© 2006 Hewlett-Packard Development Company, L.P.The information contained herein is subject to change without notice
HP Work Area Control (WAC)
50% Increase in Operations ProductivityMatthias MuellerHP IPG-IT Factory Systems Engineering
3 30 May 2007
HP-TDO Business ObjectivesTechnology Development Operations:
Deliver print engine technology platforms for best in class printing solutions
Investigate new imaging systems technology opportunities
Deliver leading technologies to drive growth in new, high-value segments
4 30 May 2007
Fab Information
• Fab 21− 34K Sq. Ft.− Class 1− Open Cassette Processing
• Fab 22− 28K Sq. Ft.− Class 1 − “SMIF” Processing (150mm)
• Fab 23 (Test & Saw)
− 12K Sq. Ft.− Class 10,000 - 100
• Fab 30− 43K Sq. Ft.− Variable Air Handling (Class 100 to 10)
• Totals:− 6218 m2 clean room, 1000 m2 Test
All four fabs support production & development activities
5 30 May 2007
Work Area Control (WAC)Program Objectives• Simplify Semiconductor Mfg Operator interface
− “Quick:” Assess state of entire work-area (e.g. Photo) from unified graphical interface based on attention state (color)
− “Easy:” Navigate & access relevant information for Fab events related to Entities, Lots, and Processes
− “Effective:” Take action to satisfy or resolve standard Fab events or escalations• Resulting in a 1.5x productivity improvement in Photo
Moves/Operator/Shift• Boundary Conditions
− Operators will be “shared” across work areas− GUI will be “standard”, accessible from anywhere− Data will be real-time, event driven− System architecture will be distributed, heterogeneous− Entities will be automated in Systema Architecture (EQC/EQS)
6 30 May 2007
FAB System Architecture
Work Area Environment and Control
Equipment Interface and Data Collection
IW
MES and Operational Parameters
Engineering Data Control
Operational Data Distribution
METRODIE DAD CDE TIJ4
ODD
JMS
TIB-RV
EQS EQC
IWAC GUI
PJSETUPsrv
FVIEWsrvVALIDATIONsrv PJOBsrv
UTILITYsrv
ArchIDManager
SWAMI
DAD/WS Sync Agent
WAC
SPACE
FAB ODS
Recipe / Parameter Management
Execution Logic Setup / Administration
WORK-STREAM
Remotes
WSMsrv
WIT Workstream Database
XWI
CMMSG
COMETS
Modules
RTC EPT
Automation Adapter
WIP, WIPA
Workstream Connection
SQC
MESsrv, MESapi
MESDA
RBR exits
Systema Admin Tool
POST
ELSAdb
ELSA gui
ELSA serverRPM agent
RPM gui
RPM data store
IWACdb
ATTNsrv
WAC Layout Editor
Manual Data EDC
KMS Agent (subset EDC?)
HAWK
HAWK DB
KLARITY
Map Morpher
agent
Non-Secs EDC
FSCE
Weblogic (J2EE)
SLEUTH
IDOC AgentAuthentication Server
RBR Server
RBRdb
Socket Agent
Key
Tib-Rv Connected
J2EE Connected
LAN Connected
Has no description document
Update ServiceSMS
SNS Monitor
Realtime WIP
eTraveler
Dispatcher
Refdocs
MDA
EDCsrv
(Factory Tool)
Future (or substantial changes)
Agent / Service
Registry
RFID db
RFID agent
Ref Data (product)
Agent
Dispatch Agent
Lot Change Agent
Entity Change Agent
PullCard Count Agent
eMail Agent
Scan Agent
SPACE agent
SPACE db
DAD http agent
TIB
CO
EM
S
Rv
Brid
ge
Disposition Server
7 30 May 2007
Work Area Control (WAC) SFC Integration Objectives• Systema based GUI for Area Overview, Q/H/D rack, and
Entity drill-downs− Area Overview
• Quick: Attention state of each object is expressed as a color• Easy: Color indicate 3 states of increasing attention required
− Red: Immediate (alarm)− Yellow: Attention required (Dispatch, lot complete, etc)− Green: No attention required (processing, no action to be taken)− White: Idle− Grey : “Down” state
• Effective: Physical location transparency − Review State Transition reasons from any GUI − Consistent “message”, data navigation, and escalation resolution.
8 30 May 2007
Work Area Control (WAC) SFC Integration Metrics• Increase Operator Productivity
− 50% increase in Operator Productivity• Photo Moves/Operator/Day
− Support reduction in operator staff• Increase use of “temporary” staff• Decrease operator training requirements
− “Off the street to moving WIP in 2 days…”− Support new Operations Model
• Reduce overall staffing in each work area• Operators are trained to support primary and secondary work areas
− HP Cost Benefit Analysis• WAC Program will save HP $30M US/year
9 30 May 2007
WAC Operational Scenario1. Operator reviews current status of work area from the
WAC Area Overview− Example: Shift change w/out status communication
2. Lot scanned into Photo Queue Rack− Queue Rack changes state indicating material is present
3. DNS Nikon determines lot is “dispatchable” and signals operator Attention Requiredà Yellow State− Lot is trackable to this entity− DNS Nikon signals “WIP Event” attention required
4. Lot processing is initiated from the Automation UI− Port Selection and Recipe Validation
5. DNS Nikon determines lot started, and Attention State Transitions to Green
10 30 May 2007
Work Area Control: Initial State
Operator reviews current status of work area from the WAC Area Overview
Example: Shift change w/out status communication
11 30 May 2007
WAC Material Arrives at Q-Rack
•Lots scanned into Photo Queue Rack
−Queue Rack changes state indicating material is present
•DNS Nikon determines lot is “dispatchable” and signals operator Attention Requiredà Yellow State
−Lot on Product Flow this DNS is associated with−Lot is trackable to this entity−DNS Nikon signals “WIP Event” attention required
12 30 May 2007
WAC Dispatch Event Request•Material on Q-Rack can be delivered to the DNS-Nikon constraint tool.
•Attention State Reason Table:•Details why state transition occurred. •Provides detail of action to be taken.
13 30 May 2007
WAC Area Overview•Lot processing is initiated from the Automation UI
−Port Selection and Recipe Validation−P13 Attention State is GreenàTool is Processing WIP
14 30 May 2007
Work Area Control (WAC) Area Overview
•Steady State Area Overview•State of tools updated real-time•Operations business process drive which tool is priority
15 30 May 2007
HP-Systema Collaboration on WAC• Systema co-developed concept & initial
prototypes −Conceptual development, business and software
requirements−Project scoping, estimation, and resource planning
• Initial System Architecture and Design−Systema co-designed application architecture
• Area Overview (GUI)−Heavily leveraged Systema GUI Components−Systema developed the Fab Layout Utility
• Create the Area Overview Objects used to represent physical entities
16 30 May 2007
HP-Systema• Systema provided HP a “Breakthrough Opportunity”
− Systema Framework Toolkit− Visibility to Semiconductor mfg best practices and opportunities
• HP selected and values Systema as a partner:− Technology
• Java, Workstream, & Tibco• Standard components (Systema Framework, GUI, Automation)
− Deep knowledge• Fab Processes, Automation, Integration & Project Execution
− Collaboration:• HP initially relied heavily on Systema collaboration• Systema transferred knowledge to HP resources through structured
training, mentoring, and co-development • HP now has the tools and knowledge to extend and rapidly deliver to
ever-changing business drivers
17 30 May 2007