Shenzhen, June 16th, 2018
Dr. Iván Fernández Martínez
Dr. Iván Fernández Martínez, co-founder, managing director ofNano4Energy SL and hipV AB.Physicist, over 16 years insputtering and particularly, inHiPIMS.
Ambiorn Wennberg, co-founderand business manager ofNano4Energy SL and hipV AB.Material Science Engineer. Hisbackground is in metallurgy,vacuum technology.
Alvaro Mendez, degree on Chemistry. PhD on HiPIMS withEU Marie CurieAction.
Sandra Muñoz Piña,degree on Chemistry.PhD on sputteringcoatings with GLAD.
Prof. Fernando Briones, co-founder of Nano4Energy SL.Material Science Engineer. Over 45years experience in R&D. Over 300published papers.
Plasma process development (magnetron, process controller, etc …)
- Gencoa (UK) as strategic partner
High power electronics / HiPIMS power supplies
- Viesca (ES) as strategic partners
Characterization of thin film properties
- Access to european research center facilities.
1st proof ofconcept
First industrial 6kW prototype
(Gen 1)
Generation 21st commercial
version
New Jointventure launched
Generation 3Made for the industry
Complete plasma operation functionality provided by Dr. Fernandez in 2007 and manufactured by Ingeniería Viesca SL.
Frank Papa, founder and president of GP Plasma, LLC. Herepresents Nano4Energy in the USA and China. He has worked atHauzer Techno Coating, Crystallume Inc., Vergason Technologyand Gencoa Ltd.. His background is in sputtering, arc and CVDprocesses and hardware development. He has developed theHiPIMS technology at Hauzer.
Feng Limin / 冯利民, 工程热物理专业;豪泽技术涂层5年销售经理; 上海新弧源涂层技术有限公司6年总经理; representsNano4Energy in China 国内独家代理.
Gerhard Eichenhofer, founder and president of 4APlasma(Germany). Sales manager at hipV AB. He has worked at Solvix,ENI and Advanced Energy. His background is in sputtering, arcand CVD processes and hardware development.
Biggest market for hipV
• Allows DC, HiPIMS and Bias operation (units are fully exchangeable!!).
• Already in production for large coating system builders worldwide.
.- Reliable operation in production is a must (24/7 operation).
2.- Plasma process understanding by the manufacturer. It is a complex process!!.
3.- Demonstrate it is possible to achieve deposition rates comparable to DC sputtering… Advanced solutions such as anodes, Positive V reversal, etc… are required.
4.- PLC communication with the latest protocols (Profibus, Ethercat, ……).
5.- Ability to run stable in reactive sputtering.
6.- Ability to run stable Metal Ion etching. Widely used process to improve adhesion in arc systems.
Vacuum chambers (x3 different sizes)
Magnetrons:
- Circular 2”
- Rectangular 20x7.5cm2
- Gencoa rectangular 40x10cm2
Gases: Ar, O2, N2, He, H, D….SpeedFlo reactive process controller.
Power supplies (up-to-date):
- AC Dual Magnetron 40kHz (AE/10kW)
- DC-Pulsed 150kHz (EN Tech/10kW)
- 3x hipV HIPIMS + Bias (6-20kW)
- RF
Plasma process development (magnetron, process controller, etc …)
- Gencoa (UK) as strategic partner
High power electronics / HiPIMS power supplies
- Viesca (ES) as strategic partners
Characterization of thin film properties
- Access to european research center facilities.
www.gencoa.com 17
V±EE DLC
±
Hugo Huang (黄汉乐)
Lane Bao (鲍磊先生)
Shanghai Triplewins
19
• Higher plasma density → Higher ionization of gases and sputtered material.
• Higher ion assistance to the growing film → Denser and smoother films.
Time (us)
Po
we
r (k
W)
DC mode (10A)
DC-pulsed (10A- kHz range)
10
102
1
103HIPIMS mode (1000A - 100Hz range)
MW power range
Ar
300 400 500 600 700 800 900 1000 1100
0.0
0.5
1.0
0.0
0.5
1.0
wavelength (nm)
No
rma
lize
d in
tensity (
a.u
.)
W (2+) W (1+)Ar
DC
HIPIMS
Optical emission Spectroscopy (OES)
First experiments with HiPIMS in lab. scale magnetrons… 2008!
Evidences of highly ionized tungsten metal plasma
Single phase metastable cubic Ti 1-x AlxN (x<0.64) with low stress (<0.7GPa).
Ti+ irradiation gives rise to two phase cubic TiAlN + hexagonal AlN (brittle, 17GPa)
G. Greczynski et al, SCT 206, 4202 (2012) Reduced damage with low energy assistance
t0
t (us)t0
t (us)
t (us)t0 t1
t1
HiPIMS/DC Magnetron 1 HiPIMS Magnetron 2
Sync to Ti+ assistance (Magnetron 2)
TiAl
t1 Floated at Magnetron 1 operation
Bias HiPIMS
I target = 570A(80us)
V Bias=1000V (300us)
I Bias=170A
Bias pulse is sync and extended to collect the highest amount of ions (bias current) with low risk of arcing.
Time (us)t0
Magnetron Discharge (metal ion generator )
Sample Bias (Ion assistance)
Time (us)
1.2
t0 ti
V Bias (0-150V)
t delay (0-50us)
10kW
G. Greczynski et al, JVST A 32, 041515 (2014)H. Fager et al, JAP 121, 171902 (2017)
I bias = 500A
I target = 1500A
V target=1000V
V Bias = 500V
15us delay
Ti plasmaTi+
Biased component
Ti2+
Ti4+
Time (us)
10kW
t0
Magnetron Discharge (metal ion generation)
Sample Bias (Ion assistance)
Time (us)Vo
ltag
e (
kV)1.2
t0
V Bias (0-1200V)
Implantationzone
CrN coating
HSS substrate
AP. Ehiasarian et al, JAP 101, (2007)
300 400 500
0
30
60
90
Inte
nsity (
a.u
.)
Wavelength (nm)
Cr (1+)
Cr (2+)
Cr (0)
Cr (1+)
Cr (0)
Cr (0)
300 400 5000
30
60
90
Inte
nsity (
a.u
.)
Wavelenght (nm)
Ti (1+)
Ti (1+)Ti (1+)
Ti (2+)
Ti (1+)/Ar(1+)
Cr (1A/cm2)
Ti : Metal etching with low bias values→ reduces arcing issues!!
Ti (3A/cm2)
I. Fernandez-Martinez et al, accepted in SCT (doi:10.1016/j.surfcoat.2018.04.090)
Cr : Higher population of neutrals (not affected by Bias)
Cr+1, Cr+2 Ti+1….Ti+4
Ei= E0 + Qe (Vplasma- Vsurface)
Substrate Bias
Net deposition(no etching)
Efective etching
Cr Ti
DLC
HSS
WCM2 HSS
WC
Ti
Cr,Ti modified area
Local epitaxy between HSS substrate and Ti bonding layer at RT
Titanium on HSS :
Implantation depth : 6nm
Chromium on HSS :
Implantation depth : 7nm
I. Fernandez-Martinez et al, accepted in SCT (doi:10.1016/j.surfcoat.2018.04.090)
50N
97N
88N66N
110N 135N
Critical loads above 100N!!
I. Fernandez-Martinez et al, accepted in SCT (doi:10.1016/j.surfcoat.2018.04.090)
HiPIMS MIE
Ti bonding layer
The implementation of magnetically guided anodes (or AC Dual) can boost the film ion incorporation.
Hip-V is a floated HiPIMS power supply!!
• New N4E development. Patent aplication number GB1713385.1
.- New N4E proprietary technology launched at 2016. 2.- Demonstrated >25% increase in deposition rate for Me-N and ta-C in different industrial machines (for example in PVT and Tekniker batch coaters).3.- Generate enhanced coating ion assistance → denser coating structure.4.- Reduced arc appearance in reactive sputtering.
Dep .rate [µm/hr] 0.51 0.42
Hardness [GPa] 21 17
Positive Pulsing YES NONO V+ YES V+
25% increase in ion incorporation!!
(deposition rate and hardness)
Setpoint [%] 45 45
Hardness [GPa] 22.0 13
POSITIVE YES NO
TiN
TaN
More energetic ions → higher sp3 hybridization
Hardness = 36GPa
Young’s Modulus = 248GPa
Triboindenter TI950 from Hysitron equipped with a
diamond Berkovich indenter.
WCM2 Steel SubstrateCr
High energy ions generated in the switching electric field.
16 20 24
-1200
-600
0
+45V
+80V
+110V
+160V
+215V
+325V
+430V
Time (s)
Ta
rge
t vo
lta
ge
(V
)
www.gencoa.com 49
Courtesy of Duralar Technologies
Centurion System from Duralar Technologies
Table diameter = 950 mm
Rotatable Magnetrons – 152 mm Diameter
1200 mm Length
Average Power to Cathode = 5kW
Coating thickness approximately 1μm
Room Temperature
Work done in cooperation with Von Ardenne
North America
Reflectivity improvement with high Ipeak & V+
Process stabilization is more complex than standart DC or Pulsed-DC
Normal operation at 10kW average power, peak power in the MW range
1000A
650V
200A
900V
Pure Ar Ar + N2
Long experience in reactive control process using Gencoa -SpeedFlo
Regulation modes : Ipk, V or Optical monitoring. Proven technology!!
Electrical signalsI peak, Voltage…
Actuator
Constant Power
Optical signalTi, Cr, N2..etc..
45% 35% 25%
Nitrogen flow at setpoint
45% ~ 4.5 sccm35% ~ 5.5 sccm25% ~ 7.0 sccm
50 100 150
20
40
60
80
Nitro
ge
n flo
w (
sccm
)
PM
T S
en
so
r sig
na
l (%
)
0
2
4
6
8
10
Time (sec)
Ti (400mm2) Ar + Nitrogen3kW 120us – 500Hz Ipeak : 220 – 500A peak
Ipk regulation mode for the most complex process : Al in Ar + Oxygen!!
Plasma process development (magnetron, process controller, etc …)
- Gencoa (UK) as strategic partner
High power electronics / HiPIMS power supplies
- Viesca (ES) as strategic partners
Characterization of thin film properties
- Access to European research center facilities.
ta-C on microtools. Al machining!!.
Raman in microtools for sp2/sp3 ratio in sharp edges
DLC
3 meters coating machine 4 x 20 kW power module(HIPIMS + Bias)
1um/hr!! for CrN and ZrN
23-25GPa250 C
3-fold rotation
2 x magnetrons
5kW average each
-60V bias
650 mm diameter x
650 mm height
Thank you for your attention!