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Large Area MappingManufacturing process problems such as organic and inorganic
contamination, corrosion and cleaning residues often occur on a
scale much larger than the field of view of traditional micro analysis
techniques. The fully automated stage stepping acquisition mode
allows the analysis of large sample areas of up to 9 x 9 cm2.
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Large Area Mapping
Field of view: 3.0 x 1.5 cm2
Large area chemical mapping of centimetre metal ruler with a
pixel resolution of 100 pixels per mm.
Cr
CxHyO
Siloxane
Overlay (Cr, CxHyO, Siloxane)
Schematic of a large area mapping in image stitching mode.
The maximum size of single images is 500 x 500 μm2.
The instrument software allows for a flexible adjustment of the
image resolution in pixels per mm.
ION-TOF USA Inc.
100 Red Schoolhouse Road, Bldg. A8 . Chestnut Ridge, NY 10977 . Phone 845 352 8079 . Fax 845 356 6304 . [email protected] . www.iontofusa.com