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Fundamentals of X-ray diffraction and scattering
Don SavageStaff member: In the Nanoscale Imaging and
Analysis Center (NIAC)
[email protected] Engineering Research Building
(608) 263-0831
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X-ray diffraction and X-ray scattering
Involves the elastic scattering of X-rays
Diffraction is primarily used for structure determination.
How are atoms or molecules arranged? What is the crystal structure?
Scattering uses differences in electron density and looks at larger structures.
X-rays are part of the electromagnetic spectrum
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Laboratory X-ray sources
• Electrons bombard target, give off X-rays
• Water cooling can be used to increase the power to the target
• Optics can be used to filter and focus the X-rays produced
eV = hν =hc/λ, V (volts) =1239.8/λ(nm)
Copper is a common anode choice
8.048 EV for Cu Kα
Cu Kα2 λ = 0.1544390 nmCu Kα1 λ = 0.1540562 nm
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Lab sources
Point source – Useful with area detector
Bruker d-8 – Conditioning Opticscrossed multilayer mirrors and point collimator yields a Cu Kα parallel point beam with diameters from 0.1 to 2.0 mm
Line source – Useful when you have a large uniform sample (e.g., for a perfect crystal or uniform smooth film)
Panalytical – Conditioning optics• Multilayer mirror and channel cut crystal - Cu Kα1• Multilayer mirror only – Cu Kα• Slits only
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X-ray interactions with matter
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X-ray interactions with matter
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X-ray scattering by an atom
X-rays are scattered by electrons in an atom into (approximately) all directions, though peaked in the forward direction. Wave picture of light is useful here:
Strength of the scatteringdepends on the number of electrons~ Z2 (Z is the atomic number)
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X-ray scattering by two (or several) atoms
Constructive interference in some places.
Destructive interference in others.
Two atoms: Several atoms:
From: C. Barret and T. B. Massalski, Structure of Metals, (1980).
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X-ray diffraction from periodic arrangements of atoms
• Important Concept :X-rays reflect from crystal planes (only those that scatter in-phase from multiple planes yield peaks)
• All “Peaks” in Diffraction Satisfy Bragg’s Law: nλ=2 d sin(θ)λ=2 dhkl sin(θ)
d sin(θ)
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What does a lab diffractometer measure?
• Angles and X-ray intensities (counts)
additional degrees of rotational freedom
“theta- 2theta” diffraction geometry
ω
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X-ray detectors
Would like to count single x-ray photons with high dynamic range as quickly as possible
0-dTraditional: Scintillation counter- serial detector (slow)- x-ray photon generates electron pulse
1-dlinear photo diode array –can now count in parallel
2-dphoto plate (first x-ray detectors)- not quantitativewire arraycharged coupled device (CCD) array2-d photo diode array
Bruker d8 Vantec detector 2048 x 2048 pixel 14cm active area
Panalytical Empyrean 255 x 255 diode array
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Powder diffraction
Widely used –• Phase identification• Amorphous to crystalline ratio
Common industrial use: Quality control (do I have the same mix)
Other uses:• Grain size • Film texture• Stress measurement
www.mater.org.uk
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Example of powder diffraction dataIn
tens
ity (c
ount
s)
2 θ (degrees)
Corundum
• Bruker d8 using 0.5 mm collimator• 3 minute acquisition time
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Phase identification
The diffraction pattern for a particular phase is unique
• Phases with the same composition can have drastically different diffraction patterns
• The peak positions and relative intensities are compared with reference patterns in a database
http://prism.mit.edu/xray/oldsite/tutorials.htm
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The scattering from a mixture is a simple sum the scattering from each component phase (reference to a standard, as different compositions scatter more or less strongly)
Note: The amorphous to crystalline ratio is determined from relative intensities (each phase is SiO2)
Example: Mixture of SiO2 phases
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Quantification: Phases with different compositions
RIR calcite[CaCO3] = 3.45
RIR dolomite [CaMg(CO3)2] = 2.51
RIR – reference intensity ratio
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Crystallite size determination
Crystallites smaller than ~100nm broaden diffraction peaks• Analyze peak width with the Scherrer equation• Must include instrument broadening
Microstrain may also broaden peaks but can be separated out by measuring peak width over a wide 2θ range
B(2θ) = K λ/[t cos(θ)],
B is the peak full width at half maximum (radians), K is a shape factor (0.8-1.2), t is the crystallite size and λ the wavelength
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Texture: Best observed with an area detectorThousands of crystalline grains are sampled
• Intensity in preferred directions shows the orientations are not random (from the deposition process or cold working)
• 2d detector with point source shows texture directly
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Stress can be inferred by measuring strain
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Macrostrain determination in a polycrystalline sample
Look a at a high 2θ angle hkl peak position at different angles ψ with respect to the surface normal
ψ
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Residual stress using the sin2ψ method
https://mrl.illinois.edu/sites/default/files/pdfs/Workshop08_X-ray_Handouts.pdf
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Single-crystal diffraction: requires high-resolution
• Obtain crystal structure and orientation
• Measure crystal symmetry, lattice constants and defects
• In epitaxial film growth– Determine strain (film relaxation),
crystal mosaic, and film thickness
Requires accurate control of the sample orientation. To satisfy Braggs law, the incident beam and the detector have to be located precisely.
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Panalytical Empyrean for high-resolution measurements
Hybrid monochromator: curved multilayer mirror coupled with 4-bounce Ge(220) crystal
Sample stage moves in x, φ, and chi
Pixcel detector for fast mapping
Channel-cut analyzer crystal with12 Arc-second acceptance angle
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High-resolution X-ray analysis
SiGe deposited on Si(001)Thickness 79 nm Alloy composition Si80.5 Ge19.5
Si(004)
thicknessSiGe (004)
63 period InGaAs/InAlAs deposited on InP (001)
4.47 nm In79Ga19As3.91 nm In24.3Al75.7As
SL periodFits assume 100% coherent growth
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Introduction to reciprocal space and the Ewald construction
Reciprocal lattice vectors• perpendicular to crystal planes• spaced = 2πn/d hkl
Ewald construction links the experiment to the lattice with q (the scattering vector)
When q (the scattering vector) is centered on a reciprocal lattice point, Bragg’s law is satisfied
• k0 is in the direction of incoming x-ray• k1 is the direction of the diffracted beam
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Possible ways to navigate in reciprocal space
Q =kf - ki
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Why use reciprocal space mapping?
The relative positions of Bragg peaks allow one to determine the degree of relaxation (coherency)
Maps can take a long time to acquire
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Reciprocal space maps of epitaxial SiGe
(-2-2 4) (-2-2 4)
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Ultra-fast reciprocal space mapping
(-2-2 4) reciprocal space map of SiGe on Si
Acquired in 3 minutes
Uses 255 lines of diodes at different 2θ valuesIn parallel during an ω−2θ scan
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X-ray reflectivity
Near surface and interface information
Density
Porosity
Film thickness
Surface and interface roughness
Works for amorphous films as well as crystalline
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X-ray reflectivity
Contrast mechanism is differing refractive indices (electron densities)
Film thickness measurements from 2nm - 300nm
Simulation and fitting: Determine interface roughness and film porosity
Log
inte
nsity
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X-ray reflectivity information content
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X-ray reflectivity: ALD of Alumina on Sapphire
As deposited:density= 2.95 gm/cm2
thickness = 114 nm
After 1050 C anneal for 2 hrsdensity= 3.4 gm/cm2
thickness = 96 nm
Smaller critical angle means lower density
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X-ray reflectivity from a thin layer
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X-ray reflectivity data fitting
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SAX (small angle x-ray scattering)
To look at larger periodic structures or particle sizes, look close to the incident beam.
• Use transmission• Cu radiation• Need a vacuum to
reduce air scatter
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Rigaku SAX system
Fixed area detector10 cm with 1024 pixel diameter
PIN diode on beam stop measures beam transmission
Sample to detector distance 2 meters
Sample heating to 350 C
Cu Kαmicro source
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Bruker d8 in SAX mode
Use when higher angles are needed
Sample to detector distance from 15 to 33.6 cm
Beam stop to block direct transmitted x-ray beam
Sample heating to 350 C
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SAX measurements from silver behenate
Log
Inte
nsity
(cps
)
q (inverse Angstroms)
Log
Inte
nsity
(cps
)
q (inverse Angstroms)
Rigaku Saxq ~ 0.08 to 1.2 nm -1d ~ 80 nm to 5 nm
Bruker d8q ~ 0.4 to 7.2 nm -1d ~ 16 nm to 0.9 nm
Smaller d possible by moving the detector closer
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Some SAX applications
• Block copolymer ordering• Nanoparticle size and distribution• DNA in solution
Nayomi Plaza will present recent work using SAX on:
Moisture-induced changes in the cellulose crystalline structure of wood cell walls
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X-ray diffraction summary
Diffraction is ideally suited for looking at order in materialsPolycrystalline samples: Phase determination, stress, grain size, and texture
Single-crystal diffraction: Epitaxial coherency, mosaic spread, film thickness, and strain
Bruker d8
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X-ray reflection and SAX
Crystallinity not needed
XRR of thin films: Thickness, density, and interface roughness
SAX: Particle size (average) and long-range domain ordering
Panalytical Empyrean