Engineering everywhereIncrease of functionality, performance, and application fields
Coriolis Force
Micromachined resonant sensors exploiting theCoriolis force are mainly used for angular rate sensing (gyroscopes)
Fs = 2m v ×
Fs: Coriolis Force: Angular rate / yaw rate of the carm:seismic massv: movement of the seismic mass
http://www.cnn.com/2009/HEALTH/12/11/bionic.eye/Eight-electrode PDMS device Artificial Retina Project (U.S. Department of Energy’s DOE’s)
Technology for Humans: Artificial Retina
Technology for Biomedical Applications: Functional Polymers in MEMS
50 m
In collaboration with the Institute of Robotics and Intelligent SystemsSuter, et.al., DOI:10.1088/0960-1317/21/2/025023, January 2011
greenTEG is an ETH spin-off company founded by the former and current PhD students of Prof. Hierold: Wulf Glatz, Lukas Durrer, Etienne Schwyter ,and Peter Stein.
The research was awarded the“swisselectric research award 2009”
Technology for Energy Conversion and Efficiency: Thermoelectric Generators
Microsystems and Nanoscale Engineering - Myths
It’s all about chemistry!?
NO, it is not.
Si + 2H2O SiO2 + 2H2
It is not mechanical engineering! YES, it is mechanical engineering!
Microsystems and Nanoscale Engineering – Myths 2
I am limited in my options for continuing Master Programs?!
NO, you are not
You are still studying BSc ME, allowing to continue with ME consecutive and specialized Master Programs and respective programs at ETH Zurich or other universities
1 μm
electrical contacts
Particles ( beads, cells, … ) are moved or rotated by nonlinear acoustics in fluid cavities in microsystems ( see Lab on Chip Tutorial Series 2011-2012 ) e.g. for biomedical applications
Ultrasonic Manipulation ofCopolymer Beads (74m) withmicrogripperCollab. with Nelson group, ETHZ1 mm channel, 6x slower
Ultrasonic Manipulation of MCF10A Cells: Line Formation Collab. with University Hospital ZurichField of view: 0.67 0.56 mm , Real time
Ultrasonic Rotation of Particle Clumps17 m Copolymer particlesReal time, 3 mm x 3 mm square chamber
Ultrasonic Particle ManipulationJürg Dual, Center of Mechanics
We design, fabricate and test the mechanical and optical properties of micro-structured materials with ultra-low and tunable thermal expansion. These systems could be used for applications in space or energy technologies.
Potential application: Reconfigurable, large-aperture space telescopes
Schematic diagram of the microfabricationapproach for ultra-low coefficient of thermal expansion (CTE) space mirrors: top-down etching of a SOI wafer
Scanning electron microscope image of the fabricated mirror: a thin bi-metallic membrane with near zero CTE
Thermally Stable MicrostructuresChiara Daraio, Chair of Mechanics and Materials
Nanosystems, Nanomaterials, Energy HarvestersChristofer Hierold, Chair of Micro- and Nanosystems
Energy harvesting from the human body
Ultraclean CNT transistors
Tunable CNT resonators
Ultra-low power acoustic emission triggers
Pressure sensors for Ventricular Assist DevicesSingle-wall CNT gas
sensors
µTEGs based on Si NWs
www.micro.mavt.ethz.ch
Multi-scale Robotics Lab: Fabrication andmanipulation of micro and nano robotsBrad Nelson, Institute of Robotics and Intelligent Systems
Magnetic manipulation systems allow the precise 3D control of various magnetic agents for biological andbiomedical applications. Micro and nanorobots with different shapes and functionalities are fabricated toperfom targeted therapies with minimal invasiveness.
Plasmonic Solar CellsDavid Norris, Institute of Process Engineering / OMEL
Result:Structured metals for new approaches to solar energy via photovoltaics and thermophotovoltaics
HotEmitter
PhotovoltaicCell
NP
PlasmonicEmitter
AQUASARDimos Poulikakos, Institute of Energy Technology / LTNT
Goal/Vision:“green“ data center – zero emission
Stopovers/Results: installation of Aquasar-
system at ETH Zurich
reuse of heat in liquid-cooled super-computers
waste heat will beused in heating systemof ETH
< 85°C
70-75°C
50-60°C
Catalysts
Biomaterials: dental fillers
Scaleable aerosolsynthesis of novel
nanomaterials
Gas Sensors
Advanced Pigments
PhosphorsBatteries
C-LiFePO4
Non-fortified FePO4 0.5 FeSO4
Nutrition: Chocolate milk
SiO2-coatedSPION/Ag
Particle Technology LabSotiris Pratsinis, Institute Process Enineering
We synthesize, assemble, and characterize functional nanoscalematerials and components to explore their potential for next-generation electronic devices.
Molecular electronic devicesassembled from nanoparticlesand characterized by scanning probe microscopy.
Sub-5-nm channel length organic field effect transistor fabricated from a pair of gold nanorods.
Voltage dropalong a nanowire.
Assembly and Characterization ofNanoscale ElectronicsAndreas Stemmer, Nanotechnology Group
Microsystems and Nanotechnology @ D-MAVTFollows an interdisciplinary engineering approach
Mechanical Engineering
materials and surfaces
computational methods optics
electronics
process development
thermodynamics and energy conversion
mechanics material and system integration
systems control
Why is an inter-disciplinary education in micro and nanosystems for engineers of great relevance?
… was Sie als Mikrosystemtechniker für uns interessant macht ist die Fähigkeit, auf Systemebene Probleme zu lösen. Dabei müssen vielfach mechanische, elektrotechnische, materialspezifische und viele andere physikalische Effekte berücksichtigt werden.
sinngemäss nach ….Hr. Christoph Tietz, Leiter Platform Engineering, Bombardier Transportation AG, Schweiz, anlässlich eines Vorstellungsgesprächs
Mechanical Engineering
Bachelor Focus in Microsystems and Nanoscale EngineeringMikrosysteme und Nanotechnologie
Questions?
Please contact:Prof. Christofer Hierold, Micro and [email protected]
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