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ESS 5855Surface Engineering for
Microelectromechanical Systems
Fall 2010
MMicroicroEElectrolectroMMechanicalechanical SSystemsystems
Miniaturized systems with integrated electrical and mechanical components for actuation and sensing applications
Texas Instruments, Digital Micromirror DeviceDigital Light Processor (DLP)
Microelectronics
Sensors Actuators
Physical World
MEMS
Microelectronics
Sensors Actuators
Physical World
MEMS
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Introduction
• Scaling
• Swimming
Introduction
Walking on water is possible but swimming is not fun
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Outline
• Introduction (3)• Capillarity (6)• Thermodynamics (3)• Electrical Double Layers (3)• Electrokinetic Phenomena (3)• van der Waals Forces (3)• Colloids and Colloidal Stability (3)
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Outline
• Surfactants and Interfacial Phenomena (3)
• Characterization (3)• MEMS Reliability (3)• BioMEMS (3)• Flow and Droplet Manipulation (3)• Self Assembly (3)
Capillarity
• Surface tension• Young-Laplace equation
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Capillarity
• Contact angle
Electrical Double Layers
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Electrokinetic Phenomena
• Electrophoresis• Electroosmosis
van der Waals Forces
• Intermolecular attractive forces
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Colloids
Surfactants
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Surfactants and Interfacial Phenomena
Hydrophilic headHydrophilic head
Hydrophobic tailHydrophobic tail
CavityCavity
Lipid Lipid BilayerBilayer
Surface Treatment
(a). Au on glass side+ SAMs
θ=110.7°Hydrophobic SAMs*
θ=56.7°Hydrophilic SAMs(-COOH)
(b) Au on micro posts
θ=109.9°dia: 60μm pitch:40μm
θ=73.8°dia:80μmPitch: 180μm
(c) Au on micro posts+SAMs
θ=143.6°Hydrophobic SAMs*dia: 60μm pitch:40μm
θ=12.4°Hydrophilic SAMs(-COOH)dia:80μmPitch: 180μm
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Controlled Interfaces
AFM
• It consists of a sensor that responds to a force and a detector that measures the sensor’s response
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BioMEMS
MMicroicroEElectrolectroMMechanicalechanical SSystemsystems
Miniaturized systems with integrated electrical and mechanical components for actuation and sensing applications
Texas Instruments, Digital Micromirror DeviceDigital Light Processor (DLP)
Microelectronics
Sensors Actuators
Physical World
MEMS
Microelectronics
Sensors Actuators
Physical World
MEMS
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Liquid Manipulation
Massively parallel manipulation of single cells and microparticles using optical images
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Self Assembly
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Current Status of Surface Related MEMS Research
MEMS 2010
885 Abstracts298 Accepted75 Oral presentations
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MEMS 2009
856 Abstracts279 Accepted47 Oral presentations
MEMS 2008
778 Abstracts267 Accepted43 Oral presentations
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MEMS 2007
610 Abstracts221 Accepted43 Oral presentations
MEMS 2006
789 Abstracts236 Accepted42 Oral presentations
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Transducers ‘09
1300 Abstracts600 Accepted
220 Oral presentations
Transducers ‘05
1035 Abstracts514 Accepted199 Oral presentations
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MicroTAS ‘08
1100 Abstracts660 Accepted
65 Oral presentations
MicroTAS ‘06
881 Abstracts (980)539 Accepted (580)66 Oral presentations
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Classification• Design, Simulation, and Theoretical Concepts
with Experimental Verification• Materials and Device Characterization• Fabrication and Packaging Technologies• Biomedical/Chemical Micro Sensors and Systems• Mechanical Sensors and Systems• Micro-Actuators• Micro-Fluidic Components and Systems• Physical MEMS (Optical, Thermal, Magneto)• RF MEMS• Nanoelectromechanical Devices and Systems • Power MEMS & Energy Harvesting
Most Popular Keywords
• RF MEMS 10 - 13 - 11 - 5• Optical MEMS - 9 - 1• Resonator(s) 7 - 9 - 8 - 8• CMOS MEMS 6 - 7, Microswitch 7• Actuator 10 - 5 - 10• DNA 6, Gyroscope 7 - 6• Microfluidic(s) 4 - 9 – 16 - 14• Drug delivery 6, Carbon Nanotube - 6
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Surface Related Keywords
• Surface tension - 3 - 4• Stiction - 3 - 1• Self-assembly - 4 - 8 - 9• Electro-phoresis/-osmosis - 2 - 6• Electrowetting - 4 - 6 - 3• Dielectrophoresis - 4 – 4 - 3• Droplet - 8 - 3• Particles - 7 – 3• Parylene - 8, PDMS - 6
Self Assembly and Packaging
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TOWARDS OPTIMAL DESIGNS FOR SELF-ALIGNMENT IN SURFACE TENSION DRIVEN
MIRCO-ASSEMBLY
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SEQUENTIAL SELF-ASSEMBLY BY CONTROLLING INTERACTIVE FORCES
BETWEEN MICROPARTICLES
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NON-ROBOTIC FABRICATION OF PACKAGED MICROSYSTEMS BY SHAPE-AND-SOLDER-
DIRECTED SELF-ASSEMBLY
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SELF-ASSEMBLY OF MEMS COMPONENTS IN AIR ASSISTED BY DIAPHRAGM AGITATION
FROM MICRO-PATTERNS TO NANO-STRUCTURES BY CONTROLLABLE COLLOIDAL
AGGREGATION AT AIR-WATER INTERFACE
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A 3D BIOLOGICAL FILTRATION MATRIX USING SELF-ASSEMBLED MICROSPHERES
INSIDEMICROCHANNELS AND GELATIN SACRIFICIAL LAYER
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Cell and Particle Handling
A MICROFLUIDIC DEVICE FOR ELECTROFUSION OF BIOLOGICAL MEMBRANES
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LIPID BILAYER MICROCHAMBERS: AN OPTICAL DETECTION SYSTEM FOR MEMBRANE TRANSPORT
A CONTINUOUS CELL SEPARATION CHIP USING HYDRODYNAMIC DIELECTROPHORESIS PROCESS
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MICROVISON-ACTIVATED AUTOMATIC OPTICAL MANIPULATOR FOR
MICROSCOPIC PARTICLES
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Optical MEMS
LIQUID LENS TECHNOLOGY: PRINCIPLE OF ELECTROWETTING BASED LENSES AND
APPLICATIONS TO IMAGING
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Electrowetting-Based Displays: Bringing Microfluidics Alive On-Screen
TUNABLE MICRODOUBLET LENS ARRAY
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BioMedical Devices
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PARYLENE FLEXIBLE NEURAL PROBE WITH MICRO FLUIDIC CHANNEL
COMPACT, SEAMLESS INTEGRATION OF ACTIVE DOSING AND ACTUATION WITH MICRONEEDLES
FOR TRANSDERMAL DRUG DELIVERY
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DETACHABLE SILICON MICRONEEDLE STAMPS FOR ALLERGY SKIN PRICK TESTING
NANOMECHANICAL PROTEIN DETECTORSUSING ELECTROTHERMAL NANO-GAP
ACTUATORS
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Actuators
ENHANCED ELECTRO-OSMOTIC PUMPING WITH LIQUID BRIDGE AND FIELD EFFECT FLOW
RECTIFICATION
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NOVEL STRUCTURE FOR PASSIVE CO2 DEGASSING IN DMFC
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Micropumping by Directional Growth and Hydrophobic Venting of Bubbles
ENGINEERING SURFACE ROUGHNESS TO MANIPULATE DROPLETS
IN MICROFLUIDIC SYSTEMS
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Physical SensorsRF Devices and Resonators
Force & Stress Sensors
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Stiction
Vapor Phase Anti-Stiction Coatings for MEMS
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A Lateral, Self-cleaning, Direct Contact MEMS Switch