Download - ME104 2 a Chua Kim Lian 25062012
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SPECIALIST DIPLOMA IN
M&E CO-ORDINATION
CLEAN ROOM SYSTEM
LABORATORY SYSTEM
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CLEANROOM
Er. CHUA Kim Lian
email: [email protected]
tel: 6742 8938
hp: 9631 5762
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Basic of Cleanroom
Cleanroom Standard
Industries
Methodology: Design ~ Project
Design Features
Cleanroom Protocol
Testing and Balancing
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CLEANROOM STANDARD
ISO 14644-1
FED STD 209E
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definition
ISO 14644-1
cleanroom
A room in which the contamination of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of particles inside the room and in which other relevant parameters. e.g. temperature, humidity, and pressure, are controlled as necessary
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definition
FED STD 209E
cleanroom A room in which the concentration of airborne
particles is controlled and which contains one
or more clean zones
clean zone A defined space in which the concentration of
airborne particles is controlled to meet a
specified airborne particulate cleanliness class
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ISO 14644-1
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FEDERAL STANDARD 209E
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ISO Class 4 cleanroom
352 airborne particles at 0.5 um size within a
volume unit of 1 m3
Federal Standard Class 10 cleanroom
10 airborne particles at 0.5 um size within a
volume unit of 1 ft3
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Facility Definitions
AS-BUILT CLEANROOM (FACILITY)
AT-REST CLEANROOM (FACILITY)
OPERATIONAL CLEANROOM (FACILITY)
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AS-BUILT
A cleanroom (facility) that is complete and
ready for operation with all services
connected and functional but without
equipment or personnel in the facility
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AT-REST
A cleanroom (facility) that is complete with all
services functioning and with equipment
installed and operable or operating as
specified, but without operating personnel in
the facility
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OPERATIONAL
A cleanroom (facility) in normal operation with
all services functioning and with equipment
and personnel, if applicable present and
performing their normal work functions in the
facility
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INDUSTRIES
Microelectronics
Wafer
Flat screen
Pharmaceutical
Sterile products
Tablet
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INDUSTRIES
Biotechnology
Antibiotic
Genetic engineering
Optics
Lenses
Laser equipment
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INDUSTRIES
Medical Devices
Instruments
Machines
Food & Beverages
Sterile environments
Packaging
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HOW TO KEEP IT CLEAN?
Influencing factors
factors that can harm the product / process /
operator
Particulate and Gaseous Contaminants
Environmental Factors
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Particulate and Gaseous Contaminants
Cleanliness of air
Cleanliness of surface of the working place
Dead and living particles
Inert and toxic particles
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Environmental Factors
Temperature of air
Humidity of air
Light intensity
Vibration
Noise
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Environmental Factors
Radiation
Ionization
Electrostatics
Electromagnetic
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CLEANROOM FUNDAMENTAL
Layout
Component
Function
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GOWNING ROOM
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AIR SHOWER
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PASS THRU
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AIR FLOW
Air circulation
Air return
Filtration
Pressurization
Pressure differential to lesser area
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AIR PRESSURE CONTROL
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CEILING SYSTEM
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CLEANROOM
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FILTERS
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CEILING
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ELECTRICAL
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PARTITION
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PARTITION
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WINDOW
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CLEANROOM
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RELIEF AIR GRILLES
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LIGHT FITTING
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REFLECTED CEILING